Silicon wafer transferring device

Abstract

The utility model discloses a silicon wafer transferring device which comprises a main conveying line, a conveying mechanism, a wafer feeding mechanism, a basket lifting and receiving mechanism and a first cache line, the main conveying line and the wafer feeding mechanism are arranged in parallel, the wafer feeding mechanism is located on the side edge of the main conveying line, and a basket is borne on the basket lifting and receiving mechanism; a material inlet of the flower basket is in butt joint with the output end of the sheet feeding mechanism; the main conveying line is configured to convey silicon wafers along a first direction; the conveying mechanism is configured to transfer the silicon wafers on the main conveying line to the wafer feeding mechanism; the wafer feeding mechanism is configured to feed received silicon wafers into a basket of the basket lifting and receiving mechanism along a first direction; the flower basket lifting and receiving mechanism comprises a flower basket conveying belt used for bearing flower baskets, the flower basket conveying belt of the flower basket lifting and receiving mechanism is in butt joint with the first temporary storage line, and the flower basket conveying belt transfers the flower baskets full of silicon wafers to the first temporary storage line in the first direction. According to the silicon wafer transferring device, a carrying mechanical arm is omitted, the efficiency is high, the productivity is high, and the safety is high.

Description

Technical Field

[0001] The present application relates to the field of silicon wafer production equipment manufacturing, and in particular to a silicon wafer transfer device. Background Art

[0002] During the processing of silicon wafers, it is usually necessary to collect the silicon wafers into baskets for transportation. Existing baskets are usually transported by a robot, which is movably mounted on a truss. The robot moves back and forth, which has low transportation efficiency and high cost. In addition, the robot is suspended at a high altitude. If the basket accidentally falls from the robot during the transportation process, it will cause safety hazards. Utility Model Content

[0003] The purpose of the present application is to provide a silicon wafer transfer device to solve the problems of low transport efficiency and potential safety hazards when using a robot to transport a flower basket.

[0004] To achieve the above objectives, this application adopts the following technical solutions:

[0005] A silicon wafer transfer device comprises a main conveying line, a conveying mechanism, a wafer feeding mechanism, a basket lifting and receiving mechanism and a first buffer line, wherein:

[0006] The main conveying line is arranged in parallel with the sheet feeding mechanism, which is located on the side of the main conveying line. The flower basket is carried on the flower basket lifting and receiving mechanism, and the inlet of the flower basket is connected with the output end of the sheet feeding mechanism.

[0007] The main conveying line is configured to convey the silicon wafer along a first direction;

[0008] The conveying mechanism is configured to transfer the silicon wafers on the main conveying line to the wafer feeding mechanism;

[0009] The wafer feeding mechanism is configured to feed the received silicon wafer into the flower basket of the flower basket lifting and receiving mechanism along the first direction;

[0010] The flower basket lifting and receiving mechanism includes a flower basket conveyor belt for carrying the flower basket. The flower basket conveyor belt of the flower basket lifting and receiving mechanism is connected to the first cache line. The flower basket conveyor belt transfers the flower basket full of silicon wafers to the first cache line along the first direction.

[0011] In the present application, the conveying direction of the sheet feeding mechanism, the conveying direction of the flower basket conveyor belt in the flower basket lifting and receiving mechanism, and the conveying direction of the first cache line are all along the first direction, so that the flower basket located above the flower basket conveyor belt in the flower basket lifting and receiving mechanism can directly connect with the sheet feeding mechanism to collect silicon wafers. After the flower basket is full of silicon wafers, the flower basket does not need to be rotated and reversed, and the flower basket conveyor belt is directly connected to the first cache line to transfer the flower basket full of silicon wafers to the first cache line, eliminating the need for a handling robot, with high efficiency, high production capacity, and low cost, avoiding high-altitude handling operations by the robot, and high safety.

[0012] Optionally, at least one reversing position is arranged along the first direction of the main conveyor line, and each reversing position is respectively equipped with a transfer unit, which includes a conveying mechanism, a wafer feeding mechanism, a basket lifting and receiving mechanism and a first cache line. The conveying mechanism in each transfer unit is configured to move the silicon wafer at the corresponding reversing position to the wafer feeding mechanism.

[0013] By setting multiple reversing positions on the main conveyor line and correspondingly setting multiple transfer units, the silicon wafers on the main conveyor line can be transferred to multiple wafer feeding mechanisms for subsequent loading into flower baskets, which greatly improves the efficiency of silicon wafer transfer. Moreover, each transfer unit is independent of each other, and if one transfer unit is damaged, it will not affect the operation of other transfer units.

