Flower basket moving device

Abstract

The utility model discloses a flower basket moving device which comprises a lifting driving part, a lifting seat, a transverse moving driving part, a bearing mechanism and a positioning mechanism, the driving end of the lifting driving part is connected with the lifting seat, and the lifting driving part is configured to drive the lifting seat to ascend and descend; the bearing mechanism and the transverse moving driving piece are installed on the lifting base, and the driving end of the transverse moving driving piece is connected with the bearing mechanism. The bearing mechanism is configured to bear a flower basket, the flower basket is a whole-piece flower basket or a half-piece flower basket, and the half-piece flower basket is provided with two storage cavities in the first horizontal direction; the transverse moving driving piece is configured to drive the bearing mechanism to enable the borne flower basket to move in a reciprocating mode in the first horizontal direction, so that a containing cavity, for containing the sheet bodies, in the flower basket is in butt joint with the corresponding sheet body feeding mechanism; and the positioning mechanism is configured to fix the flower basket on the bearing mechanism or loosen the flower basket on the bearing mechanism. The flower basket moving device is suitable for half-piece flower baskets and whole-piece flower baskets, good in compatibility, compact in structure and low in cost.

Description

Technical Field

[0001] The present application belongs to the field of silicon wafer production equipment manufacturing, and in particular, relates to a flower basket moving device. Background Art

[0002] During the processing of silicon wafers, a flower basket moving device is required to cooperate with the flower basket to collect or take out the wafers. The flower basket can be divided into a full-wafer flower basket and a half-wafer flower basket according to the type. The full-wafer flower basket has a storage cavity, which is used to store a row of full-wafer silicon wafers; the half-wafer flower basket has two storage cavities, which are used to store a row of half-wafer silicon wafers respectively.

[0003] The existing flower basket moving device usually includes a lifting drive and a lifting platform. The flower basket is placed on the lifting platform. The lifting drive drives the lifting platform and the flower basket to lift and lower, so as to cooperate with the silicon wafer conveying mechanism to collect silicon wafers into the flower basket or take out silicon wafers from the flower basket. This flower basket moving device can only drive the flower basket to lift and lower, but cannot drive the flower basket to move horizontally, and is only applicable to the operation of collecting or taking out the wafers of the whole flower basket; and the half-piece flower basket is provided with two storage chambers. If this flower basket moving device is used, after the wafers are collected or taken out in one of the storage chambers, the flower basket cannot be moved horizontally to the other storage chamber to collect or take out the wafers.

[0004] Therefore, the existing flower basket moving device cannot be applied to the flower collection or flower removal operation of the half flower basket, and has poor compatibility. Utility Model Content

[0005] The purpose of the present application is to provide a flower basket moving device to solve the problem of poor compatibility of the flower basket moving device in the prior art.

[0006] To achieve the above objectives, this application adopts the following technical solutions:

[0007] A flower basket moving device comprises a lifting drive member, a lifting seat, a transverse driving member, a bearing mechanism and a positioning mechanism, wherein:

[0008] The driving end of the lifting drive member is connected to the lifting seat, and the lifting drive member is configured to drive the lifting seat to move up and down;

[0009] The bearing mechanism and the transverse driving member are installed on the lifting seat, and the driving end of the transverse driving member is connected to the bearing mechanism;

[0010] The carrying mechanism is configured to carry a flower basket, which is a whole flower basket or a half flower basket, and the half flower basket has two storage cavities arranged in a first horizontal direction; the transverse driving member is configured to drive the carrying mechanism to make the carried flower basket reciprocate along the first horizontal direction, so that the storage cavity of the sheet to be stored in the flower basket is docked with the corresponding sheet feeding mechanism;

[0011] The positioning mechanism is configured to fix the flower basket on the carrying mechanism or release the flower basket on the carrying mechanism.

