A wafer grinding disc that is easy to assemble

Abstract

The utility model relates to the technical field of wafer processing equipment, and discloses a wafer grinding disc that is easy to assemble, comprising a grinding disc mounting shell, the upper side surface of the grinding disc mounting shell is fixedly connected with a grinding surface, the inner cavity of the grinding disc mounting shell is hollow and a containing recessed disc is fixedly provided on the bottom inner wall, a rotating block is movably clamped in the containing recessed disc, a connecting piece is fixedly connected to the top inner wall of the grinding disc mounting shell, a rotating groove is provided on the side of the grinding disc mounting shell, and also includes a locking device, which is arranged above the corresponding rotating block in the inner cavity of the grinding disc mounting shell, and a fixing device, which is arranged on the side of the grinding disc mounting shell. The device effectively improves the stability and efficiency of the grinding process through the innovative design of the locking and fixing devices, and at the same time simplifies the installation and disassembly steps, thereby improving the work efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing equipment, in particular to a wafer grinding disc which is easy to assemble. Background Art

[0002] In the semiconductor field, a wafer is a round silicon chip used to manufacture integrated circuits. Its raw material is silicon, which is formed into a single-crystal silicon rod after the steps of dissolving high-purity polycrystalline silicon, adding silicon crystal seeds, and pulling. The single-crystal silicon rod is then processed through grinding, polishing, slicing and other processes to finally be made into a silicon wafer, i.e., a wafer. In the semiconductor manufacturing process, wafer grinding is one of the key process steps, which is used to remove impurities, oxides or uneven parts on the surface of the wafer to achieve the required surface finish and precision. As an important tool in the grinding process, the quality and performance of the wafer grinding disc directly affect the grinding effect and wafer quality.

[0003] Traditional wafer grinding discs are usually installed on grinders by screws or other mechanical means. This installation method is not only time-consuming and labor-intensive, but also difficult to operate. It is also easy to damage the grinding disc and the grinder during disassembly. For this reason, we propose a wafer grinding disc that is easy to assemble. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a wafer grinding disc that is easy to assemble, thereby solving the above-mentioned problems.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a wafer grinding disc that is easy to assemble, comprising a grinding disc mounting shell, the upper side of the grinding disc mounting shell is fixedly connected to a grinding surface, the inner cavity of the grinding disc mounting shell is hollow and a holding concave disc is fixed to the bottom inner wall, a rotating block is movably connected in the holding concave disc, a connecting piece is fixedly connected to the top inner wall of the grinding disc mounting shell, and a rotating groove is opened on the side of the grinding disc mounting shell, and also includes:

[0006] A locking device, which is arranged above the corresponding rotating block in the inner cavity of the grinding disc mounting housing and is used to connect the device to the grinding machine;

[0007] The fixing device is arranged on the side of the grinding disc mounting shell and is used to fix the locking device.

[0008] Preferably, a rotating connection block is fixedly connected to the side of the rotating block, the rotating connection block is movably inserted in the rotating groove and extends to the outer end, and a through hole is opened on the side of the rotating connection block.

[0009] Preferably, the fixing device includes a fixed mounting block, a threaded rod, a rotating connecting block and a rotating nut, and fixed mounting blocks are fixedly connected to both ends of the rotating groove corresponding to the side of the grinding disc mounting shell, and a threaded rod is fixedly connected between the two fixed mounting blocks, and the threaded rod is movably inserted in the through hole of the rotating connecting block, and two rotating nuts are threadedly connected to both ends of the threaded rod corresponding to the rotating connecting block.

[0010] Preferably, the locking device includes a limit block, a limit groove and a limit through hole. The upper surface of the rotating block is in contact with the limit block. The side of the limit block is provided with a plurality of limit grooves arranged equidistantly in a ring shape, and the top inner walls of the plurality of limit grooves are provided with limit through holes.

[0011] Preferably, the locking device also includes an arc-shaped push groove, a locking plug block and a sliding column. A plurality of arc-shaped push grooves equidistantly arranged in a ring shape are opened on the upper surface of the rotating block. Sliding columns are movably inserted in the plurality of arc-shaped push grooves. A locking plug block is movably connected to the plurality of sliding columns. The lower surface of the locking plug block is tightly attached to the upper surface of the rotating block, and the upper end of the sliding column is movably clamped in the limiting groove.

[0012] Preferably, the numbers of the arc-shaped pushing grooves, locking plugs and limiting grooves are the same, and a plurality of the locking plugs are movably inserted in the limiting grooves.

[0013] Preferably, a connecting piece is fixedly connected to the upper surface of the limit block, and the lower surfaces of the containing recessed plate, rotating block, limit block, connecting piece and grinding disc mounting shell are all provided with concentric circular through grooves of equal size, the arc-shaped push groove is arc-shaped, and the ends of the plurality of locking plug blocks away from the inner wall of the grinding disc mounting shell are raised rough surfaces.

