An expandable liquid supply tank

Abstract

The utility model discloses an expandable liquid supply tank, comprising a liquid supply tank, wherein a sealing ring is fixedly mounted on the upper end of the inner wall of the liquid supply tank, a sub-tank is plugged into the inner wall of the sealing ring, one side of the sub-tank is connected to the liquid supply tank through a limiting structure, and the other side of the sub-tank is connected to the liquid supply tank through an adjusting structure. The liquid supply tank stores solution, and through the function of the sub-tank, the space in the tank can be adjusted according to production needs, thereby adjusting the volume in the tank. Through the function of the sealing ring, the airtightness of the connection between the liquid supply tank and the sub-tank is ensured, and the use effect of the equipment is ensured. Through the function of the adjusting structure, the up and down displacement of the sub-tank is conveniently adjusted, thereby adjusting the overall volume in the tank. Through the function of the limiting structure, it is ensured that the sub-tank maintains a fixed trajectory movement when displacing, thereby ensuring the stability of the equipment during adjustment. The adjustment is convenient and the practicability is strong.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid supply tanks for silicon powder precipitation, in particular to an expandable liquid supply tank. Background Art

[0002] Silicon wafers, also known as wafers, are important raw materials for manufacturing chips and various semiconductor devices. In the production of semiconductor device silicon wafers, as the equipment continues to be used, the silicon powder content in the liquid supply tank will increase. Excessive silicon powder content will affect product quality. Therefore, it is necessary to transform and expand the liquid supply tank to increase the height, diameter or volume of the liquid supply tank to increase the sedimentation area and time, so as to reduce the silicon powder content, so that it can effectively improve the cleanliness and surface quality of the silicon wafers after cutting, and improve product quality. Utility Model Content

[0003] The purpose of the utility model is to provide an expandable liquid supply tank to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an expandable liquid supply tank, comprising a liquid supply tank, a sealing ring fixedly mounted on the upper end of the inner wall of the liquid supply tank, a sub-tank inserted into the inner wall of the sealing ring, one side of the sub-tank is connected to the liquid supply tank through a limiting structure, and the other side of the sub-tank is connected to the liquid supply tank through an adjusting structure.

[0005] Preferably, the adjustment structure includes a support plate, which is fixedly mounted on the side wall of the auxiliary tank. The side wall of the liquid supply tank is fixedly mounted with two brackets, and the inner walls of the two brackets are fixedly mounted with a first hydraulic cylinder, and the upper end of the piston rod of the first hydraulic cylinder is connected to the support plate.

[0006] Preferably, the limiting structure includes a connecting plate, which is fixedly assembled on the side wall of the auxiliary tank, and a sliding rod is fixedly assembled on the lower end of the connecting plate. The side wall of the liquid supply tank is fixedly assembled with a support tube, and the sliding rod is inserted into the inner wall of the support tube, and the sliding rod cooperates with the internal clearance of the support tube.

[0007] Preferably, an auxiliary structure is also included, which includes a hollow cylinder, which is fixedly connected to the side wall of the liquid supply tank, and the inner wall of the hollow cylinder is fixedly equipped with a second hydraulic cylinder, and the end of the piston rod of the second hydraulic cylinder is fixedly equipped with a push plate, and the push plate fits tightly to the inner wall of the hollow cylinder.

[0008] Preferably, a base is fixedly mounted on the lower end of the liquid supply tank.

[0009] Compared with the prior art, the utility model has the following beneficial effects: the solution is stored in the liquid supply tank, and the space in the tank can be adjusted according to production requirements through the function of the auxiliary tank, thereby adjusting the volume in the tank; the sealing ring ensures the airtightness of the connection between the liquid supply tank and the auxiliary tank, thereby ensuring the use effect of the equipment; the adjustment structure facilitates the adjustment of the up and down displacement of the auxiliary tank, thereby adjusting the overall volume in the tank; the limiting structure ensures that the auxiliary tank maintains a fixed trajectory when displacing, thereby ensuring the stability of the equipment during adjustment; the adjustment is convenient and practical; the auxiliary structure can expand the volume of the tank to a greater extent, and the base ensures the stability of the liquid supply tank;

[0010] The utility model provides an expandable liquid supply tank. By increasing the capacity of the liquid supply tank, the silicon powder content in the liquid can be diluted without changing other production conditions, thereby reducing the overall impurity concentration. Reducing the silicon powder content helps to reduce the impact on the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional schematic diagram of the structure of the utility model;

[0012] Figure 2 It is a planar cross-sectional view of the utility model;

[0013] Figure 3 It is a three-dimensional schematic diagram of the adjustment structure;

[0014] Figure 4 for Figure 2 A schematic diagram of the enlarged structure in the middle.

[0015] In the figure: 1-liquid supply tank, 2-limiting structure, 21-connecting plate, 22-support cylinder, 23-slide rod, 3-sealing ring, 4-auxiliary tank, 5-adjusting structure, 51-support plate, 52-bracket, 53-first hydraulic cylinder, 6-auxiliary structure, 61-hollow cylinder, 62-second hydraulic cylinder, 63-push plate, 7-base. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] See also Figure 1-4The utility model provides an expandable liquid supply tank, including a liquid supply tank 1, a sealing ring 3 is fixedly mounted on the upper end of the inner wall of the liquid supply tank 1, a sub-tank 4 is inserted into the inner wall of the sealing ring 3, one side of the sub-tank 4 is connected to the liquid supply tank 1 through a limiting structure 2, and the other side of the sub-tank 4 is connected to the liquid supply tank 1 through an adjusting structure 5.

