A clamping arm transfer module

Abstract

The utility model provides a clamping arm transfer module, which relates to the field of semiconductor technology. The clamping arm transfer module includes a clamping jaw assembly for clamping a gold wire box, the clamping jaw assembly includes a first clamping jaw; a second clamping jaw, located below the first clamping jaw, and the second clamping jaw is configured to be movable relative to the first clamping jaw in a vertical direction; a first driving member, used to drive the second clamping jaw to move vertically, and the first driving member is used to drive the second clamping jaw to move to a height where its top surface fits with the bottom surface of the cover body when the clamping jaw assembly is in a first preset position, so that the second clamping jaw and the first clamping jaw jointly clamp the cover body of the gold wire box, and the bottom surface of the first clamping jaw is located at the top of the cover body when the clamping jaw assembly is in the first preset position. The second clamping jaw and the first clamping jaw of the utility model jointly clamp the cover body of the gold wire box, so that the clamping jaw assembly can simultaneously apply clamping force to the gold wire box in the horizontal direction and the vertical direction, thereby improving the stability of the clamping arm transfer module when clamping objects.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a clamping arm transfer module. Background Art

[0002] In the semiconductor manufacturing process, gold wire boxes are important tools for storing gold wires and need to be transported between different process steps. Gold wires are prone to oxidation, so gold wire boxes that store gold wires usually need to be stored in sealed nitrogen cabinets. However, gold wire boxes cannot be transported manually in nitrogen cabinets that lack oxygen. And because the gold wire boxes contain precious gold wires, if an accident occurs during transportation, such as falling or collision, the gold wires may be damaged or lost, causing economic losses to the company.

[0003] In the prior art, the clamping assembly usually only includes two clamping parts, that is, the clamping assembly can only apply force in the horizontal direction when clamping the object, and cannot ensure that the clamping assembly clamps the object in the vertical direction, so it is impossible to avoid the situation where the clamping assembly clamps too loosely or too tightly, causing the object to shift in the vertical direction and fall. That is, the traditional clamping assembly cannot ensure the clamping stability of the gold wire box.

[0004] Therefore, it is urgent to design a transfer module with high clamping stability for the stable transfer of the gold wire box. Utility Model Content

[0005] One purpose of the utility model is to provide a clamping arm transfer module to solve the technical problem of low stability of the clamping claw assembly of the clamping arm transfer module in the prior art.

[0006] Another purpose of the utility model is to improve the transportation convenience of the clamping arm transportation module.

[0007] According to the purpose of the utility model, the utility model provides a clamping arm transfer module for transferring a gold wire box, wherein the gold wire box comprises a main body and a cover body located on the top of the main body, wherein the cover body protrudes from the outer surface of the side wall of the main body, and the clamping arm transfer module comprises a clamping claw assembly for clamping the gold wire box, wherein the clamping claw assembly comprises:

[0008] First gripper;

[0009] A second clamping jaw is located below the first clamping jaw, the second clamping jaw is in a U-shaped structure, and the second clamping jaw is configured to be movable relative to the first clamping jaw in a vertical direction;

[0010] The first driving member is used to drive the second jaw to move vertically. The first driving member is used to drive the second jaw to move to a height where its top surface is in contact with the bottom surface of the cover body when the jaw assembly is in the first preset position, so that the second jaw and the first jaw can jointly clamp the cover body of the gold wire box. When the jaw assembly is in the first preset position, the bottom surface of the first jaw is located on the top of the cover body.

[0011] Optionally, the first clamping jaw comprises:

[0012] Two protruding parts, the two protruding parts respectively correspond to the cover body located on two opposite sides of the main body.

[0013] Optionally, the second clamping jaw comprises:

[0014] Two clamping parts, the two clamping parts are symmetrically arranged, and each clamping part is correspondingly arranged with one of the extending parts;

[0015] The clamping part extends in a horizontal direction and is configured to be clamped with the main body of the gold wire box.

