A gear rotating clamp device for automatically transporting FOUP boxes

Abstract

The utility model discloses a gear rotating clamping claw device for automatically transporting FOUP boxes, comprising a sealed anti-corrosion box, a rotating connecting rod symmetrically penetrated at one end of the sealed anti-corrosion box, a clamping connecting plate installed at one end of the rotating connecting rod, a stabilizing plate arranged at one side of the clamping connecting plate at one end of the rotating connecting rod, a clamping assembly installed at the bottom of the clamping connecting plate, a rotating gear installed on the rotating connecting rod at the inner side of the sealed anti-corrosion box; through the structure of the sealed transport, a rotating mechanism is adopted, and the gear is driven to rotate by a cylinder to realize the rotation of the clamping claw shaft, and the rotating connecting rod is sealed by a sealing ring mechanism, which solves the problems of unstable wafer transport of FOUP boxes and short service life of the mechanism, and at the same time, the gear is driven to rotate by the cylinder, and the clamping claw arm rotates synchronously to clamp the product, so that the structure can be used in a closed space, thereby improving the service life of the device and the practicability of the device.

Description

Technical Field

[0001] The utility model belongs to the technical field of rotating clamps, and in particular relates to a gear rotating clamp device for automatically transporting FOUP boxes. Background Art

[0002] In the semiconductor manufacturing and packaging industry, a FOUP is a container used to store and transport semiconductor wafers. These wafers are key components in the manufacture of integrated circuits (ICs) such as microprocessors, memory and other electronic components. Handling FOUP boxes is a common operation in semiconductor manufacturing plants, involving the precise and safe handling of wafer transport boxes (FOUPs). In modern semiconductor manufacturing environments, the use of FOUPs has become a standardized practice to ensure efficient, safe and clean handling of wafers during the manufacturing process.

[0003] The patent with application number 202221805378.5 discloses a FOUP automatic handling equipment. Through multiple lifting mechanisms, the conveyor line can be designed at a high place, and a channel can be made under the conveyor line or other production equipment can be placed, which greatly saves the occupied space; it can avoid the vibration of the wafer box caused by sudden stop during the transmission process, which causes damage to the wafer; combined with the above application and compared with the existing handling device, in the semiconductor manufacturing process, the wafer needs to go through various different processes, so it will be transported between multiple devices, and the handling claws are generally parallel moving claws. When the parallel moving claws are used for handling, the handling environment generally has acid and alkaline gases, and the mechanism cannot be sealed, which affects the practicability and service life of the handling device. For this reason, we propose a gear rotating claw device for automatically handling FOUP boxes. Utility Model Content

[0004] The purpose of the utility model is to provide a gear rotating clamp device for automatically transporting FOUP boxes, so as to solve the problem raised in the above background technology that in the semiconductor manufacturing process, the wafer needs to undergo various processes, so it will be transported between multiple devices, and the transport clamps are generally parallel moving clamps. When the parallel moving clamps are transported, the transport environment generally has acid and alkaline gases, and the mechanism cannot be sealed, thereby affecting the practicability and service life of the transport device.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a gear rotating claw device for automatically transporting FOUP boxes, comprising a closed anti-corrosion box, a rotating connecting rod is symmetrically installed through one end of the closed anti-corrosion box, a clamping plate is installed at one end of the rotating connecting rod, a stabilizing plate is provided on one side of the clamping plate at one end of the rotating connecting rod, a clamping assembly is installed at the bottom of the clamping plate, a rotating gear is installed on the rotating connecting rod on the inner side of the closed anti-corrosion box, a rotating seat is installed on the inner side of the closed anti-corrosion box, a rotating pushing cylinder is installed on the top of one side of the rotating seat, a pushing connecting rod is installed at the bottom of the rotating pushing cylinder, and a bar-shaped lifting tooth plate is installed at the bottom of the pushing connecting rod.

[0006] Preferably, a rotating gear is provided on each of the two rotating connecting rods, and the two rotating connecting rods are meshed and assembled with the edge of the bar-shaped lifting gear plate through the rotating gear.

[0007] Preferably, a rubber sealing pad for sealing is provided at the penetration point between the rotating connecting rod and the sealed anti-corrosion box.

[0008] Preferably, the clamping assembly includes an adjustable jaw, a telescopic connecting rod is provided at the bottom of the adjustable jaw, the telescopic connecting rod is telescopically installed in the adjustable jaw, a displacement motor is installed on one side of the clamping plate, a movable groove is opened at the inner bottom of the clamping plate, a threaded rod is installed in the movable groove and at one end of the displacement motor, and a stabilizing rod is installed at the bottom of the threaded rod.

[0009] Preferably, a threaded hole and a limiting through hole are adjacently formed at one end of the adjustable clamping jaw.