[0012] The bearing mechanism for bearing the flower basket in the present application can be moved laterally along the first horizontal direction under the drive of the transverse driving member. When a half-sheet flower basket is used to collect a half-sheet silicon wafer, the half-sheet flower basket can be driven to move laterally by the transverse driving member, so that the two storage cavities of the half-sheet flower basket are respectively connected with the sheet feeding mechanism to complete the two rounds of collecting the sheets in the half-sheet flower basket; when a whole-sheet flower basket is used to collect a whole-sheet silicon wafer, the whole-sheet flower basket can be driven to move laterally by the transverse driving member, so that one storage cavity of the whole-sheet flower basket is connected with the sheet feeding mechanism to complete the collection of the whole-sheet flower basket. Therefore, the present application is applicable to both half-sheet flower baskets and whole-sheet flower baskets, has good compatibility, compact structure and low cost.

[0013] Optionally, the transverse driving member includes at least one driving unit, the driving unit includes a first driving member and a belt transmission member, and the first driving member is configured to drive the supporting mechanism to reciprocate along the first horizontal direction through the belt transmission member.

[0014] The driving unit is provided to realize the translation function of the bearing mechanism, so that the storage cavity of the flower basket can accurately connect with the sheet feeding mechanism.

[0015] Optionally, the carrying mechanism includes a flower basket transfer mechanism, which is configured to receive and support empty flower baskets from a flower basket feeding line or support full flower baskets and move them to a flower basket receiving line.

[0016] The flower basket is driven by setting a flower basket transfer mechanism to meet the requirements of collecting and conveying silicon wafers.

[0017] Optionally, the bearing mechanism further includes a transverse shift seat, which is mounted on the driving end of the transverse shift driving member;

[0018] The flower basket transfer mechanism includes a conveying drive and at least one conveyor belt, the conveyor belt is used to transfer and support the flower basket, the conveyor belt is rotatably arranged on the transverse shift seat, the conveyor belt extends along the second horizontal direction, and the conveying drive is configured to drive all conveyor belts to rotate to drive the supported flower basket to move along the second horizontal direction.

[0019] The flower baskets are supported and transferred by providing a conveyor belt, so that empty flower baskets can be moved in and full flower baskets can be moved out.

[0020] Optionally, the conveying drive member includes a second drive member, a transmission assembly and a drive shaft. The fixed end of the second drive member is mounted on the transverse shift seat. The driving end of the second drive member drives the drive shaft to rotate through the transmission assembly. There are two conveyor belts. Each conveyor belt is mounted on two conveying wheels spaced apart along a second horizontal direction. The conveying wheels are rotatably mounted on the transverse shift seat. Both ends of the drive shaft are connected to two conveying wheels located at the same end of the two conveyor belts.

[0021] The driving shaft is driven to rotate through the second driving member and the transmission assembly, and the driving shaft is connected to the conveying wheels of the two conveyor belts to achieve synchronous operation of the two conveyor belts.

[0022] Optionally, the transmission assembly includes a driving pulley, a driven pulley and a transmission belt, the driving pulley is installed at the driving end of the second driving member, the second driving member is configured to drive the driving pulley to rotate, the driven pulley is fixed on the driving shaft, and the transmission belt is sleeved on the driving pulley and the driven pulley.

[0023] The transmission connection between the second driving member and the driving shaft is achieved through the driving pulley, the driven pulley and the transmission belt, thereby meeting the transfer requirements of the flower basket.

[0024] Optionally, a limiting member is provided on the transverse shift seat, and the flower basket enters and exits from one end of the conveyor belt. The limiting member is located at the other end of the conveyor belt, and the limiting member is configured to limit the flower basket on the conveyor belt.

[0025] The travel of the flower basket is limited by setting a limit piece to ensure that the flower basket is accurately docked with the sheet feeding mechanism.

[0026] Optionally, a guide assembly is provided between the transverse shift seat and the lifting seat.

[0027] The guide assembly ensures that the traverse seat moves accurately along the first horizontal direction on the lifting seat.