[0014] Optionally, the conveying mechanism includes a first conveying unit and a second conveying unit, the second conveying unit is arranged in parallel with the main conveying line, the second conveying unit is connected to the wafer feeding mechanism, the first conveying unit is configured to move the silicon wafer on the main conveying line to the second conveying unit, and the second conveying unit is configured to receive the silicon wafer conveyed by the first conveying unit and convey the received silicon wafer to the wafer feeding mechanism along the first direction;

[0015] Alternatively, the conveying mechanism includes a first conveying unit, and the first conveying unit is configured to move the silicon wafers on the main conveying line to the wafer feeding mechanism.

[0016] Among them, the conveying mechanism includes a first conveying unit and a second conveying unit, or the conveying mechanism only includes the first conveying unit, to realize the transfer of silicon wafers from the main conveying line to the wafer feeding mechanism. When the conveying stroke of the first conveying unit is insufficient, the second conveying unit will compensate for it.

[0017] Optionally, the first conveying unit includes a mounting frame and at least one conveying unit, the conveying direction of the conveying unit is along the second direction, the conveying unit is assembled on the mounting frame, the conveying unit includes a first conveying frame, a first conveyor belt, a first driving member and an adsorption assembly, the first conveyor belt is rotatably mounted on the first conveying frame, the first driving member is mounted on the first conveying frame, the adsorption assembly is mounted on the first conveying frame, the adsorption surface of the adsorption assembly is higher than the conveying surface of the first conveyor belt, the adsorption assembly is configured to non-contactly adsorb the silicon wafers on the main conveying line and adsorb the silicon wafers on the conveying surface of the first conveyor belt, and the first driving member is configured to drive the first conveyor belt to rotate so as to move the silicon wafers on the conveying surface of the first conveyor belt along the second direction to the second conveying unit or the film feeding mechanism.

[0018] The silicon wafers are loaded and unloaded from the main conveyor line through the first conveying unit, and are transferred to the second conveying unit or the wafer feeding mechanism along the second direction.

[0019] Optionally, the second conveying unit includes a second conveying frame, a second conveying belt and a second driving member, the second conveying belt is rotatably mounted on the second conveying frame, the second driving member is mounted on the second conveying frame, the second driving member is configured to drive the second conveying belt to rotate, and the second conveying frame can approach or move away from the sheet feeding mechanism along the first direction;

[0020] The second conveying frame is away from the film feeding mechanism along the first direction, so that a travel channel is formed between the second conveying unit and the film feeding mechanism.

[0021] By giving the second conveying frame the function of being able to approach or move away from the film feeding mechanism along the first direction, a passage is formed between the second conveying unit and the film feeding mechanism for people to pass through for inspection or other operations.

[0022] Optionally, the wafer feeding mechanism includes a base, a fixed conveyor frame, a movable conveyor frame, a third conveyor belt, a third driving member and a wafer feeding driving member, the fixed conveyor frame is fixed on the base, the movable conveyor frame can be installed on the base close to or away from the base along the first direction, the fixed end of the wafer feeding driving member is installed on the base, the driving end of the wafer feeding driving member is connected to the movable conveyor frame, the third conveyor belt is rotatably and telescopically installed on the fixed conveyor frame and the movable conveyor frame, the conveying direction of the third conveyor belt is along the first direction, the third driving member is configured to drive the third conveyor belt to rotate, and the third conveyor belt is configured to receive and transport the silicon wafer;

[0023] The wafer feeding drive is configured to drive the movable conveyor frame to move along the first direction close to the flower basket lifting and receiving mechanism to drive the third conveyor belt to extend and feed the silicon wafers on the third conveyor belt into the flower basket of the flower basket lifting and receiving mechanism.

[0024] By driving the movable conveyor frame to reciprocate along the first direction relative to the flower basket lifting and receiving mechanism, and cooperating with the third conveyor belt, the silicon wafers are delivered into the flower basket of the flower basket lifting and receiving mechanism, and the action of neatly loading the silicon wafers into the flower basket is completed.

