Tubular coating equipment

Abstract

The present application provides a tubular coating device, comprising a furnace tube, an air inlet and a gas delivery assembly. The air inlet is arranged in the furnace tube, and the air inlet has an air inlet side, and the air inlet side is provided with a plurality of air holes, and the plurality of air holes are distributed along the axial direction of the furnace tube and perpendicular to the axial direction of the furnace tube. The distribution area of ​​the plurality of air holes is greater than or equal to the coating area in the furnace tube. The gas delivery assembly is partially arranged in the furnace tube and connected to the air inlet. The plurality of air holes on the air inlet can uniformly output process gas in the axial direction of the furnace tube, realize uniform distribution of gas in the axial direction of the furnace tube, and fully improve the uniformity of the thickness of the substrate film.

Description

Technical Field

[0001] The present application relates to the technical field of solar cell manufacturing equipment, and in particular to a tubular coating equipment. Background Art

[0002] Tubular plasma enhanced chemical vapor deposition (PECVD) equipment is mainly used to deposit thin films on substrates. When the tubular PECVD equipment is in operation, multiple substrates are usually placed evenly and vertically at the RF discharge cathode of the graphite boat, and the reaction gas is introduced. The SiH4 and NH3 reaction gases are excited into a plasma state by means of glow discharge, the chemical activity of the reaction gas is enhanced, and the plasma gas undergoes a chemical reaction, thereby achieving the growth of Si3N4 thin film material on the substrate. Within the same deposition time, the thickness of the substrate film is affected by the deposition rate, and the deposition rate is closely related to the flow field distribution of the process gas in the furnace tube.

[0003] In existing tubular PECVD equipment, gas is usually introduced at the port of the furnace tube. The process gas in the furnace tube is prone to more in the front and less in the back. The flow field distribution of the process gas in the furnace tube is uneven, resulting in uneven thickness of the substrate film.

[0004] The thickness of the film directly determines the appearance and price of the final product. As users have higher and higher requirements for product quality and production capacity, the poor uniformity of substrate film thickness has become a problem that needs to be solved urgently. Utility Model Content

[0005] The present application provides a tubular coating device to solve the above-mentioned technical problems.

[0006] The embodiment of the present application is implemented as follows:

[0007] A tubular coating device comprises a furnace tube, an air inlet and a gas delivery assembly. The air inlet is arranged in the furnace tube, and has an air inlet side, and a plurality of air holes are arranged on the air inlet side, and the plurality of air holes are distributed along the axial direction of the furnace tube and perpendicular to the axial direction of the furnace tube. The distribution area of ​​the plurality of air holes is greater than or equal to the coating area in the furnace tube. The gas delivery assembly is partially arranged in the furnace tube and connected to the air inlet.

[0008] In this way, the multiple air holes on the air inlet piece can continuously output process gas in the axial direction of the furnace tube, and the distribution area of ​​the multiple air holes can cover the coating area in the furnace tube, so that the coating area can evenly receive the process gas, thereby achieving uniform distribution of gas in the axial direction of the furnace tube and fully improving the uniformity of the substrate film thickness.

[0009] In a possible implementation, an air baffle is provided at the edge of the air inlet, and the air baffle is convexly arranged on the air inlet side. The air baffle can allow the process gas output by the air inlet to flow to the coating area, thereby improving the utilization rate of the process gas and reducing the ineffective diffusion of the process gas.

[0010] In a possible implementation manner, the air inlet side is a flat plate structure, and the air baffle is arranged around the air inlet side so that the gas flowing out of the multiple air holes is concentrated to flow toward the coating area.

[0011] In a possible implementation manner: a plurality of air holes are evenly distributed on the air inlet side, so that the process gas in the air inlet member is evenly transported to various positions in the axial direction of the furnace tube, and the process gas flow field in the furnace tube is evenly distributed.

[0012] In a possible implementation, the density of the multiple pores on the gas inlet side gradually increases in the direction away from the gas delivery assembly. In this way, under the condition of constant gas pressure, the process gas flow rate output by the gas inlet component can match the length of the graphite boat, and the consistency of the process gas output flow rate is ensured by increasing the density of pores, further optimizing the uniform distribution of the process gas flow field in the furnace tube.

