Limiting unit and movement device

Abstract

The utility model provides a limit unit and motion device, limit unit includes first limit seat, second limit seat, limit subassembly and fixed subassembly, the second limit seat is provided on the first limit seat and is movably connected along the first direction, and the limit subassembly is fixed on the second limit seat. The limiting assembly is arranged at the end, away from the first limiting seat, of the second limiting seat to form a limiting space, and the fixing assembly is movably connected with one of the two limiting seats and abuts against one end of the other limiting seat to fix the second limiting seat. The first limiting seat and the second limiting seat in the limiting unit are movably connected in the first direction so as to flexibly adjust the size of the limiting unit and expand the application scene of the limiting unit, and the fixing assembly fixes the second limiting seat so as to improve the structural stability of the limiting unit and the application efficiency and flexibility of the device provided with the limiting unit. Based on the limiting unit, the position of the frame assembly in the movement device can be adjusted on line in real time without repeated disassembly and assembly, and the convenience and efficiency of installation and maintenance of the device are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing and testing equipment, and relates to a limiting unit and a motion device. Background Art

[0002] In the electron beam detection device, the distance between the focal plane position of the electron beam and the displacement stage of the motion platform is very small (basically less than 1mm). Therefore, when designing the motion platform, at least the upper limit position of the displacement stage or the top frame in the motion platform needs to be strictly controlled to avoid interference between the two under the condition of ensuring the formation of high-speed functions. At present, a limit device can be set in the motion platform to achieve effective and accurate position restriction of the displacement stage. However, the structure of the current limit device cannot be adjusted online in real time when it is applied to the motion platform. This leads to the need to repeatedly disassemble and assemble the displacement platform and the limit device in the motion platform to finally adjust it in place when the motion platform is applied to different detection scenarios. This seriously restricts the debugging efficiency and convenience of the motion platform. In addition, since the distance between the motion platform and other equipment in the detection device is extremely limited, when some parts in the device need to be replaced or repaired, the whole machine needs to be disassembled and reassembled, which also affects the convenience and efficiency of operation to a certain extent.

[0003] Therefore, how to provide a limit unit and a motion device to achieve online flexible adjustment of the limit device structure and thereby improve the debugging efficiency and convenience of the motion device has become an important technical problem that needs to be urgently solved by technical personnel in this field.

[0004] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present application and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because they are described in the background technology section of the present application. Utility Model Content

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a limit unit and a motion device, which are used to solve the problem that the limit device in the prior art cannot be flexibly adjusted online after being applied to the motion platform, thereby affecting the debugging efficiency and operation convenience of the motion platform.

[0006] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides a limiting unit, which includes:

[0007] The first limit seat;

[0008] A second limiting seat is disposed on the first limiting seat, and the second limiting seat is movably connected relative to the first limiting seat along a first direction;

[0009] A limiting assembly, arranged at one end of the second limiting seat away from the first limiting seat to form a limiting space of the limiting unit in the first direction;

[0010] The fixing component is movably connected to one of the first limiting seat and the second limiting seat, and the fixing component abuts against one end of the other of the first limiting seat and the second limiting seat to fix the second limiting seat.

[0011] Optionally, the second limiting seat includes a limiting rod and a connecting rod connected in the first direction, the limiting assembly is arranged on the limiting rod, and the connecting rod is connected to the first limiting seat.

[0012] Optionally, the limiting assembly includes a first limiting element and a second limiting element, the first limiting element is connected to the end of the limiting rod facing away from the first limiting seat, and the surface of the first limiting element facing the first limiting seat has a first limiting surface extending along a second direction, the second direction is perpendicular to the first direction, the second limiting element is sleeved on the outer periphery of the end of the limiting rod facing the first limiting seat, and the surface of the second limiting element facing the first limiting element has a second limiting surface extending along the second direction, and the area between the second limiting surface and the first limiting surface constitutes the limiting space.

[0013] Optionally, the limiting assembly further includes a third limiting element, the third limiting element is sleeved on the periphery of the limiting rod, and the third limiting element is also located between the first limiting surface and the second limiting surface in the first direction.

[0014] Optionally, one of the first limit seat and the second limit seat that abuts against the fixing component has a groove that opens from one end that abuts against the fixing component and extends along the first direction, and the other of the first limit seat and the second limit seat that is movably connected to the fixing component extends into the groove to connect the first limit seat with the second limit seat.

[0015] Optionally, the groove includes a connecting space, a portion of the side wall of the groove corresponding to the connecting space is provided with threads, and the first limiting seat and the second limiting seat are threadedly connected.

[0016] Optionally, the groove also includes a guide space, which is connected to the connecting space. The first limit seat or the second limit seat passes through the guide space and extends into the connecting space. The distance range between the side wall of the groove corresponding to at least part of the guide space and the part of the first limit seat or the second limit seat placed in the guide space is 8 to 15 μm.

[0017] Optionally, the first limiting seat or the second limiting seat is provided with at least one exhaust hole, and the exhaust hole passes through the side wall of the groove to communicate with the groove.