[0025] Optionally, the flower basket lifting and receiving mechanism includes a lifting drive member, a lifting seat and a positioning mechanism, wherein:

[0026] The driving end of the lifting drive is connected to the lifting seat, and the lifting drive is configured to drive the lifting seat to move up and down to a preset height each time;

[0027] The flower basket conveyor belt is arranged on the lifting seat;

[0028] The positioning mechanism is configured to fix the flower basket on the flower basket conveyor belt or release the flower basket on the flower basket conveyor belt;

[0029] The lifting drive member drives the lifting seat to lift a preset height each time, so that an empty slot in the flower basket is flush with the conveying surface of the output end of the wafer feeding mechanism, so that the wafer feeding mechanism inserts the silicon wafer into the slot of the flower basket.

[0030] The flower basket is driven to move up and down by driving the lifting seat to accurately receive the silicon wafers delivered by the wafer feeding mechanism, ensuring that the silicon wafers are neatly stacked in the flower basket.

[0031] Optionally, the flower basket lifting and receiving mechanism further includes a transverse shift seat and a transverse shift driving member, wherein:

[0032] The flower basket conveyor belt is arranged on the transverse shift seat, and the flower basket is provided with at least one row of storage chambers in the second direction, and the storage chambers are configured to store half a silicon wafer or a whole silicon wafer. The transverse shift seat can be reciprocatingly mounted on the lifting seat along the second direction, and the fixed end of the transverse shift driving member is mounted on the lifting seat, and the driving end of the transverse shift driving member is connected to the transverse shift seat, and the transverse shift driving member is configured to drive the transverse shift seat to reciprocate along the second direction so as to connect each row of storage chambers in the flower basket to the sheet conveying mechanism.

[0033] The flower basket is driven to move back and forth along the second direction by driving the transverse shift seat, so that the working condition of the whole flower basket collecting the whole silicon wafer can be met, and the working condition of the half flower basket collecting the half silicon wafer can be met.

[0034] Optionally, the silicon wafer transfer device further includes a second cache line, which is configured to cache empty flower baskets and automatically convey the cached empty flower baskets to the flower basket conveyor belt.

[0035] The flower basket filled with silicon wafers is output through the first cache line, and the empty flower basket is input through the second cache line, so that the flower basket can be loaded and unloaded in an orderly manner, thereby improving the silicon wafer loading efficiency.

[0036] Optionally, a wafer feeding mechanism, a flower basket lifting and receiving mechanism and a first cache line are provided on both sides of the main conveyor line; the conveying mechanism is also configured to first move the silicon wafers on the main conveyor line to the wafer feeding mechanism on one side, and after the flower basket in the flower basket lifting and receiving mechanism on one side is full of silicon wafers, move the silicon wafers on the main conveyor line to the wafer feeding mechanism on the other side.

[0037] By designing the flower basket in the flower basket lifting and collecting mechanism on one side of the main conveyor line to collect materials first, and when it is full, the flower basket on the other side of the main conveyor line will collect materials, so as to achieve orderly transportation of silicon wafers and flower baskets and improve the efficiency of silicon wafer transfer. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present application, the following briefly introduces the background technology of the present application and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present application and these drawings without paying any creative work.

[0039] Figure 1is a schematic diagram of the three-dimensional structure of a silicon wafer transfer device provided in an embodiment of the present application;

[0040] Figure 2 is a structural schematic diagram of a first conveying unit in a silicon wafer transfer device provided in an embodiment of the present application;

[0041] Figure 3 is a structural schematic diagram of a second conveying unit in a silicon wafer transfer device provided in an embodiment of the present application;

[0042] Figure 4 It is a structural schematic diagram of a wafer feeding mechanism in a silicon wafer transfer device provided in an embodiment of the present application;

[0043] Figure 5 The structure diagram of the basket lifting and receiving mechanism in the silicon wafer transfer device provided in the embodiment of the present application is shown in FIG. Figure 1 ;

[0044] Figure 6 The structure diagram of the basket lifting and receiving mechanism in the silicon wafer transfer device provided in the embodiment of the present application is shown in FIG. Figure 2 .

[0045] Figures 1 to 6 The following reference numerals are included:

[0046] Main conveyor line 1, reversing position 11;

[0047] Conveying mechanism 2, first conveying unit 21, mounting frame 211, first conveying frame 212, first conveying belt 213, first driving member 214, adsorption assembly 215, second conveying unit 22, second conveying frame 221, second conveying belt 222, second driving member 223;

[0048] The film feeding mechanism 3 comprises a base 31, a fixed conveying frame 32, a movable conveying frame 33, a third conveying belt 34, a third driving member 35, and a film feeding driving member 36;

[0049] Flower basket lifting and receiving mechanism 4, flower basket conveyor belt 41, lifting drive member 42, lifting seat 43, first clamping strip 441, second clamping strip 442, pressing plate 443, transverse seat 45, transverse drive member 46;

[0050] First cache line 5;

[0051] Second cache line 6. DETAILED DESCRIPTION

[0052] In order to make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved more clearly, the technical solutions of the embodiments of this application will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of this application.