[0010] Preferably, the threaded rod passes through the adjustable jaws through the threaded hole, and the adjustable jaws are driven to move toward each other by the threaded rod. At the same time, when the adjustable jaws are displaced, the stabilizing rod passes through the limiting through hole so that the adjustable jaws can move stably in the moving groove.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] (1) The sealed handling structure is provided with a rotating mechanism, and the cylinder is used to drive the gear to rotate, thereby realizing the rotation of the clamping claw shaft. The rotating connecting rod is sealed by the sealing ring mechanism, which solves the problem of unstable FOUP box wafer handling and short mechanism service life. At the same time, the cylinder drives the gear to rotate, and the clamping claw arm rotates synchronously to clamp the product, so that the structure can be used in a closed space, thereby increasing the service life of the device and improving the practicality of the device.

[0013] (2) When the device is in use, if the sizes of the FOUP boxes for placing wafers are different, the adjustable clamping jaws can be used for adaptive adjustment. By adjusting the length of the adjustable clamping jaws, different types of FOUP boxes can be clamped and fixed, thereby increasing the clamping range and ensuring stability during the clamping process, thereby improving the functionality and scope of application of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic diagram of the cross-sectional structure of the closed anti-corrosion box of the utility model;

[0016] Figure 3 This is a schematic diagram of the installation structure of the adjustable clamping jaw of the utility model;

[0017] In the figure: 100, closed anti-corrosion box; 101, rotating connecting rod; 102, clamping connecting plate; 103, stabilizing plate; 200, rotating seat; 201, rotating pushing cylinder; 202, bar lifting gear plate; 203, rotating gear; 204, pushing connecting rod; 300, adjustable clamping claw; 301, telescopic connecting rod; 302, displacement motor; 303, threaded rod; 304, stabilizing rod; 305, threaded hole; 306, limit through hole. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Example 1

[0020] See also Figure 1 , Figure 2 and Figure 3The utility model provides a technical solution: a FOUP box handling claw is a special tool for automatically handling a FOUP box. As an important tool in the semiconductor manufacturing and packaging industry, a FOUP box is used to store and transport semiconductor wafers. Therefore, the FOUP box handling claw plays an important role in semiconductor production lines, logistics systems and warehouse management. A gear rotating claw device for automatically handling a FOUP box includes a sealed anti-corrosion box 100, one end of which is symmetrically penetrated by a rotating connecting rod 101, and the rotating connecting rod 101 is symmetrically penetrated by a rotating connecting rod 101. 1 is fixedly installed with a clamping connecting plate 102 at one end, and the clamping connecting plate 102 and the rotating connecting rod 101 can rotate synchronously. One end of the rotating connecting rod 101 is located on one side of the clamping connecting plate 102 and a stabilizing plate 103 is provided. The stabilizing plate 103 ensures the stability of the rotating connecting rod 101 during operation to prevent it from shaking and being unstable. A clamping assembly is installed at the bottom of the clamping connecting plate 102. A rotating gear 203 is installed on the inner side of the sealed anti-corrosion box 100 on the rotating connecting rod 101. A rotating seat 200 is installed on the inner side of the sealed anti-corrosion box 100. One side of the rotating seat 200 A rotary push cylinder 201 is installed on the top of the side, a push connecting rod 204 is installed on the bottom of the rotary push cylinder 201, and a strip lifting tooth plate 202 is installed on the bottom of the push connecting rod 204. When the clamp in the application is used to transport the FOUP box, a rotary clamping method is set, and one end of the rotary connecting rod 101 of the rotary mechanism is placed in the closed anti-corrosion box 100, and the connection between the closed anti-corrosion box 100 and the rotary connecting rod 101 is sealed by a sealing ring, thereby ensuring the internal sealing of the closed anti-corrosion box 100 to avoid acidic gas during transportation. The corrosion rotating mechanism, when working, the rotating pushing cylinder 201 installed on the rotating seat 200 inside the closed anti-corrosion box 100 works, and the bar-shaped lifting gear plate 202 is pushed up and down by pushing the connecting rod 204. The two ends of the bar-shaped lifting gear plate 202 are meshed with the rotating gear 203, thereby driving the rotating gear 203 to rotate. When the rotating gear 203 rotates, it drives the rotating connecting rod 101 to rotate synchronously. The rotating rotating connecting rod 101 is clamped and transported by the clamping connecting plate 102 at the other end and the adjustable clamping claw 300, which improves the transportation and improves the use time of the device.

[0021] Specifically, the two rotating connecting rods 101 are each provided with a rotating gear 203, and the two rotating connecting rods 101 are meshed and assembled with the edges of the bar-shaped lifting gear plate 202 through the rotating gear 203. The meshed assembly rotation method ensures stable rotation while better controlling the rotation accuracy. A rubber sealing pad for sealing is initially provided at the penetration between the rotating connecting rod 101 and the sealed anti-corrosion box 100 to improve the sealing performance of the sealed anti-corrosion box 100 and increase the service life.