[0013] In a possible implementation manner: a heating element is further provided on the air inlet member, which can assist in heating the coating area, improve the problem of uneven heating of the coating area, and evenly distribute the heat field in the furnace tube.

[0014] In a possible implementation, the tubular coating device further includes a flow controller, which is configured to adjust the airflow pressure input by the gas delivery component to the gas inlet, and the airflow pressure input by the gas delivery component changes over time according to a preset rule. Different inlet pressures can have different ranges, and the airflow pressure changes over time according to a preset rule, allowing the process gas to be circulated and sprayed to different positions of the gas inlet, so that the gas can be evenly output at all locations of the gas inlet, thereby improving the distribution of the process gas flow field in the furnace tube.

[0015] In a possible implementation, the number of gas delivery components is N, N≥2, and along the axial direction of the furnace tube, multiple gas delivery components are connected to different positions of the gas inlet. In this way, different gas delivery components can input gas to different areas of the gas inlet, thereby improving the effect of uniform gas delivery.

[0016] In a possible implementation, the airflow pressure inputted by the gas delivery assembly to the air inlet increases in the direction away from the furnace port of the furnace tube. In this way, the airflow pressure inputted by the multiple gas delivery assemblies matches the length of the air inlet, thereby matching the range of the process airflow with the length of the air inlet, so that the process gas can be outputted in equal amounts at all locations of the air inlet at the same time, further making the process gas flow field in the furnace tube uniform.

[0017] In a possible implementation, the gas delivery assembly includes a first air inlet pipe, a second air inlet pipe and a third air inlet pipe, wherein the first air inlet pipe and the second air inlet pipe are arranged outside the furnace tube, one end of the third air inlet pipe is arranged outside the furnace tube and connected to the first air inlet pipe and the second air inlet pipe, and the other end of the third air inlet pipe is arranged inside the furnace tube and connected to the air inlet member. In this way, different types of process gases can be respectively input through the first air inlet pipe and the second air inlet pipe, mixed in the third air inlet pipe and then input into the air inlet member, thereby reducing the influence of uneven mixing of gases in the furnace tube on the deposition process, which is beneficial to improving the uniformity of the thickness of the substrate film.

[0018] In a possible implementation manner: the first air inlet pipe and the second air inlet pipe are respectively connected to opposite sides of the third air inlet pipe, and the first air inlet pipe and the second air inlet pipe are staggered. The diameter of the third air inlet pipe is larger than the diameter of the first air inlet pipe and the diameter of the second air inlet pipe. In this way, when different types of process gases flow into the third air inlet pipe through the first air inlet pipe and the second air inlet pipe respectively, they can impact the inner wall of the third air inlet pipe and then collide with each other, forming a vortex in the third air inlet pipe, so that different types of process gases can be mixed more evenly in the third air inlet pipe.

[0019] In a possible implementation, the gas delivery assembly further includes a flow meter and a flow valve, which are installed on the first gas inlet pipe and the second gas inlet pipe, and are electrically connected to a flow controller. In this way, the flow controller can adjust the inlet pressure according to the detection results of the flow meter and the flow valve, change the injection distance of the process gas flow, and evenly distribute the gas.

[0020] In a possible implementation: the tubular coating equipment also includes a graphite boat, which is arranged in the furnace tube, and the area where the graphite boat is located is the coating area in the furnace tube; the air inlet piece is arranged on one side of the graphite boat at intervals along a direction intersecting the axial direction of the furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 It is a schematic cross-sectional structure diagram of a tubular coating device according to an embodiment of the present application.

[0023] Figure 2 for Figure 1 Another cross-sectional structural schematic diagram of the tubular coating equipment shown.

[0024] Figure 3FIG. 4 is a schematic diagram of the cross-sectional structure of a gas delivery component in one embodiment.

[0025] Figure 4 for Figure 3 Another cross-sectional schematic diagram of the gas delivery assembly shown.

[0026] Figure 5 FIG. 4 is a schematic diagram of the structure of a gas delivery component in one embodiment.