[0018] Optionally, the fixing assembly includes a nut and a gasket, and the nut and the gasket are both mounted on the periphery of one of the first limit seat and the second limit seat that is movably connected to the fixing assembly, and the gasket is located between the other one of the first limit seat and the second limit seat that abuts against the fixing assembly and the nut, and at least one side of the gasket in the first direction is provided with an exhaust groove.

[0019] The utility model also provides a sports device, the sports device comprising:

[0020] Base assembly;

[0021] A plurality of the above-mentioned limiting units are arranged on the base assembly, and the plurality of the limiting units are distributed in a preset manner;

[0022] A frame assembly is arranged above the base assembly and moves relative to the base assembly at least along a first direction, at least a portion of the limit assembly in the limit unit is embedded in the frame assembly to limit the movement of the frame assembly, and the second limit seat in the limit unit is at least partially exposed outside the frame assembly to adjust the limit unit.

[0023] As described above, the fixed component in the limit unit of the utility model is connected to the first limit seat / the second limit seat to fix the position of the second limit seat, thereby improving the structural stability of the limit unit. At the same time, the position of the fixed component on the limit seat to which it is connected can be adjusted online in real time without the need to frequently disassemble and assemble other structural parts in the limit unit, thereby improving the application efficiency and flexibility of the device provided with the limit unit, and at the same time, improving the efficiency and convenience of daily maintenance of the device; further, through the material selection of each structural part in the limit unit, the limit unit can be applied to a vacuum environment, meeting the application requirements of the next generation of vacuum semiconductor equipment. The motion device of the utility model is based on the application of the limit unit as described above. The position of the frame assembly in the motion device can be adjusted online in real time without the need to repeatedly disassemble and assemble the position adjustment device of the frame assembly, and when parts need to be replaced or repaired and maintained in the specific application scenario of the motion platform, there is no need to disassemble the entire motion platform, thereby improving the convenience and efficiency of the device during installation and maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the limiting unit of the utility model in the first embodiment.

[0025] Figure 2 It is a partial cross-sectional schematic diagram of the limiting unit of the utility model in the first embodiment.

[0026] Figure 3 It is a schematic diagram of the overall structure of the second limiting seat in the limiting unit of the utility model in the first embodiment.

[0027] Figure 4 It is a cross-sectional schematic diagram of the second limiting seat in the limiting unit of the utility model in the first embodiment.

[0028] Figure 5 It is a partial cross-sectional schematic diagram of the structure obtained after the limiting assembly in the limiting unit of the utility model is connected to the limiting rod.

[0029] Figure 6 Display as Figure 2 A partial enlarged schematic diagram of the structure shown in the dotted box.

[0030] Figure 7 Shown is a schematic diagram of the overall structure of the gasket in the limiting unit of the utility model.

[0031] Figure 8 It is a schematic diagram of the overall structure of the first limiting seat in the limiting unit of the utility model in the first embodiment.

[0032] Fig. 9 It is a partial cross-sectional schematic diagram of the limiting unit of the utility model in the second embodiment.

[0033] Fig.10 It is a partial cross-sectional schematic diagram of the first limiting seat in the limiting unit of the utility model in the second embodiment.

[0034] Fig.11 It is a partial cross-sectional schematic diagram of the second limiting seat in the limiting unit of the utility model in the second embodiment.

[0035] Fig.12 Shown is a schematic diagram of the overall structure of the sports device of the utility model.

[0036] Fig.13 Display as Fig.12 Schematic diagram of the cross section at I-I'.

[0037] Description of Reference Numerals

[0038] 10 Limiting units

[0039] 11 First limit seat

[0040] 111 First connection section

[0041] 112 Guide segment

[0042] 113 Second connection section

[0043] 114 Base

[0044] 114a Fixing hole

[0045] 114b Positioning hole

[0046] 12 Second limit seat

[0047] 121 Limit rod

[0048] 122 Connecting rod

[0049] 1221 First connection

[0050] 1222 Guide

[0051] 1223 Second connection

[0052] 123 Fixed slot

[0053] 124 threaded holes

[0054] 13 Limiting components

[0055] 131 First limit element

[0056] 131a First limit surface

[0057] 132 Second limit element

[0058] 132a Second limit surface

[0059] 133 The third limiting element

[0060] 14 Fixing components

[0061] 141 Nut

[0062] 142 Gasket

[0063] 1421 Exhaust Slot

[0064] 15 Grooves

[0065] 151 Connecting Space

[0066] 152 Guiding Space

[0067] 153 Transitional Space

[0068] 16 Exhaust holes

[0069] 20 Base assembly

[0070] 30 Frame components DETAILED DESCRIPTION

[0071] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0072] See also Figures 1 to 13 It should be noted that the illustrations provided in this embodiment are only used to schematically illustrate the basic concept of the utility model, and the drawings only show the components related to the utility model rather than the number, shape and size of the components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0073] Embodiment 1

[0074] This embodiment provides a limiting unit 10, see Figure 1 and Figure 2 ,in, Figure 1 It is a schematic diagram of the overall structure of the limit unit. Figure 2 The schematic diagram is a partial cross-section (along the first direction) of the limiting unit. The limiting unit 10 includes a first limiting seat 11 , a second limiting seat 12 , a limiting component 13 and a fixing component 14 .