[0016] Optionally, the clamping jaw assembly further includes a rotating arm having one end fixedly connected to the first clamping jaw, and the other end of the rotating arm is provided with a rotating shaft extending vertically, and the clamping arm transfer module further includes:

[0017] A supporting structure, provided with a vertically arranged supporting hole, wherein the supporting hole is used to pass the rotating shaft;

[0018] The second driving member is used to drive the rotating shaft to rotate.

[0019] Optionally, the clamping arm transfer module further includes:

[0020] a first guide rail extending along a first horizontal direction;

[0021] The second guide rail extends along a second horizontal direction perpendicular to the first horizontal direction, and the second guide rail is configured to move along the extension direction of the first guide rail, and the support structure is configured to be movable relative to the second guide rail.

[0022] Optionally, the clamping arm transfer module further includes:

[0023] A vertical guide rail extends in a vertical direction, the vertical guide rail is connected to the second guide rail, and the second guide rail is configured to be movable along an extension direction of the vertical guide rail.

[0024] Optionally, the vertical guide rail further includes a first track portion extending in a vertical direction, and the second guide rail further includes:

[0025] The first sliding block is arranged along the vertical direction, and the first sliding block is arranged to cooperate with the first track portion so that the second guide rail moves along the extension direction of the vertical guide rail.

[0026] Optionally, the second guide rail further includes:

[0027] A second rail portion extending along an extension direction of the second guide rail;

[0028] A second sliding block is provided at the bottom of the supporting structure, and the second sliding block cooperates with the second track portion to enable the transfer mechanism to move along the extension direction of the second guide rail.

[0029] Optionally, the first driving member is a cylinder.

[0030] The clamping jaw assembly of the clamping arm transfer module of the utility model is configured to include a first clamping jaw and a second clamping jaw arranged in an upper and lower direction, the first clamping jaw is located on the top of the gold wire box cover, and the second clamping jaw is located on the side wall of the gold wire box main body, and the first driving member is configured to drive the second clamping jaw to move upward along the side wall of the main body until the top surface of the second clamping jaw is in contact with the bottom surface of the cover, so that the second clamping jaw and the first clamping jaw jointly clamp the cover of the gold wire box, that is, the side surface of the second clamping jaw clamps the side wall of the gold wire box in the horizontal direction, and at the same time, the top surface of the second clamping jaw cooperates with the first clamping jaw to clamp the cover of the gold wire box in the vertical direction, so that the clamping jaw assembly can apply clamping force to the gold wire box in two directions at the same time when clamping the gold wire box, thereby improving the stability of the clamping arm transfer module when clamping objects.

[0031] Furthermore, the clamping arm transfer module of the utility model further comprises a first guide rail and a second guide rail, the first guide rail extends along a first horizontal direction, the second guide rail extends along a second horizontal direction perpendicular to the first horizontal direction, and the second guide rail is configured to move along the extension direction of the first guide rail, and the support structure is configured to be movable relative to the second guide rail. The gold wire box clamped by the clamping jaw assembly can move along the first horizontal direction and the second horizontal direction with the support structure, thereby improving the flexibility of the transfer angle of the clamping jaw assembly and improving the transfer convenience of the clamping arm transfer module.

[0032] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0034] Figure 1 is a schematic structural diagram of a clamping arm transfer module according to an embodiment of the utility model;

[0035] Figure 2 yes Figure 1 A schematic partial enlarged view of point A shown;

[0036] Figure 3 is a schematic side view of a clamping arm transfer module according to an embodiment of the utility model;

[0037] Figure 4 is a schematic side view of a clamping arm transfer module according to an embodiment of the utility model from another angle;

[0038] Figure 5 yes Figure 4 A schematic partial enlarged view of point B is shown.

