Wafer box pressing equipment

By designing a device for compacting wafer cassettes, the problem of PP material wafer cassette floating in water is solved, ensuring that the wafer remains wet.

CN222690641UActive Publication Date: 2025-03-28SUZHOU SEMI PRECISION TECH CO LTD
View PDF 0 Cites 1 Cited by

Patent Information

Application Number
CN202421341602.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-13
Publication Date
2025-03-28
Estimated Expiration
2034-06-13

AI Technical Summary

Technical Problem

During the wafer manufacturing process, the PP-material box floats in the water, causing the wafer to be exposed to the water surface and cannot remain moist.

Method used

A wafer box pressing equipment is designed, including the main support frame, sink, auxiliary installation components, cylinder installation components and down-pressure power components. The down-pressure power cylinder drives the down-pressure plate down-pressure, and combined with the cooperation of the auxiliary groove wheel and limit column, the effective compression of the wafer box is achieved.

Benefits of technology

It effectively avoids the phenomenon of wafer floating in the sink, keeps the wafer in a wet state, and ensures the wet environment of wafers.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN222690641U_ABST
    Figure CN222690641U_ABST
Patent Text Reader

Abstract

The utility model discloses wafer box pressing equipment which comprises a main supporting frame, a water tank is arranged on the main supporting frame, auxiliary installation assemblies are arranged on the main supporting frame and located on the two sides of the water tank, air cylinder installation assemblies are arranged on the auxiliary installation assemblies, and downward pressing power assemblies are arranged on the air cylinder installation assemblies. A downward pressing guide assembly is arranged on the auxiliary installation assembly, a downward pressing plate is arranged on the moving portion of the downward pressing guide assembly, an auxiliary limiting assembly is arranged on the portion, located on one side of the downward pressing plate, of the auxiliary installation assembly, a plurality of limiting columns distributed in an arc shape are arranged on the auxiliary installation assembly, and an installation bearing is arranged on the downward pressing plate. An auxiliary grooved wheel is arranged at one end of the mounting rod, and an auxiliary pressing rod is arranged at the end, away from the auxiliary grooved wheel, of the mounting rod. The wafer box pressing equipment is ingenious in structural design, and by means of the wafer box pressing equipment, the phenomenon that wafers float upwards in the water tank is effectively avoided, and the wafers are effectively kept in a wet state.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of wafer production, in particular to a wafer box pressing device. Background Art

[0002] In the process of wafer manufacturing, after the wafer is ground and polished by a polishing machine, the surface of the wafer needs to be kept moist and cleaned, so the wafer is often soaked in pure water for temporary storage. The wafer loading box is made of PP material, and the PP material box will float when soaked in water, causing the wafer to be exposed to the water surface. When the wafer is partially exposed to the water surface, it cannot be guaranteed that the entire wafer is in a moist state. For this reason, a wafer box pressing device is designed. Utility Model Content

[0003] The utility model aims to solve the above problems and designs a wafer box pressing device.

[0004] To achieve the above-mentioned purpose, the technical solution of the utility model is a wafer box pressing device, comprising a main support frame, the main support frame is provided with a water trough, the main support frame is provided with auxiliary mounting components on both sides of the water trough, the auxiliary mounting component is provided with a cylinder mounting component, the cylinder mounting component is provided with a downward pressure power component, the auxiliary mounting component is provided with a downward pressure guide component, the moving part of the downward pressure guide component is provided with a downward pressure plate, the auxiliary mounting component is provided with an auxiliary limiting component on one side of the downward pressure plate, the auxiliary mounting component is provided with a plurality of limit columns distributed in an arc shape, the lower pressure plate is provided with a mounting bearing, the mounting bearing is provided with a mounting rod, one end of the mounting rod is provided with an auxiliary groove wheel, and the end of the mounting rod away from the auxiliary groove wheel is provided with an auxiliary pressure rod.

[0005] As a further description of the technical solution, the auxiliary mounting assembly includes an auxiliary mounting base plate arranged on the main support frame on both sides of the sink, the auxiliary mounting base plate is provided with a mounting vertical plate, side reinforcement plates are provided on both sides of the mounting vertical plate, a cylinder mounting assembly is provided on the mounting vertical plate, a downward pressure guide assembly is provided on the mounting vertical plate, and an auxiliary limit assembly is provided on the auxiliary mounting base plate.

[0006] As a further description of the technical solution, the cylinder mounting assembly includes a cylinder mounting bracket arranged on a mounting vertical plate, and a downward pressing power assembly is arranged on the cylinder mounting bracket.

[0007] As a further description of the present technical solution, the downward pressing power assembly includes a downward pressing power cylinder arranged on a cylinder mounting bracket, and an output end of the downward pressing power cylinder is connected to a downward pressing plate.

[0008] As a further description of the technical solution, the downward pressing guide assembly includes a downward pressing guide rail arranged on the mounting vertical plate, a movable slider is arranged on the downward pressing guide rail, and a downward pressing plate is arranged on the movable slider.