[0075] Specifically, the second limiting seat 12 is disposed on the first limiting seat 11, and the second limiting seat 12 is relative to the first limiting seat 11 along the first direction (such as Figure 2 The second limiting seat 12 is movably connected in the Y direction (shown in FIG. 1 ) (i.e., the second limiting seat 12 can move relative to the first limiting seat 11 along the first direction to adjust the size of the limiting unit 10 in the first direction); the limiting assembly 13 is arranged at one end of the second limiting seat 12 away from the first limiting seat 11 to form a limiting space of the limiting unit 10 in the first direction; the fixing assembly 14 is movably connected to one of the first limiting seat 11 and the second limiting seat 12, and the fixing assembly 14 abuts against one end of the other of the first limiting seat 11 and the second limiting seat 12 to fix the second limiting seat 12. Figure 2 As shown, in this embodiment, the fixing assembly 14 is movably connected to the first limiting seat 11 and simultaneously abuts against the second limiting seat 12 to fix the second limiting seat 12 .

[0076] As an example, see Figures 1 to 4 ,in, Figure 3 It is a schematic diagram of the overall structure of the second limiting seat in the limiting unit. Figure 4 It is a cross-sectional schematic diagram of the second limiting seat in the limiting unit. The second limiting seat 12 includes a limiting rod 121 and a connecting rod 122 connected in a first direction. The limiting assembly 13 is arranged on the limiting rod 121, and the connecting rod 122 is connected to the first limiting seat 11.

[0077] As an example, see Figure 5 , which is a partial cross-sectional schematic diagram of the structure obtained after the limiting assembly is connected to the limiting rod, the limiting assembly 13 includes a first limiting element 131 and a second limiting element 132, the first limiting element 131 is connected to the end of the limiting rod 121 away from the first limiting seat 11, and the surface of the first limiting element 131 facing the first limiting seat 11 has a second direction (such as Figure 5 The second direction is perpendicular to the first direction. The second limiting element 132 is sleeved on the periphery of one end of the limiting rod 121 facing the first limiting seat 11, and the surface of the second limiting element 132 facing the first limiting element 131 has a second limiting surface 132a extending along the second direction. The area between the second limiting surface 132a and the first limiting surface 131a constitutes a limiting space ( Figure 5 (indicated by the double-headed arrows in the figure).

[0078] For further information, see Figure 4 , Figure 5The limiting rod 121 is also provided with a threaded hole 124, which opens from one end of the limiting rod 121 away from the connecting rod 122 and extends along the first direction, and the first limiting element 131 has a through hole along the first direction. The end of the first limiting element 131 facing the second limiting seat 12 abuts against the outer edge of the threaded hole 124 facing the limiting assembly 13, and a bolt passes through the through hole of the first limiting element 131 and is threadedly connected with the threaded hole 124, thereby fixing the first limiting element 131. As an example, Figure 5 As shown, the limiting assembly 13 further includes a third limiting element 133, which is sleeved on the periphery of the limiting rod 121, and the third limiting element 133 is also located between the first limiting surface 131a and the second limiting surface 132a in the first direction. When the limiting unit 10 is applied to a specific device, the third limiting element 133 is used to limit the second direction (see Fig.13 (see the arrow in the middle for details).

[0079] In one example, if Figure 5 As shown, the first direction section of the first limiting element 131 is in a "T" shape, and the third limiting element 133 is simultaneously sleeved on the periphery of one end of the first limiting element 131 connected to the first limiting seat 11, which can be regarded as a part of the first limiting element 131 being embedded in the space formed by the third limiting element 133 in the first direction. The third limiting element 133 limits the positional relationship between the first limiting element 131 and the second limiting element 132 in the first direction, and the exposed surface of the third limiting element 133 constitutes the limiting surface of the limiting unit 10 in the second direction. In addition, in this embodiment, the limiting elements of the limiting assembly 13 are separately arranged. In actual application, limiting elements of different sizes can be selected based on the specific application scenario of the limiting unit 10 to construct the limiting element, thereby improving the structural flexibility and applicability of the limiting unit 10.

[0080] Furthermore, the first limiting element 131 is made of a rigid material and has a stiffness less than that of a specific device that needs to be limited, including a metal material (for example, an aluminum alloy), and the first limiting element 131 has a Teflon coating on one side facing the first limiting seat 11, and the thickness of the Teflon coating ranges from 30 to 70 μm (including but not limited to 40 μm, 50 μm and 60 μm); the second limiting element 132 is made of a flexible material, including rubber (for example, fluororubber), and the third limiting element 133 is made of a flexible material, including rubber (in this case, the third limiting element 133 can be regarded as a rubber guide sleeve). The design of the Teflon coating and the second / third limiting elements made of rubber are intended to buffer the collision of other structural parts with the limiting unit 10 during limiting to ensure structural stability and consistency, while reducing particles generated by collision friction, making it more suitable for use in a vacuum working environment. In addition, the first limiting element 131 uses a rigid material to prevent the first limiting element 131 from being deformed and affecting the limiting accuracy when the specific device reaches the upper limit position; at the same time, its rigidity is smaller than the rigidity of the specific device (usually ceramic in the vacuum field) in order to prevent the specific device from being damaged during a collision.

