Light source fixing and adjusting device and light source assembly

Abstract

The present invention relates to the field of automatic detection technology, and in particular to a light source fixing and adjusting device and a light source assembly. The light source fixing and adjusting device comprises a connecting piece connected to the light source and the fixing piece, wherein a first moving space for the light source to move along a first direction is provided at the connecting end of the connecting piece and the light source, and a second moving space for the connecting piece to move along a second direction is provided at the connecting end of the fixing piece and the connecting piece; the first direction and the second direction are non-parallel. The positional relationship between a plurality of light sources and a wafer to be detected can be adjusted as a whole, and the positional relationship of a single light source relative to the wafer to be detected can be adjusted by setting a light source fixing and adjusting device, and the position of the incident light spot of a single light source on the wafer to be detected can be adjusted, so that the light spots of a plurality of light sources overlap on the wafer to be detected, and the high uniformity requirement can be met. Moreover, the structure of the light source assembly is simple and compact, occupies a small space, has a high practical effect, and after adjustment, the structure is reliably fixed, the force is uniform, and has a high stability effect.

Description

Technical Field

[0001] The present invention relates to the field of automatic detection technology, and in particular to a light source fixing and adjusting device and a light source component. Background Art

[0002] In industrial visual inspection, especially in semiconductor product visual inspection, light source components are necessary components to provide lighting environment. In order to adapt to various scenes and different inspection environments, light path adjustment is an indispensable part of the inspection process, which plays a vital role in precision equipment and various optical instruments.

[0003] With the development of technology, the performance requirements for optical systems are getting higher and higher, which requires precise and reliable optical path adjustment devices to ensure the accuracy and stability of the optical path. Summary of the invention

[0004] In view of this, an object of the present invention is to provide a light source fixing and adjusting device and a light source assembly, which can meet the requirements for light source adjustment accuracy and reliability in the current optical detection process.

[0005] In the first aspect, an embodiment of the present invention provides a light source fixing and adjusting device, which is applied to a light source and a fixing part, and includes a connecting part connected to the light source and the fixing part, wherein a first moving space for the light source to move along a first direction is provided at the connecting end of the connecting part and the light source, and a second moving space for the connecting part to move along a second direction is provided at the connecting end of the fixing part and the connecting part; the first direction and the second direction are in a non-parallel relationship.

[0006] Furthermore, the light source is connected to the connecting member via a receiving member.

[0007] Furthermore, the receiving member is sleeved on the outside of the light source.

[0008] Furthermore, the first direction is the direction in which the light emitting surface of the light source approaches or moves away from the illumination target.

[0009] Furthermore, the second direction is a direction that is perpendicular to the first direction.

[0010] In a second aspect, a light source assembly is provided, comprising a mounting plate and a plurality of light sources, wherein the plurality of light sources are connected to the mounting plate via the plurality of light source fixing and adjusting devices described in any one of the above items, and the plurality of connecting members are fixedly connected to the mounting plate and the plurality of light sources, respectively.

[0011] In some specific implementations, an adjustment device is provided in the contact area between the mounting plate and the external structure. The number of the adjustment devices is two and they are symmetrically arranged with respect to the central axis of the mounting plate.

[0012] In some specific implementations, the adjustment device includes a first adjustment block and a second adjustment block that are in contact with each other, the first adjustment block is arranged on the surface of the mounting plate, the second adjustment block is arranged at the external structure, and the first adjustment block and the second adjustment block are non-tetrahedral structures, and the contact surfaces of the two are flat surfaces that match each other.

[0013] In some specific implementations, the first adjustment block and the second adjustment block are wedge-shaped blocks, and their inclined surfaces are arranged in contact with each other.

[0014] In some specific implementations, the first adjusting block is connected to an external power source, and the external power source drives the first adjusting block to move.

[0015] The embodiments of the present invention bring the following beneficial effects:

[0016] The embodiment of the present invention provides a light source fixing and adjusting device and a light source assembly, which can adjust the positional relationship between multiple light sources and the wafer to be detected as a whole, and adjust the positional relationship of a single light source relative to the wafer to be detected by setting a light source fixing and adjusting device, and adjust the position of the incident light spot of a single light source on the wafer to be detected, so that the light spots of multiple light sources overlap on the wafer to be detected, meeting the high uniformity requirements. In addition, the structure of the light source assembly is simple and compact, occupies a small space, has a high practical effect, and after adjustment, the structure is fixed reliably, the force is evenly applied, and has a high stability effect.

[0017] Other features and advantages of the present disclosure will be set forth in the following description, or some features and advantages may be inferred or unambiguously determined from the description, or may be learned by implementing the above-mentioned technology of the present disclosure.

