A PECVD source cabinet with quartz tube entering and exiting from the tail

Abstract

The utility model discloses a PECVD source cabinet for entering and exiting a quartz tube from the tail, comprising a cabinet, the top of the cabinet is connected to a bridge frame to realize the cable lead-out inside the cabinet, the two opposite sides of the cabinet are respectively connected to the external pipeline and the furnace cabinet, and the side of the cabinet is provided with a pipeline fixing device to realize the communication between the internal pipeline in the cabinet and the external pipeline outside the cabinet; inside the cabinet, multiple internal pipelines are arranged in a vertical direction, and the internal pipelines are connected to the corresponding tail flanges through flange elbows, and the tail flange is connected to the tail of the furnace cabinet; when the quartz tube enters and exits the furnace cabinet, the flange elbow and the tail flange are removed to realize the quartz tube entering and exiting the furnace cabinet through the cabinet. The utility model has the characteristics of compact structure, convenient disassembly and assembly, high space utilization, etc., solves the problem that the existing PECVD equipment cannot exit the quartz tube from the tail and the source cabinet has a narrow installation and maintenance space, and improves the production efficiency of the PECVD equipment.

Description

Technical Field

[0001] The utility model relates to the technical field of PECVD equipment, in particular to a PECVD source cabinet with a quartz tube entering and exiting from the tail. Background Art

[0002] In existing PECVD (plasma enhanced chemical vapor deposition) equipment, quartz tubes are mainly installed from the side of the clean bench. When replacing the quartz tube, the cache rack, manipulator, and boat pusher mechanism need to be removed, which is very labor-intensive and inefficient. In addition, the source cabinet space is relatively narrow, which makes it inconvenient to install components such as the tail flange and perform subsequent maintenance. Utility Model Content

[0003] In view of the shortcomings of the prior art, the utility model provides a PECVD source cabinet with compact structure, convenient maintenance, large internal operation space and low cost, which can be used to enter and exit the quartz tube from the tail, and solves the problem that the existing PECVD cannot exit the quartz tube from the tail and the problem that the source cabinet has narrow installation and maintenance space. To achieve the above purpose, the utility model can adopt the following technical solutions:

[0004] A PECVD source cabinet for entering and exiting a quartz tube from the rear, comprising a cabinet body, the top of the cabinet body being connected to a bridge frame to realize the lead-out of cables inside the cabinet body, the two opposite sides of the cabinet body being respectively arranged as a cabinet joint surface and a docking surface, the cabinet joint surface being docked with a furnace cabinet, and the docking surface being docked with an external pipeline; a pipeline fixing device is provided on the docking surface of the cabinet body to realize the communication between an internal pipeline in the cabinet body and an external pipeline outside the cabinet body; inside the cabinet body, a plurality of internal pipelines are arranged in a vertical direction, the internal pipelines are connected to corresponding tail flanges through flange elbows, and the tail flange is connected to the rear of the furnace cabinet; when the quartz tube enters and exits the furnace cabinet, the flange elbow and the tail flange are removed to realize the quartz tube entering and exiting the furnace cabinet through the cabinet body.

[0005] As a further improvement of the present invention, a foot pedal, a base plate and a climbing frame are provided inside the cabinet; the base plate is located at the bottom of the cabinet, and a maintenance space is provided above the base plate; the climbing frame is arranged in the cabinet along the vertical direction, the internal pipes are arranged in an S shape in the cabinet, and the internal pipes are overlapped on the climbing frame; the foot pedal is arranged in the upper and middle part of the cabinet, and the foot pedal is reached through the climbing frame to realize the disassembly and assembly of the components in the upper and middle part of the cabinet.

[0006] As a further improvement of the utility model, an electrical side panel and an electrical board installation area are provided on the upper inner side of the cabinet body, the electrical board installation area is close to the docking surface, and the electrical side panel is arranged on the inner side of the electrical board installation area along the vertical direction, and the electrical side panel is close to the cabinet surface.

[0007] As a further improvement of the present invention, a water divider is provided inside the cabinet, the water divider includes water inlet and water return, the water divider is arranged on one side of the cabinet along the vertical direction, and the water divider is close to the cabinet surface.

[0008] As a further improvement of the utility model, a first wire trough is provided inside the cabinet, the first wire trough is arranged on one side of the cabinet along the vertical direction, and the first wire trough is close to the water distributor, and the first wire trough is used to lay the furnace tail discharge wire and the inlet and outlet water switch wires.