[0027] Figure 6 It is the relationship curve of air flow pressure and time.

[0028] Figure 7 FIG. 4 is another relationship curve diagram of air flow pressure and time.

[0029] Figure 8 It is a schematic structural diagram of a tubular coating device in another embodiment.

[0030] Fig. 9 It is a curve diagram of the relationship between the air flow pressure and time of different air transmission components.

[0031] Description of main component symbols:

[0032] Tubular coating equipment 100

[0033] Furnace pipe 10

[0034] Housing 11

[0035] Insulation layer 12

[0036] Heating element 13

[0037] Quartz tube 14

[0038] Air intake 20

[0039] Intake cavity 21

[0040] Air baffle 22

[0041] Gas delivery assembly 30

[0042] First intake pipe 31

[0043] Second intake pipe 32

[0044] The third intake pipe 33

[0045] First flow meter 34

[0046] First flow valve 35

[0047] Second flow valve 36

[0048] Second flow meter 37

[0049] Graphite Boat 40

[0050] Flow Controller 50 DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0052] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may also be a centered element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may also be a centered element. When an element is considered to be "set on" another element, it may be directly set on the other element or there may also be a centered element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0053] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present application. The terms used herein in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "or / and" used herein includes any and all combinations of one or more related listed items.

[0054] Some embodiments of the present application are described in detail. In the absence of conflict, the following embodiments and features of the embodiments can be combined with each other.

[0055] See also Figure 1 and Figure 2 The present embodiment provides a tubular coating device 100 including a furnace tube 10, an air inlet 20 and a gas delivery assembly 30. The air inlet 20 is arranged in the furnace tube 10, and the air inlet 20 has an air inlet side. The air inlet side of the air inlet 20 is provided with a plurality of air holes, and the plurality of air holes are distributed along the axial direction of the furnace tube 10 and perpendicular to the axial direction of the furnace tube 10. In other words, the plurality of air holes can be distributed on the surface of the air inlet side along the length direction and the width direction of the air inlet side. The distribution area of ​​the plurality of air holes is greater than or equal to the area of ​​the coating area in the furnace tube 10. The gas delivery assembly 30 is partially arranged in the furnace tube 10 and is connected to the air inlet 20. The plurality of air holes on the air inlet 20 can continuously output process gas to the coating area in the axial direction of the furnace tube 10, so that the coating area can evenly receive the process gas, thereby realizing uniform distribution of gas in the axial direction of the furnace tube 10 and fully improving the uniformity of the thickness of the substrate film.

[0056] The tubular coating device 100 may further include a graphite boat 40 disposed in the furnace tube 10. The air inlet member 20 is disposed at one side of the graphite boat 40 at intervals along a direction intersecting the axial direction of the furnace tube 10. The air inlet side of the air inlet member 20 is disposed toward the graphite boat 40, and the area where the graphite boat 40 is located is the coating area in the furnace tube 10. In this way, the area of ​​the air inlet side is greater than or equal to the area of ​​the side of the graphite boat 40 facing the air inlet member 20, so that the air inlet member 20 can cover the graphite boat 40, so that the graphite boat 40 can uniformly receive the process gas at various locations along the axial direction of the furnace tube 10, thereby improving the uniformity of the thickness of the substrate film.

[0057] In some embodiments, the furnace tube 10 includes a shell 11, a heat preservation layer 12, a heating body 13, and a quartz tube 14, which are sequentially arranged from the outside to the inside. The reaction chamber of the furnace tube 10 is the inner cavity of the quartz tube 14, and the graphite boat 40 and the air inlet 20 are both arranged in the inner cavity of the quartz tube 14. The heating body 13 is used to heat and transfer heat to the inner cavity of the quartz tube 14 to maintain the temperature field inside the quartz tube 14. The heat preservation layer 12 and the shell 11 are used to reduce internal heat loss and protect the internal structure of the furnace tube 10.