[0018] In order to make the above-mentioned objectives, features and advantages of the present disclosure more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A schematic diagram of the structure of a light source assembly provided by an embodiment of the present invention;

[0021] Figure 2 A schematic diagram of the structure of an adjusting device provided in an embodiment of the present invention;

[0022] Figure 3 A schematic diagram of the structure of a first adjustment block provided in an embodiment of the present invention;

[0023] Figure 4 A schematic diagram of the structure of a second adjustment block provided in an embodiment of the present invention;

[0024] Figure 5 A schematic diagram of the structure of a light source adjustment and fixing device provided in an embodiment of the present invention;

[0025] Figure 6 A schematic diagram of the connector structure provided in an embodiment of the present invention.

[0026] Icon: 100-light source component; 200-light source;

[0027] 110-mounting plate; 120-adjusting device; 130-light source fixing and adjusting device;

[0028] 121-first adjustment block; 122-second adjustment block; 123-horizontal adjustment screw; 124-horizontal adjustment block; 125-fixing rod; 126-fixing channel;

[0029] 131 -connecting piece; 132 -sleeve; 133 -first moving space; 134 -left and right adjusting blocks; 135 -second moving space. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] The light source assembly provided in the embodiment of the present application is applied to the scene of automated optical inspection to provide light source for inspection. Among them, the scene of automated optical inspection is mainly the automated optical inspection of electronic products. In the embodiment of the present application, this scene can be semiconductor products, specifically unpackaged semiconductor electronic products, especially involving a scene of automated optical inspection of wafers.

[0032] In the scenario of wafer automated optical inspection, there are multiple technical solutions, one of which is to use an illumination light path and cooperate with a sensor to obtain optical information of the surface of the wafer to be inspected, and analyze or process the optical information to obtain physical defects on the surface of the wafer to be inspected, thereby improving the efficiency and automation of the overall wafer inspection process. Among them, the light source component in the embodiment of the present application is the main component of the illumination light path, which is used to project the illumination light path to the surface of the wafer to be inspected.

[0033] For details, see Figure 1 The light source assembly 100 in the embodiment of the present application includes a plurality of light sources 200, wherein the specific number of light sources is four in the embodiment of the present application. The four light sources 200 are respectively fixed by mounting plates 110, and are arranged at positions to be detected to project light sources onto the wafer to be detected.

[0034] In order to ensure the uniformity of the light source and the integrity of the light source coverage, in the embodiment of the present application, the four light sources 200 are evenly arranged on the mounting plate 110, that is, the angles between the four light sources 200 are the same and evenly arranged.

[0035] In another embodiment of the present application, because the object to be detected is a wafer, no matter the size of the wafer is 8 inches, 12 inches or 18 inches, it is circular. Therefore, the corresponding mounting plate 110 and the corresponding four light sources 200 are also arranged in a ring shape, that is, the angle between the four light sources 200 is 90°, and the combination of the four light sources 200 can completely and evenly cover the surface of the wafer to be detected. In other embodiments, the mounting plate 110 and the multiple light sources can be set according to the characteristics of the corresponding object to be detected. For example, when the object to be detected is a strip structure, multiple light sources form a strip structure, and are symmetrically arranged based on the central axis of the object to be detected. The above deformation structure will not be repeated in the embodiment of the present application, as long as it is ensured that the multiple light sources can present uniform and complete projection light.

[0036] Among them, in the embodiment of the present application, the mounting plate 110 is a supporting structure of the light source, which is connected to the external machine structure so that the light source can be configured in the overall machine device. Among them, the external machine structure will not be described in detail in the embodiment of the present application. The mounting plate 110 carries multiple light sources, but during the actual installation and use process, the relative position relationship between the mounting plate 110 and the external mechanism can affect the incident angles of the multiple light sources, so a position relationship adjustment device needs to be set between the mounting plate 110 and the external structure to be able to adjust the position relationship between the mounting plate 110 and the external structure on the plane, so that the incident angles of the four light sources are as required for detection.

[0037] Specifically, the adjustment device 120 is for horizontal adjustment, that is, the installation plate 110 and the four light sources 200 are horizontally adjusted. In order to ensure the stability and multi-posture of the adjustment, the number of the adjustment device 120 includes at least two, and they are respectively arranged symmetrically in the installation plate 110. By adjusting the two adjustment devices 120, the horizontal angles of both sides can be adjusted, so that the posture of the installation plate 110 maintains the stability required by the target.