[0009] As a further improvement of the present invention, a power supply rear baffle and a power supply fixing area are provided at the lower inner side of the cabinet body, the power supply fixing area is located below the electrical board installation area, the power supply fixing area is close to the docking surface, the power supply rear baffle is arranged on the inner side of the power supply fixing area in the vertical direction, the power supply rear baffle is close to the cabinet surface, and the power supply rear baffle is located below the electrical side panel.

[0010] As a further improvement of the utility model, a second wire trough and a third wire trough are provided on both sides of the power rear baffle in the vertical direction, the second wire trough is used for laying power incoming wires and electrical board wires, and the third wire trough is used for laying power outgoing wires and communication wires.

[0011] As a further improvement of the utility model, a fourth wire trough is provided on the inner side of the cabinet along the vertical direction, the fourth wire trough runs through the electrical board installation area and the power supply fixing area, the fourth wire trough is close to the external pipeline, and the fourth wire trough is used for thin film gauge wiring.

[0012] As a further improvement of the present invention, with the fourth wire trough as a dividing line, the electrical board installation area and the power supply fixing area are respectively located on both sides of the cabinet and on the diagonal line with the tail flange.

[0013] As a further improvement of the present invention, an emergency stop button is provided on the outer side of the cabinet.

[0014] Compared with the prior art, the advantages of the utility model are:

[0015] The utility model discloses a PECVD source cabinet for entering and exiting quartz tubes from the rear end, by connecting the top of the cabinet body with a bridge frame, and the cables inside the cabinet body are led out by the bridge frame, so that the wiring is more beautiful, and it is also beneficial to increase the operating space inside the source cabinet, and improve the efficiency of installation, debugging and later maintenance; by providing a pipeline fixing device on the docking surface of the cabinet body, the internal pipeline in the cabinet body is connected with the external pipeline outside the cabinet body, and at the same time, a plurality of internal pipelines are arranged in a vertical direction inside the cabinet body, and the internal pipelines are connected to the corresponding tail flanges through flange elbows, and the tail flange is connected to the tail end of the furnace cabinet, so that the production needs of multi-tube furnace cabinets are met, and there is no mutual interference when the adjacent furnace tubes enter and exit the quartz tubes; when the quartz tube enters and exits the furnace cabinet, it is only necessary to remove the corresponding flange elbow and the tail flange, so that only one internal pipeline needs to be removed when replacing the quartz tube from the tail end, the operating space inside the source cabinet is large, the speed of replacing the quartz tube is increased, and the efficiency of installation and debugging is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the overall structural principle of the PECVD source cabinet in a specific embodiment of the utility model;

[0017] Figure 2 It is a schematic diagram of the structural principle of the PECVD source cabinet and the furnace cabinet in a specific embodiment of the utility model;

[0018] Figure 3 It is a schematic diagram of the structural principle of the PECVD source cabinet and the furnace cabinet in another perspective of the cabinet surface in a specific embodiment of the utility model;

[0019] Figure 4 This is a schematic diagram of the structural principle of the interface between the PECVD source cabinet and the external pipeline in a specific embodiment of the utility model;

[0020] Figure 5 It is a schematic diagram of the structural principle of the interface between the PECVD source cabinet and the external pipeline from another perspective in a specific embodiment of the utility model;

[0021] Legend: 1. Cabinet; 2. Folding door; 3. Bridge; 4. External pipes; 5. Water distributor; 6. Internal pipes; 7. Foot pedal; 8. First wire duct; 9. Bottom plate; 10. Climbing frame; 11. Emergency stop button; 12. Electrical side panel; 13. Second wire duct; 14. Third wire duct; 15. Power supply rear baffle; 16. Tail flange; 17. Flange elbow; 18. Electrical panel installation area; 19. Pipe fixing device; 20. Movable beam; 21. Power supply fixing area; 22. Fourth wire duct. DETAILED DESCRIPTION

[0022] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0023] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0025] Example

