Novel spectral reflection type film thickness gauge

Abstract

The utility model provides a novel spectral reflection type film thickness gauge, which comprises a film thickness gauge body and adjusting mechanisms symmetrically arranged on the two sides of the lower end of the film thickness gauge body, and is characterized in that the film thickness gauge body comprises a rack, a shell detachably mounted at the outer end of the rack, and an optical module and a spectrograph which are arranged on the rack; a distance sensor is installed on the side, located on the optical module, of the rack to detect the distance between the lower end of the optical module and the test piece. The device adopts a modularized design thought, all functional systems are integrated into a single module to be combined and installed, and meanwhile, a distance sensor, a data acquisition and transmission module and a precise lifting adjusting mechanism are additionally arranged, so that the equipment structure is simplified, the equipment performance is improved, the same test distance under different installation conditions is ensured, and the test efficiency is improved. Consistency of measurement results of multiple devices is facilitated; adjustment in the vertical direction and the horizontal direction can be achieved through the adjusting mechanism, and the field adaptability is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of film thickness meters, in particular to a novel spectral reflection type film thickness meter. Background Art

[0002] The spectral reflective film thickness meter is an instrument for measuring the thickness of reflective films of materials, and is usually used in the field of optics. It uses non-contact testing technology and can measure parameters such as reflectivity, transmittance and phase angle, and then analyze and calculate the thickness of the measured film. During measurement, it is placed above the film to be measured, and visible light is emitted vertically or obliquely downward from the probe part of the instrument. The light passes through the film to be tested and is reflected at the interface between the film and the substrate. The spectrometer is used to collect this part of the reflected light, and it is analyzed, processed and calculated to measure the thickness of the film.

[0003] The spectral reflective film thickness meter in the production of photovoltaic cells is generally installed on the conveyor belt for online detection of the film thickness of the cell. When the spectral reflective film thickness meter detects the film thickness, there are certain requirements for the test distance, so a more accurate distance test is required during installation. The existing reflective film thickness meter generally does not have a distance measurement module installed, and cannot accurately measure the distance parameters. At the same time, there is no more accurate distance adjustment device during installation, so when multiple devices are installed, there is a lack of consistency between them. Utility Model Content

[0004] The technical problem solved by the utility model is to provide a spectral reflection type film thickness meter with accurately adjustable height setting, so as to solve the problems raised in the above-mentioned background technology.

[0005] The technical problem solved by the utility model is achieved by the following technical solution: a novel spectral reflection film thickness meter, comprising a film thickness meter body and adjustment mechanisms symmetrically arranged on both sides of the lower end of the film thickness meter body, the film thickness meter body comprising a frame and a shell detachably mounted on the outer end of the frame, an optical module and a spectrometer arranged on the frame, the frame is provided with a distance sensor on one side of the optical module to detect the distance between the lower end of the optical module and the test piece;

[0006] The adjustment mechanism includes a base fixing plate and a horizontal adjustment frame installed on the base fixing plate, and a precision lifting bracket arranged on the horizontal adjustment frame. The horizontal adjustment frame includes a flat plate and an adjustment plate integrally arranged with the flat plate. The flat plate and the adjustment plate form an L-shaped structure. The flat plate is adjustably installed on the base fixing plate. A slide groove is provided in the middle of the adjustment plate. The precision lifting bracket is slidably installed in the slide groove. Step blocks are provided on both sides of the upper end of the precision lifting bracket. Precision thread pairs are installed on the step blocks. The step blocks are lifted and installed on the adjustment plate through the precision thread pairs to control the lifting and lowering adjustment of the precision lifting bracket.

[0007] As a further solution of the utility model:

[0008] The flat plate is provided with first waist-shaped holes on both sides, and the base fixing plate is provided with screw holes corresponding to the first waist-shaped holes. The bolts pass through the first waist-shaped holes and are threadedly connected with the screw holes to fix the flat plate on the base fixing plate. After loosening the bolts, the flat plate can slide back and forth through the first waist-shaped holes to adjust the position of the horizontal adjustment frame.