[0028] Optionally, the positioning mechanism includes a third driving member, a first clamping member and a second clamping member, the first clamping member and the second clamping member can be arranged close to or far from each other on both sides of the carrying mechanism, the fixed end of the third driving member is installed on the carrying mechanism, and the driving end of the third driving member is connected to the first clamping member and / or the second clamping member;

[0029] The third driving member is configured to drive the first clamping member and the second clamping member to approach each other, so as to clamp and fix the bottom of the flower basket on the carrying mechanism;

[0030] The third driving member is further configured to drive the first clamping member and the second clamping member to move away from each other so as to loosen the bottom of the flower basket on the supporting mechanism.

[0031] The third driving member is arranged to drive the first clamping member and the second clamping member to move relative to each other, thereby clamping or loosening the bottom of the flower basket, so as to stabilize the position of the flower basket when collecting silicon wafers, and release the flower basket after being filled with silicon wafers.

[0032] Optionally, the positioning mechanism includes a fourth driving member and a pressing member, the pressing member is located above the flower basket, a fixed end of the fourth driving member is installed on the lifting seat, and a driving end of the fourth driving member is connected to the pressing member;

[0033] The fourth driving member is configured to drive the pressing member to descend and press against the top of the flower basket to press and fix the flower basket on the carrying mechanism;

[0034] The fourth driving member is further configured to drive the pressing member to rise and leave the flower basket to release the flower basket on the carrying mechanism.

[0035] By arranging the fourth driving member to drive the pressing member to move relatively, the flower basket on the supporting mechanism can be pressed or loosened, so as to stabilize the position of the flower basket when collecting silicon wafers, and release the flower basket after being filled with silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present application, the following briefly introduces the background technology of the present application and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present application and these drawings without paying any creative work.

[0037] Figure 1 The three-dimensional structure diagram of the flower basket moving device provided in the embodiment of the present application is shown in FIG. Figure 1 ;

[0038] Figure 2 The three-dimensional structure diagram of the flower basket moving device provided in the embodiment of the present application is shown in FIG. Figure 2 ;

[0039] Figure 3 It is a structural schematic diagram of the carrying mechanism in the flower basket moving device provided in an embodiment of the present application.

[0040] Figures 1 to 3 The following reference numerals are included:

[0041] Lifting drive member 1;

[0042] Lifting seat 2;

[0043] Transverse drive member 3, drive unit 31, first drive member 311, belt drive member 312;

[0044] Carrying mechanism 4, flower basket transfer mechanism 41, conveying drive member 411, second drive member 4111, transmission assembly 4112, driving pulley 41121, driven pulley 41122, transmission belt 41123, driving shaft 4113, conveyor belt 412, transverse shift seat 42, and stopper 43;

[0045] Positioning mechanism 5, third driving member 51, first clamping member 52, second clamping member 53, fourth driving member 54, pressing member 55;

[0046] Guide assembly 6;

[0047] Flower basket 8;

[0048] Silicon wafer 7. DETAILED DESCRIPTION

[0049] In order to make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved more clearly, the technical solutions of the embodiments of this application will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of this application.

[0050] The existing flower basket moving device can generally only drive the flower basket to rise and fall, but cannot drive the flower basket to move horizontally, and is only suitable for the operation of collecting or taking out the flowers of the whole flower basket. As for the half-flower basket, since there are two storage chambers, if this flower basket moving device is used, after the flowers are collected or taken out in one of the storage chambers, the flower basket cannot be moved horizontally to the other storage chamber to collect or take out the flowers, and the compatibility is poor.

[0051] In this regard, the present application provides a flower basket moving device to realize the lateral movement function of the flower basket, so as to be suitable for collecting both full silicon wafers and half silicon wafers. Figures 1 to 3 As shown, the flower basket moving device provided in the embodiment of the present application includes a lifting drive member 1, a lifting seat 2, a transverse driving member 3, a bearing mechanism 4 and a positioning mechanism 5.