[0018] The solution is stored in the liquid supply tank 1, and the auxiliary tank 4 can be used to adjust the space in the tank according to production needs, thereby adjusting the volume in the tank. The sealing ring 3 ensures the airtightness of the connection between the liquid supply tank 1 and the auxiliary tank 4, thereby ensuring the use effect of the equipment. The adjustment structure 5 facilitates the adjustment of the up and down displacement of the auxiliary tank 4, thereby adjusting the overall volume in the tank. The limiting structure 2 ensures that the auxiliary tank 4 maintains a fixed trajectory when displacing, thereby ensuring the stability of the equipment during adjustment. The adjustment is convenient and the practicability is strong.

[0019] The adjustment structure 5 includes a support plate 51, which is fixedly mounted on the side wall of the auxiliary tank 4. Two brackets 52 are fixedly mounted on the side wall of the liquid supply tank 1. The inner walls of the two brackets 52 are fixedly mounted with a first hydraulic cylinder 53. The upper end of the piston rod of the first hydraulic cylinder 53 is connected to the support plate 51.

[0020] When the adjustment structure 5 needs to be used, first open the first hydraulic cylinder 53, control the piston rod to move upward, thereby pushing the support plate 51 to move upward, and the support plate 51 will drive the auxiliary tank 4 to move against the inner wall of the sealing ring 3. At this time, the space between the liquid supply tank 1 and the auxiliary tank 4 is increased, and the adjustment is completed. The bracket 52 ensures the stability of the operation of the first hydraulic cylinder 53.

[0021] The limiting structure 2 includes a connecting plate 21, which is fixedly assembled on the side wall of the auxiliary tank 4. A sliding rod 23 is fixedly assembled on the lower end of the connecting plate 21. A support tube 22 is fixedly assembled on the side wall of the liquid supply tank 1. The sliding rod 23 is inserted into the inner wall of the support tube 22, and the internal clearance of the sliding rod 23 and the support tube 22 are matched.

[0022] When the auxiliary tank 4 is displaced, the sliding rod 23 can be driven to displace by the connecting plate 21, and the sliding rod 23 can be closely attached to the inner wall of the support tube 22 to maintain a fixed trajectory, thereby limiting the displacement trajectory of the sliding rod 23, thereby limiting the displacement trajectory of the auxiliary tank 4 through the connecting plate 21, and at the same time, the displacement of the auxiliary tank 4 against the inner wall of the sealing ring 3 is also limited, thereby ensuring the stability of the adjustment of the auxiliary tank 4.

[0023] It also includes an auxiliary structure 6, which includes a hollow cylinder 61. The hollow cylinder 61 is fixedly connected to the side wall of the liquid supply tank 1. The inner wall of the hollow cylinder 61 is fixedly equipped with a second hydraulic cylinder 62. The end of the piston rod of the second hydraulic cylinder 62 is fixedly equipped with a push plate 63. The push plate 63 fits tightly against the inner wall of the hollow cylinder 61.

[0024] Through the action of the auxiliary structure 6, the internal volume of the tank can be further expanded. When necessary, the second hydraulic cylinder 62 can be opened and the piston rod can be adjusted to retract. At this time, the push plate 63 can be driven to move in the direction of the second hydraulic cylinder 62 to increase the inner wall space of the hollow tube 61, thereby adjusting the overall internal space of the tank.

[0025] A base 7 is fixedly mounted on the lower end of the liquid supply tank 1 .

[0026] The stability of the liquid supply tank is ensured by the base.

[0027] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An expandable liquid supply tank, characterized in that: The invention comprises a liquid supply tank (1), wherein a sealing ring (3) is fixedly mounted on the upper end of the inner wall of the liquid supply tank (1), a sub-tank (4) is inserted into the inner wall of the sealing ring (3), one side of the sub-tank (4) is connected to the liquid supply tank (1) via a limiting structure (2), and the other side of the sub-tank (4) is connected to the liquid supply tank (1) via an adjusting structure (5).

2. The expandable liquid supply tank according to claim 1, characterized in that: The regulating structure (5) comprises a support plate (51), wherein the support plate (51) is fixedly mounted on the side wall of the auxiliary tank (4), and two brackets (52) are fixedly mounted on the side wall of the liquid supply tank (1), and a first hydraulic cylinder (53) is fixedly mounted on the inner walls of the two brackets (52), and the upper end of the piston rod of the first hydraulic cylinder (53) is connected to the support plate (51).

3. The expandable liquid supply tank according to claim 1, characterized in that: The limiting structure (2) comprises a connecting plate (21), the connecting plate (21) is fixedly mounted on the side wall of the auxiliary tank (4), a sliding rod (23) is fixedly mounted on the lower end of the connecting plate (21), a supporting tube (22) is fixedly mounted on the side wall of the liquid supply tank (1), the sliding rod (23) is inserted into the inner wall of the supporting tube (22), and the sliding rod (23) is matched with the internal clearance of the supporting tube (22).

4. The expandable liquid supply tank according to claim 1, characterized in that: The auxiliary structure (6) further comprises a hollow cylinder (61), wherein the hollow cylinder (61) is fixedly connected to the side wall of the liquid supply tank (1), a second hydraulic cylinder (62) is fixedly mounted on the inner wall of the hollow cylinder (61), a push plate (63) is fixedly mounted on the end of the piston rod of the second hydraulic cylinder (62), and the push plate (63) is tightly fitted to the inner wall of the hollow cylinder (61).

5. The expandable liquid supply tank according to claim 1, characterized in that: The lower end of the liquid supply tank (1) is fixedly mounted with a base (7).

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