[0026] like Figures 1 to 5 As shown, the PECVD source cabinet of the utility model for entering and exiting the quartz tube from the tail includes a cabinet 1 with a sheet metal frame, and a bridge 3 is connected to the top of the cabinet 1 to realize the cable lead-out inside the cabinet 1, that is, the bridge 3 can be used for the main extraction, slow extraction, butterfly valve, vacuum pump and other wiring, making the wiring more beautiful. The two opposite sides of the cabinet 1 are respectively set as a cabinet surface and a docking surface; the cabinet surface is docked with the furnace cabinet, and personnel cannot pass through the cabinet surface after the equipment is installed; the docking surface is docked with the external pipeline 4, and a plurality of folding doors 2 are provided on the docking surface. When the equipment is operating normally, the folding door 2 is closed to keep the overall equipment neat and beautiful. When maintenance is required, the folding door 2 can be opened to enter the cabinet 1. The docking surface of the cabinet 1 is provided with a pipeline fixing device 19, and the pipeline fixing device 19 is provided with a plurality of docking ports along the vertical direction to realize the connection between the internal pipeline 6 in the cabinet 1 and the external pipeline 4 outside the cabinet 1. Inside the cabinet 1, multiple internal pipes 6 are arranged in the vertical direction, and the internal pipes 6 are connected to the corresponding tail flanges 16 through flange elbows 17, and the tail flanges 16 are connected to the tail of the furnace cabinet; that is, the internal pipes 6, flange elbows 17 and tail flanges 16 are connected one by one. Figure 5 As shown, when the quartz tube enters and exits the furnace cabinet, the flange elbow 17 and the tail flange 16 are removed, so that the quartz tube can enter and exit the tail of the furnace cabinet through the cabinet 1, and there is no obstruction in the quartz tube replacement channel. This avoids the defect that the quartz tube replacement of traditional PE equipment is mainly carried out on the clean bench, and the clean bench needs to remove the push boat, buffer rack, etc., which is a relatively large workload.

[0027] In this embodiment, by connecting the top of the cabinet 1 with the bridge 3, the cables inside the cabinet 1 are led out by the bridge 3, making the wiring more beautiful, and also conducive to increasing the operating space inside the source cabinet, improving the efficiency of installation, debugging and later maintenance. By providing a pipeline fixing device 19 on the docking surface of the cabinet 1, the internal pipeline 6 in the cabinet 1 is connected to the external pipeline 4 outside the cabinet 1. At the same time, multiple internal pipelines 6 are arranged in the vertical direction inside the cabinet 1, and the internal pipeline 6 is connected to the corresponding tail flange 16 through the flange elbow 17. The tail flange 16 is connected to the tail of the furnace cabinet, which meets the production needs of the multi-tube furnace cabinet, and the adjacent furnace tubes will not interfere with each other when entering and exiting the quartz tube. When the quartz tube enters and exits the furnace cabinet, it is only necessary to remove the corresponding flange elbow 17 and the tail flange 16, so that only one internal pipeline needs to be removed when replacing the quartz tube from the tail. The internal operating space of the source cabinet is large, the speed of replacing the quartz tube is increased, and the efficiency of installation and debugging is improved.

[0028] like Figure 2 and Figure 4 As shown, the cabinet 1 is provided with a foot pedal 7, a bottom plate 9, a climbing frame 10 and a movable beam 20. The bottom plate 9 is located at the bottom of the cabinet 1, and a maintenance space is provided above the bottom plate 9 for easy installation and maintenance. The climbing frame 10 is arranged in the cabinet 1 along the vertical direction, which is equivalent to a ladder. The internal pipe 6 is arranged in an S shape in the cabinet 1, and the internal pipe 6 is overlapped on the climbing frame 10; Figure 3 As shown, the internal pipe 6 turns left after coming out of the reaction chamber, and the internal pipe 6 passes through the middle of the sheet metal of the cabinet 1, which increases the operation and maintenance space of the source cabinet. The foot pedal 7 is arranged in the upper middle part of the cabinet 1, and the foot pedal 7 is reached by the climbing frame 10 to realize the disassembly and assembly of the components in the upper middle part of the cabinet 1. The climbing frame 10 is arranged to cooperate with the foot pedal 7, and when installing, disassembling or replacing the flange, quartz tube and other components in the upper middle part of the cabinet 1, there is no need to set up an additional ladder. In this embodiment, the foot pedal 7 and the bottom plate 9 are both made of stainless steel patterned plates to increase the anti-slip performance. The movable beam 20 spans the side of the cabinet 1 to increase the overall structural strength of the cabinet 1.