[0052] The driving end of the lifting drive member 1 is connected to the lifting seat 2, and the lifting drive member 1 is configured to drive the lifting seat 2 to move up and down;

[0053] The bearing mechanism 4 and the transverse driving member 3 are installed on the lifting seat 2, and the driving end of the transverse driving member 3 is connected to the bearing mechanism 4;

[0054] The carrying mechanism 4 is configured to carry a flower basket 8, and the flower basket 8 is a whole flower basket or a half flower basket, and the half flower basket has two storage cavities arranged in the first horizontal direction; the transverse driving member 3 is configured to drive the carrying mechanism 4 to make the carried flower basket 8 reciprocate along the first horizontal direction, so that the storage cavity of the sheet to be stored in the flower basket 8 is docked with the corresponding sheet feeding mechanism;

[0055] The positioning mechanism 5 is configured to fix the flower basket 8 on the supporting mechanism 4 or release the flower basket 8 on the supporting mechanism 4 .

[0056] The carrying mechanism 4 for carrying the flower basket 8 proposed in the present application can be moved laterally along the first horizontal direction under the drive of the transverse driving member 3. When the whole silicon wafer 7 is collected by using the whole flower basket, the whole flower basket can be driven to move laterally by the transverse driving member 3, so that one storage cavity of the whole flower basket is connected with the sheet feeding mechanism to complete the collection of the whole flower basket; when the half-sheet flower basket is used to collect the half silicon wafer 7, the half-sheet flower basket can be driven to move laterally by the transverse driving member 3, so that the two storage cavities of the half-sheet flower basket are respectively connected with the sheet feeding mechanism to complete the two rounds of collecting of the half-sheet flower basket, so that the flower basket moving device is suitable for both the half-sheet flower basket and the whole-sheet flower basket, with good compatibility, compact structure and low cost.

[0057] Optionally, the transverse driving member 3 includes at least one driving unit 31, and the driving unit 31 includes a first driving member 311 and a belt transmission member 312. The first driving member 311 is configured to drive the bearing mechanism 4 to reciprocate along the first horizontal direction through the belt transmission member 312. The first driving member 311 here is preferably a first motor. The driving unit 31 here can be one or two. When there are two driving units 31, one first motor can drive two belt transmission members 312 to operate at the same time, or two first motors can drive two belt transmission members 312 to operate respectively.

[0058] It can be seen that the driving unit 31 is provided to realize the translation function of the supporting mechanism 4 so that the storage cavity of the flower basket 8 can be accurately connected with the sheet feeding mechanism.

[0059] See Figure 3 The carrying mechanism 4 includes a flower basket transfer mechanism 41, which is configured to receive and support an empty flower basket 8 from a flower basket feeding line or to support a full flower basket 8 and move it to a flower basket receiving line.

[0060] It can be seen that the flower basket 8 is driven by providing the flower basket transfer mechanism 41 , thereby meeting the requirements for collecting and transporting the silicon wafers 7 .

[0061] Optionally, the supporting mechanism 4 also includes a transverse shift seat 42, which is installed on the driving end of the transverse shift drive member 3. The flower basket transfer mechanism 41 includes a conveying drive member 411 and at least one conveyor belt 412. The conveyor belt 412 is used to transfer and support the flower basket 8. The conveyor belt 412 is rotatably arranged on the transverse shift seat 42. The conveyor belt 412 extends along the second horizontal direction. The conveying drive member 411 is configured to drive all conveyor belts 412 to rotate to drive the supported flower basket 8 to move along the second horizontal direction, where the second horizontal direction is perpendicular to the first horizontal direction.

[0062] It can be seen that the flower basket 8 is supported and transferred by providing the conveyor belt 412, so as to facilitate the moving of an empty flower basket 8 in or the moving of a full flower basket 8 out.