[0009] As a further solution of the utility model:

[0010] Screw holes are provided on both sides of the adjustment plate corresponding to the precision lifting bracket, so that the precision lifting bracket can be fixed to the corresponding position of the adjustment plate by bolts, and second waist-shaped holes are provided on both sides of the precision lifting bracket to cooperate with the bolts, so that when the bolts are loosened, the precision lifting bracket can rise and slide.

[0011] As a further solution of the utility model:

[0012] The rack comprises a bottom plate, a back plate arranged on one side of the bottom plate, and a top cover installed on the upper end of the back plate. The bottom plate, the back plate and the top cover form an integral U-shaped structure. The outer shell is sleeved on the outer end of the rack to cover the internal equipment of the rack.

[0013] As a further solution of the utility model:

[0014] A zero position sensor and a data acquisition and transmission module are also installed on the bottom plate. The zero position sensor is electrically connected to the data acquisition and transmission module, and the optical module is connected to the spectrometer via an optical fiber.

[0015] As a further solution of the utility model:

[0016] The distance sensor is fixedly mounted on the plate frame and is installed at the corresponding position of the bottom plate through the plate frame. The bottom plate is provided with a corresponding test hole at the lower end of the distance sensor; the bottom plate is also provided with a detection hole corresponding to the zero position sensor.

[0017] As a further solution of the utility model:

[0018] Two sets of power modules and power input connectors are fixedly installed on the back panel. The power modules convert 220Vac into 24V and 12V DC to supply power to internal electrical components. The spectrometer is fixedly installed on the back panel through a side frame.

[0019] Compared with the prior art, the beneficial effects of the utility model are as follows: the film thickness meter body is installed at the corresponding position of the conveyor and other equipment through the adjustment mechanism, and precision lifting brackets are fixedly installed on both sides of the bottom plate, and are installed on the adjustment plate through the precision lifting brackets. Step blocks are provided on both sides of the precision lifting bracket, and the step blocks are provided with threaded pairs connected to the adjustment plate, and the precision lifting bracket is raised and lowered by rotating the threaded pairs. The height can be detected by the distance sensor to determine the position of the precision lifting bracket, and the second waist-shaped hole is penetrated by a bolt to fix the precision lifting bracket on the adjustment plate. The device adopts a modular design concept, integrating various functional systems into a single module for combined installation, and at the same time adding distance sensors, data acquisition and transmission modules, and precision lifting adjustment mechanisms, which not only simplifies the equipment structure and improves the equipment performance, but also ensures the same test distance under different installation conditions, and facilitates the consistency of measurement results of multiple devices; the adjustment mechanism can realize vertical and horizontal adjustments, which greatly improves the adaptability of the site. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the internal structure of the film thickness meter body of the utility model;

[0022] Figure 3 This is a schematic diagram of the structure of the adjustment mechanism of the utility model;

[0023] Figure 4 This is a schematic diagram of the shell structure of the utility model;

[0024] Markings in the figure: 1. Film thickness meter body; 2. Adjustment mechanism; 3. Power module; 10. Plate rack; 11. Housing; 12. Optical module; 13. Spectrometer; 14. Distance sensor; 15. Bottom plate; 16. Back plate; 17. Top cover; 18. Zero position sensor; 19. Data acquisition and transmission module; 21. Base fixing plate; 22. Flat plate; 23. Adjustment plate; 24. Precision lifting bracket; 25. Step block; 26. Precision thread pair; 27. First waist-shaped hole; 28. Second waist-shaped hole; 31. Power input connector; 32. Side frame. DETAILED DESCRIPTION

[0025] In order to make the technical means for realizing the utility model, creative features, objectives and effects easy to understand, the utility model is further explained below with reference to specific illustrations.