[0009] As a further description of the technical solution, the auxiliary limiting assembly includes an auxiliary limiting plate arranged on the auxiliary mounting base plate, the auxiliary limiting plate is provided with an auxiliary limiting guide groove, and the mounting rod is arranged in the auxiliary limiting guide groove.

[0010] As a further description of the technical solution, a plurality of slots are provided on the auxiliary sheave, and when the lower pressure plate moves up and down, different slots cooperate with corresponding limit columns to realize the rotation of the auxiliary sheave.

[0011] The beneficial effect is that the wafer box pressing device of the technical solution has an ingenious structural design, strong practicality, and stable operation. The use of this wafer box pressing device can effectively avoid the floating phenomenon of wafers in the water tank and effectively keep the wafers in a moist state. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0013] Figure 2 This is a schematic diagram of the installation structure of the auxiliary sheave of the utility model;

[0014] Figure 3 It is a schematic diagram of the installation structure of the downward pressure guide component of the utility model.

[0015] In the figure, 1. main support frame; 2. water tank; 3. auxiliary installation assembly; 4. cylinder installation assembly; 5. downward pressure power assembly; 6. downward pressure guide assembly; 7. downward pressure plate; 8. auxiliary limit assembly; 9. limit column; 10. installation bearing; 11. installation rod; 12. auxiliary groove wheel; 13. auxiliary pressure rod; 14. auxiliary installation base plate; 15. installation vertical plate; 16. side reinforcement plate; 17. cylinder installation bracket; 18. downward pressure power cylinder; 19. downward pressure guide rail; 20. moving slider; 21. auxiliary limit plate; 22. auxiliary limit guide groove; 23. card slot. DETAILED DESCRIPTION

[0016] The utility model is described in detail below in conjunction with the accompanying drawings. Figure 1-Figure 3 As shown, a wafer box pressing device includes a main support frame 1, and a water tank 2 is arranged on the main support frame 1.

[0017] In order to facilitate the installation of the cylinder mounting assembly 4, an auxiliary mounting assembly 3 is arranged on both sides of the water tank 2 on the main support frame 1. The auxiliary mounting assembly 3 will be described in detail below. The auxiliary mounting assembly 3 includes an auxiliary mounting base plate 14 arranged on the main support frame 1 on both sides of the water tank 2, a mounting vertical plate 15 is arranged on the auxiliary mounting base plate 14, side reinforcing plates 16 are arranged on both sides of the mounting vertical plate 15, a cylinder mounting assembly 4 is arranged on the mounting vertical plate 15, a downward pressure guide assembly 6 is arranged on the mounting vertical plate 15, and an auxiliary limiting assembly 8 is arranged on the auxiliary mounting base plate 14.

[0018] In order to facilitate the installation of the downward pressing power assembly 5, a cylinder mounting assembly 4 is arranged on the auxiliary mounting assembly 3. The cylinder mounting assembly 4 will be described in detail below. The cylinder mounting assembly 4 includes a cylinder mounting bracket 17 arranged on the mounting vertical plate 15, and the downward pressing power assembly 5 is arranged on the cylinder mounting bracket 17.

[0019] In order to facilitate the provision of power to the lower pressure plate 7, a lower pressure power assembly 5 is arranged on the cylinder mounting assembly 4. The lower pressure power assembly 5 will be introduced in detail below. The lower pressure power assembly 5 includes a lower pressure power cylinder 18 arranged on a cylinder mounting bracket 17, and the output end of the lower pressure cylinder 18 is connected to the lower pressure plate 7.

[0020] In order to facilitate the guidance of the downward pressing plate 7, a downward pressing guide assembly 6 is arranged on the auxiliary mounting assembly 3. The downward pressing guide assembly 6 will be described in detail below. The downward pressing guide assembly 6 includes a downward pressing guide rail 19 arranged on the mounting vertical plate 15, and a movable slider 20 is arranged on the downward pressing guide rail 19, and the movable slider 20 is arranged on the downward pressing plate 7.

[0021] A pressing plate 7 is provided at the moving portion of the pressing guide assembly 6 .

[0022] In order to facilitate the auxiliary limiting process of the installation rod 11 during the lifting and lowering process, an auxiliary limiting assembly 8 is arranged on the auxiliary installation assembly 3 on one side of the lower pressure plate 7. The auxiliary limiting assembly 8 will be described in detail below. The auxiliary limiting assembly 8 includes an auxiliary limiting plate 21 arranged on the auxiliary installation base plate 14, and an auxiliary limiting guide groove 22 is arranged on the auxiliary limiting plate 21. The installation rod 11 is arranged in the auxiliary limiting guide groove 22.

[0023] A mounting bearing 10 is arranged on the lower pressure plate 7, and an auxiliary pressure rod 13 is arranged at one end of the mounting rod 11 away from the auxiliary groove wheel 12. The mounting bearing 10 is arranged with a mounting rod 11. In order to facilitate the control of the rotation of the auxiliary pressure rod 13, an auxiliary groove wheel 12 is arranged at one end of the mounting rod 11. In addition, a plurality of arc-shaped limit columns 9 are arranged on the auxiliary mounting assembly 3.