[0039] Reference numerals:

[0040] 100-clamping arm transfer module, 200-gold wire box, 210-main body, 220-cover body, 10-clamping jaw assembly, 11-first clamping jaw, 12-second clamping jaw, 13-first driving member, 111-extending portion, 121-clamping portion, 122-engaging portion, 14-rotating arm, 141-rotating shaft, 20-supporting structure, 21-supporting hole, 22-second slider, 30-second driving member, 40-first guide rail, 50-second guide rail, 51-first slider, 52-second rail portion, 60-vertical guide rail, 61-first rail portion. DETAILED DESCRIPTION

[0041] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0042] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. It is to be understood that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some structures related to the present application are shown in the accompanying drawings, rather than all structures. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0043] The terms "including" and "having" and any variations thereof in this application are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products or devices.

[0044] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0045] Figure 1 is a schematic structural diagram of a clamping arm transfer module according to an embodiment of the utility model. Figure 2 yes Figure 1 A schematic partial enlarged diagram of point A shown, Figure 3 is a schematic side view of a clamping arm transfer module according to an embodiment of the utility model, Figure 4 is a schematic side view of a clamping arm transfer module according to an embodiment of the utility model from another angle, Figure 5 yes Figure 4 A schematic partial enlarged view of point B is shown.

[0046] like Figure 4 As shown, one embodiment of the utility model provides a clamping arm transfer module 100, which is used to transfer a gold wire box 200. The gold wire box 200 includes a main body 210 and a cover 220 located on the top of the main body 210, and the cover 220 protrudes from the outer surface of the side wall of the main body 210. The clamping arm transfer module 100 includes a clamping jaw assembly 10 for clamping the gold wire box 200, and the clamping jaw assembly 10 includes a first clamping jaw 11, a second clamping jaw 12 and a first driving member 13.

[0047] like Figure 2 As shown, the second jaw 12 is located below the first jaw 11, the second jaw 12 is a U-shaped structure, and the second jaw 12 is configured to be movable in the vertical direction relative to the first jaw 11, the first driving member 13 is used to drive the second jaw 12 to move vertically, and the first driving member 13 is used to drive the second jaw 12 to move to a height where its top surface is in contact with the bottom surface of the cover body 220 when the jaw assembly 10 is in the first preset position, so that the second jaw 12 and the first jaw 11 jointly clamp the cover body 220 of the gold wire box 200, and the bottom surface of the first jaw 11 is located on the top of the cover body 220 when the jaw assembly 10 is in the first preset position.

[0048] In this embodiment, the first preset position is that the first clamping jaw 11 is located at the top of the cover 220 of the gold wire, the second clamping jaw 12 is located at the side wall of the main body 210 of the gold wire box 200, and the second clamping jaw 12 is spaced a preset distance from the side wall of the main body 210. Here, the main body 210 of the gold wire box 200 can be a regular hexahedral structure, and the main body 210 of the gold wire box 200 can also be a structure whose side wall gradually expands upward, that is, the top surface size of the main body 210 can be the same as the bottom surface size, and the top surface size of the main body 210 can also be larger than the bottom surface size of the main body 210.

[0049] In this embodiment, the clamping jaw assembly 10 of the clamping arm transfer module 100 is configured to include a first clamping jaw 11 and a second clamping jaw 12 arranged up and down, the first clamping jaw 11 is located on the top of the cover 220 of the gold wire box 200, and the second clamping jaw 12 is located on the side wall of the main body 210 of the gold wire box 200, and the first driving member 13 is configured to drive the second clamping jaw 12 to move upward along the side wall of the main body 210 until the top surface of the second clamping jaw 12 is in contact with the bottom surface of the cover 220, so that the second clamping jaw 12 is in contact with the bottom surface of the cover 220. The claw 12 and the first clamping jaw 11 jointly clamp the cover 220 of the gold wire box 200, that is, the side surface of the second clamping jaw 12 clamps the side wall of the gold wire box 200 in the horizontal direction, and at the same time, the top surface of the second clamping jaw 12 cooperates with the first clamping jaw 11 to clamp the cover 220 of the gold wire box 200 in the vertical direction, so that the clamping jaw assembly 10 can apply clamping force to the gold wire box 200 in two directions at the same time when clamping the gold wire box 200, thereby improving the stability of the clamping arm transfer module 100 when clamping objects.