[0038] Among them, see Figure 2 , Figure 3 and Figure 4 , for any one of the adjustment devices 120, it includes a first adjustment block 121 and a second adjustment block 122 that are in contact with each other, wherein the first adjustment block 121 is arranged on the surface of the mounting plate 110, and the second adjustment block 122 is arranged at the external structure. By adjusting the relative position relationship between the first adjustment block 121 and the second adjustment block 122, the horizontal angle of the mounting plate 110 relative to the external structure and the wafer to be inspected is achieved, thereby adjusting the overall incident light angle of the four light sources 200 installed on the mounting plate 110 relative to the external structure and the wafer to be inspected.

[0039] Specifically, the first adjustment block 121 and the second adjustment block 122 can realize relative position adjustment based on their structure setting, wherein the first adjustment block 121 and the second adjustment block 122 are both non-tetrahedrons. In the embodiment of the present application, the structure is specifically a wedge-shaped structure, that is, the first adjustment block 121 and the second adjustment block 122 are both wedge-shaped blocks, and the inclined surfaces of the two are contacted, that is, through the relative position of the first adjustment block 121 and the second adjustment block 122, the adjustment device 120 drives the installation disk 110 to produce a change in relative position. In the embodiment of the present application, the first adjustment block 121 is set on the surface of the installation disk 110, and the second adjustment block 122 is set at the external structure. It can be moved only by adjusting the first adjustment block 121. Its adjustment can be achieved by setting a horizontal adjustment screw 123 on the first adjustment block 121, and the horizontal adjustment screw 123 drives the first adjustment block 121 to move. Furthermore, in order to ensure the installation stability of the adjustment device 120, a horizontal adjustment block 124 is provided, and the horizontal adjustment screw 123 passes through a through hole provided on the horizontal adjustment block 124 and is connected to the first adjustment block 121, and the horizontal adjustment block 124 is fixedly connected to the mounting plate 110 by a fixing screw, that is, when performing horizontal adjustment, the horizontal adjustment screw 123 is loosened, and the first adjustment block 121 is driven to move to the target position by the horizontal adjustment screw 123 and then the horizontal adjustment screw 123 is locked to fix the horizontal adjustment screw 123 and the horizontal adjustment block 124, so that the first adjustment block 121 does not move. In order to ensure the fixed setting of the second adjusting block 122, a through hole for the fixing rod 125 to pass through is provided in the second adjusting block 122, and the fixing rod 125 passes through the second adjusting block 122 and is fixedly connected to the mounting plate 110, so that the position of the second adjusting block 122 does not change. In order to enable the fixing rod 125 to pass through the first adjusting block 121 without affecting the movement of the first adjusting block 121, in an embodiment of the present application, a fixing channel 126 for the fixing block to pass through is provided along the moving direction of the first adjusting block 121, wherein the size of the fixing channel 126 is greater than or equal to the diameter of the fixing rod 125, so that the movement of the first adjusting block 121 will not be hindered by the setting of the fixing rod 125.

[0040] In the embodiment of the present application, the above structure can be used to adjust the horizontal angle of the mounting plate 110, thereby controlling the angle between the incident light of the four light sources 200 and the surface of the wafer to be inspected.

[0041] In the actual detection process, it is necessary not only to adjust the overall light source incident angle, but also to adjust the four light sources separately. Figure 5 and Figure 6That is, in the embodiment of the present application, a light source fixing and adjusting device 130 capable of independently adjusting the positions of four light sources is also provided. This device is a connecting member 131 that serves as a connection between the light source and the fixing member, wherein in the embodiment of the present application, the fixing member is a mounting plate 110. A first moving space 133 is provided at the connection end between the connecting member 131 and the light source for the light source to move along a first direction, and a second moving space 135 is provided at the connection end between the fixing member and the connecting member 131 for the connecting member 131 to move along a second direction, wherein the first direction and the second direction are in a non-parallel relationship.

[0042] Specifically, the adjustment direction of the light source is the adjustment in the xy direction, wherein the x direction and the y direction refer to the direction of the light spot of a single light source on the wafer to be detected, wherein adjusting the x direction means adjusting the light spot generated by the light source to move in the x-axis direction of the wafer to be detected, and adjusting the y direction means adjusting the light spot generated by the light source to move in the y-axis direction of the wafer to be detected. If the coordinates of the corresponding light source are adjusted, when the light spot is adjusted to move in the x-axis direction of the wafer to be detected, it means adjusting the light source to get closer to the wafer to be detected, and adjusting the light spot to move in the y-axis direction of the wafer to be detected means adjusting the light source to move upward relative to the wafer to be detected. Therefore, the first direction is the moving direction of the light spot on the x-axis of the wafer to be detected, and the second direction is the moving direction of the light spot on the y-axis of the wafer to be detected, and the first direction is perpendicular to the second direction.