[0014] Compared with the prior art, the utility model provides a wafer grinding disc that is easy to assemble and has the following beneficial effects:

[0015] 1. This easy-to-assemble wafer grinding disc cooperates with the grinding machine through a turntable clamping device to achieve quick installation. Compared with traditional screw fixing or other mechanical methods, it shortens the installation time and improves production efficiency. No special tools are required during the installation process, which reduces the difficulty of operation and makes the installation process easier. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the disassembled structure of the fixing device of the utility model;

[0018] Figure 3 This is a schematic diagram of the locking plug and the sliding column of the utility model;

[0019] Figure 4 It is a schematic diagram of the limit block of the utility model.

[0020] In the figure: 1. grinding disc mounting shell; 2. grinding surface; 3. holding concave disc; 4. rotating block; 5. limiting block; 6. connecting piece; 7. rotating groove; 8. fixed mounting block; 9. threaded rod; 10. rotating connecting block; 11. rotating nut; 12. arc-shaped pushing groove; 13. limiting groove; 14. limiting through hole; 15. locking plug block; 16. sliding column; 17. locking device; 18. fixing device. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-4 , a wafer grinding disc that is easy to assemble, comprising a grinding disc mounting shell 1, a grinding surface 2 is fixedly connected to the upper side of the grinding disc mounting shell 1, the inner cavity of the grinding disc mounting shell 1 is hollow and a receiving concave disc 3 is fixed to the inner wall of the bottom side, a rotating block 4 is movably connected in the receiving concave disc 3, a connecting piece 6 is fixedly connected to the inner wall of the top side of the grinding disc mounting shell 1, and a rotating groove 7 is opened on the side of the grinding disc mounting shell 1, and also includes:

[0023] A locking device 17, which is arranged above the corresponding rotating block 4 in the inner cavity of the grinding disc mounting housing 1, and is used to connect the device to the grinding machine;

[0024] The fixing device 18 is arranged on the side of the grinding disc mounting housing 1 and is used to fix the locking device 17 .

[0025] Furthermore, a rotating connection block 10 is fixedly connected to the side of the rotating block 4 , and the rotating connection block 10 is movably inserted in the rotating groove 7 and extends to the outer end. A through hole is opened on the side of the rotating connection block 10 .

[0026] Furthermore, the fixing device 18 includes a fixed mounting block 8, a threaded rod 9, a rotating connecting block 10 and a rotating nut 11. The fixed mounting blocks 8 are fixedly connected to both ends of the rotating groove 7 corresponding to the side of the grinding disc mounting shell 1, and a threaded rod 9 is fixedly connected between the two fixed mounting blocks 8. The threaded rod 9 is movably inserted in the through hole of the rotating connecting block 10, and two rotating nuts 11 are threadedly connected to the two ends of the threaded rod 9 corresponding to the rotating connecting block 10.

[0027] Furthermore, the locking device 17 includes a limit block 5, a limit groove 13 and a limit through hole 14. The upper surface of the rotating block 4 is attached to the limit block 5. The side of the limit block 5 is provided with a plurality of limit grooves 13 arranged equidistantly in a ring shape, and the top inner walls of the plurality of limit grooves 13 are provided with limit through holes 14.

[0028] Furthermore, the locking device 17 also includes an arc-shaped push groove 12, a locking plug block 15 and a sliding column 16. A plurality of arc-shaped push grooves 12 equidistantly arranged in a ring shape are provided on the upper surface of the rotating block 4. The sliding columns 16 are movably inserted in the plurality of arc-shaped push grooves 12. The locking plug blocks 15 are movably connected to the plurality of sliding columns 16. The lower surface of the locking plug block 15 is tightly attached to the upper surface of the rotating block 4. The upper end of the sliding column 16 is movably clamped in the limiting groove 13.

[0029] Furthermore, the number of the arc-shaped pushing grooves 12 , the locking plugs 15 and the limiting grooves 13 are the same, and the plurality of locking plugs 15 are movably inserted in the limiting grooves 13 .

[0030] Furthermore, the upper surface of the limit block 5 is fixedly connected with a connecting piece 6, and the lower surface of the concave plate 3, the rotating block 4, the limit block 5, the connecting piece 6 and the grinding disc mounting shell 1 are all provided with equal-sized concentric circular through grooves, the arc-shaped push groove 12 is arc-shaped, and the end of the multiple locking plug blocks 15 away from the inner wall of the grinding disc mounting shell 1 is a raised rough surface.