[0029] like Figure 3 and Figure 4 As shown, an electrical side panel 12 and an electrical panel installation area 18 are provided at the upper inner side of the cabinet 1. The electrical panel installation area 18 is close to the docking surface. The gas circuit board is installed in the electrical panel installation area 18. The electrical side panel 12 is arranged inside the electrical panel installation area 18 in the vertical direction. The electrical side panel 12 is close to the cabinet surface. The electrical side panel 12 provides a shielding effect. Move the gas circuit board into the cabinet 1 so that personnel can enter the equipment for maintenance.

[0030] like Figure 2As shown, a water divider 5 is provided inside the cabinet 1. The water divider 5 includes water inlet and water return. The water divider 5 is arranged on one side of the cabinet 1 along the vertical direction, and the water divider 5 is close to the cabinet surface. The position of the water divider 5 does not affect the tail inlet and outlet of the quartz tube.

[0031] like Figure 2 As shown, a first wire duct 8 is provided inside the cabinet 1. The first wire duct 8 is arranged on one side of the cabinet 1 along the vertical direction and is close to the water distributor 5. The first wire duct 8 is used to lay the furnace tail discharge wire and the inlet and outlet water switch wires.

[0032] like Figure 3 and Figure 4 As shown, a power rear baffle 15 and a power fixing area 21 are provided at the lower inner part of the cabinet 1. The power fixing area 21 is located below the electrical panel installation area 18, close to the docking surface, and the power rear baffle 15 is arranged inside the power fixing area 21 in the vertical direction. The power rear baffle 15 is close to the cabinet surface, and the power rear baffle 15 is located below the electrical side panel 12. The rear side of the power rear baffle 15 is the RF power installation area. The baffle can isolate the wires for protection, and can also hide the power wires and cooling water pipes to increase the aesthetics.

[0033] like Figure 3 As shown, a second wire trough 13 and a third wire trough 14 are provided on both sides of the power rear baffle 15 in the vertical direction. The second wire trough 13 is used to lay the power incoming wire and the electrical board wire, and the third wire trough 14 is used to lay the power outgoing wire and the communication wire. The second wire trough 13 and the third wire trough 14 both lead the cables to the top of the cabinet 1 to connect the bridge 3.

[0034] like Figure 4 As shown, a fourth wire duct 22 is provided on the inner side of the cabinet 1 along the vertical direction. The fourth wire duct 22 passes through the electrical board installation area 18 and the power supply fixing area 21. The fourth wire duct 22 is close to the external pipeline 4. The fourth wire duct 22 is used for thin film gauge wiring and leads the cables to the top of the cabinet 1 to connect the bridge 3.

[0035] Furthermore, with the fourth wire slot 22 as the dividing line, the electrical board installation area 18 and the power supply fixing area 21 are respectively located on both sides of the cabinet 1 and on the diagonal line with the tail flange 16. The installation area of ​​the electrical circuit board and the power supply completely avoids the quartz tube disassembly channel, and the gas circuit board is arranged just above the power supply installation area, making full use of the space without any obstruction, which is conducive to improving the efficiency of installation, debugging and later maintenance.

[0036] In this embodiment, the first wire groove 8, the second wire groove 13, the third wire groove 14 and the fourth wire groove 22 are all made of metal wire grooves to improve durability.

[0037] like Figure 2As shown, an emergency stop button 11 is provided on the outer side of the cabinet 1. When an emergency occurs, the equipment can be urgently stopped by the emergency stop button 11 to ensure production safety.

[0038] The PECVD source cabinet of this embodiment has a reasonable spatial layout and relatively large space for installation, debugging and maintenance; only one internal pipe needs to be removed to achieve the tail end entering and exiting the quartz tube; and anti-skid plates are used in areas where operators step on to avoid slipping; through the reasonable use of metal wire troughs and bridges, the wiring of the source cabinet is neat and beautiful.