[0043] In the embodiment of the present application, the connecting member 131 is connected to the light source through a receiving member, that is, the movement of the light source drives the light source to move through the receiving member. In the embodiment of the present application, the light source can be a light tube, and the receiving member is a sleeve in the embodiment of the present application, wherein the sleeve is sleeved on the outside of the light tube, and the sleeve 132 is connected to the connecting member 131, and a first moving space 133 is provided in the connecting member 131 so that the sleeve 132 moves in the first moving space 133 along the first direction.

[0044] A second moving space 135 is provided at a connection position between the mounting plate 110 and the connecting member 131 , and the connecting member 131 moves in the second moving space 135 .

[0045] By setting the first moving space 133 and the second moving space 135, the light spot generated by the light source can be moved along the first direction, i.e., the x-axis direction, and the second direction, i.e., the y-axis direction, on the surface of the wafer to be inspected, so that the light spots of the four light sources are adjusted to overlap, meeting the high uniformity requirement.

[0046] Among them, the second mobile space 135 can be directly set by digging a groove on the installation disk 110, but this setting requires targeted processing of the installation disk 110, and the moving range of this second mobile space 135 is a fixed range. In order to reduce the formation cost of the second mobile space 135 and improve the variability of the second mobile space 135, in another embodiment, the formation of the second mobile space 135 can be configured as a left and right adjustment block 134, wherein the second mobile space 135 is opened in the adjustment block, and the left and right adjustment block 134 is fixedly connected to the installation disk 110, and the connecting member 131 is arranged in the second mobile space 135 of the left and right adjustment block 134, and is fixed after being penetrated by a fixed column, and a locking screw is provided to lock and fix the connecting member 131 and the left and right adjustment. Through this structure, the molding cost of the installation disk can be reduced, and the left and right adjustment blocks 134 can be replaced according to specific needs to achieve controllability of the adjustment.

[0047] The light source assembly 100 provided in the embodiment of the present application can adjust the positional relationship between multiple light sources and the wafer to be detected as a whole, and adjust the positional relationship of a single light source relative to the wafer to be detected by setting a light source fixing adjustment device, and adjust the position of the incident light spot of a single light source on the wafer to be detected, so that the light spots of multiple light sources overlap on the wafer to be detected, meeting the high uniformity requirements. In addition, the structure of the light source assembly 100 is simple and compact, occupies a small space, has a high practical effect, and after adjustment, the structure is fixed reliably, the force is evenly applied, and has a high stability effect.

[0048] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0049] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A light source fixing and adjusting device, applied to a light source and a fixing part, characterized in that: It includes a connecting member connected to the light source and the fixing member, wherein a first moving space for the light source to move along a first direction is provided at the connecting end of the connecting member and the light source, and a second moving space for the connecting member to move along a second direction is provided at the connecting end of the fixing member and the connecting member; the first direction and the second direction are in a non-parallel relationship.

2. The light source fixing and adjusting device according to claim 1, characterized in that: The light source is connected to the connecting member via a receiving member.

3. The light source fixing and adjusting device according to claim 2, characterized in that: The receiving member is sleeved on the outside of the light source.

4. The light source fixing and adjusting device according to any one of claims 1 to 3, characterized in that: The first direction is the direction in which the light emitting surface of the light source approaches or moves away from the illumination target.

5. The light source fixing and adjusting device according to claim 4, characterized in that: The second direction is a direction perpendicular to the first direction.

6. A light source assembly, characterized in that: It includes a mounting plate and a plurality of light sources, wherein the plurality of light sources are connected to the mounting plate via the plurality of light source fixing and adjusting devices according to any one of claims 1 to 5, and the plurality of connecting members are fixedly connected to the mounting plate and the plurality of light sources, respectively.

7. The light source assembly according to claim 6, characterized in that: An adjusting device is arranged in the contact area between the mounting plate and the external structure. The number of the adjusting devices is two and they are arranged symmetrically with respect to the central axis of the mounting plate.

8. The light source assembly according to claim 7, characterized in that: The adjustment device includes a first adjustment block and a second adjustment block that are in contact with each other, the first adjustment block is arranged on the surface of the mounting plate, and the second adjustment block is arranged at the external structure. The first adjustment block and the second adjustment block are non-tetrahedral structures, and the contact surfaces of the two are flat surfaces that match each other.

9. The light source assembly according to claim 8, characterized in that: The first adjusting block and the second adjusting block are wedge-shaped blocks, and their inclined surfaces are arranged in contact with each other.

10. The light source assembly according to claim 8 or 9, characterized in that: The first adjusting block is connected to an external power source, and the external power source drives the first adjusting block to move.

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