[0024] The auxiliary sheave 12 is provided with a plurality of slots 23 . When the lower pressing plate 7 moves up and down, different slots 23 cooperate with corresponding limiting columns 9 to realize the rotation of the auxiliary sheave 12 .

[0025] The above describes in detail the specific structure of the utility model. The working principle of the utility model will be described below: when in use, the wafer box is placed in the water tank 2, and the lower pressure plate 7 is pressed down by pressing the power cylinder 18. At this time, the mounting rod 11 moves downward in the auxiliary limiting guide groove 22. During the downward movement, the slot 23 on the auxiliary groove wheel 12 cooperates with the limiting column 9. At this time, the auxiliary groove wheel 12 rotates, and the auxiliary groove wheel 12 rotates, driving the mounting rod 11 and the auxiliary pressure rod 13 to rotate. At this time, the auxiliary pressure rod 13 rotates while pressing down the wafer box to ensure that the wafer box is in the water in the water tank 2. The wafer box pressing device of the present technical solution has a clever structural design, strong practicality, and stable working operation. The use of this wafer box pressing device can effectively avoid the floating phenomenon of wafers in the water tank 2, and effectively keep the wafers in a wet state.

[0026] The above technical solutions only reflect the preferred technical solutions of the technical solutions of the utility model. Some changes that may be made to certain parts thereof by technicians in this technical field all reflect the principles of the utility model and fall within the protection scope of the utility model.

Claims

1. A wafer box pressing device, characterized in that: The invention comprises a main support frame (1), wherein a water tank (2) is arranged on the main support frame (1), auxiliary mounting components (3) are arranged on both sides of the water tank (2) on the main support frame (1), a cylinder mounting component (4) is arranged on the auxiliary mounting component (3), a downward pressure power component (5) is arranged on the cylinder mounting component (4), a downward pressure guide component (6) is arranged on the auxiliary mounting component (3), and a downward pressure plate (7) is arranged at the moving part of the downward pressure guide component (6), The auxiliary mounting assembly (3) is provided with an auxiliary limiting assembly (8) located on one side of the lower pressure plate (7), the auxiliary mounting assembly (3) is provided with a plurality of limiting columns (9) distributed in an arc shape, the lower pressure plate (7) is provided with a mounting bearing (10), the mounting bearing (10) is provided with a mounting rod (11), one end of the mounting rod (11) is provided with an auxiliary groove wheel (12), and the end of the mounting rod (11) away from the auxiliary groove wheel (12) is provided with an auxiliary pressure rod (13).

2. A wafer box pressing device according to claim 1, characterized in that: The auxiliary mounting assembly (3) comprises an auxiliary mounting base plate (14) arranged on the main support frame (1) and located on both sides of the water tank (2); a mounting vertical plate (15) is arranged on the auxiliary mounting base plate (14); side reinforcing plates (16) are arranged on both sides of the mounting vertical plate (15); a cylinder mounting assembly (4) is arranged on the mounting vertical plate (15); a downward pressure guide assembly (6) is arranged on the mounting vertical plate (15); and an auxiliary limit assembly (8) is arranged on the auxiliary mounting base plate (14).

3. A wafer box pressing device according to claim 2, characterized in that: The cylinder mounting assembly (4) comprises a cylinder mounting bracket (17) arranged on a mounting vertical plate (15), and a downward pressing power assembly (5) is arranged on the cylinder mounting bracket (17).

4. The wafer box pressing device according to claim 3, characterized in that: The downward pressing power assembly (5) comprises a downward pressing power cylinder (18) arranged on a cylinder mounting bracket (17), and the output end of the downward pressing power cylinder (18) is connected to the downward pressing plate (7).

5. The wafer box pressing device according to claim 2, characterized in that: The downward pressing guide assembly (6) comprises a downward pressing guide rail (19) arranged on the mounting vertical plate (15), a movable slider (20) is arranged on the downward pressing guide rail (19), and a downward pressing plate (7) is arranged on the movable slider (20).

6. The wafer box pressing device according to claim 2, characterized in that: The auxiliary limiting assembly (8) comprises an auxiliary limiting plate (21) arranged on an auxiliary mounting base plate (14), the auxiliary limiting plate (21) being provided with an auxiliary limiting guide groove (22), and the mounting rod (11) being arranged in the auxiliary limiting guide groove (22).

7. The wafer box pressing device according to claim 1, characterized in that: The auxiliary groove wheel (12) is provided with a plurality of slots (23). When the lower pressure plate (7) moves up and down, different slots (23) cooperate with corresponding limiting columns (9) to realize the rotation of the auxiliary groove wheel (12).

Citation Information

Cited By

  • Wafer box pressing equipment

    CN120809631A