[0026] like Figures 1 to 4 As shown,

[0027] This embodiment provides a novel spectral reflective film thickness meter, comprising a film thickness meter body 1 and an adjustment mechanism 2 symmetrically arranged on both sides of the lower end of the film thickness meter body 1, the film thickness meter body 1 comprising a frame and a housing 11 detachably mounted on the outer end of the frame, an optical module 12 and a spectrometer 13 arranged on the frame, and a distance sensor 14 is installed on one side of the optical module 12 of the frame to detect the distance between the lower end of the optical module 12 and the test piece;

[0028] The adjustment mechanism 2 includes a base fixing plate 21 and a horizontal adjustment frame installed on the base fixing plate 21, and a precision lifting bracket 24 arranged on the horizontal adjustment frame. The horizontal adjustment frame includes a flat plate 22 and an adjustment plate 23 integrally arranged with the flat plate 22. The flat plate 22 and the adjustment plate 23 form an L-shaped structure. The flat plate 22 is adjustably installed on the base fixing plate 21. A slide groove is provided in the middle of the adjustment plate 23. The precision lifting bracket 24 is slidably installed in the slide groove. Step blocks 25 are provided on both sides of the upper end of the precision lifting bracket 24. Precision thread pairs 26 are installed on the step blocks 25. The step blocks 25 are lifted and installed on the adjustment plate 23 through the precision thread pairs 26 to control the lifting and lowering adjustment of the precision lifting bracket 24.

[0029] In this embodiment, first waist-shaped holes 27 are provided on both sides of the flat plate 22, and screw holes are provided on the base fixing plate 21 corresponding to the first waist-shaped holes 27. The bolts penetrate the first waist-shaped holes 27 and are threadedly connected with the screw holes to fix the flat plate 22 on the base fixing plate 21. When the bolts are loosened, the flat plate 22 can slide forward and backward through the first waist-shaped holes 27 to adjust the position of the horizontal adjustment frame. Screw holes are provided on both sides of the adjustment plate 23 corresponding to the precision lifting bracket 24, so that the precision lifting bracket 24 can be fixed to the corresponding position of the adjustment plate 23 by bolts. Second waist-shaped holes 28 that are connected with the bolts are provided on both sides of the precision lifting bracket 24, so that when the bolts are loosened, the precision lifting bracket 24 can rise and slide.

[0030] In this embodiment, the rack includes a bottom plate 15, a back plate 16 arranged on one side of the bottom plate 15, and a top cover 17 installed on the upper end of the back plate 16. The bottom plate 15, the back plate 16 and the top cover 17 constitute an integral U-shaped structure, and the housing 11 is sleeved on the outer end of the rack to cover the internal equipment of the rack. The bottom plate 15 is also equipped with a zero position sensor 18 and a data acquisition and transmission module 19. The zero position sensor 18 is used to determine whether the test piece is in place. It is electrically connected to the data acquisition and transmission module 19 and transmits the test piece in place information to the host computer system. The data acquisition and transmission module 19 timely and accurately collects the distance between the test piece and the optical module 12, the test piece in place information and other data, and uploads them to the host computer system; the optical module 12 is connected to the spectrometer 13 through an optical fiber, and a light source is integrated inside the optical module 12, and the light generated by the light source is irradiated onto the test piece, and the returned light is transmitted to the spectrometer 13 through the optical fiber. The distance sensor 14 is fixedly mounted on the frame 10 and is mounted at the corresponding position of the bottom plate 15 through the frame 10. The bottom plate 15 is provided with a corresponding test hole at the lower end of the distance sensor 14; the bottom plate 15 is also provided with a detection hole corresponding to the zero position sensor 18. Two sets of power modules 3 and power input connectors 31 are fixedly mounted on the back plate 16. The power module 3 converts 220Vac into 24V and 12V DC to supply power to the internal electrical components; the spectrometer 13 is fixedly mounted on the back plate 16 through the side frame 32.

[0031] The working principle of the utility model is as follows: the film thickness meter body 1 is installed at the corresponding position of the conveyor and other equipment through the adjustment mechanism 2, and the precision lifting bracket 24 is fixedly installed on both sides of the bottom plate 15, and is installed on the adjustment plate 23 through the precision lifting bracket 24. Step blocks 25 are provided on both sides of the precision lifting bracket 24, and the step blocks 25 are provided with a threaded pair connected to the adjustment plate 23, and the precision lifting bracket 24 is raised and lowered by rotating the threaded pair. The height can be detected by the distance sensor 14 to determine the position of the precision lifting bracket 24, and the bolt passes through the second waist hole 28 to fix the precision lifting bracket 24 on the adjustment plate 23. The data acquisition and transmission module 19 in the device timely and accurately collects the distance between the test piece and the optical module 12, the test piece in place information and other data, and uploads them to the host computer system; the optical module 12 integrates a light source inside, irradiates the light generated by the light source onto the test piece, and transmits the returned light to the spectrometer 13 through the optical fiber, records the reflection spectrum on the test piece, and transmits the spectrum information to the host computer system at the same time, and the computer software performs data analysis and gives the film thickness test result.

