Ceramic ring convenient for cleaning and drying graphite boat

Abstract

The utility model discloses a ceramic ring convenient for cleaning and drying a graphite boat, which belongs to the technical field of solar cells and comprises a ring body, a channel penetrating through the ring body is coaxially arranged on the ring body, drainage grooves connected with the channel are arranged on end faces of two ends of the ring body, and the inner wall of the ring body is in an arc shape protruding towards a central shaft of the ring body. Chamfers coaxial with the ring body are arranged on the end faces of the two ends of the ring body. The ceramic ring has the advantages that the inner wall of the ceramic ring is arranged to be in the arc shape protruding towards the center axis of the ceramic ring, outflow of residual water drops in the channel is accelerated, only water vapor in the channel needs to be dried during drying, the drying speed is increased, and drying energy consumption is reduced; and meanwhile, through the design, holes are prevented from being formed in the wall of the thin ceramic ring, so that the ceramic ring is firmer and more durable.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cells, in particular to a ceramic ring which is convenient for cleaning and drying a graphite boat. Background Art

[0002] Solar cells refer to semiconductor components that can effectively absorb solar energy and convert it into electrical energy. They are devices that use semiconductor materials such as silicon and selenium to convert solar light energy into electrical energy. They have the advantages of high reliability, long life, and high conversion efficiency. They can be used as power sources for artificial satellites, navigation lights, transistor radios, etc. Solar cells are the main components of solar cells. In the process of anti-reflection coating in the production of solar cells, graphite boats composed of graphite boat leaves and ceramic rings are required.

[0003] At present, tubular PECVD equipment uses graphite boats to deposit silicon nitride, silicon oxynitride and other film layers. As the number of uses increases, thicker film layers are deposited on the surface of the graphite boat blades, resulting in an increase in the proportion of defects. Therefore, the graphite boat needs to be regularly cleaned, dried and maintained before it can be put online. During the drying process after cleaning, water will accumulate in the ceramic ring, making it difficult to dry it, resulting in a slow drying rate and high drying energy consumption.

[0004] A utility model patent with announcement number CN217933735U discloses a graphite boat ceramic ring with improved yield, including a ceramic ring body, an outer chamfer is provided on the outside of the ceramic ring body, an air hole is provided on the ceramic ring body, and an inner chamfer is provided on the inside of the ceramic ring body. The technical solution provided by the application is to facilitate the discharge of drying water vapor of the ceramic ring by providing air holes on the ceramic ring body, but during the cleaning process, water droplets will accumulate on the plane between the air holes under the action of tension. During the drying process, the water droplets must be evaporated into water vapor before the drying process can be accelerated. In addition, the ceramic ring is usually small in size and thin in body wall. The air holes provided on the side wall of the ceramic ring will affect the overall structural stability of the ceramic ring, increasing the risk of damage to the ceramic ring during use. Utility Model Content

[0005] In order to overcome the problems in the prior art of water accumulation in the ceramic ring during the drying process after cleaning, which makes it difficult to dry the ceramic ring, resulting in slow drying rate and high drying energy consumption, the utility model provides a ceramic ring that is convenient for cleaning and drying a graphite boat, including a ring body, a channel that runs through the ring body is coaxially arranged on the ring body, drainage grooves connected to the channel are arranged on the end faces at both ends of the ring body, the inner wall of the ring body is an arc that bulges toward the central axis of the ring body, and chamfers are arranged coaxially with the ring body on the end faces at both ends of the ring body.

[0006] By setting the inner wall of the ceramic ring to be an arc shape protruding toward the central axis of the ceramic ring, the water droplets remaining in the channel flow to the two ends of the ceramic ring and flow out through the water outlets set on the end faces of the ceramic ring at both ends, thereby avoiding the accumulation of water droplets in the channel under the tension and the hydrophilic effect of the ceramic, so that only the water vapor in the channel needs to be dried during drying, which accelerates the drying speed and reduces the drying energy consumption. At the same time, this design avoids opening holes in the already thin ceramic ring wall, making the ceramic ring more sturdy and durable. In addition, the chamfers set on the end faces of the ceramic ring at both ends prevent the graphite boat blades assembled on the ceramic ring from scratching the boat blades when they contact the end faces of the ceramic ring.