[0039] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A PECVD source cabinet with a quartz tube entering and exiting from the tail, characterized in that: The cabinet (1) comprises a cabinet body (1), the top of which is connected to a bridge frame (3) to realize the cable lead-out inside the cabinet body (1), and the two opposite sides of the cabinet body (1) are respectively provided with a cabinet joint surface and a docking surface, the cabinet joint surface is docked with a furnace cabinet, and the docking surface is docked with an external pipe (4); the docking surface of the cabinet body (1) is provided with a pipe fixing device (19) to realize the communication between the internal pipe (6) inside the cabinet body (1) and the external pipe (4) outside the cabinet body (1); inside the cabinet body (1), a plurality of internal pipes (6) are arranged in a vertical direction, the internal pipes (6) are connected to corresponding tail flanges (16) through flange elbows (17), and the tail flange (16) is connected to the tail of the furnace cabinet; when the quartz tube enters and exits the furnace cabinet, the flange elbow (17) and the tail flange (16) are removed to realize the quartz tube entering and exiting the furnace cabinet through the cabinet body (1).

2. The PECVD source cabinet for entering and exiting the quartz tube from the tail according to claim 1, characterized in that: The cabinet (1) is provided with a foot pedal (7), a bottom plate (9) and a climbing frame (10); the bottom plate (9) is located at the bottom of the cabinet (1), and a maintenance space is provided above the bottom plate (9); the climbing frame (10) is arranged in the cabinet (1) along the vertical direction, the internal pipe (6) is arranged in an S shape in the cabinet (1), and the internal pipe (6) is overlapped on the climbing frame (10); the foot pedal (7) is arranged in the middle and upper part of the cabinet (1), and the foot pedal (7) is reached through the climbing frame (10) to realize the disassembly and assembly of the components in the middle and upper part of the cabinet (1).

3. The PECVD source cabinet for entering and exiting the quartz tube from the tail according to claim 2, characterized in that: An electrical side panel (12) and an electrical panel installation area (18) are provided at the upper inner side of the cabinet body (1), wherein the electrical panel installation area (18) is close to the docking surface, and the electrical side panel (12) is arranged on the inner side of the electrical panel installation area (18) in a vertical direction, and the electrical side panel (12) is close to the cabinet surface.

4. The PECVD source cabinet for entering and exiting the quartz tube from the tail according to claim 3, characterized in that: A water divider (5) is provided inside the cabinet (1), the water divider (5) includes inlet water and return water, and the water divider (5) is arranged on one side of the cabinet (1) in a vertical direction, and the water divider (5) is close to the cabinet surface.

5. The PECVD source cabinet for entering and exiting the quartz tube from the tail according to claim 4, characterized in that: A first wire trough (8) is provided inside the cabinet (1), the first wire trough (8) is arranged on one side of the cabinet (1) in a vertical direction, and the first wire trough (8) is close to the water distributor (5), and the first wire trough (8) is used for laying furnace tail discharge wires and water inlet and outlet switch wires.

6. The PECVD source cabinet for entering and exiting the quartz tube from the rear end according to claim 3, characterized in that: The cabinet body (1) is provided with a power supply rear baffle (15) and a power supply fixing area (21) at the lower inner side, the power supply fixing area (21) is located below the electrical panel installation area (18), the power supply fixing area (21) is close to the docking surface, the power supply rear baffle (15) is arranged inside the power supply fixing area (21) in a vertical direction, the power supply rear baffle (15) is close to the cabinet joint surface, and the power supply rear baffle (15) is located below the electrical side panel (12).

7. The PECVD source cabinet for entering and exiting the quartz tube from the rear end according to claim 6, characterized in that: A second wire trough (13) and a third wire trough (14) are provided on both sides of the power rear baffle (15) in the vertical direction. The second wire trough (13) is used for laying power inlet wires and electrical board wires, and the third wire trough (14) is used for laying power outlet wires and communication wires.

8. The PECVD source cabinet for entering and exiting the quartz tube from the rear end according to claim 6, characterized in that: A fourth wire groove (22) is provided on the inner side of the cabinet (1) along the vertical direction. The fourth wire groove (22) passes through the electrical panel installation area (18) and the power supply fixing area (21). The fourth wire groove (22) is close to the external pipeline (4). The fourth wire groove (22) is used for routing the thin film gauge.

9. The PECVD source cabinet for entering and exiting the quartz tube from the rear end according to claim 8, characterized in that: With the fourth wire slot (22) as a dividing line, the electrical board installation area (18) and the power supply fixing area (21) are respectively located on two sides of the cabinet (1) and on a diagonal line with the tail flange (16).

10. The PECVD source cabinet with a quartz tube entering and exiting from the rear end according to any one of claims 1 to 9, characterized in that: An emergency stop button (11) is provided on the outer side of the cabinet (1).

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