A graphite accessories cleaning auxiliary jig

Abstract

The utility model discloses a graphite accessory cleaning auxiliary jig, including a jig body, an embedding groove and a fixing step are provided on the plane of the jig body, a fixing groove is provided on the fixing step, and the fixing groove is connected with the embedding groove. A fixing screw hole is provided in the embedding groove, and a screw through hole is provided at a position of the graphite accessory corresponding to the fixing screw hole. The graphite accessory is embedded in the embedding groove corresponding to the embedding groove and fixed with screws, and the bottom of the graphite accessory is in close contact with the bottom of the embedding groove. The utility model can ensure that the accessory is subjected to uniform force during the cleaning process (especially for accessories with irregular shapes), thereby reducing damage to the accessory. The bottom of the graphite accessory is fixed, and the bottom surface of the graphite accessory is in full contact with the jig body, so that the jig is subjected to uniform force during the cleaning process, and the probability of damage is reduced without affecting the removal of sediments on the upper surface and side surfaces of the accessory.

Description

Technical Field

[0001] The utility model relates to graphite accessory auxiliary equipment, in particular to a graphite accessory cleaning auxiliary jig. Background Art

[0002] During the SiC vapor phase epitaxy process, the reaction chamber of the epitaxial equipment contains a large number of graphite parts. During the reaction process, the products of the epitaxial reaction will gradually deposit on the surface of the graphite parts. After continuously growing multiple epitaxial wafers, when the deposits on the graphite accessories reach a certain thickness, particles and dust will fall off during the epitaxial growth process, causing dropped defects on the substrate epitaxial film, affecting the quality and yield of the epitaxial wafers. Therefore, the reaction chamber needs to be cleaned regularly.

[0003] The existing method for cleaning graphite accessories in the reaction chamber of epitaxial equipment is as follows: after growing a certain number of epitaxial wafers, the equipment reaction chamber needs to be opened, the graphite parts need to be manually disassembled, and the deposits on the surface of the accessories need to be manually scraped off with silicon wafers. After cleaning, the accessories are then put back into the reaction chamber. During the cleaning process, the accessories are easily damaged by force.

[0004] There is currently no effective technical solution to the above problems. Summary of the invention

[0005] In order to overcome the shortcomings and deficiencies in the prior art, the utility model aims to provide a graphite accessories cleaning auxiliary jig.

[0006] The purpose of the utility model is achieved through the following technical solutions: A graphite accessory cleaning auxiliary jig, including a jig body, an embedding groove and a fixed step are provided on the upper plane of the jig body, a fixed groove is provided on the fixed step, and the fixed groove is connected to the embedding groove. The bottom surface of the graphite accessory is fully in contact with the jig body, so that the graphite accessory is evenly stressed during the cleaning process, and the probability of damage is reduced without affecting the removal of sediments on the upper surface and side of the accessory. The depth of the embedding groove is less than the height of the graphite accessory, and the upper half of the graphite accessory protrudes outside the embedding groove and is semi-embedded and fixed, which is convenient for cleaning the side of the graphite accessory.

[0007] As an improvement of the auxiliary jig for cleaning graphite accessories of the utility model, a fixing screw hole is provided in the embedding groove, a screw through hole is provided at the position of the graphite accessory corresponding to the fixing screw hole, the graphite accessory is embedded in the embedding groove corresponding to the embedding groove and fixed with screws, and the bottom of the graphite accessory is in close contact with the bottom of the embedding groove. The graphite accessory is evenly stressed in the embedding groove, and it is convenient to clean the graphite accessory.

[0008] As an improvement of the auxiliary jig for cleaning graphite accessories of the utility model, a fixing part is provided on one side of the graphite accessory, and an embedding block is provided at the bottom of the fixing part, and the embedding block can be embedded in the fixing groove. The fixing part cooperates with the fixing groove to facilitate the fixing of the graphite accessory.

[0009] As an improvement of the auxiliary jig for cleaning graphite accessories of the utility model, the jig body is a polytetrafluoroethylene component. The jig body made of polytetrafluoroethylene (PTFE) material can prevent pollution to graphite accessories.

[0010] As an improvement of the auxiliary jig for cleaning graphite accessories of the utility model, one side wall of the embedding groove is in an arc shape, and one side of the graphite accessory is in an arc shape. The arc end of the graphite accessory cooperates with the arc side wall of the embedding groove, which facilitates the fixing of the graphite accessory.

[0011] As an improvement of the auxiliary jig for cleaning graphite accessories of the utility model, two sides of the embedding groove are provided with openings, which can expose the two sides of the graphite accessories, so as to facilitate the cleaning of the side of the graphite accessories.