[0022] Example 2

[0023] See also Figure 1 and Figure 3The utility model provides a technical solution: a gear rotating clamping device for automatically transporting FOUP boxes, the clamping assembly includes an adjustable clamping jaw 300, a telescopic connecting rod 301 is arranged at the bottom of the adjustable clamping jaw 300, the telescopic connecting rod 301 is telescopically installed in the adjustable clamping jaw 300, a displacement motor 302 is fixedly installed on one side of the clamping connecting plate 102, a moving groove is opened at the inner bottom of the clamping connecting plate 102, a threaded rod 303 is installed in the moving groove and at one end of the displacement motor 302, and a stabilizing rod 304 is installed at the bottom of the threaded rod 303. When transporting and using, if the outer dimensions of the FOUP box are different, in order to To ensure stability during clamping and transportation, and to adapt to the size of the FOUP box, the adjustable clamping jaw 300 can also be adjusted according to the size of the FOUP box during transportation. During adjustment, the displacement motor 302 works to drive the threaded rod 303 at the bottom inner side of the clamping connecting plate 102 to rotate, and the rotating threaded rod 303 drives the adjustable clamping jaws 300 on both sides to move toward each other through the threaded hole 305, so that FOUP boxes of different sizes can be clamped for use, and when the adjustable clamping jaw 300 moves, it also maintains stability through the limiting through hole 306 and the stabilizing rod 304 that penetrates, thereby achieving more stable clamping, thereby improving the stability and practicality of the device and better clamping use.

[0024] Specifically, a threaded hole 305 and a limit hole 306 are adjacently opened at one end of the adjustable jaw 300, the threaded rod 303 penetrates the adjustable jaw 300 through the threaded hole 305, and the adjustable jaw 300 is driven to displace in opposite directions by the threaded rod 303. At the same time, when the adjustable jaw 300 is displaced, the stabilizing rod 304 penetrates the limit hole 306 so that the adjustable jaw 300 can move stably in the moving groove, thereby ensuring the stability of the adjustable jaw 300 during adjustment, better clamping, and preventing the box body from falling during the clamping process.

[0025] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A gear rotating claw device for automatically transporting FOUP boxes, characterized in that: The invention comprises a sealed anti-corrosion box (100), wherein a rotating connecting rod (101) is symmetrically installed through one end of the sealed anti-corrosion box (100), a clamping connecting plate (102) is installed on one end of the rotating connecting rod (101), a stabilizing plate (103) is provided on one side of the clamping connecting plate (102) at one end of the rotating connecting rod (101), a clamping assembly is installed at the bottom of the clamping connecting plate (102), a rotating gear (203) is installed on the rotating connecting rod (101) on the inner side of the sealed anti-corrosion box (100), a rotating seat (200) is installed on the inner side of the sealed anti-corrosion box (100), a rotating pushing cylinder (201) is installed on the top of one side of the rotating seat (200), a pushing connecting rod (204) is installed at the bottom of the rotating pushing cylinder (201), and a bar-shaped lifting tooth plate (202) is installed at the bottom of the pushing connecting rod (204).

2. A gear rotating clamping device for automatically transporting FOUP boxes according to claim 1, characterized in that: The two rotating connecting rods (101) are both provided with rotating gears (203), and the two rotating connecting rods (101) are meshed and assembled with the edges of the bar-shaped lifting gear plate (202) through the rotating gears (203).

3. The gear rotating clamping device for automatically transporting FOUP boxes according to claim 1, characterized in that: A rubber sealing pad for sealing is provided at the penetration point between the rotating connecting rod (101) and the sealed anti-corrosion box (100).

4. The gear rotating clamping device for automatically transporting FOUP boxes according to claim 1, characterized in that: The clamping assembly comprises an adjustable clamping jaw (300), a telescopic connecting rod (301) is arranged at the bottom of the adjustable clamping jaw (300), and the telescopic connecting rod (301) is telescopically installed in the adjustable clamping jaw (300), a displacement motor (302) is installed on one side of the clamping connecting plate (102), a moving groove is opened at the inner bottom of the clamping connecting plate (102), a threaded rod (303) is installed in the moving groove and at one end of the displacement motor (302), and a stabilizing rod (304) is installed at the bottom of the threaded rod (303).

5. The gear rotating clamping device for automatically transporting FOUP boxes according to claim 4, characterized in that: A threaded hole (305) and a limiting through hole (306) are adjacently formed at one end of the adjustable clamping jaw (300).

6. The gear rotating claw device for automatically transporting FOUP boxes according to claim 5, characterized in that: The threaded rod (303) passes through the adjustable clamping jaw (300) through the threaded hole (305), and the adjustable clamping jaw (300) is driven to move in opposite directions by the threaded rod (303). At the same time, when the adjustable clamping jaw (300) moves, the stabilizing rod (304) passes through the limiting through hole (306), so that the adjustable clamping jaw (300) moves stably in the moving groove.

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