[0031] Working principle: When the device needs to be installed, first insert the circular through groove on the lower surface of the grinding disc mounting shell 1 into the rotating main shaft of the grinder, and then rotate the two rotating nuts 11 on the threaded rod 9 at the same time, so that the two rotating nuts 11 move on the threaded rod 9, thereby driving the rotating connecting block 10 to move. Since the rotating connecting block 10 is fixedly connected to the rotating block 4, the rotating block 4 will be driven to rotate in the containing recessed disk 3 when the rotating connecting block 10 moves. When the rotating block 4 rotates, the inner wall of the multiple arc-shaped push grooves 12 on the upper surface of the rotating block 4 will decompress the lower end of the sliding column 16 inserted therein, so that the sliding column 16 moves from one end of the inner wall of the arc-shaped push groove 12 close to the grinding disc mounting shell 1 to the other end. The movement of the sliding column 16 drives the locking plug 15 to move toward the inner circle together, so that The ends of the multiple locking blocks 15 away from the inner wall of the grinding disc mounting shell 1 are retracted inward and clamp the rotating spindle of the grinder. During the movement of the locking block 15, the limiting grooves 13 limit the locking block 15 on both sides and the upper end of the sliding column 16 moves along the limiting through hole 14, which makes the locking block 15 more stable during the movement and will not shift or rotate. After the multiple locking blocks 15 clamp the rotating spindle of the grinder, the wafer can be ground through the grinding surface 2. During the entire grinding process, the operator can adjust the locking device 17 and the fixing device 18 as needed to ensure the stability and effect of the grinding. After the grinding is completed, the fixing effect of the locking device 17 and the fixing device 18 can be released by rotating the rotating nut 11 in the opposite direction, and the grinding disc can be removed from the grinder.

[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer grinding disc that is easy to assemble, comprising a grinding disc mounting housing (1), characterized in that: The upper side of the grinding disc mounting shell (1) is fixedly connected to a grinding surface (2); the inner cavity of the grinding disc mounting shell (1) is hollow and a receiving recessed disk (3) is fixedly connected to the inner wall of the bottom side; a rotating block (4) is movably engaged in the receiving recessed disk (3); a connecting piece (6) is fixedly connected to the inner wall of the top side of the grinding disc mounting shell (1); a rotating groove (7) is provided on the side of the grinding disc mounting shell (1); and further comprising: A locking device (17) is arranged above the corresponding rotating block (4) in the inner cavity of the grinding disc mounting housing (1) and is used to connect the device to the grinding machine; A fixing device (18) is arranged on a side of the grinding disc mounting housing (1) and is used to fix the locking device (17).

2. The wafer grinding disc that is easy to assemble according to claim 1, characterized in that: A rotating connection block (10) is fixedly connected to the side of the rotating block (4); the rotating connection block (10) is movably inserted in the rotating groove (7) and extends to the outer end; a through hole is provided on the side of the rotating connection block (10).

3. The wafer grinding disc that is easy to assemble according to claim 1, characterized in that: The fixing device (18) comprises a fixed mounting block (8), a threaded rod (9), a rotating connection block (10) and a rotating nut (11); the fixed mounting blocks (8) are fixedly connected at both ends of the rotating groove (7) corresponding to the side surface of the grinding disc mounting shell (1); a threaded rod (9) is fixedly connected between the two fixed mounting blocks (8); the threaded rod (9) is movably inserted into the through hole of the rotating connection block (10); and two rotating nuts (11) are threadedly connected at both ends of the threaded rod (9) corresponding to the rotating connection block (10).

4. The wafer grinding disc that is easy to assemble according to claim 1, characterized in that: The locking device (17) comprises a limit block (5), a limit groove (13) and a limit through hole (14); the upper surface of the rotating block (4) is in contact with the limit block (5); a plurality of limit grooves (13) arranged in an annular shape and at equal intervals are formed on the side surface of the limit block (5); and the limit through holes (14) are formed on the top inner walls of the plurality of limit grooves (13).

5. The wafer grinding disc that is easy to assemble according to claim 4, characterized in that: The locking device (17) further comprises an arc-shaped push groove (12), a locking plug block (15) and a sliding column (16); a plurality of annular arc-shaped push grooves (12) are provided on the upper surface of the rotating block (4) at equal intervals; a plurality of sliding columns (16) are movably inserted into the plurality of arc-shaped push grooves (12); a plurality of locking plug blocks (15) are movably connected to the plurality of sliding columns (16); a lower surface of the locking plug block (15) is in close contact with the upper surface of the rotating block (4); and an upper end of the sliding column (16) is movably engaged in the limiting groove (13).

6. The wafer grinding disc that is easy to assemble according to claim 5, characterized in that: The numbers of the arc-shaped pushing grooves (12), locking plug blocks (15) and limiting grooves (13) are all the same, and a plurality of the locking plug blocks (15) are all movably inserted into the limiting grooves (13).

7. The wafer grinding disc that is easy to assemble according to claim 5, characterized in that: The upper surface of the limit block (5) is fixedly connected to a connecting piece (6); the lower surfaces of the containing recessed disc (3), the rotating block (4), the limit block (5), the connecting piece (6) and the grinding disc mounting shell (1) are all provided with concentric circular through grooves of equal size; the arc-shaped pushing groove (12) is arc-shaped; and the ends of the plurality of locking plug blocks (15) away from the inner wall of the grinding disc mounting shell (1) are convex rough surfaces.

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