[0063] Optionally, the conveying drive member 411 includes a second drive member 4111, a transmission assembly 4112 and a drive shaft 4113. The fixed end of the second drive member 4111 is installed on the transverse displacement seat 42. The driving end of the second drive member 4111 drives the drive shaft 4113 to rotate through the transmission assembly 4112. There are two conveyor belts 412 here. Each conveyor belt 412 is mounted on two conveyor wheels spaced apart along the second horizontal direction. The conveyor wheels are rotatably mounted on the transverse displacement seat 42. Both ends of the drive shaft 4113 are connected to the two conveyor wheels located at the same end of the two conveyor belts 412.

[0064] It can be seen that the driving shaft 4113 is driven to rotate by the second driving member 4111 and the transmission assembly 4112 , and the driving shaft 4113 is connected to the conveying wheels matched with the two conveyor belts 412 , thereby realizing the synchronous operation of the two conveyor belts 412 .

[0065] Optionally, the transmission assembly 4112 includes a driving pulley 41121, a driven pulley 41122 and a transmission belt 41123, the driving pulley 41121 is installed on the driving end of the second driving member 4111, and the second driving member 4111 is configured to drive the driving pulley 41121 to rotate. The second driving member 4111 here is preferably a second motor, the driving pulley 41121 is fixed on the rotating shaft of the second motor, the driven pulley 41122 is fixed on the driving shaft 4113, and the transmission belt 41123 is mounted on the driving pulley 41121 and the driven pulley 41122.

[0066] It can be seen that the transmission connection between the second driving member 4111 and the driving shaft 4113 is realized by the driving pulley 41121, the driven pulley 41122 and the transmission belt 41123, and the synchronous driving of the two conveyor belts 412 is realized, thereby meeting the transfer requirements of the flower basket 8.

[0067] Optionally, a limiting member 43 is provided on the transverse shift seat 42, and the flower basket 8 enters and exits from one end of the conveyor belt 412. The limiting member 43 is located at the other end of the conveyor belt 412, and the limiting member 43 is configured to limit the flower basket 8 on the conveyor belt 412. The limiting member 43 is specifically a block provided on the transverse shift seat 42 and close to the sheet feeding mechanism. The limiting member 43 can block the empty flower basket 8 received by the conveyor belt 412 to limit the final stopping position of the empty flower basket 8 on the conveyor belt 412, so as to facilitate the determination of the position of the empty flower basket 8 when collecting the silicon wafer 7, and ensure that the silicon wafer 7 can be accurately inserted into the empty flower basket 8 by the sheet feeding mechanism.

[0068] It can be seen that by setting the limiter 43 to limit the travel of the flower basket 8, it is ensured that the flower basket 8 is accurately docked with the wafer feeding mechanism. The wafer feeding mechanism can be a retractable conveyor line, which is used to convey the silicon wafer 7, and one end of the retractable conveyor line can be extended or retracted to insert the silicon wafer 7 into the flower basket 8.

[0069] Optionally, a guide assembly 6 is provided between the transverse shift seat 42 and the lifting seat 2 , wherein the guide assembly 6 is exemplified by a guide rail provided on the lifting seat 2 along a first horizontal direction, and the transverse shift seat 42 is slidably mounted on the guide rail and is driven by the transverse shift driving member 3 to reciprocate along the guide rail.

[0070] It can be seen that the guide assembly 6 ensures that the traverse seat 42 moves accurately along the first horizontal direction on the lifting seat 2.

[0071] Optionally, the positioning mechanism 5 includes a third driving member 51, a first clamping member 52, and a second clamping member 53. The first clamping member 52 and the second clamping member 53 can be arranged close to or far from each other on both sides of the supporting mechanism 4. The fixed end of the third driving member 51 is installed on the supporting mechanism 4, and the driving end of the third driving member 51 is connected to the first clamping member 52 and / or the second clamping member 53.

[0072] The third driving member 51 is configured to drive the first clamping member 52 and the second clamping member 53 to approach each other so as to clamp and fix the bottom of the flower basket 8 on the supporting mechanism 4; the third driving member 51 is also configured to drive the first clamping member 52 and the second clamping member 53 to move away from each other so as to loosen the bottom of the flower basket 8 on the supporting mechanism 4.