[0058] The air inlet member 20 is generally a hollow plate-like structure, having an air inlet cavity 21, and the air inlet side is a flat plate structure at the bottom of the air inlet cavity 21. The gas delivery assembly 30 is connected to the air inlet cavity 21 to provide the process gas to the air inlet cavity 21, and the process gas then flows to the graphite boat 40 through the air holes on the air inlet side of the air inlet member 20. In the direction of gravity, the air inlet member 20 is arranged above the graphite boat 40, so that the gas flow direction can be assisted under the action of gravity, helping the process gas to flow more into the graphite boat 40, thereby improving the utilization rate of the process gas. In other embodiments, the air inlet member 20 can also be a hollow irregular shell structure, the air inlet side is a flat plate structure at the bottom of the air inlet member 20, and the side of the air inlet member 20 opposite to the air inlet side is an arc-shaped cover structure, etc., and the present application is not limited thereto.

[0059] In some embodiments, Figure 1 and Figure 2 As shown, an air baffle 22 is provided at the edge of the air inlet 20, and the air baffle 22 is convexly arranged on the air inlet side of the air inlet 20. The air baffle 22 allows the process gas output by the air inlet 20 to flow to the graphite boat 40 in a concentrated manner, thereby reducing the diffusion of the process gas to the outside and further improving the utilization rate of the process gas.

[0060] In some embodiments, the air baffle 22 is arranged around the air inlet side of the flat structure. The height of the air baffle 22 is less than or equal to the spacing distance between the air inlet 20 and the graphite boat 40, and the distance between the air baffles 22 on two opposite sides is greater than the size of the graphite boat 40. On the one hand, the space surrounded by the air baffle 22 can cover the upper area of ​​the graphite boat 40, so that all parts of the graphite boat 40 can evenly receive the process gas. On the other hand, it can reduce the collision between the air inlet 20 and the graphite boat 40 during assembly or movement, thereby improving the safety of equipment use.

[0061] In some embodiments, a plurality of air holes are evenly distributed on the air inlet side of the air inlet member 20 , so that the process gas in the air inlet member 20 is evenly transported to various positions in the axial direction of the furnace tube 10 , and the process gas flow field in the furnace tube 10 is evenly distributed.

[0062] In some embodiments, the air intake side of the air intake member 20 may be a hollow structure, and the multiple hollow holes on the hollow structure are used as air holes for conveying gas. The air intake member 20 with a hollow structure can reduce weight on the one hand, and reduce the design and processing process on the other hand, thereby reducing the manufacturing cost of the air intake member 20.

[0063] In some embodiments, the furnace tube 10 has a furnace mouth, which is an end of the furnace tube 10 that allows the graphite boat 40 to enter. Along the direction away from the gas delivery assembly 30, or in the direction away from the furnace mouth of the furnace tube 10, the density of the plurality of pores on the gas inlet side of the gas inlet member 20 gradually increases. In this way, the more pores there are on the gas inlet member 20, the more pores there are at the back. Under the condition of constant gas pressure, the flow rate of the process gas output by the gas inlet member 20 can match the length of the graphite boat 40. The consistency of the output flow rate of the process gas is ensured by increasing the density of pores, while reducing the problem of insufficient process gas in the rear section caused by the loss of process gas in the transmission distance, and further optimizing the uniform distribution of the process gas flow field in the furnace tube 10.

[0064] In some embodiments, Figure 1 and Figure 2 As shown, the graphite boat 40 is in an offset state in the furnace tube 10, the axis of the graphite boat 40 does not coincide with the axis of the furnace tube 10, and most of the structure of the graphite boat 40 is in the lower half of the inner cavity of the furnace tube 10. A heating element is also provided on the air inlet 20, which can assist in heating the graphite boat 40, improve the problem of uneven heating of the graphite boat 40, and evenly distribute the heat field in the furnace tube 10. The heating element can be, but is not limited to, a resistance wire, an electric heating plate, or other structures arranged inside or on the surface of the air inlet 20, which can assist in heating the upper end of the graphite boat 40 away from the heating body 13, so that the heating temperature of the upper and lower parts of the graphite boat 40 remains consistent.