[0050] In a further embodiment, the first clamping jaw 11 includes two protruding portions 111, and the two protruding portions 111 correspond to the cover body 220 located on opposite sides of the main body 210. In this embodiment, the protruding portions 111 are in a strip-shaped structure, and the two protruding portions 111 are symmetrically arranged. The two protruding portions 111 are arranged on the top of the wire box 200 and abut against the cover body 220 of the wire box 200, so that when the top surface of the second clamping jaw 12 abuts against the bottom surface of the cover body 220, the protruding portion 111 of the first clamping jaw 11 and the top surface of the second clamping jaw 12 jointly clamp the cover body 220 of the wire box 200, thereby improving the clamping stability of the clamping assembly. In other embodiments, the two protruding portions 111 of the first clamping jaw 11 can also be a plate-shaped structure.

[0051] In a further embodiment, the second clamping jaw 12 includes two clamping portions 121 and a clamping portion 122, the two clamping portions 121 are symmetrically arranged, and each clamping portion 121 is correspondingly arranged to an extension portion 111, the clamping portion 122 extends in a horizontal direction, and the clamping portion 122 is configured to clamp with the main body 210 of the gold wire box 200. In this embodiment, the two clamping portions 121 are symmetrically distributed at both ends of the engaging portion 122. When in the first preset position, the engaging portion 122 and the two clamping portions 121 jointly clamp the main body 210 of the gold wire box 200 to pre-fix the gold wire box 200. When the first driving member 13 drives the second clamping jaw 12 to move until the top surface of the clamping portion 121 is in contact with the bottom surface of the cover body 220, the side surface of the clamping portion 121 and the engaging portion 122 abut against the side wall of the main body 210, so that the clamping jaw assembly 10 can fix the clamping assembly box in the horizontal direction and the vertical direction at the same time, thereby improving the clamping stability of the clamping jaw assembly 10.

[0052] In this embodiment, the clamping portion 121 is a vertical plate-like structure, that is, the side dimension of the clamping portion 121 is larger than the top dimension of the clamping portion 121, and the top width of the clamping portion 121 is the same as the bottom width of the protruding portion 111 of the first clamping jaw 11, so as to improve the clamping stability when the clamping portion 121 and the protruding portion 111 jointly clamp the metal and the cover body 220. The side dimension of the clamping portion 121 is larger to increase the contact area between the clamping portion 121 and the side wall of the main body 210 of the gold wire box 200.

[0053] like Figure 2 As shown, in a further embodiment, the clamping jaw assembly 10 also includes a rotating arm 14 having one end fixedly connected to the first clamping jaw 11, and the other end of the rotating arm 14 is provided with a rotating shaft 141 extending vertically, and the clamping arm transfer module 100 also includes a supporting structure 20 and a second driving member 30, the supporting structure 20 is provided with a vertically arranged supporting hole 21, the supporting hole 21 is used to pass the rotating shaft 141, and the second driving member 30 is used to drive the rotating shaft 141 to rotate. In this embodiment, the first clamp 11 and the second clamp 12 are fixedly installed at one end of the rotating arm 14, and the end of the rotating arm 14 away from the first clamp 11 is fixedly connected with a rotating shaft 141, the rotating shaft 141 is penetrated into the supporting hole 21 of the supporting structure 20, and the rotating shaft 141 is configured to be rotated by the second driving member 30 in the supporting structure 20, that is, the second driving member 30 can drive the rotating shaft 141 and the rotating arm 14 to rotate, and at the same time drive the first clamp 11 and the second clamp 12 to rotate, so that the clamp assembly 10 can clamp the gold wire box 200 and then be driven by the second driving member 30 to transfer it to the target shelf, thereby improving the flexibility of the transfer angle of the clamp assembly 10.