[0073] The third driving member 51 here is preferably a first cylinder that drives the first clamping member 52 to move, and the second clamping member 53 is fixedly installed on the transverse seat 42. The piston rod end of the first cylinder is connected to the first clamping member 52 through a connecting plate. The first cylinder drives the first clamping member 52 to move so as to achieve the first clamping member 52 and the second clamping member 53 to approach or move away from each other; the first clamping member 52 and the second clamping member 53 are preferably clamping plates respectively arranged on the outside of the two conveyor belts 412, and the two clamping plates are clamped to form a bottom clamp of the flower basket 8. The transverse seat 42 includes a support plate and two parallel first side plates and second side plates. The support plate and the first side plates and the second side plates enclose a U-shaped plate frame with the U-shaped opening of the plate frame facing upwards. The cylinder body of the first cylinder is fixed to the lower surface of the support plate, and the connecting plate is arranged on one side of the plate frame. The first clamping member 52 is movably arranged above the first side plate, and the second clamping member 53 is fixed to the upper end of the second side plate. The two conveying wheels matched with one conveying belt 412 are rotatably mounted on the inner surface of the first side plate, and the two conveying wheels matched with the other conveying belt 412 are rotatably mounted on the inner surface of the second side plate. The second driving member 4111 is fixed to the upper surface of the support plate, and the upper surface of the second driving member 4111 is lower than the conveying surface of the conveying belt 412 to prevent the second driving member 4111 from affecting the conveying and supporting of the flower basket 8 by the conveying belt 412. The limiting member 43 is fixed at the edge of the support plate.

[0074] It can be seen that by setting the third driving member 51 to drive the first clamping member 52 to approach or move away from the second clamping member 53, the bottom of the flower basket 8 is clamped or loosened, so as to stabilize the position of the flower basket 8 when collecting the silicon wafers 7, and release the flower basket 8 after it is filled with silicon wafers 7.

[0075] Optionally, the positioning mechanism 5 includes a fourth driving member 54 and a pressing member 55, the pressing member 55 is located above the flower basket 8, the fixed end of the fourth driving member 54 is installed on the lifting seat 2, and the driving end of the fourth driving member 54 is connected to the pressing member 55;

[0076] The fourth driving member 54 is configured to drive the pressing member 55 to descend and press against the top of the flower basket 8 to press and fix the flower basket 8 on the supporting mechanism 4; the fourth driving member 54 is also configured to drive the pressing member 55 to ascend and leave the flower basket 8 to loosen the flower basket 8 on the supporting mechanism 4.

[0077] The fourth driving member 54 here is preferably a second cylinder installed on the lifting seat 2 and arranged toward the bearing plane of the two conveyor belts 412; the clamping member 55 is preferably a pressure plate installed on the output rod of the second cylinder, and the pressure plate applies pressure to the top of the flower basket 8 to fix the flower basket 8 on the conveyor belt 412.

[0078] It can be seen that by setting the fourth driving member 54 to drive the pressing member 55 to move relatively, the flower basket 8 on the supporting mechanism 4 can be pressed or loosened, so as to stabilize the position of the flower basket 8 when collecting silicon wafers, and release the flower basket 8 after being filled with silicon wafers.

[0079] Optionally, the lifting drive member 1 is set as a linear module, and the lifting seat 2 is installed on the slide of the linear module to meet the lifting and moving requirements of the flower basket 8. The lifting seat 2 includes a horizontal bottom plate and a horizontal top plate, the top plate is arranged above the bottom plate and the two are connected by a plurality of vertical plates or pillars, the lateral seat 42 is movably installed on the bottom plate of the lifting seat 2, the lateral drive member 3 is installed on the bottom plate of the lifting seat 2, and the fourth drive member 54 is installed on the lower surface of the top plate of the lifting seat 2. There are openings between the plates of the lifting seat 2, between the pillars, or on the plate surface of the plate body for silicon wafers to enter and exit the flower basket or for the entire flower basket to enter and exit the lifting seat 2.