[0081] As an example, one of the first limiting seat 11 and the second limiting seat 12 that abuts against the fixing assembly 14 has a groove 15 that opens from one end that abuts against the fixing assembly 14 and extends along the first direction, and the other of the first limiting seat 11 and the second limiting seat 12 that is movably connected to the fixing assembly 14 extends into the groove 15 to connect the first limiting seat 11 with the second limiting seat 12. Figure 3 and Figure 4 As shown, in this embodiment, the groove 15 is arranged in the second limit seat 12, that is, the groove 15 opens from one end of the second limit seat 12 toward the first limit seat 11 and extends along the first direction and at least partially penetrates the second limit seat 12 to form a space for the first limit seat 11 to extend into.

[0082] As an example, Figure 2 and Figure 4 As shown, the groove 15 includes a connection space 151, and the side wall of the groove 15 corresponding to the connection space 151 is provided with threads, and the first limit seat 11 is threadedly connected to the second limit seat 12. Further, the length range covered by the above-mentioned threads in the groove 15 is 20 to 35 mm, including but not limited to 25 mm, 28 mm and 32 mm, that is, the adjustable distance of the second limit seat 12 relative to the first limit seat 11 in the first direction is within the above range, which can facilitate the operation during the replacement and maintenance of parts in actual application.

[0083] Furthermore, if Figure 2 and Figure 4As shown, the groove 15 further includes a guide space 152, which is communicated with the connecting space 151. The first limiting seat 11 or the second limiting seat 12 passes through the guide space 152 and then extends into the connecting space 151. Figure 6 , displayed as Figure 2 The partial enlarged view of the area shown in the dotted line frame, the distance between the side wall of at least part of the groove 15 corresponding to the guide space 152 and the part of the first limit seat 11 or the second limit seat 12 placed in the guide space 152 ( Figure 6 The range (as shown in d) is 8 to 15 μm, including but not limited to 10 μm, 12 μm and 14 μm. The guide space 152 is provided to prevent the limit unit 10 from being deflected when the limit unit 10 is demodulated. If the distance exceeds the above-mentioned distance range, either the limit unit 10 cannot be prevented from being deflected, or the time for the first limit seat 11 to extend into the connecting space 151 will be increased, which is not conducive to improving the assembly efficiency of the limit unit 10.

[0084] Furthermore, if Figure 2 and Figure 4 As shown, the groove 15 also includes a transition space 153, and the transition space 153 is connected between the guide space 152 and the connection space 151 in the first direction, that is, in the case of the transition space 153, the guide space 152, the transition space 153 and the connection space 151 are arranged in sequence in the extension direction of the groove 15, and more preferably, in terms of the diameter in the second direction, the transition space 153 is larger than the guide space 152 and the guide space 152 is larger than the connection space 151. In addition to facilitating processing, the provision of the transition space 153 also prevents the first limit seat 11 from being stuck when it extends into the groove 15 to be threadedly connected with the connection space 151 when there is a slight difference in the coaxiality of the guide space 152 and the connection space 151 due to factors such as processing accuracy, thereby improving the assembly efficiency and long-term reliability of the limit unit 10.

[0085] As an example, Figures 1 to 4 As shown, the first limiting seat 11 or the second limiting seat 12 is provided with at least one exhaust hole 16, and the exhaust hole 16 penetrates the side wall of the groove 15 to communicate with the groove 15, and the position of the exhaust hole 16 is set correspondingly based on the position of the groove 15, so as to improve the vacuum degree inside the limiting unit 10 when evacuating. In this embodiment, the exhaust hole 16 is arranged on the second limiting seat 12, and more preferably, the exhaust hole 16 is arranged on the three sections of the side wall of the groove 15 corresponding to the connecting space 151, the transition space 153 and the guide space 152, and even a plurality of exhaust holes 16 are arranged on the side wall corresponding to each space, and the plurality of exhaust holes 16 are evenly distributed along the circumference of the side wall. Of course, in other embodiments, the number and distribution of the exhaust holes 16 can also be adjusted according to actual needs and are not limited to those shown in the drawings of this embodiment.

[0086] As an example, Figure 3 and Figure 4 As shown, the second limit seat 12 is also provided with a pair of fixed grooves 123, which are arranged at one end of the connecting rod 122 away from the limit rod 121 and are arranged along the circumference of the connecting rod 122. The bottom of the fixed groove 123 is preferably a plane. The arrangement of the fixed groove 123 is convenient for increasing the contact area between the wrench and the first limit seat 11 when using a wrench to adjust or assemble the structure of the limit unit 10, thereby improving the convenience and efficiency of operation. In addition, in view of the arrangement of the groove 15 and the fixed groove 123 in the second limit seat 12, the diameter of the end of the connecting rod 122 away from the limit rod 121 in the second direction is preferably greater than the diameter of the end thereof facing the limit rod 121 to ensure the reliability of the connecting rod 122 during use, that is, to ensure that the side walls of the portion of the connecting rod 122 where the groove 15 is arranged and the portion where the fixed groove 123 is arranged have sufficient thickness to avoid deformation during repeated screwing during use, thereby damaging the structural stability of the second limit seat 12 and even the limit unit 10.