[0053] In the existing silicon wafer production process, silicon wafers need to be collected in baskets and then transported. The baskets are usually transported by a robot mounted on a truss. The robot moves back and forth, resulting in low transportation efficiency and high costs. In addition, there are safety hazards in high-altitude operations.

[0054] In this regard, the present application provides a silicon wafer transfer device, which efficiently and orderly transports silicon wafers and flower baskets in the form of a conveyor line, replacing the high-altitude handling operation of a robot, thereby improving the efficiency and safety of transportation. Figures 1 to 6 As shown, the silicon wafer transfer device provided in the embodiment of the present application includes a main conveying line 1, a conveying mechanism 2, a wafer feeding mechanism 3, a basket lifting and receiving mechanism 4 and a first buffer line 5.

[0055] The main conveying line 1 is arranged in parallel with the film feeding mechanism 3, the film feeding mechanism 3 is located on the side of the main conveying line 1, the flower basket is carried on the flower basket lifting and receiving mechanism 4, and the inlet of the flower basket is connected to the output end of the film feeding mechanism 3;

[0056] The main conveying line 1 is configured to convey silicon wafers along a first direction;

[0057] The conveying mechanism 2 is configured to transfer the silicon wafers on the main conveying line 1 to the wafer feeding mechanism 3;

[0058] The wafer feeding mechanism 3 is configured to feed the received silicon wafer into the basket of the basket lifting and receiving mechanism 4 along the first direction;

[0059] The flower basket lifting and receiving mechanism 4 includes a flower basket conveyor belt 41 for carrying the flower basket. The flower basket conveyor belt 41 of the flower basket lifting and receiving mechanism 4 is connected to the first cache line 5. The flower basket conveyor belt 41 transfers the flower basket full of silicon wafers to the first cache line 5 along the first direction.

[0060] The conveying direction of the wafer feeding mechanism 3 in the silicon wafer transfer device proposed in the present application, the conveying direction of the flower basket conveyor belt 41 in the flower basket lifting and receiving mechanism 4, and the conveying direction of the first cache line 5 are all along the first direction, so that the flower basket located above the flower basket conveyor belt 41 in the flower basket lifting and receiving mechanism 4 can directly connect with the wafer feeding mechanism 3 to collect silicon wafers. After the flower basket is full of silicon wafers, the flower basket does not need to be rotated and reversed, and the flower basket conveyor belt 41 is directly connected to the first cache line 5 to transfer the flower basket full of silicon wafers to the first cache line 5, eliminating the need for a handling robot, with high efficiency, high production capacity, and low cost, avoiding the high-altitude handling operation of the robot, and high safety.

[0061] Optionally, at least one reversing position 11 is provided on the main conveying line 1 along the first direction, and each reversing position 11 is respectively equipped with a transfer unit. Figure 1 Two reversing positions 11 are used as an example. The transfer unit here includes a conveying mechanism 2, a wafer feeding mechanism 3, a basket lifting and receiving mechanism 4 and a first cache line 5. The conveying mechanism 2 in each transfer unit is configured to move the silicon wafer at the corresponding reversing position 11 to the wafer feeding mechanism 3.

[0062] It can be seen that by setting multiple reversing positions 11 on the main conveyor line 1 and correspondingly setting multiple transfer units, the silicon wafers on the main conveyor line 1 can be transferred to multiple wafer feeding mechanisms 3 for subsequent loading into flower baskets, which greatly improves the silicon wafer transfer efficiency. Moreover, each transfer unit is independent of each other. If one of the transfer units is damaged, it will not affect the operation of other transfer units, thereby ensuring the silicon wafer transfer efficiency.

[0063] As an optional solution, the conveying mechanism 2 includes a first conveying unit 21 and a second conveying unit 22. The second conveying unit 22 is arranged parallel to the main conveying line 1, and the second conveying unit 22 is connected to the wafer feeding mechanism 3. The first conveying unit 21 is configured to move the silicon wafers on the main conveying line 1 to the second conveying unit 22, and the second conveying unit 22 is configured to receive the silicon wafers conveyed by the first conveying unit 21 and convey the received silicon wafers to the wafer feeding mechanism 3 along the first direction.