[0065] In some embodiments, Figure 3 and Figure 4As shown, the gas delivery assembly 30 includes a first air inlet pipe 31, a second air inlet pipe 32 and a third air inlet pipe 33. The first air inlet pipe 31 and the second air inlet pipe 32 are arranged outside the furnace tube 10, one end of the third air inlet pipe 33 is arranged outside the furnace tube 10 and connected to the first air inlet pipe 31 and the second air inlet pipe 32, and the other end of the third air inlet pipe 33 is arranged inside the furnace tube 10 and connected to the air inlet member 20. Different types of process gases can be input from the first air inlet pipe 31 and the second air inlet pipe 32 respectively, mixed in the third air inlet pipe 33 and then input to the air inlet member 20, so as to reduce the influence of uneven mixing of gases in the furnace tube 10 on the deposition process, which is conducive to improving the uniformity of the thickness of the substrate film.

[0066] In some embodiments, the first air inlet pipe 31 and the second air inlet pipe 32 are respectively connected to opposite sides of the third air inlet pipe 33, and the first air inlet pipe 31 and the second air inlet pipe 32 are staggered. The diameter of the third air inlet pipe 33 is larger than the diameter of the first air inlet pipe 31 and the diameter of the second air inlet pipe 32, so that the third air inlet pipe 33 can provide sufficient mixing space, which is conducive to improving the uniformity of gas mixing. In one embodiment, the axial direction of the first air inlet pipe 31 is perpendicular to the axial direction of the third air inlet pipe 33, and the axial direction of the second air inlet pipe 32 is roughly parallel to the first air inlet pipe 31. From the axial direction of the third air inlet pipe 33, as shown in FIG. Figure 3 As shown, the first air intake pipe 31 is connected to the upper left side of the third air intake pipe 33, and the second air intake pipe 32 is connected to the lower right side of the third air intake pipe 33. The axis extension line of the first air intake pipe 31 is staggered with the axis of the third air intake pipe 33, and the axis extension line of the second air intake pipe 32 is also staggered with the axis of the third air intake pipe 33. Figure 4 As shown, in the length direction of the third air inlet pipe 33, the distance between the first air inlet pipe 31 and the end of the third air inlet pipe 33 is equal to the distance between the second air inlet pipe 32 and the end of the third air inlet pipe 33, that is, the axis of the first air inlet pipe 31 and the axis of the second air inlet pipe 32 are arranged coplanar. In this way, when different types of process gases flow into the third air inlet pipe 33 through the first air inlet pipe 31 and the second air inlet pipe 32 respectively, they can impact the inner wall of the third air inlet pipe 33 and then collide with each other, forming a vortex in the third air inlet pipe 33, so that different types of process gases can be more evenly mixed in the third air inlet pipe 33.

[0067] In other embodiments, the first intake pipe 31 and the second intake pipe 32 may also be connected to the left and right sides of the third intake pipe 33, or other relative positions, respectively. The axis extension lines of the first intake pipe 31 and the second intake pipe 32 may also be inclined relative to the axis of the third intake pipe 33, so that the gases in the first intake pipe 31 and the second intake pipe 32 can collide with each other after entering the third intake pipe 33 to generate vortices. The present application is not limited to this.

[0068] In some embodiments, Figure 5 As shown, the tubular coating equipment 100 also includes a flow controller 50. The flow controller 50 is configured to adjust the air flow pressure input from the gas delivery component 30 to the gas inlet 20, and the air flow pressure input from the gas delivery component 30 changes with time according to a preset rule. Different inlet pressures can have different ranges, and the air flow pressure changes with time according to a preset rule, so that the process gas can be circulated and sprayed to different positions of the gas inlet 20, so that the gas can be uniformly output from all parts of the gas inlet 20, and the distribution of the process gas flow field in the furnace tube 10 can be improved.

[0069] like Figure 6 As shown, the flow controller 50 can be, but is not limited to, a sinusoidal flow controller, which can control the pressure of the airflow input by the gas delivery component 30 to change according to the pressure-time sinusoidal curve. In the pressure-time sinusoidal curve, each waveform segment indicates that the pressure of the airflow input by the gas delivery component 30 first gradually increases and then gradually decreases. During this process, the process gas can be gradually ejected from the end of the gas inlet 20 close to the furnace mouth of the furnace tube 10 to the end away from the furnace mouth of the furnace tube 10, and then gradually ejected to the end close to the gas delivery component 30. The injection distance of the process gas changes regularly back and forth within a preset time range, and the gas flow rate received at each location in the length direction of the gas inlet 20 is roughly the same, so as to achieve the purpose of uniform process gas flow field in the furnace tube 10.