[0087] As an example, Figure 1 and Figure 2As shown, the fixing assembly 14 includes a nut 141 and a gasket 142, and the nut 141 and the gasket 142 are both sleeved on the periphery of one of the first limiting seat 11 and the second limiting seat 12 that is movably connected to the fixing assembly 14, and the gasket 142 is located between the other one of the first limiting seat 11 and the second limiting seat 12 that abuts against the fixing assembly 14 and the nut 141. In this embodiment, the nut 141 and the gasket 142 are both sleeved on the periphery of the first limiting seat 11 and the gasket 142 is located between the second limiting seat 12 and the nut 141. Based on the threaded connection, the second limit seat 12 can actually be fixed on the first limit seat 11 relatively stably. However, due to the interference caused by vibration or other working environment during the actual application of the limit unit 10 (for example, set in the motion platform), the second limit seat 12 is easily slightly displaced relative to the first limit seat 11, which seriously affects the high precision and accuracy of the motion platform. Therefore, setting a fixing component 14 to further fix the second limit seat 12 is crucial for the structural stability of the limit unit 10 and the accuracy of the motion platform. In addition, the active connection and abutment form of the firmware component 14 can be adjusted as a whole in any direction, which is convenient for real-time adjustment and installation and maintenance of the device. Of course, in other embodiments, the fixing component 14 can also be other structural parts that can achieve the positional relationship between the second limit seat 12 and the first limit seat 11 in the first direction and can achieve the same technical effect as the fixing component 14 in this embodiment. The setting of the fixing component 14 can apply a force in the first direction to the second limit seat 12 to increase the bite force when the first limit seat 11 and the second limit seat 12 are threadedly connected (that is, increase the friction between the threads), so that conventional vibrations will not cause the threads between the two to loosen, thereby achieving the fixation of the second limit seat 12. In addition, since the fixing component 14 in this embodiment is movably connected to the first limit seat 11, the displacement of the second limit seat 12 can be directly limited by the fixing component 14 itself under abnormal circumstances, further ensuring the structural stability of the limit unit 10.

[0088] For further information, see Figure 7 , which is a schematic diagram of the overall structure of the gasket in the fixing assembly, wherein the gasket 142 has an exhaust groove 1421 (for example, Figure 7 As shown, the exhaust groove 1421 is arranged on the side of the gasket 142 facing the second limit seat 12, and the arrangement of the exhaust groove 1421 can improve the vacuum degree during vacuuming. Furthermore, the exhaust groove 1421 can form an air flow channel inside the limit unit 10 with the exhaust hole 16 to facilitate the vacuuming operation of the limit unit 10, and preferably, the number of the exhaust grooves 1421 is multiple and the multiple exhaust grooves 1421 are evenly distributed along the circumferential direction, for example, Figure 7 As shown in FIG. 4 , four exhaust slots 1421 are provided.

[0089] As an example, based on the above-mentioned groove 15 structure provided in the second limiting seat 12, correspondingly, in this embodiment, the end of the first limiting seat 11 facing the second limiting seat 12 includes a first connecting section 111, a guide section 112 (when the groove 15 is provided with a guide space 152 or even a transition space 153) and a second connecting section 113 sequentially arranged in the first direction, wherein, please refer to Figure 2 The first connecting section 111 at least extends into the connecting space 151 to realize the threaded connection between the first limiting seat 11 and the second limiting seat 12, and the guide section 112 at least extends into the guide space 152 to guide the connecting section in the process of extending into the connecting space 151, thereby improving the convenience and efficiency of installation. The second connecting section 113 is used for threaded connection with the nut 141 in the fixing assembly 14.

[0090] As an example, the first limiting seat 11 also includes a base 114 connected to the end of the second connecting section 113 away from the guide section 112, and the base 114 is provided with at least one fixing hole 114a to install the limiting unit 10 on other structural members using fasteners (such as screws, bolts, etc.), and the fixing holes 114a are preferably arranged in pairs and symmetrically distributed to improve the installation stability and structural reliability of the limiting unit 10. Furthermore, further, the plane where the opening of the fixing hole 114a is located is preferably lower than the side of the base 114 facing the second connecting section 113. On the one hand, the depth of the fixing hole 114a is shortened to improve the installation efficiency while ensuring the installation stability, and at the same time, it can avoid the top surface of the fastener inserted into the fixing hole 114a protruding from the top surface of the base 114 and causing unnecessary obstacles and inconveniences in the subsequent process of adjusting the position of the nut 141 by a wrench.

[0091] Furthermore, the base 114 is further provided with at least one positioning hole 114b (for example, Figure 8 The setting of the positioning hole 114b can accurately locate the installation position of the limiting unit 10 before fixing the limiting unit 10, thereby improving the convenience and efficiency of installation.