[0064] As another optional solution, the conveying mechanism 2 only includes the first conveying unit 21 , and the first conveying unit 21 is configured to move the silicon wafers on the main conveying line 1 to the wafer feeding mechanism 3 .

[0065] It can be seen that the conveying mechanism 2 includes the first conveying unit 21 and the second conveying unit 22, or the conveying mechanism 2 only includes the first conveying unit 21, both of which can realize the transfer of silicon wafers from the main conveying line 1 to the wafer feeding mechanism 3. When the conveying stroke of the first conveying unit 21 is insufficient, the second conveying unit 22 can compensate for it to ensure that the silicon wafers at each reversing position 11 can be transferred to the corresponding wafer feeding mechanism 3.

[0066] Optional, see Figure 2 The first conveying unit 21 includes a mounting frame 211 and at least one conveying unit. The conveying direction of the conveying unit is along the second direction. The conveying unit is assembled on the mounting frame 211. The conveying unit includes a first conveying frame 212, a first conveying belt 213, a first driving member 214 and an adsorption assembly 215, wherein:

[0067] The first conveyor belt 213 is rotatably mounted on the first conveyor frame 212;

[0068] The first driving member 214 is installed on the first conveying frame 212, and the first driving member 214 is preferably a motor;

[0069] The adsorption assembly 215 is installed on the first conveyor frame 212. The adsorption surface of the adsorption assembly 215 is higher than the conveying surface of the first conveyor belt 213. The adsorption assembly 215 is configured to adsorb the silicon wafers on the main conveyor line 1 in a non-contact manner, such as by negative pressure adsorption, and adsorb the silicon wafers on the conveying surface of the first conveyor belt 213.

[0070] The first driving member 214 is configured to drive the first conveyor belt 213 to rotate, so as to move the silicon wafers on the conveying surface of the first conveyor belt 213 along the second direction to the second conveying unit 22 or the wafer feeding mechanism 3 .

[0071] It can be seen that the silicon wafers are unloaded from the main conveyor line 1 through the first conveyor unit 21 and transferred to the second conveyor unit 22 or the wafer feeding mechanism 3 along the second direction.

[0072] Optional, see Figure 3 The second conveying unit 22 includes a second conveying frame 221, a second conveying belt 222, and a second driving member 223, wherein:

[0073] The second conveyor belt 222 is rotatably mounted on the second conveyor frame 221;

[0074] The second driving member 223 is installed on the second conveying frame 221, and the second driving member 223 is configured to drive the second conveying belt 222 to rotate. Here, the second driving member 223 is preferably a motor;

[0075] The second conveying frame 221 can approach or move away from the film feeding mechanism 3 along the first direction. In order to reduce costs, the second conveying frame 221 can be pushed manually. A guide rail for limiting and guiding the second conveying frame 221 is set on the ground. When the second conveying frame 221 moves away from the film feeding mechanism 3 along the first direction, a passage is formed between the second conveying unit 22 and the film feeding mechanism 3.

[0076] It can be seen that by giving the second conveying frame 221 the function of being able to approach or move away from the film feeding mechanism 3 along the first direction, a passage can be formed between the second conveying unit 22 and the film feeding mechanism 3 for people to pass through for inspection or other operations.

[0077] Optional, see Figure 4 The film feeding mechanism 3 includes a base 31, a fixed conveying frame 32, a movable conveying frame 33, a third conveying belt 34, a third driving member 35 and a film feeding driving member 36, wherein:

[0078] The fixed conveying frame 32 is fixed on the base 31;

[0079] The movable conveyor frame 33 can be installed on the base 31 to move closer or farther along the first direction;

[0080] The fixed end of the sheet feeding driving member 36 is mounted on the base 31, and the driving end of the sheet feeding driving member 36 is connected to the movable conveying frame 33. Here, the sheet feeding driving member 36 is preferably a rodless cylinder, and the slider of the rodless cylinder drives the movable conveying frame 33 to reciprocate relative to the fixed conveying frame 32;

[0081] The third conveyor belt 34 is rotatably and telescopically installed on the fixed conveyor frame 32 and the movable conveyor frame 33, and the conveying direction of the third conveyor belt 34 is along the first direction;

[0082] The third driving member 35 is configured to drive the third conveyor belt 34 to operate. The third conveyor belt 34 is configured to receive and convey silicon wafers. Here, the third driving member 35 is preferably a motor;

[0083] The wafer feeding drive 36 is configured to drive the movable conveyor frame 33 to move along the first direction close to the flower basket lifting and receiving mechanism 4 to drive the third conveyor belt 34 to extend and feed the silicon wafers on the third conveyor belt 34 into the flower basket of the flower basket lifting and receiving mechanism 4.