[0070] like Figure 7 As shown, the flow controller 50 can be, but is not limited to, a step flow controller, which can control the pressure of the airflow input by the gas delivery component 30 to change according to the pressure-time step curve. In the pressure-time step curve, the pressure of the airflow input by the gas delivery component 30 increases step by step within the same time interval, increases to the highest level, and then drops to the initial level to start again. In this process, the process gas can be injected stepwise to different areas in the length direction of the gas inlet 20, and the step injection process is repeated, so that each area in the length direction of the gas inlet 20 can regularly receive the process gas and maintain the gas uniformity in the gas inlet 20.

[0071] In some embodiments, Figure 5As shown, the gas delivery assembly 30 also includes a flow meter and a flow valve, which are installed on the first air inlet pipe 31 and the second air inlet pipe 32, and the flow meter and the flow valve are electrically connected to the flow controller 50. The flow controller 50 can adjust the intake pressure according to the detection results of the flow meter and the flow valve, change the injection distance of the process gas flow, and make the gas evenly distributed. Specifically, the flow meter includes a first flow meter 34 and a second flow meter 37, and the flow valve includes a first flow valve 35 and a second flow valve 36. The first flow meter 34 and the first flow valve 35 are installed on the first air inlet pipe 31. The first flow meter 34 is configured to detect the flow of the first air inlet pipe 31, and the first flow valve 35 is configured to adjust the flow of the first air inlet pipe 31. The second flow meter 37 and the second flow valve 36 are installed on the second air inlet pipe 32. The second flow meter 37 is configured to detect the flow of the second air inlet pipe 32, and the second flow valve 36 is configured to adjust the flow of the second air inlet pipe 32. The flow controller 50 can adjust the opening and closing amount of the first flow valve 35 and / or the second flow valve 36 according to the detection results of the first flow meter 34 and the second flow meter 37, and then adjust the intake flow in the first intake pipe 31 and / or the second intake pipe 32, so that the gas flow in the third intake pipe 33 changes, and changes the air flow pressure input from the third intake pipe 33 to the intake member 20. The first flow meter 34 and the second flow meter 37 can be, but are not limited to, mass flow meters, and the first flow valve 35 and the second flow valve 36 can be, but are not limited to, pneumatic flow valves or electromagnetic flow valves.

[0072] In some embodiments, Figure 8 As shown, the number of gas delivery components 30 is N, N ≥ 2, and along the axial direction of the furnace tube 10, multiple gas delivery components 30 are respectively connected to different positions of the gas inlet 20. In this way, different gas delivery components 30 can input gas to different areas of the gas inlet 20, thereby improving the effect of uniform gas delivery. Figure 8 In the illustrated embodiment, the number of gas delivery components 30 is three, and the three gas delivery components 30 are respectively connected to three areas in the length direction of the gas inlet 20. In other embodiments, the number of gas delivery components 30 can also be two or more than three, and the present application is not limited thereto. In some embodiments, the number of gas inlet components 20 can also be more than or equal to two, and the number of multiple gas inlet components 20 can match the number of multiple gas delivery components 30. Multiple gas inlet components 20 are arranged in sequence along the axial direction of the furnace tube 10, and multiple gas delivery components 30 are respectively connected to multiple gas inlet components 20 to even out the process gas in the multiple gas inlet components 20 and improve the process gas flow field in the furnace tube 10.