[0080] It should be noted that the above-mentioned optional implementation modes can be combined in any combination, and the combined implementation modes all fall within the protection scope of this application.

[0081] In view of the working condition that the whole flower basket collects the whole silicon wafer, the flower basket moving device has a storage cavity for storing the whole silicon wafer. The specific action process is as follows:

[0082] 1) Using the conveying driving member 411 to drive the conveying belt 412 to rotate so as to receive the external whole flower basket on the conveying belt 412, and the limiting member 43 limits the final stop position of the whole flower basket;

[0083] 2) Using the lifting drive 1 and the lateral drive 3 to adjust the position of the whole flower basket, so that the whole flower basket moves to a position where it docks with the sheet feeding mechanism;

[0084] 3) The wafer feeding mechanism inserts the whole silicon wafers into the whole wafer basket one by one. During the process, the whole wafer basket is lifted and lowered by the lifting driving member 1 so as to insert the whole silicon wafers into different layers of the whole wafer basket;

[0085] 4) The conveyor driving member 411 is used to drive the conveyor belt 412 to rotate so as to remove the full flower basket.

[0086] In view of the working condition of collecting half silicon wafers in a half-wafer basket, the basket moving device is provided with two storage chambers for storing half silicon wafers arranged in the first horizontal direction. For the convenience of description, the two storage chambers are divided into a first chamber and a second chamber in parallel. The first chamber is used to place one column of half silicon wafers, and the second chamber is used to place the other column of half silicon wafers. The specific action process is as follows:

[0087] 1) Using the conveying driving member 411 to drive the conveying belt 412 to rotate so as to receive the outer half-flower basket on the conveying belt 412, and the limiting member 43 limits the final stop position of the half-flower basket;

[0088] 2) Using the lifting drive 1 and the lateral drive 3 to adjust the position of the half-sheet flower basket, so that the first chamber of the half-sheet flower basket moves to a position where it docks with the sheet feeding mechanism;

[0089] 3) The wafer feeding mechanism inserts the half-wafers into the first chamber one by one. During the process, the lifting drive 1 controls the lifting of the half-wafer basket to fill the entire row of the first chamber with half-wafers.

[0090] 4) Using the transverse driving member 3 to adjust the position of the half-sheet basket, the second chamber of the half-sheet basket moves to a position where it docks with the sheet feeding mechanism;

[0091] 5) The wafer feeding mechanism inserts the half-wafers into the second chamber one by one. During the process, the lifting drive 1 controls the lifting of the half-wafer basket to fill the entire row of the second chamber with half-wafers.

[0092] 6) The entire half-flower basket is full, and the conveyor drive member 411 is used to drive the conveyor belt 412 to rotate to remove the full half-flower basket.

[0093] It should be noted that the present application can not only insert the silicon wafer 7 into the empty flower basket 8 to realize wafer collection, but also utilize the wafer feeding mechanism to take out the whole silicon wafer in the whole flower basket or the half silicon wafer in the half flower basket to realize wafer retrieval. The wafer retrieval process is opposite to the above-mentioned wafer collection process, and no detailed description is given.

[0094] Therefore, the flower basket moving device proposed in the present application is suitable for both full-wafer flower baskets and half-wafer flower baskets, and is used for collecting and taking out full-wafer or half-wafer silicon wafers, and has good compatibility.

[0095] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above embodiments. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A flower basket moving device, characterized in that: The flower basket moving device comprises a lifting drive member, a lifting seat, a transverse driving member, a bearing mechanism and a positioning mechanism, wherein: The driving end of the lifting drive member is connected to the lifting seat, and the lifting drive member is configured to drive the lifting seat to move up and down; The bearing mechanism and the transverse driving member are installed on the lifting seat, and the driving end of the transverse driving member is connected to the bearing mechanism; The carrying mechanism is configured to carry a flower basket, and the flower basket is a whole flower basket or a half flower basket, and the half flower basket has two storage cavities arranged in a first horizontal direction; the transverse driving member is configured to drive the carrying mechanism to make the carried flower basket reciprocate along the first horizontal direction, so that the storage cavity of the sheet to be stored in the flower basket is docked with the corresponding sheet feeding mechanism; The positioning mechanism is configured to fix the flower basket on the carrying mechanism or release the flower basket on the carrying mechanism.