[0054] like Figure 1As shown, in a further embodiment, the clamping arm transfer module 100 further includes a first guide rail 40 and a second guide rail 50, the first guide rail 40 extends along a first horizontal direction, the second guide rail 50 extends along a second horizontal direction perpendicular to the first horizontal direction, and the second guide rail 50 is configured to move along the extension direction of the first guide rail 40, and the support structure 20 is configured to be movable relative to the second guide rail 50. In this embodiment, the first guide rail 40 and the second guide rail 50 are both configured to extend along a horizontal direction, and the first guide rail 40 is perpendicular to the second guide rail 50, the second guide rail 50 is configured to move along the extension direction of the first guide rail 40, and the support structure 20 is configured to be movable relative to the second guide rail 50, that is, the support structure 20 can extend along the second horizontal direction in the extension direction of the second guide rail 50, and at the same time, the support structure 20 can move along the extension direction of the first guide rail 40 with the second guide rail 50, that is, the support structure 20 can move along the first horizontal direction. That is to say, the gold wire box 200 clamped by the clamping jaw assembly 10 can move in the first horizontal direction and the second horizontal direction along with the supporting structure 20. At the same time, the clamping jaw assembly 10 can rotate under the drive of the second driving member 30, thereby improving the flexibility of the transportation angle of the clamping jaw assembly 10 and improving the transportation convenience of the clamping arm transportation module 100.

[0055] In a further embodiment, the clamping arm transfer module 100 further includes a vertical guide rail 60, which extends in the vertical direction, is connected to the second guide rail 50, and the second guide rail 50 is configured to be movable along the extension direction of the vertical guide rail 60. In this embodiment, the vertical guide rail 60 extends in the vertical direction, is connected to the second guide rail 50, and the support structure 20 is connected to the second guide rail 50, that is, the clamping jaw assembly 10 can move in the vertical direction along the vertical guide rail 60 with the second guide rail 50 to adjust the transfer height of the clamping jaw assembly 10.

[0056] like Figure 5 As shown, in a further embodiment, the vertical guide rail 60 further includes a first rail portion 61 extending in the vertical direction, and the second guide rail 50 further includes a first slider 51, which is arranged in the vertical direction, and is arranged to cooperate with the first rail portion 61, so that the second guide rail 50 moves along the extension direction of the vertical guide rail 60. In this embodiment, the first slider 51 is located at the bottom of the second guide rail 50, the first slider 51 extends in the vertical direction, and the first slider 51 has a first opening facing the first rail portion 61, and the first slider 51 cooperates with the first rail portion 61, so that the second rail can move along the extension direction of the vertical rail, thereby driving the clamping jaw assembly 10 to move along the second horizontal direction at different heights, so as to drive the gold wire box 200 to realize the transportation at different heights and in different directions.

[0057] In a further embodiment, the second guide rail 50 further includes a second rail portion 52, which is extended along the extension direction of the second guide rail 50, and a second slider 22 is provided at the bottom of the support structure 20, and the second slider 22 cooperates with the second rail portion 52 to move the transfer mechanism along the extension direction of the second guide rail 50. In this embodiment, the second rail portion 52 of the second guide rail 50 extends along the second horizontal direction, and the second rail portion 52 is provided on the side wall away from the first slider 51. The second slider 22 located at the bottom of the support mechanism has a second opening facing the second rail portion 52, and the second slider 22 cooperates with the second rail portion 52 to drive the support structure 20 to extend along the second horizontal direction, thereby driving the clamping jaw assembly 10 to move along the second horizontal direction.

[0058] In a further embodiment, the first driving member 13 is a cylinder. In this embodiment, the cylinder is arranged at the bottom of the second clamping jaw 12 to drive the second clamping jaw 12 to move to a height where its top surface is in contact with the bottom surface of the cover 220, so that the second clamping jaw 12 and the first clamping jaw 11 clamp the cover 220 of the wire box 200 together to clamp the wire box 200 in the vertical direction, and at the same time, the clamping portion 121 and the clamping portion 122 of the second clamping jaw 12 clamp the side wall of the main body 210 of the wire box 200 to clamp the wire box 200 in the horizontal direction, so that the clamping assembly clamps the wire box 200 in the horizontal and vertical directions at the same time, thereby improving the clamping stability of the clamping arm transfer module 100.

