A loader for a double-cycle CVD continuous process device

Abstract

The utility model relates to a feeder for a dual-cycle CVD continuous process device, including a feeder, which is composed of a chuck, an inflation bag, an end sealing flange and a movable base, as well as a double-layer two-dimensional movable guide rail. The end sealing flange of the feeder is sealed and connected to the exchange cabin. The chuck is a tubular structure with closed ends, and a plurality of long strip through holes are evenly distributed on its tube wall. The inflation bag is placed in the inner cavity of the chuck, and a protruding strip is provided on the outer surface of the inflation bag, and the protruding strip can pass through the corresponding long strip through hole on the chuck. The utility model uses a tubular chuck with closed ends, and a built-in inflation bag with evenly distributed key-shaped protruding strips that can expand under the action of air pressure to achieve rapid internal support type clamping and loading and unloading of tubular materials. The chuck combination is sealed and connected to the exchange cabin with a quick-opening sealing flange, etc., to complete the quick clamping and loading and unloading of tubular materials in such cabins. The movable base can be used for the plane movement of materials.

Description

Technical Field

[0001] The utility model relates to a CVD process technology, in particular to a feeder for a double-circulation CVD continuous process device. Background Art

[0002] In the past, CVD process equipment adopted intermittent working mode. The production process had to be interrupted for each loading and unloading of products, and the sealed door of the production chamber had to be opened and closed repeatedly. Due to the large area of ​​the sealed door, its sealing and reliability were difficult to ensure under repeated opening and closing. During each interruption, a series of operations such as sealing inspection and gas replacement had to be repeated, which was time-consuming, labor-intensive, inefficient, and energy-intensive.

[0003] A novel dual-circulation CVD continuous process device adopts dual-circulation connection for production, so that the loading and unloading operations can be carried out sequentially without destroying the working environment of the production warehouse. The loader described in the utility model is one of the key equipment that must be equipped in the dual-circulation system, and is used to realize the convenient clamping and loading and unloading operations of materials during the transfer of products between the production warehouse and the exchange cabin. Utility Model Content

[0004] The utility model aims to provide a material loader for a double-circulation CVD continuous process device, which is used to solve the problem that the existing CVD process device is inconvenient to clamp and load and unload materials in an exchange chamber.

[0005] In order to solve the above problems, the utility model provides a loader for a dual-cycle CVD continuous process device, including a loader, wherein the loader is composed of a chuck, an inflation bag, an end sealing flange and a movable base, and a double-layer two-dimensional movable guide rail.

[0006] The double-cycle CVD continuous process device feeder provided by the utility model also has the following technical features:

[0007] Furthermore, the end sealing flange of the loader is sealed and connected to the exchange cabin.

[0008] Furthermore, the chuck is a tubular structure with closed ends, and a plurality of long strip-shaped through holes are evenly distributed on the tube wall.

[0009] Furthermore, the inflatable bag is placed in the inner cavity of the chuck, and a protruding strip is provided on the outer surface of the inflatable bag. The protruding strip can pass through the corresponding long strip through hole on the chuck, and the height of the protruding strip is slightly greater than the thickness of the tube wall of the chuck.

[0010] Furthermore, the clamp and the inflation bag are assembled and mounted on the end of the end sealing flange fixed on the movable base.

[0011] Furthermore, the end sealing flange is used to dock with the exchange chamber flange, and the movable base is used to clamp the material and move between the loading and unloading stations along the two-dimensional movable guide rail.

[0012] The utility model has the following beneficial effects: the utility model uses a tubular chuck with closed ends, and has built-in evenly distributed inflation bags with key-shaped protruding strips that can expand under the action of air pressure, so as to realize rapid internal support type clamping and loading and unloading of tubular materials. The chuck combination is sealed and connected to the exchange cabin with a quick-opening sealing flange to complete the rapid clamping and loading and unloading of tubular materials in such cabins, and the use of a mobile machine base can be used for the plane movement of materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A plan view of an embodiment of the utility model;

[0014] Figure 2 It is a schematic diagram of the structure of the inflatable bag in the embodiment of the utility model;

[0015] Figure 3 It is a schematic diagram of the structure of the chuck in the embodiment of the utility model. DETAILED DESCRIPTION

[0016] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments. It should be noted that the embodiments and features in the embodiments of the present invention can be combined with each other without conflict.

[0017] like Figures 1 to 3 In the embodiment of the loader for the dual-cycle CVD continuous process device of the utility model shown, the loader for the dual-cycle CVD continuous process device includes a loader, which is composed of a chuck 1, an inflation bag 2, an end sealing flange 3 and a movable base 4, and a double-layer two-dimensional movable guide rail 7.