2. The flower basket moving device according to claim 1, characterized in that: The transverse driving member includes at least one driving unit, and the driving unit includes a first driving member and a belt transmission member. The first driving member is configured to drive the supporting mechanism to reciprocate along the first horizontal direction through the belt transmission member.

3. The flower basket moving device according to claim 1, characterized in that: The carrying mechanism comprises a flower basket transfer mechanism, which is configured to receive and support empty flower baskets from a flower basket feeding line or support full flower baskets and move them to a flower basket receiving line.

4. The flower basket moving device according to claim 3, characterized in that: The bearing mechanism further comprises a transverse shift seat, and the transverse shift seat is mounted on the driving end of the transverse shift driving member; The flower basket transfer mechanism includes a conveying drive and at least one conveyor belt, wherein the conveyor belt is used to transfer and support the flower basket, and the conveyor belt is rotatably disposed on the transverse shift seat, and the conveyor belt extends along a second horizontal direction. The conveying drive is configured to drive all conveyor belts to rotate to drive the supported flower basket to move along the second horizontal direction.

5. The flower basket moving device according to claim 4, characterized in that: The conveying drive member includes a second drive member, a transmission assembly and a driving shaft. The fixed end of the second drive member is installed on the transverse shift seat. The driving end of the second drive member drives the driving shaft to rotate through the transmission assembly. There are two conveyor belts. Each of the conveyor belts is mounted on two conveying wheels spaced apart along the second horizontal direction. The conveying wheels are rotatably mounted on the transverse shift seat. Both ends of the driving shaft are connected to the two conveying wheels located at the same end of the two conveyor belts.

6. The flower basket moving device according to claim 5, characterized in that: The transmission assembly includes a driving pulley, a driven pulley and a transmission belt, the driving pulley is installed on the driving end of the second driving member, the second driving member is configured to drive the driving pulley to rotate, the driven pulley is fixed on the driving shaft, and the transmission belt is sleeved on the driving pulley and the driven pulley.

7. The flower basket moving device according to claim 4, characterized in that: A limiting member is arranged on the transverse shift seat, the flower basket enters and exits from one end of the conveyor belt, the limiting member is located at the other end of the conveyor belt, and the limiting member is configured to limit the flower basket on the conveyor belt.

8. The flower basket moving device according to claim 4, characterized in that: A guide assembly is arranged between the transverse shift seat and the lifting seat.

9. The flower basket moving device according to claim 1, characterized in that: The positioning mechanism comprises a third driving member, a first clamping member and a second clamping member, wherein the first clamping member and the second clamping member can be arranged close to or far from each other on both sides of the bearing mechanism, a fixed end of the third driving member is mounted on the bearing mechanism, and a driving end of the third driving member is connected to the first clamping member and / or the second clamping member; The third driving member is configured to drive the first clamping member and the second clamping member to move closer to each other, so as to clamp and fix the bottom of the flower basket on the carrying mechanism; The third driving member is further configured to drive the first clamping member and the second clamping member to move away from each other so as to loosen the bottom of the flower basket on the supporting mechanism.

10. The flower basket moving device according to claim 1 or 9, characterized in that: The positioning mechanism comprises a fourth driving member and a pressing member, wherein the pressing member is located above the flower basket, a fixed end of the fourth driving member is mounted on the lifting seat, and a driving end of the fourth driving member is connected to the pressing member; The fourth driving member is configured to drive the pressing member to descend and press against the top of the flower basket to press and fix the flower basket on the carrying mechanism; The fourth driving member is further configured to drive the pressing member to rise and leave the flower basket to release the flower basket on the carrying mechanism.

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