A new CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry

Abstract

The utility model relates to the technical field of semiconductor ultrapure water systems, and in particular to a new CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry. The utility model comprises a CEDI membrane stack body, wherein the outer wall of the CEDI membrane stack body is provided with a connecting mechanism, and the left side of the outer wall of the CEDI membrane stack body is fixedly connected with a junction box; the connecting mechanism comprises a fresh water inlet branch pipe installed at the fresh water inlets on both sides of the CEDI membrane stack body, the outer wall of the fresh water inlet branch pipe is provided with a fresh water inlet main pipe at a position away from the CEDI membrane stack body, and fresh water outlet branches are installed at the fresh water outlets on both sides of the CEDI membrane stack body. By designing a new CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry, the connecting mechanism in the device is used to change the water flow entry direction, thereby solving the problems of complex operation of the mainstream boron removal process of the UPW system in the world today, high operation and maintenance cost and safety risk of the UPW system, and low boron removal efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor ultrapure water systems, in particular to a new CEDI device for efficiently removing boron in ultrapure water systems in the semiconductor industry. Background Art

[0002] Semiconductor-related industries are mainly divided into four major sectors: IC design, silicon wafer production, integrated circuits, and packaging and testing. However, only silicon wafer production, integrated circuits, and packaging and testing use UPW (ultrapure water). Among them, integrated circuits have the highest requirements for UPW water quality. In semiconductor Fab plants, boron is a p-type impurity. Excessive amounts will cause n-type silicon to reverse and affect the concentration of electrons and holes, thereby affecting the performance of semiconductor electronic products.

[0003] In the ultrapure water manufacturing system of the semiconductor industry, boron ions can only be removed by using RO membranes, ion exchange resins, and CEDI (continuous electrodeionization reactors). Using these three types of boron removal products, the operation of the mainstream boron removal process of the UPW system in the world today is complicated, the operation and maintenance costs and safety risks of the UPW system are high, and the boron removal efficiency is low.

[0004] Therefore, a new CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry is needed to solve the problems raised in the above background technology. Utility Model Content

[0005] The purpose of the utility model is to provide a new CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry, so as to solve the problems raised in the above-mentioned background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A new CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry, comprising a CEDI membrane stack body, an outer wall of the CEDI membrane stack body is provided with a connecting mechanism, and a junction box is fixedly connected to the left side of the outer wall of the CEDI membrane stack body;

[0008] The connecting mechanism includes a fresh water inlet branch pipe installed at the fresh water inlet on both sides of the CEDI membrane stack body, a fresh water inlet main pipe is installed on the outer wall of the fresh water inlet branch pipe and at a position away from the CEDI membrane stack body, fresh water outlet branch pipes are installed at the fresh water outlet on both sides of the CEDI membrane stack body, a fresh water outlet main pipe is installed on the outer wall of the fresh water outlet branch pipe and at a position away from the CEDI membrane stack body, a concentrated water inlet pipe is installed at the concentrated water inlet on the left side of the CEDI membrane stack body, a guide pipe is installed on the outer wall of the concentrated water inlet pipe and at a position close to the fresh water outlet main pipe, a concentrated water outlet pipe is installed at the concentrated water outlet on the left side of the CEDI membrane stack body, and a one-way valve is installed inside the guide pipe.

[0009] As a preferred solution of the utility model, the CEDI membrane stack body is a VNX55-EX-2 large-flow boron removal CEDI membrane stack.

[0010] As a preferred solution of the utility model, the fresh water inlet branch pipe, the fresh water inlet main pipe, the fresh water outlet branch pipe and the fresh water outlet main pipe are all made of PVC plastic pipes, and the fresh water inlet branch pipe and the fresh water outlet branch pipe are both L-shaped structural designs.

[0011] As a preferred solution of the utility model, the concentrate water inlet pipe, the guide pipe and the concentrate water outlet pipe are all made of PE plastic pipes, and the guide pipe penetrates the concentrate water inlet pipe and extends into the fresh water outlet main pipe.

[0012] As a preferred solution of the utility model, the one-way valve only allows the fluid to flow into the concentrated water inlet pipe along the guide pipe, and the connection mode between the guide pipe and the fresh water outlet pipe is a fixed connection.