[0092] As an example, the first limit seat 11, the second limit seat 12 and the nut 141 all include metal materials, and more preferably, the metal materials used in the above three structures are different, or at least the material of the first limit seat 11 is different from the material of the second limit seat 12 and the material of the nut 141 to avoid the situation that the threads of the same material are easily bitten each other when the threaded connection is made, and the size adjustment of the limit unit 10 cannot be achieved. For example, in one example, the first limit seat 11 is made of beryllium copper, the second limit seat 12 is made of aluminum alloy, and the nut 141 is made of titanium alloy. In other examples, the above three structural parts can also use other metal materials that can be used in a vacuum environment and have a certain rigidity. The material of the gasket 142 includes plastic, such as polyetheretherketone (PEEK for short). Of course, the gasket 142 can also use other materials that can be used in a vacuum environment and have a certain elastic deformation ability and toughness.

[0093] Specifically, the limit unit is mainly used in the motion platform of the electron beam detection device, and more specifically is arranged between the frame component and the base component (please refer to Fig.12 and Fig.13 To understand), when the frame assembly moves in the first direction and / or the second direction relative to the base assembly, the movement of the frame assembly is limited to avoid collision between the frame assembly and the electron beam component or excessive deviation of the frame assembly from the measurement position. Therefore, in terms of the actual effect applied to the motion platform of the electron beam detection device, the limiting unit based on this embodiment can realize the online real-time adjustment of the focal plane position of the light source and the position of the motion platform (especially the top frame) in the electron beam detection equipment, and at the same time can improve the convenience of replacement, repair and daily maintenance of parts in the electron beam detection equipment. However, based on the current limiting device, in the process of adjusting the focal plane position of the light source and the position of the top frame, some structural parts of the top frame and the limiting unit need to be repeatedly disassembled and assembled, which seriously affects the detection efficiency and structural reliability of the detection device.

[0094] The limiting unit of this embodiment includes a first limiting seat, a second limiting seat, a limiting assembly and a fixing assembly. The limiting unit is mainly used in high-precision devices or equipment such as motion platforms to accurately limit the position of other structural parts in the device to improve the structural stability and reliability of the device. The first limiting seat and the second limiting seat are movably connected in the first direction to flexibly adjust the actual size of the limiting unit (especially the size in the first direction) to expand the application scenario of the limiting unit. The limiting assembly is arranged on the second limiting seat to form a limiting space for other structural parts of the limiting unit. The fixing assembly is connected to the first limiting seat / the second limiting seat to fix the position of the second limiting seat to improve the structural stability of the limiting unit. At the same time, the position of the fixing assembly on the limiting seat to which it is connected can be adjusted online in real time without the need to frequently disassemble and assemble other structural parts in the limiting unit, thereby improving the application efficiency and flexibility of the device provided with the limiting unit, and at the same time, it can also improve the efficiency and convenience of daily maintenance of the device. Furthermore, through the material selection of each structural part in the limiting unit, the limiting unit can be applied in a vacuum environment, which meets the application requirements of the next generation of vacuum semiconductor equipment.

[0095] Embodiment 2

[0096] This embodiment provides a limit unit 10, please refer to Figures 9 to 11 ,in, Fig. 9 It is shown as a schematic diagram of the overall structure of the limit unit. The difference between this embodiment and embodiment one is that: in embodiment one, the fixing component is movably connected to the first limit seat and abuts against one end of the second limit seat, while in this embodiment, the fixing component is movably connected to the second limit seat and abuts against one end of the first limit seat, and further based on the change of the above-mentioned connection relationship, the detailed structure of the first limit seat and the second limit seat is adaptively adjusted. For example, in embodiment one, the first limit seat extends into a groove set in the second limit seat, while in this embodiment, the second limit seat extends into a groove set in the first limit seat, etc.

[0097] Specifically, the limiting unit 10 includes a first limiting seat 11, a second limiting seat 12, a limiting assembly 13 and a fixing assembly 14, wherein the second limiting seat 12 is arranged on the first limiting seat 11, and the second limiting seat 12 is movably connected relative to the first limiting seat 11 along the first direction; the limiting assembly 13 is arranged at one end of the second limiting seat 12 away from the first limiting seat 11 to form a limiting space of the limiting unit 10 in the first direction; the fixing assembly 14 is movably connected to one of the first limiting seat 11 and the second limiting seat 12, and the fixing assembly 14 abuts against one end of the other of the first limiting seat 11 and the second limiting seat 12 to fix the second limiting seat 12. Fig. 9 As shown, in this embodiment, the fixing assembly 14 is movably connected to the second limiting seat 12 and abuts against the first limiting seat 11 to fix the second limiting seat 12 .

[0098] As an example, one of the first limiting seat 11 and the second limiting seat 12 that abuts against the fixing component 14 has a groove 15 that opens from one end that abuts against the fixing component 14 and extends along the first direction, and the other of the first limiting seat 11 and the second limiting seat 12 that is movably connected to the fixing component 14 extends into the groove 15 to connect the first limiting seat 11 with the second limiting seat 12. Fig.10 and Fig.11 ,in, Fig.10 It is a partial cross-sectional schematic diagram of the first limit seat, Fig.11 The cross-sectional schematic diagram of the second limit seat is shown. In this embodiment, the groove 15 is arranged in the first limit seat 11, that is, the groove 15 opens from one end of the first limit seat 11 toward the second limit seat 12 and extends along the first direction and at least partially penetrates the first limit seat 11 to form a space for the second limit seat 12 to extend into. Further, in this embodiment, the groove 15 includes a connecting space 151, a transition space 153 and a guide space 152 that are sequentially connected in the first direction.