[0007] Preferably, the inner diameter of the ring body is smallest at the center of the ring body, and the smallest inner diameter of the ring body is 5-8 mm; the inner diameter of the ring body is largest at both ends of the ring body, and the largest inner diameter of the ring body is 8-10 mm.

[0008] Preferably, the central axis of the water outlet is perpendicular to the central axis of the channel, and the water outlet is circumferentially distributed at both ends of the ring body along the central axis of the ring body.

[0009] Preferably, the width of the water outlet is 1-2 mm, and the depth of the water outlet is 0.5-3 mm.

[0010] Preferably, the number of drainage grooves disposed at both ends of the ring body is 3 to 5.

[0011] By means of a plurality of water outlets arranged at both ends of the ceramic ring and distributed circumferentially along the central axis of the ceramic ring, water droplets and water vapor in the channel can be discharged from the ceramic ring more quickly, while avoiding the situation where only a single water outlet can only discharge water vapor if it is not placed in a downward position during use.

[0012] Preferably, the outer wall of the ring body is in an arc shape that bulges away from the central axis of the ring body.

[0013] Preferably, the outer diameter of the ring body is largest at the center of the ring body, and the inner diameter of the ring body is 10-13 mm at its maximum; the inner diameter of the ring body is smallest at both ends of the ring body, and the inner diameter of the ring body is 8-10 mm at its minimum.

[0014] By setting the outer wall of the ceramic ring to be an arc that protrudes away from the central axis of the ceramic ring, the water flowing out of the water outlet is gathered on the outer wall of the ceramic ring at the largest outer diameter under the action of gravity and drips, preventing water droplets from adhering to the flatter outer wall of the ceramic ring under tension and the hydrophilic effect of the ceramic after flowing out of the water outlet.

[0015] Preferably, the length of the ring body is 10 to 13 mm.

[0016] Preferably, the chamfered cross section is semicircular, the diameter of the chamfer is equal to the length of the end face, and the diameter of the chamfer is 0.5-1.5 mm, which prevents the graphite boat blade assembled on the ceramic ring from being scratched when it contacts the end face of the ceramic ring.

[0017] Preferably, a hydrophobic layer is provided on both the inner and outer surfaces of the ring body. The hydrophobic layer is glaze. Ceramic is a hydrophilic material. The glaze made of hydrophobic material is provided on the surface of the ceramic ring to reduce the adhesion and retention of water droplets on the surface of the ceramic ring.

[0018] Beneficial effects:

[0019] The beneficial effects of the technical solution of the utility model are as follows:

[0020] (1) By setting the inner wall of the ceramic ring to be an arc shape protruding toward the central axis of the ceramic ring, the water droplets remaining in the channel flow to the two ends of the ceramic ring and flow out through the water outlets set on the end faces of the ceramic ring, thereby avoiding the accumulation of water droplets in the channel under the tension and the hydrophilic effect of the ceramic. During drying, only the water vapor in the channel needs to be dried, which accelerates the drying speed and reduces the drying energy consumption. At the same time, this design avoids opening holes in the already thin ceramic ring wall, making the ceramic ring more durable.

[0021] (2) By setting the outer wall of the ceramic ring to be an arc that protrudes away from the central axis of the ceramic ring, the water flowing out of the water outlet is gathered on the outer wall of the ceramic ring at the largest outer diameter under the action of gravity and drips, preventing water droplets from adhering to the flatter outer wall of the ceramic ring under the tension and the hydrophilic effect of the ceramic after flowing out of the water outlet.

[0022] (3) The chamfers provided on the end faces of the ceramic ring prevent the graphite boat blades assembled on the ceramic ring from scratching the boat blades when they come into contact with the end faces of the ceramic ring. In addition, ceramics are hydrophilic materials, and the adhesion and retention of water droplets on the surface of the ceramic ring can be reduced by providing a hydrophobic glaze on the surface of the ceramic ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solution of the implementation mode of the utility model, the drawings required for use in the implementation mode will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a cross-sectional structural schematic diagram of a ceramic ring of the utility model which is convenient for cleaning and drying a graphite boat;

[0025] Figure 2It is a side view structural schematic diagram of a ceramic ring for facilitating the cleaning and drying of a graphite boat in the utility model;

[0026] Figure 3 It is a front view schematic diagram of a ceramic ring for facilitating the cleaning and drying of a graphite boat according to the utility model;

[0027] Figure 4 The utility model is a three-dimensional structural schematic diagram of a ceramic ring which is convenient for cleaning and drying a graphite boat.