[0032] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. The technicians in this industry should understand that the utility model is not limited by the above embodiments. The above embodiments and the description only illustrate the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model will also have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents. It should be noted that in this article, if there are first and second relationship terms such as only used to distinguish one entity or operation from another entity or operation, it does not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the term "include", "comprise" or any other variant thereof is intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements includes not only those elements, but also includes other elements that are not explicitly listed, or also includes elements inherent to such process, method, article or equipment. Without more constraints, an element defined by the phrase "comprising a..." does not exclude the existence of other identical elements in the process, method, article or apparatus comprising the element.

Claims

1. A new type of spectral reflection film thickness meter, characterized by: The film thickness meter comprises a body and adjustment mechanisms symmetrically arranged on both sides of the lower end of the body, the body of the film thickness meter comprises a frame and a shell detachably mounted on the outer end of the frame, an optical module and a spectrometer arranged on the frame, and a distance sensor is installed on one side of the frame located on the optical module to detect the distance between the lower end of the optical module and the test piece; The adjustment mechanism includes a base fixing plate and a horizontal adjustment frame installed on the base fixing plate, and a precision lifting bracket arranged on the horizontal adjustment frame. The horizontal adjustment frame includes a flat plate and an adjustment plate integrally arranged with the flat plate. The flat plate and the adjustment plate form an L-shaped structure. The flat plate is adjustably mounted on the base fixing plate. A slide groove is provided in the middle of the adjustment plate. The precision lifting bracket is slidably installed in the slide groove. Step blocks are provided on both sides of the upper end of the precision lifting bracket. Precision thread pairs are installed on the step blocks. The step blocks are lifted and mounted on the adjustment plate through the precision thread pairs.

2. A novel spectral reflection film thickness meter according to claim 1, characterized in that: The two sides of the flat plate are provided with first waist-shaped holes, the base fixing plate is provided with screw holes corresponding to the first waist-shaped holes, and the bolts penetrate through the first waist-shaped holes and are threadedly connected with the screw holes.

3. A novel spectral reflection film thickness meter according to claim 2, characterized in that: Screw holes are provided on both sides of the adjustment plate corresponding to the precision lifting brackets, so that the precision lifting brackets can be fixed at corresponding positions of the adjustment plate by bolts, and second waist-shaped holes are provided on both sides of the precision lifting brackets to cooperate with the bolts.

4. A novel spectral reflection film thickness meter according to claim 1, characterized in that: The rack comprises a bottom plate, a back plate arranged on one side of the bottom plate, and a top cover installed on the upper end of the back plate. The bottom plate, the back plate and the top cover form an integral U-shaped structure. The outer shell is sleeved on the outer end of the rack to cover the internal equipment of the rack.

5. A novel spectral reflection film thickness meter according to claim 4, characterized in that: A zero position sensor and a data acquisition and transmission module are also installed on the bottom plate. The zero position sensor is electrically connected to the data acquisition and transmission module, and the optical module is connected to the spectrometer via an optical fiber.

6. A novel spectral reflection film thickness meter according to claim 5, characterized in that: The distance sensor is fixedly mounted on the plate frame and is installed at the corresponding position of the bottom plate through the plate frame. The bottom plate is provided with a corresponding test hole at the lower end of the distance sensor; the bottom plate is also provided with a detection hole corresponding to the zero position sensor.

7. A novel spectral reflection film thickness meter according to claim 4, characterized in that: Two groups of power modules and power input connectors are fixedly installed on the back panel; the spectrometer is fixedly installed on the back panel through a side frame.

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