[0099] As an example, based on the above groove 15 structure provided in the first limiting seat 11, correspondingly, as Fig.11 As shown, in this embodiment, the end of the connecting rod 122 of the second limiting seat 12 away from the limiting rod 121 includes a first connecting portion 1221, a guide portion 1222 (when the groove 15 is provided with a guide space 152 or even a transition space 153) and a second connecting portion 1223 arranged in sequence in the first direction, wherein, please refer to Fig. 9 The first connecting portion 1221 at least extends into the connecting space 151 to realize the threaded connection between the first limit seat 11 and the second limit seat 12, and the guide portion 1222 at least extends into the guide space 152 to guide the connecting portion in the process of extending into the connecting space 151, thereby improving the convenience and efficiency of installation. The second connecting portion 1223 is used for threaded connection with the nut 141 in the fixing assembly 14.

[0100] As an example, Fig. 9 As shown, the fixing assembly 14 includes a nut 141 and a washer 142, and the nut 141 and the washer 142 are both sleeved on the periphery of one of the first limiting seat 11 and the second limiting seat 12 that is movably connected to the fixing assembly 14, and the washer 142 is located between the other of the first limiting seat 11 and the second limiting seat 12 that abuts against the fixing assembly 14 and the nut 141. In this embodiment, the nut 141 and the washer 142 are both sleeved on the periphery of the second limiting seat 12, and the washer 142 is located between the first limiting seat 11 and the nut 141.

[0101] It should be noted that, in addition to the above-mentioned structure, the spatial layout within the groove 15, exhaust holes, exhaust grooves, material selection of structural parts and size range and other structures or parameters introduced in the first embodiment can all be applied to the limiting unit 10 of this embodiment and will not be described one by one here.

[0102] Embodiment 3

[0103] This embodiment provides a sports device. Fig.12 , which is a schematic diagram of the overall structure of the motion device, wherein the motion device includes a base assembly 20, a plurality of limit units 10 as described in Embodiment 1 and / or Embodiment 2, and a frame assembly 30.

[0104] Specifically, a plurality of limit units 10 are disposed on the base assembly 20, and the plurality of limit units 10 are distributed in a preset manner; the frame assembly 30 is disposed above the base assembly 20 and moves relative to the base assembly 20 at least along a first direction, see Fig.13 , displayed as Fig.12 along Fig.12 In the cross-sectional schematic diagram at I-I', at least a portion of the limiting assembly 13 in the limiting unit 10 is embedded in the frame assembly 30 to limit the movement of the frame assembly 30, and the second limiting seat 12 in the limiting unit 10 is at least partially exposed outside the frame assembly 30 to adjust the limiting unit 10. The motion device of this embodiment includes four limiting units 10, and the four units are distributed between the base assembly 20 and the frame assembly 30 in a rectangular shape.

[0105] As an example, the motion device also includes a driving component and a position / displacement detection component (for example, an eddy current sensor, a capacitive sensor), the driving component is connected to the frame component to drive the frame component to move in a first direction (and a second direction) relative to the base component, and the displacement detection component is used to calibrate and detect the posture (six degrees of freedom parameters of position in the first direction, yaw and pitch) of the frame component at different positions (for example, the upper limit position when the frame component is connected to the first limit surface of the limit unit, or the lower limit position when the frame component is connected to the second limit surface of the limit unit).

[0106] As an example, the application fields of the motion device include electron beam detection equipment, etc. The motion device is used to carry wafers or other samples to be detected to the target position (for example, the focal plane position of the light source in the electron beam detection device, etc.) to realize the detection of the samples to be detected and other operations. In this application scenario, the limit unit can realize the limit and position online real-time adjustment in the process of the top frame in the motion device reaching the target position, and there is no need to perform operations such as repeated disassembly and assembly of the top frame and other structures required in traditional motion devices, thereby improving convenience and efficiency.

[0107] The motion device of the present embodiment has a base assembly, a limit unit and a frame assembly. Based on the application of the limit unit as described in Example 1 and Example 2, the position of the frame assembly in the motion device can be adjusted online in real time without the need for repeated disassembly and assembly of the position adjustment device of the frame assembly. In addition, when parts need to be replaced or maintenance is required in the specific application scenario of the motion platform, there is no need to disassemble the entire motion platform, thereby improving the convenience and efficiency of device installation and maintenance.