[0084] It can be seen that by driving the movable conveyor frame 33 to reciprocate along the first direction relative to the flower basket lifting and collecting mechanism 4, and cooperating with the third conveyor belt 34, the silicon wafers can be delivered into the flower basket of the flower basket lifting and collecting mechanism 4, and the action of neatly loading the silicon wafers into the flower basket can be completed.

[0085] Optional, see Figure 5 and Figure 6 The flower basket lifting and receiving mechanism 4 includes a lifting driving member 42, a lifting seat 43 and a positioning mechanism, wherein:

[0086] The driving end of the lifting drive member 42 is connected to the lifting seat 43, and the lifting drive member 42 is configured to drive the lifting seat 43 to move up and down to a preset height each time. Here, the lifting drive member 42 is preferably a linear module;

[0087] The flower basket conveyor belt 41 is arranged on a lifting seat 43;

[0088] The positioning mechanism is configured to fix the flower basket on the flower basket conveyor belt 41 or release the flower basket on the flower basket conveyor belt 41;

[0089] The lifting drive 42 drives the lifting seat 43 to lift a preset height each time, so that an empty slot in the flower basket is flush with the conveying surface of the output end of the wafer feeding mechanism 3, so that the wafer feeding mechanism 3 inserts the silicon wafer into the slot of the flower basket.

[0090] It can be seen that the lifting seat 43 is driven to lift the flower basket to accurately receive the silicon wafers delivered by the wafer delivery mechanism 3, thereby ensuring that the silicon wafers are neatly stacked in the flower basket.

[0091] Optionally, the flower basket lifting and collecting mechanism 4 also includes a transverse shift seat 45 and a transverse shift driving member 46, wherein the flower basket conveyor belt 41 is arranged on the transverse shift seat 45, and the flower basket is provided with at least one row of storage chambers in the second direction, and the storage chambers are configured to store half silicon wafers or whole silicon wafers, and the transverse shift seat 45 can be installed on the lifting seat 43 to reciprocate along the second direction, and the fixed end of the transverse shift driving member 46 is installed on the lifting seat 43, and the driving end of the transverse shift driving member 46 is connected to the transverse shift seat 45, and the transverse shift driving member 46 is configured to drive the transverse shift seat 45 to reciprocate along the second direction so as to connect each row of storage chambers in the flower basket to the sheet feeding mechanism 3, and the transverse shift driving member 46 here is preferably driven by a motor plus a belt, that is, the motor drives the transverse shift seat 45 to move through the belt.

[0092] It can be seen that by driving the transverse shift seat 45 to drive the flower basket to move back and forth along the second direction, it can meet the working conditions of the whole flower basket collecting a whole silicon wafer and the half flower basket collecting a half silicon wafer, and has better compatibility.

[0093] Optionally, the lifting seat 43 includes a horizontal bottom plate and a horizontal top plate, the top plate is arranged above the bottom plate and the two are connected by a plurality of vertical plates or pillars, and the transverse seat 45 is movably mounted on the bottom plate. To ensure the smooth movement of the transverse seat 45, the transverse seat 45 and the bottom plate are guided and matched by a slider and a linear guide. The positioning mechanism includes a clamping mechanism and a pressing mechanism, the clamping mechanism is installed on the transverse seat 45, the clamping mechanism includes a first clamping strip 441 and a second clamping strip 442, the first clamping strip 441 is fixed on the transverse seat 45, and the second clamping strip 442 is driven by a clamping cylinder to move close to or away from the first clamping strip 441, the first clamping strip 441 and the second clamping strip 442 can clamp the lower end of the flower basket when they are close to each other, and release the flower basket when the first clamping strip 441 and the second clamping strip 442 are away from each other. The pressing mechanism is installed on the top plate, and the pressing mechanism includes a pressing cylinder and a pressing plate 443. The pressing cylinder is used to drive the pressing plate 443 to move up and down, so as to use the pressing plate 443 to press the upper end of the flower basket.

[0094] Optionally, the silicon wafer transfer device further includes a second cache line 6 , which is configured to cache empty flower baskets and automatically convey the cached empty flower baskets to the flower basket conveyor belt 41 .