[0018] In one embodiment of the present application, preferably, the loader end sealing flange 3 is sealedly connected to the exchange chamber 6 .

[0019] In one embodiment of the present application, preferably, the chuck 1 is a tubular structure with closed ends, and a plurality of long strip-shaped through holes 101 are evenly distributed on the tube wall 102 thereof.

[0020] In one embodiment of the present application, preferably, the inflation bag 2 is placed in the inner cavity of the chuck 1, and a key-shaped protruding strip 201 is provided on the outer surface of the inflation bag 2. A plurality of long strip through holes 101 correspond one to one to the plurality of protruding strips 201. The protruding strips 201 can pass through the corresponding long strip through holes 101 on the chuck 1. The height of the protruding strips 201 is slightly larger than the tube wall thickness of the chuck 1. When the inflation bag 2 is inflated at a constant pressure, each key-shaped protruding strip 201 protrudes to achieve internal support and clamping of the material tube whose inner diameter is slightly larger than the outer diameter of the chuck shell 1, which is used for loading and unloading operations of tube materials.

[0021] In one embodiment of the present application, preferably, the chuck 1 and the inflation bag 2 are combined and mounted on the end of a coaxial end sealing flange 3 fixed on the mobile base 4, the end sealing flange 3 is a quick-opening end face sealing flange, which can be sealed and connected to the exchange cabin 6, the chuck 1 combination is fixed on the mobile base 4 together with the end sealing flange 3, the mobile base 4 is a two-dimensional moving mechanism on a plane, and a double-layer guide rail 7 is provided on the lower side of the mobile base 4, and the mobile base 4 moves between the loading and unloading stations along the double-layer guide rail 7, which includes a longitudinal guide rail 701 and a transverse guide rail 702.

[0022] In one embodiment of the present application, preferably, the end sealing flange 3 is used to dock with the flange of the exchange chamber 6, and the movable base 4 is used to clamp the material and move along the two-dimensional movable guide rail 7 between the loading and unloading stations.

[0023] An inflation interface through hole 303 of the inflatable bag 2 is provided at the end sealing flange 3 at the tail end of the chuck 1; a mounting groove 301 and an inflation nozzle opening 302 are provided at the end face of the end sealing flange 3, an inflation sealing ring is provided in the mounting groove 301, and the inflation nozzle of the inflation sealing ring is placed in the inflation nozzle opening 302.

[0024] The utility model comprises a tubular chuck 1 with closed ends, and an inflatable bag 2 with evenly distributed key-shaped protruding strips that can expand under the action of air pressure, so as to realize the rapid internal support type clamping and loading and unloading of tubular materials. The chuck 1 is combined with a quick-opening sealing flange to be sealed and connected to the exchange cabin 6, so as to complete the rapid clamping and loading and unloading of tubular materials in such cabin. At the same time, in order to ensure the sealing and rapid opening and closing of the exchange cabin 6, an inflatable adaptive sealing ring is arranged at the connecting surface of the end sealing flange 3. When the mobile machine base 4 is used for the plane movement of the material, the inflatable bag is filled with constant pressure gas, the protruding strips expand, and support the inner wall of the tube core of the material to be clamped, so as to realize the clamping; after the inflatable bag is depressurized, the protruding strips retract, and the clamped material is released.

[0025] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A loader for a dual-cycle CVD continuous process device, comprising a loader, characterized in that: The feeder is composed of a chuck (1), an inflation bag (2), an end sealing flange (3), a movable base (4), and a double-layer two-dimensional movable guide rail (7). The end sealing flange (3) of the feeder is sealedly connected to the exchange chamber (6). The chuck (1) is a tubular structure with closed ends. A plurality of long strip through holes (101) are evenly distributed on its tube wall (102). The inflation bag (2) is placed in the inner cavity of the chuck (1). A protruding strip (201) is provided on the outer surface of the inflation bag (2). The protruding strip (201) can pass through the corresponding long strip through hole (101) on the chuck (1). The height of the protruding strip (201) is slightly greater than the thickness of the tube wall of the chuck (1). The chuck (1) and the inflation bag (2) are assembled and mounted on the end of the end sealing flange (3) fixed on the movable base (4).

2. The double-cycle CVD continuous process device loader according to claim 1, characterized in that: The end sealing flange (3) is used to dock with the flange of the exchange chamber (6), and the movable base (4) is used to clamp the material and move along the two-dimensional movable guide rail (7) between the loading and unloading stations.

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