[0108] In summary, the fixed component in the limit unit of the utility model is connected to the first limit seat / the second limit seat to fix the position of the second limit seat, thereby improving the structural stability of the limit unit. At the same time, the position of the fixed component on the limit seat to which it is connected can be adjusted online in real time without the need to frequently disassemble and assemble other structural parts in the limit unit, thereby improving the application efficiency and flexibility of the device provided with the limit unit, and at the same time, improving the efficiency and convenience of daily maintenance of the device; further, through the material selection of each structural part in the limit unit, the limit unit can be applied to a vacuum environment, meeting the application requirements of the next generation of vacuum semiconductor equipment. The motion device of the utility model is based on the application of the limit unit as described above. The position of the frame component in the motion device can be adjusted online in real time without the need to repeatedly disassemble and assemble the position adjustment device of the frame component, and when it is necessary to replace parts or perform maintenance in the specific application scenario of the motion platform, it is also unnecessary to disassemble the entire motion platform, thereby improving the convenience and efficiency of the device during installation and maintenance. Therefore, the utility model effectively overcomes the various shortcomings of the prior art and has a high industrial utilization value.

[0109] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A limiting unit, characterized in that: The limiting unit (10) comprises: A first limiting seat (11); A second limiting seat (12) is arranged on the first limiting seat (11), and the second limiting seat (12) is movably connected relative to the first limiting seat (11) along a first direction; A limiting assembly (13) is arranged at one end of the second limiting seat (12) away from the first limiting seat (11) to form a limiting space of the limiting unit (10) in the first direction; A fixing component (14) is movably connected to one of the first limiting seat (11) and the second limiting seat (12), and the fixing component (14) abuts against one end of the other of the first limiting seat (11) and the second limiting seat (12) to fix the second limiting seat (12).

2. The limiting unit according to claim 1, characterized in that: The second limiting seat (12) comprises a limiting rod (121) and a connecting rod (122) connected in a first direction, the limiting assembly (13) is arranged on the limiting rod (121), and the connecting rod (122) is connected to the first limiting seat (11).

3. The limiting unit according to claim 2, characterized in that: The limiting assembly (13) comprises a first limiting element (131) and a second limiting element (132); the first limiting element (131) is connected to an end of the limiting rod (121) facing away from the first limiting seat (11); and the surface of the first limiting element (131) facing the first limiting seat (11) has a first limiting surface (131a) extending along a second direction, the second direction is perpendicular to the first direction; the second limiting element (132) is sleeved on the periphery of an end of the limiting rod (121) facing the first limiting seat (11); and the surface of the second limiting element (132) facing the first limiting element (131) has a second limiting surface (132a) extending along the second direction; the area between the second limiting surface (132a) and the first limiting surface (131a) constitutes the limiting space.

4. The limiting unit according to claim 3, characterized in that: The limiting assembly (13) further comprises a third limiting element (133), wherein the third limiting element (133) is sleeved on the periphery of the limiting rod (121), and the third limiting element (133) is also located between the first limiting surface (131a) and the second limiting surface (132a) in the first direction.

5. The limiting unit according to claim 1, characterized in that: One of the first limiting seat (11) and the second limiting seat (12) that abuts against the fixing component (14) has a groove (15) that opens from one end that abuts against the fixing component (14) and extends along a first direction, and the other of the first limiting seat (11) and the second limiting seat (12) that is movably connected to the fixing component (14) extends into the groove (15) so that the first limiting seat (11) and the second limiting seat (12) are connected.

6. The limiting unit according to claim 5, characterized in that: The groove (15) comprises a connection space (151), a portion of the side wall of the groove (15) corresponding to the connection space (151) is provided with a thread, and the first limiting seat (11) and the second limiting seat (12) are threadedly connected.

7. The limiting unit according to claim 6, characterized in that: The groove (15) further comprises a guide space (152), wherein the guide space (152) is connected to the connection space (151), and the first limit seat (11) or the second limit seat (12) passes through the guide space (152) and then extends into the connection space (151), and the distance between at least a portion of the side wall of the groove (15) corresponding to the guide space (152) and a portion of the first limit seat (11) or the second limit seat (12) disposed in the guide space (152) is in the range of 8 to 15 μm.

8. The limiting unit according to claim 5, characterized in that: The first limiting seat (11) or the second limiting seat (12) is provided with at least one exhaust hole (16), and the exhaust hole (16) passes through the side wall of the groove (15) to communicate with the groove (15).

9. The limiting unit according to claim 1, characterized in that: The fixing component (14) comprises a nut (141) and a gasket (142), wherein the nut (141) and the gasket (142) are both sleeved on the periphery of one of the first limiting seat (11) and the second limiting seat (12) that is movably connected to the fixing component (14), and the gasket (142) is located between the other of the first limiting seat (11) and the second limiting seat (12) that is abutted against the fixing component (14) and the nut (141), and at least one side of the gasket (142) in the first direction is provided with an exhaust groove (1421).

10. A sports device, characterized in that: The sports device comprises: A base assembly (20); A plurality of limiting units (10) according to any one of claims 1 to 9, arranged on the base assembly (20), and the plurality of limiting units (10) are distributed in a preset manner; A frame assembly (30) is arranged above the base assembly (20) and moves relative to the base assembly (20) at least along a first direction, at least a portion of the limit assembly (13) in the limit unit (10) is embedded in the frame assembly (30) to limit the movement of the frame assembly (30), and the second limit seat (12) in the limit unit (10) is at least partially exposed outside the frame assembly (30) to adjust the limit unit (10).

Images