[0059] The clamping assembly of the clamping arm transfer module 100 in this embodiment can drive the clamping jaw assembly 10 to clamp the gold wire box 200 in the horizontal direction and the vertical direction by using the first clamping jaw 11, the second clamping jaw 12 and the first driving member 13, thereby improving the clamping stability of the clamping arm transfer module 100. In addition, the clamping arm transfer module 100 also includes a first guide rail 40 and a second guide rail 50, and the support structure 20 is configured to move relative to the second guide rail 50, so that the support structure 20 can drive the clamping jaw assembly 10 to move in the first horizontal direction and the second horizontal direction, thereby improving the transportation convenience of the clamping arm transfer module 100.

[0060] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] The above embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A clamping arm transfer module for transferring a gold wire box, the gold wire box comprising a main body and a cover located on the top of the main body, the cover protruding from the outer surface of the side wall of the main body, characterized in that: The clamping arm transfer module includes a clamping claw assembly for clamping the gold wire box, and the clamping claw assembly includes: First gripper; A second clamping jaw is located below the first clamping jaw, the second clamping jaw is in a U-shaped structure, and the second clamping jaw is configured to be movable relative to the first clamping jaw in a vertical direction; The first driving member is used to drive the second jaw to move vertically. The first driving member is used to drive the second jaw to move to a height where its top surface is in contact with the bottom surface of the cover body when the jaw assembly is in the first preset position, so that the second jaw and the first jaw can jointly clamp the cover body of the gold wire box. When the jaw assembly is in the first preset position, the bottom surface of the first jaw is located on the top of the cover body.

2. The clamping arm transfer module according to claim 1, characterized in that: The first clamping jaw comprises: Two protruding parts, the two protruding parts respectively correspond to the cover body located on two opposite sides of the main body.

3. The clamping arm transfer module according to claim 2, characterized in that: The second clamping jaw comprises: Two clamping parts, the two clamping parts are symmetrically arranged, and each clamping part is correspondingly arranged with one of the extending parts; The clamping part extends in a horizontal direction and is configured to be clamped with the main body of the gold wire box.

4. The clamping arm transfer module according to claim 3, characterized in that: The clamping jaw assembly further includes a rotating arm having one end fixedly connected to the first clamping jaw, and the other end of the rotating arm is provided with a rotating shaft extending vertically, and the clamping arm transfer module further includes: A supporting structure, provided with a vertically arranged supporting hole, wherein the supporting hole is used to pass the rotating shaft; The second driving member is used to drive the rotating shaft to rotate.

5. The clamping arm transfer module according to claim 4, characterized in that: The clamping arm transfer module also includes: a first guide rail extending along a first horizontal direction; The second guide rail extends along a second horizontal direction perpendicular to the first horizontal direction, and the second guide rail is configured to move along the extension direction of the first guide rail, and the support structure is configured to be movable relative to the second guide rail.

6. The clamping arm transfer module according to claim 5, characterized in that: The clamping arm transfer module also includes: A vertical guide rail extends in a vertical direction, the vertical guide rail is connected to the second guide rail, and the second guide rail is configured to be movable along an extension direction of the vertical guide rail.

7. The clamping arm transfer module according to claim 6, characterized in that: The vertical guide rail further includes a first track portion extending in a vertical direction, and the second guide rail further includes: The first sliding block is arranged along the vertical direction, and the first sliding block is arranged to cooperate with the first track portion so that the second guide rail moves along the extension direction of the vertical guide rail.

8. The clamping arm transfer module according to claim 7, characterized in that: The second guide rail further comprises: A second rail portion extending along an extension direction of the second guide rail; A second sliding block is disposed at the bottom of the supporting structure, and the second sliding block cooperates with the second track portion to enable the supporting structure to move along the extension direction of the second guide rail.

9. The clamping arm transfer module according to any one of claims 1 to 8, characterized in that: The first driving member is a cylinder.

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