[0013] As a preferred solution of the utility model, the fresh water outlet main pipe and the fresh water inlet main pipe are both T-shaped structural designs, and the fresh water inlet branch pipe, fresh water inlet main pipe, fresh water outlet branch pipe, fresh water outlet main pipe, concentrated water inlet pipe and concentrated water outlet pipe are all connected to the CEDI membrane stack body through PVC joints.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. In the utility model, a new CEDI device for efficient boron removal in the ultrapure water system of the semiconductor industry is designed, and the connecting mechanism in the device is used to change the water flow direction, so that the water flow in the CEDI membrane stack body is more evenly distributed, and at the same time, the downstream concentrated water inlet direction is changed to countercurrent, and then the source of concentrated water is changed from CEDI water inlet to CEDI produced water, thereby improving the boron index of CEDI produced water, reducing the operating load of boron elements on subsequent equipment, delaying the leakage time of boron elements, extending the replacement cycle of resins, reducing the operating cost of the UPW system, and reducing the risk of a decrease in the yield of Fab products due to excessive boron indicators, solving the problems of complex operation of the mainstream boron removal process of the UPW system in the world today, high operation and maintenance costs and safety risks of the UPW system, and low boron removal efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the fresh water outlet main pipe of the utility model;

[0018] Figure 3 It is a side sectional view of the flow guide tube of the utility model.

[0019] In the figure: 1. CEDI membrane stack body; 2. connecting mechanism; 3. junction box; 201. fresh water inlet branch pipe; 202. fresh water inlet main pipe; 203. fresh water outlet branch pipe; 204. fresh water outlet main pipe; 205. concentrate inlet pipe; 206. guide pipe; 207. concentrate outlet pipe; 208. one-way valve. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0021] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0022] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may also be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may also be a central element. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in this article includes any and all combinations of one or more related listed items.

[0024] For examples, see Figure 1-3 , the utility model provides a technical solution:

[0025] A new CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry comprises a CEDI membrane stack body 1, a connecting mechanism 2 is arranged on the outer wall of the CEDI membrane stack body 1, and a junction box 3 is fixedly connected to the left side of the outer wall of the CEDI membrane stack body 1;

[0026] The CEDI membrane stack body 1 is a VNX55-EX-2 high-flow boron removal CEDI membrane stack;

[0027] In this embodiment, reference Figure 1 and Figure 3 The connecting mechanism 2 comprises a fresh water inlet branch pipe 201 installed at the fresh water inlet on both sides of the CEDI membrane stack body 1, a fresh water inlet main pipe 202 is installed on the outer wall of the fresh water inlet branch pipe 201 and at a position far away from the CEDI membrane stack body 1, fresh water outlet branch pipes 203 are installed at the fresh water outlet on both sides of the CEDI membrane stack body 1, a fresh water outlet main pipe 204 is installed on the outer wall of the fresh water outlet branch pipe 203 and at a position far away from the CEDI membrane stack body 1, a concentrated water inlet pipe 205 is installed at the concentrated water inlet on the left side of the CEDI membrane stack body 1, a guide pipe 206 is installed on the outer wall of the concentrated water inlet pipe 205 and at a position close to the fresh water outlet main pipe 204, a concentrated water outlet pipe 207 is installed at the concentrated water outlet on the left side of the CEDI membrane stack body 1, and a one-way valve 208 is installed inside the guide pipe 206;

[0028] The fresh water inlet branch pipe 201, the fresh water inlet main pipe 202, the fresh water outlet branch pipe 203 and the fresh water outlet main pipe 204 are all made of PVC plastic pipes, and the fresh water inlet branch pipe 201 and the fresh water outlet branch pipe 203 are both L-shaped structural designs, the concentrate inlet pipe 205, the guide pipe 206 and the concentrate outlet pipe 207 are all made of PE plastic pipes, the guide pipe 206 runs through the concentrate inlet pipe 205 and extends into the fresh water outlet main pipe 204, the one-way valve 208 only allows the fluid to flow into the concentrate inlet pipe 205 along the guide pipe 206, the connection mode of the guide pipe 206 and the fresh water outlet main pipe 204 is a fixed connection, the fresh water outlet main pipe 204 and the fresh water inlet main pipe 202 are all T-shaped structural designs, the fresh water inlet branch pipe 201, the fresh water inlet main pipe 202, the fresh water outlet branch pipe 203, the fresh water outlet main pipe 204, the concentrate inlet pipe 205 and the concentrate outlet pipe 207 are connected to the CEDI membrane stack body 1 through a PVC joint, and fresh water is injected into the fresh water inlet main pipe 202. The fresh water flows into the fresh water inlet branch pipe 201 along the fresh water inlet main pipe 202, and enters the CEDI membrane stack body 1 along the fresh water inlet branch pipe 201. The CEDI membrane stack body 1 processes the fresh water. The treated fresh water flows out of the CEDI membrane stack body 1 through the fresh water outlet branch pipe 203, and flows into the fresh water outlet main pipe 204 along the fresh water outlet branch pipe 203. A part of the fresh water in the fresh water outlet main pipe 204 flows into the concentrate inlet pipe 205 through the guide pipe 206, and flows into the CEDI membrane stack body 1 together with the concentrate in the concentrate inlet pipe 205. The CEDI membrane stack body 1 processes the incoming concentrate, and the treated concentrate flows out through the concentrate outlet pipe 207.