[0095] It can be seen that by outputting a basket full of silicon wafers through the first cache line 5 and inputting an empty basket through the second cache line 6, the baskets can be loaded and unloaded in an orderly manner, thereby improving the efficiency of silicon wafer loading.

[0096] Optionally, a wafer feeding mechanism 3, a flower basket lifting and receiving mechanism 4 and a first cache line 5 are provided on both sides of the main conveyor line 1; the conveyor mechanism 2 is also configured to first move the silicon wafers on the main conveyor line 1 to the wafer feeding mechanism 3 on one side, and after the flower basket in the flower basket lifting and receiving mechanism 4 on one side is full of silicon wafers, move the silicon wafers on the main conveyor line 1 to the wafer feeding mechanism 3 on the other side.

[0097] It can be seen that by designing the flower basket in the flower basket lifting and receiving mechanism 4 located on one side of the main conveyor line 1 to receive materials first, and then the flower basket located on the other side of the main conveyor line 1 receives materials after it is full, the silicon wafers and flower baskets can be transported in an orderly manner, thereby improving the silicon wafer transfer efficiency.

[0098] It should be noted that the above-mentioned optional implementation modes can be combined in any combination, and the combined implementation modes all fall within the protection scope of this application.

[0099] The specific working process of the silicon wafer transfer device is as follows:

[0100] 1) The second buffer line 6 conveys the empty flower baskets to the flower basket conveyor belt 41 in the flower basket lifting and receiving mechanism 4, and the flower baskets are fixed on the flower basket conveyor belt 41 by the positioning mechanism;

[0101] 2) The silicon wafer is transported from the main conveyor line 1 to the reversing position 11;

[0102] 3) The first conveying unit 21 absorbs and conveys the silicon wafer at the reversing position 11 to the second conveying unit 22, and then to the wafer conveying mechanism 3, or the first conveying unit 21 directly conveys the silicon wafer to the wafer conveying mechanism 3;

[0103] 4) The wafer feeding mechanism 3 loads the silicon wafers one by one into the basket on the basket lifting and receiving mechanism 4 until the basket is full;

[0104] 5) The basket conveyor belt 41 moves the basket filled with silicon wafers to the first cache line 5;

[0105] Multiple silicon wafers are unloaded from multiple reversing positions 11 at the same time. The baskets on the same side of the main conveyor line 1 receive the wafers first. After the baskets are full, the baskets on the other side of the main conveyor line 1 receive the wafers again, thereby realizing efficient transfer of silicon wafers.

[0106] The silicon wafer transfer device provided in the embodiment of the present application has the following advantages:

[0107] 1) It eliminates the need for a handling robot, which has higher efficiency, higher production capacity, and lower cost, and avoids the need for high-altitude handling by the robot, which is highly safe.

[0108] 2) The transfer efficiency of silicon wafers is improved, and each transfer unit is independent of each other. If one transfer unit is damaged, it will not affect the operation of other transfer units.

[0109] 3) A passage can be formed between the second conveying unit and the sheet feeding mechanism, so that people can pass through for inspection or other operations.

[0110] 4) Good compatibility, able to handle the transfer of half a silicon wafer or a whole silicon wafer.

[0111] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above embodiments. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A silicon wafer transfer device, characterized in that: The silicon wafer transfer device includes a main conveying line, a conveying mechanism, a wafer feeding mechanism, a basket lifting and receiving mechanism and a first buffer line, wherein: The main conveying line is arranged in parallel with the sheet feeding mechanism, the sheet feeding mechanism is located at the side of the main conveying line, the flower basket is carried on the flower basket lifting and receiving mechanism, and the feeding port of the flower basket is connected to the output end of the sheet feeding mechanism; The main conveying line is configured to convey silicon wafers along a first direction; The conveying mechanism is configured to transfer the silicon wafers on the main conveying line to the wafer feeding mechanism; The wafer feeding mechanism is configured to feed the received silicon wafer into the flower basket of the flower basket lifting and receiving mechanism along the first direction; The flower basket lifting and collecting mechanism includes a flower basket conveyor belt for carrying the flower basket. The flower basket conveyor belt of the flower basket lifting and collecting mechanism is connected to the first cache line. The flower basket conveyor belt transfers the flower basket full of silicon wafers to the first cache line along the first direction.