[0028] In the figure: 1, ring body; 2, channel; 3, water outlet; 4, chamfer; 5, end face; 6, hydrophobic layer. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the utility model for which protection is sought, but merely represents the selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0030] This embodiment accelerates the outflow of residual water droplets in the channel by setting the inner wall of the ceramic ring to be an arc convex toward the central axis of the ceramic ring, so that only the water vapor in the channel needs to be dried during drying, which accelerates the drying speed and reduces the drying energy consumption; at the same time, this design avoids opening holes in the already thin ceramic ring wall, making the ceramic ring more durable. The specific implementation is as follows:

[0031] like Figures 1 to 4 As shown, a ceramic ring convenient for cleaning and drying a graphite boat comprises a ring body 1, a channel 2 penetrating the ring body 1 is coaxially arranged on the ring body 1, drainage grooves connected to the channel 2 are arranged on the end faces 5 at both ends of the ring body 1, the inner wall of the ring body 1 is an arc convex toward the central axis of the ring body 1, and chamfers 4 coaxially arranged with the ring body 1 are arranged on the end faces 5 at both ends of the ring body 1.

[0032] By setting the inner wall of the ceramic ring to an arc shape protruding toward the central axis of the ceramic ring, the water droplets remaining in the channel 2 flow to the two ends of the ceramic ring and flow out through the water outlets 3 set on the end faces 5 at both ends of the ceramic ring, thereby avoiding the accumulation of water droplets in the channel 2 under the tension and the hydrophilic effect of the ceramic, so that only the water vapor in the channel 2 needs to be dried during drying, which accelerates the drying speed and reduces the drying energy consumption. At the same time, this design avoids opening holes in the already thin ceramic ring wall, making the ceramic ring more sturdy and durable. In addition, the chamfers 4 set on the end faces 5 at both ends of the ceramic ring prevent the graphite boat blades assembled on the ceramic ring from scratching the boat blades when they contact the end faces 5 of the ceramic ring.

[0033] Specifically, the inner diameter of the ring body 1 is smallest at the center of the ring body 1 , and the smallest inner diameter of the ring body 1 is 5-8 mm; the inner diameter of the ring body 1 is largest at both ends of the ring body 1 , and the largest inner diameter of the ring body 1 is 8-10 mm.

[0034] Specifically, the central axis of the water outlet 3 is perpendicular to the central axis of the channel 2 , and the water outlet 3 is circumferentially distributed at both ends of the ring body 1 along the central axis of the ring body 1 .

[0035] Specifically, the width of the water outlet 3 is 1-2 mm, and the depth of the water outlet 3 is 0.5-3 mm.

[0036] Specifically, the number of drainage grooves disposed at both ends of the ring body 1 is 3 to 5.

[0037] By means of a plurality of water outlets 3 arranged at both ends of the ceramic ring and distributed circumferentially along the central axis of the ceramic ring, water droplets and water vapor in the channel 2 can be discharged from the ceramic ring more quickly, while avoiding the situation where only a single water outlet 3 can only discharge water vapor if it is not placed in a downward position during use.

[0038] Specifically, the outer wall of the ring body is an arc-shaped convex in a direction away from the central axis of the ring body 1 .

[0039] Specifically, the outer diameter of the ring body 1 is largest at the center of the ring body 1 , and the inner diameter of the ring body 1 is 10-13 mm at its largest; the inner diameter of the ring body 1 is smallest at both ends of the ring body 1 , and the inner diameter of the ring body 1 is 8-10 mm at its smallest.

[0040] By setting the outer wall of the ceramic ring to be an arc protruding away from the central axis of the ceramic ring, the water flowing out of the water outlet 3 is gathered on the outer wall of the ceramic ring at the largest outer diameter under the action of gravity and drips, preventing water droplets from adhering to the flatter outer wall of the ceramic ring under the tension and the hydrophilic effect of the ceramic after flowing out of the water outlet 3.

[0041] Specifically, the length of the ring body 1 is 10 to 13 mm.