[0029] Working process of the utility model: when the new CEDI device designed by the present invention is used for efficient boron removal in the ultrapure water system of the semiconductor industry, fresh water is injected into the fresh water inlet main pipe 202, and the fresh water flows into the fresh water inlet branch pipe 201 along the fresh water inlet branch pipe 201, and enters the CEDI membrane stack body 1 along the fresh water inlet branch pipe 201, the CEDI membrane stack body 1 processes the fresh water, and the treated fresh water flows out of the CEDI membrane stack body 1 through the fresh water outlet branch pipe 203, and flows into the fresh water outlet main pipe 204 along the fresh water outlet branch pipe 203, a part of the fresh water in the fresh water outlet main pipe 204 flows into the concentrated water inlet pipe 205 through the guide pipe 206, and flows into the CEDI membrane stack body 1 together with the concentrated water in the concentrated water inlet pipe 205, the CEDI membrane stack body 1 processes the entering concentrated water, and the concentrated water after treatment flows out through the concentrated water outlet pipe 207.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A novel CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry, comprising a CEDI membrane stack body (1), characterized in that: The outer wall of the CEDI membrane stack body (1) is provided with a connection mechanism (2), and the left side of the outer wall of the CEDI membrane stack body (1) is fixedly connected with a junction box (3); The connecting mechanism (2) comprises a fresh water inlet branch pipe (201) installed at the fresh water inlet on both sides of the CEDI membrane stack body (1), a fresh water inlet main pipe (202) installed on the outer wall of the fresh water inlet branch pipe (201) at a position away from the CEDI membrane stack body (1), and fresh water outlet branch pipes (203) installed at the fresh water outlet on both sides of the CEDI membrane stack body (1), and the outer wall of the fresh water outlet branch pipe (203) at a position away from the CEDI membrane stack body ( A fresh water outlet main pipe (204) is installed at the position of the CEDI membrane stack body (1), a concentrated water inlet pipe (205) is installed at the concentrated water inlet on the left side of the CEDI membrane stack body (1), a guide pipe (206) is installed on the outer wall of the concentrated water inlet pipe (205) and near the position of the fresh water outlet main pipe (204), a concentrated water outlet pipe (207) is installed at the concentrated water outlet on the left side of the CEDI membrane stack body (1), and a one-way valve (208) is installed inside the guide pipe (206).

2. A novel CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry according to claim 1, characterized in that: The CEDI membrane stack body (1) is a VNX55-EX-2 large-flow boron removal CEDI membrane stack.

3. A novel CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry according to claim 1, characterized in that: The fresh water inlet branch pipe (201), the fresh water inlet main pipe (202), the fresh water outlet branch pipe (203) and the fresh water outlet main pipe (204) are all made of PVC plastic pipes, and the fresh water inlet branch pipe (201) and the fresh water outlet branch pipe (203) are both of L-shaped structural design.

4. A novel CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry according to claim 1, characterized in that: The concentrate water inlet pipe (205), the flow guide pipe (206) and the concentrate water outlet pipe (207) are all made of PE plastic pipes. The flow guide pipe (206) penetrates the concentrate water inlet pipe (205) and extends into the fresh water outlet main pipe (204).

5. A novel CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry according to claim 1, characterized in that: The one-way valve (208) only allows the fluid to flow into the concentrated water inlet pipe (205) along the flow guide pipe (206), and the connection between the flow guide pipe (206) and the fresh water outlet main pipe (204) is a fixed connection.

6. A novel CEDI device for efficient boron removal in ultrapure water systems in the semiconductor industry according to claim 1, characterized in that: The fresh water outlet main pipe (204) and the fresh water inlet main pipe (202) are both of T-shaped structural design, and the fresh water inlet branch pipe (201), the fresh water inlet main pipe (202), the fresh water outlet branch pipe (203), the fresh water outlet main pipe (204), the concentrated water inlet pipe (205) and the concentrated water outlet pipe (207) are all connected to the CEDI membrane stack body (1) via PVC joints.

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