[0073] In some embodiments, the pressure of the airflow input from the gas delivery assembly 30 to the air inlet 20 increases in a direction away from the furnace opening of the furnace tube 10. In other words, the farther the connection between the gas delivery assembly 30 and the air inlet 20 is from the furnace opening of the furnace tube 10, the greater the pressure of the airflow input from the gas delivery assembly 30. Figure 8 and Fig. 9 As shown, the connection between the gas delivery component 30 and the gas inlet 20 is the gas inlet of the gas delivery component 30. The airflow pressure input by the three gas inlets is directly proportional to the distance between the air inlets and the furnace mouth of the furnace tube 10. The airflow pressure input by the first air inlet close to the furnace mouth of the furnace tube 10 is the smallest, and the airflow pressure input by the nth air inlet farthest from the furnace mouth of the furnace tube 10 is the largest. In this way, the airflow pressure input by multiple gas delivery components 30 matches the length of the gas inlet 20, thereby matching the range of the process gas flow with the length of the gas inlet 20 and the gas delivery component 30, so that the process gas can be outputted in equal amounts at all locations of the gas inlet 20 at the same time, further equalizing the process gas flow field in the furnace tube 10.

[0074] The above implementation modes are only used to illustrate the technical solutions of the present application and are not intended to limit the present application. Although the present application has been described in detail with reference to the above preferred implementation modes, a person skilled in the art should understand that the technical solutions of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. A tubular coating device, characterized in that: include: Furnace pipes; An air inlet member is arranged in the furnace tube, the air inlet member has an air inlet side, the air inlet side is provided with a plurality of air holes, the plurality of air holes are distributed along the axial direction of the furnace tube and perpendicular to the axial direction of the furnace tube; the distribution area of ​​the plurality of air holes is greater than or equal to the area of ​​the coating region in the furnace tube; A gas delivery component is partially disposed in the furnace tube and is connected to the gas inlet.

2. The tubular coating equipment according to claim 1, characterized in that: An air baffle is provided on the edge of the air inlet, and the air baffle is convexly arranged on the air inlet side.

3. The tubular coating equipment according to claim 2, characterized in that: The air intake side is a flat plate structure, and the air baffle is arranged around the air intake side.

4. The tubular coating device according to claim 1, characterized in that: The plurality of air holes are evenly distributed on the air inlet side; or Along the direction away from the gas delivery component, the density of the plurality of gas holes on the gas inlet side gradually increases.

5. The tubular coating equipment according to claim 1, characterized in that: The air inlet component is also provided with a heating component; and / or the tubular coating equipment also includes a flow controller, which is configured to adjust the air flow pressure input by the air delivery component to the air inlet component, and the air flow pressure input by the air delivery component changes with time according to a preset rule.

6. The tubular coating equipment according to claim 1, characterized in that: The number of the gas delivery components is N, where N≥2, and along the axial direction of the furnace tube, the plurality of gas delivery components are respectively connected to different positions of the gas inlet member.

7. The tubular coating device according to claim 6, characterized in that: Along the direction away from the furnace opening of the furnace tube, the pressure of the air flow input by the gas delivery component to the air inlet member increases.

8. The tubular coating device according to claim 5, characterized in that: The gas delivery assembly includes a first air inlet pipe, a second air inlet pipe and a third air inlet pipe, the first air inlet pipe and the second air inlet pipe are arranged outside the furnace pipe, one end of the third air inlet pipe is arranged outside the furnace pipe and connected to the first air inlet pipe and the second air inlet pipe, and the other end of the third air inlet pipe is arranged inside the furnace pipe and connected to the air inlet member.

9. The tubular coating device according to claim 8, characterized in that: The first air intake pipe and the second air intake pipe are respectively connected to opposite sides of the third air intake pipe, and the first air intake pipe and the second air intake pipe are staggered; the diameter of the third air intake pipe is larger than the diameter of the first air intake pipe and the diameter of the second air intake pipe; or The gas delivery assembly further includes a flow meter and a flow valve, wherein the flow meter and the flow valve are installed on the first air inlet pipe and the second air inlet pipe, and the flow meter and the flow valve are electrically connected to the flow controller.

10. The tubular coating equipment according to any one of claims 1 to 9, characterized in that: include: A graphite boat, wherein the graphite boat is arranged in the furnace tube, and the area where the graphite boat is located is the coating area in the furnace tube; The air inlet member is arranged at a distance from one side of the graphite boat along a direction intersecting the axial direction of the furnace tube.

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