[0042] Specifically, the cross section of the chamfer 4 is semicircular, the diameter of the chamfer 4 is equal to the length of the end face 5, and the diameter of the chamfer 4 is 0.5-1.5 mm, which prevents the graphite boat blade assembled on the ceramic ring from being scratched when it contacts the end face 5 of the ceramic ring.

[0043] Specifically, a hydrophobic layer 6 is provided on both the inner and outer surfaces of the ring body 1. The hydrophobic layer 6 is glaze. Ceramics are hydrophilic materials. The glaze made of hydrophobic material is provided on the surface of the ceramic ring to reduce the adhesion and retention of water droplets on the surface of the ceramic ring.

[0044] Working principle: When installing the graphite boat, the chamfers at both ends of the ceramic ring prevent scratches on the graphite boat blades; during the cleaning process of the graphite boat, the water droplets in the channel of the ceramic ring flow along the arc-shaped inner wall of the ceramic ring to the two ends of the ceramic ring, and fall and flow out through the water outlet. The water droplets attached to the outer wall of the ceramic ring gather and drip along the protruding outer wall of the ceramic ring to the largest outer diameter of the ceramic ring under the action of gravity. The porcelain glaze arranged on the inner and outer surfaces of the ceramic ring is hydrophobic, making it difficult for water droplets to adhere to the ceramic ring wall. When drying, only the water vapor in the ceramic ring needs to be dried.

[0045] The above description is only the preferred implementation of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A ceramic ring that is convenient for cleaning and drying a graphite boat, characterized in that: The invention comprises a ring body (1), wherein a channel (2) penetrating the ring body (1) is coaxially arranged on the ring body (1), and water outlets (3) connected to the channel (2) are arranged on the end faces (5) at both ends of the ring body (1), the inner wall of the ring body (1) is an arc convex toward the central axis of the ring body (1), and chamfers (4) coaxially arranged with the ring body (1) are arranged on the end faces (5) at both ends of the ring body (1).

2. A ceramic ring for facilitating cleaning and drying of a graphite boat according to claim 1, characterized in that: The inner diameter of the ring body (1) is smallest at the center of the ring body (1), and the smallest inner diameter of the ring body (1) is 5 to 8 mm; the inner diameter of the ring body (1) is largest at the two ends of the ring body (1), and the largest inner diameter of the ring body (1) is 8 to 10 mm.

3. The ceramic ring for facilitating the cleaning and drying of a graphite boat according to claim 1, characterized in that: The central axis of the water outlet (3) is perpendicular to the central axis of the channel (2), and the water outlet (3) is arranged at both ends of the ring body (1) in a circumferentially distributed manner along the central axis of the ring body (1).

4. The ceramic ring for facilitating cleaning and drying of a graphite boat according to claim 1, characterized in that: The width of the water outlet (3) is 1 to 2 mm, and the depth of the water outlet (3) is 0.5 to 3 mm.

5. The ceramic ring for facilitating the cleaning and drying of a graphite boat according to claim 1, characterized in that: The number of the water outlets (3) arranged at both ends of the ring body (1) is 3 to 5.

6. The ceramic ring for facilitating cleaning and drying of a graphite boat according to claim 1, characterized in that: The outer wall of the ring body is in the shape of an arc that bulges away from the central axis of the ring body (1).

7. The ceramic ring for facilitating cleaning and drying of a graphite boat according to claim 5, characterized in that: The outer diameter of the ring body (1) is the largest at the center of the ring body (1), and the inner diameter of the ring body (1) is 10 to 13 mm at its largest; the inner diameter of the ring body (1) is the smallest at both ends of the ring body (1), and the inner diameter of the ring body (1) is 8 to 10 mm at its smallest.

8. The ceramic ring for facilitating the cleaning and drying of a graphite boat according to claim 1, characterized in that: The length of the ring body (1) is 10 to 13 mm.

9. The ceramic ring for facilitating the cleaning and drying of a graphite boat according to claim 1, characterized in that: The cross section of the chamfer (4) is a semicircle, the diameter of the chamfer (4) is equal to the length of the end surface (5), and the diameter of the chamfer (4) is 0.5 to 1.5 mm.

10. The ceramic ring for facilitating cleaning and drying of a graphite boat according to claim 1, characterized in that: A hydrophobic layer (6) is provided on both the inner surface and the outer surface of the ring body (1).

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