[0012] The beneficial effect of the utility model is that the utility model can ensure that the accessories are evenly stressed during the cleaning process (especially accessories with irregular shapes), thereby reducing damage to the accessories. The bottom of the graphite accessories is fixed, and the bottom surface of the graphite accessories is fully in contact with the fixture body, so that the fixture is evenly stressed during the cleaning process, and the probability of damage is reduced without affecting the removal of sediments on the upper surface and side of the accessories. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a three-dimensional diagram of the utility model;

[0014] Figure 2 It is a three-dimensional diagram of the assembled graphite accessories of the utility model;

[0015] The accompanying drawings are marked as follows: 1. fixture body; 2. embedding groove; 3. fixing step; 4. fixing groove; 5. graphite fitting; 6. fixing screw hole; 7. opening; 8. screw through hole; 9. fixing part; 10. embedding block. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0018] In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0019] like Figure 1 and Figure 2 As shown, a graphite accessory cleaning auxiliary jig includes a jig body 1, an embedding groove 2 and a fixing step 3 are provided on the plane of the jig body 1, a fixing groove 4 is provided on the fixing step 3, and the fixing groove 4 is connected with the embedding groove 2. The bottom surface of the graphite accessory 5 is fully in contact with the jig body 1, so that the graphite accessory 5 is evenly stressed during the cleaning process, and the probability of damage is reduced without affecting the removal of sediments on the upper surface and side of the accessory. The depth of the embedding groove 2 is less than the height of the graphite accessory 5, and the upper half of the graphite accessory 5 protrudes outside the embedding groove 2, and is semi-embedded and fixed, which is convenient for cleaning the side of the graphite accessory 5.

[0020] Preferably, a fixing screw hole 6 is provided in the embedding groove 2, and a screw through hole 8 is provided at a position of the graphite accessory 5 corresponding to the fixing screw hole 6. The graphite accessory 5 is embedded in the embedding groove 2 and fixed with screws, and the bottom of the graphite accessory 5 is in close contact with the bottom of the embedding groove 2. The graphite accessory 5 is evenly stressed in the embedding groove 2, and the graphite accessory is easy to clean.

[0021] Preferably, a fixing portion 9 is provided on one side of the graphite accessory 5, and an embedding block 10 is provided at the bottom of the fixing portion 9, and the embedding block 10 can be embedded in the fixing groove 4. The fixing portion 9 cooperates with the fixing groove 4 to facilitate the fixing of the graphite accessory 5.

[0022] Preferably, the fixture body 1 is a polytetrafluoroethylene component. The fixture body made of polytetrafluoroethylene (PTFE) material can prevent contamination of graphite accessories.

[0023] Preferably, one side wall of the embedding groove 2 is in an arc shape, and one side of the graphite fitting 5 is in an arc shape. The arc end of the graphite fitting 5 cooperates with the arc side wall of the embedding groove, which facilitates the fixing of the graphite fitting.

[0024] Preferably, two sides of the embedding groove 2 have openings 7. The openings 7 can expose two sides of the graphite accessory 5, making it convenient to clean the side of the graphite accessory 5.

[0025] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and structures of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A graphite accessories cleaning auxiliary jig, characterized in that: The utility model comprises a fixture body, wherein an embedding groove and a fixing step are arranged on a plane of the fixture body, a fixing groove is arranged on the fixing step, and the fixing groove is communicated with the embedding groove.

2. The graphite accessories cleaning auxiliary jig according to claim 1, characterized in that: A fixing screw hole is provided in the embedding groove, and a screw through hole is provided at a position of the graphite accessory corresponding to the fixing screw hole. The graphite accessory is embedded in the embedding groove corresponding to the embedding groove and fixed with screws, and the bottom of the graphite accessory is in close contact with the bottom of the embedding groove.

3. The graphite accessories cleaning auxiliary jig according to claim 2, characterized in that: A fixing portion is provided on one side of the graphite accessory, and an embedding block is provided at the bottom of the fixing portion. The embedding block can be embedded in the fixing groove.

4. The graphite accessories cleaning auxiliary jig according to claim 2, characterized in that: The fixture body is a polytetrafluoroethylene component.

5. The graphite parts cleaning auxiliary jig according to claim 2, characterized in that: One side wall of the embedding groove is in an arc shape, and one side of the graphite fitting is in an arc shape.

6. The graphite parts cleaning auxiliary jig according to claim 2, characterized in that: Two sides of the embedding groove have openings.

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