2. The silicon wafer transfer device according to claim 1, characterized in that: At least one reversing position is arranged on the main conveyor line along the first direction, and each reversing position is respectively equipped with a transfer unit, which includes a conveying mechanism, a wafer feeding mechanism, a basket lifting and receiving mechanism and a first cache line. The conveying mechanism in each transfer unit is configured to move the silicon wafer at the corresponding reversing position to the wafer feeding mechanism.

3. The silicon wafer transfer device according to claim 1, characterized in that: The conveying mechanism includes a first conveying unit and a second conveying unit, the second conveying unit is arranged in parallel with the main conveying line, the second conveying unit is connected to the wafer feeding mechanism, the first conveying unit is configured to move the silicon wafers on the main conveying line to the second conveying unit, and the second conveying unit is configured to receive the silicon wafers conveyed by the first conveying unit and convey the received silicon wafers to the wafer feeding mechanism along the first direction; Alternatively, the conveying mechanism includes a first conveying unit, and the first conveying unit is configured to move the silicon wafers on the main conveying line to the wafer feeding mechanism.

4. The silicon wafer transfer device according to claim 3, characterized in that: The first conveying unit includes a mounting frame and at least one conveying unit, the conveying direction of the conveying unit is along the second direction, the conveying unit is assembled on the mounting frame, the conveying unit includes a first conveying frame, a first conveyor belt, a first driving member and an adsorption assembly, the first conveyor belt is rotatably mounted on the first conveying frame, the first driving member is mounted on the first conveying frame, the adsorption assembly is mounted on the first conveying frame, the adsorption surface of the adsorption assembly is higher than the conveying surface of the first conveyor belt, the adsorption assembly is configured to non-contactly adsorb the silicon wafers on the main conveying line and adsorb the silicon wafers on the conveying surface of the first conveyor belt, the first driving member is configured to drive the first conveyor belt to rotate so as to move the silicon wafers on the conveying surface of the first conveyor belt along the second direction to the second conveying unit or the sheet feeding mechanism.

5. The silicon wafer transfer device according to claim 3, characterized in that: The second conveying unit comprises a second conveying frame, a second conveying belt and a second driving member, wherein the second conveying belt is rotatably mounted on the second conveying frame, the second driving member is mounted on the second conveying frame, the second driving member is configured to drive the second conveying belt to rotate, and the second conveying frame can approach or move away from the sheet feeding mechanism along the first direction; The second conveying frame is away from the film feeding mechanism along the first direction, so that a travel channel is formed between the second conveying unit and the film feeding mechanism.

6. The silicon wafer transfer device according to claim 1, characterized in that: The wafer feeding mechanism comprises a base, a fixed conveying frame, a movable conveying frame, a third conveying belt, a third driving member and a wafer feeding driving member, wherein the fixed conveying frame is fixed on the base, the movable conveying frame can be installed on the base close to or away from the base along the first direction, the fixed end of the wafer feeding driving member is installed on the base, the driving end of the wafer feeding driving member is connected to the movable conveying frame, the third conveying belt is rotatably and telescopically installed on the fixed conveying frame and the movable conveying frame, the conveying direction of the third conveying belt is along the first direction, the third driving member is configured to drive the third conveying belt to rotate, and the third conveying belt is configured to receive and transport silicon wafers; The wafer feeding drive is configured to drive the movable conveyor frame to move along the first direction close to the flower basket lifting and receiving mechanism to drive the third conveyor belt to extend and feed the silicon wafers on the third conveyor belt into the flower basket of the flower basket lifting and receiving mechanism.

7. The silicon wafer transfer device according to claim 1, characterized in that: The flower basket lifting and receiving mechanism includes a lifting drive member, a lifting seat and a positioning mechanism, wherein: The driving end of the lifting drive member is connected to the lifting seat, and the lifting drive member is configured to drive the lifting seat to rise and fall to a preset height each time; The flower basket conveyor belt is arranged on the lifting seat; The positioning mechanism is configured to fix the flower basket on the flower basket conveyor belt or release the flower basket on the flower basket conveyor belt; The lifting drive member drives the lifting seat to lift a preset height each time, so that an empty slot in the flower basket is flush with the conveying surface of the output end of the wafer feeding mechanism, so that the wafer feeding mechanism inserts the silicon wafer into the slot of the flower basket.

8. The silicon wafer transfer device according to claim 7, characterized in that: The flower basket lifting and receiving mechanism also includes a transverse movement seat and a transverse movement driving member, wherein: The flower basket conveyor belt is arranged on the transverse shift seat, the flower basket is provided with at least one row of storage chambers in the second direction, the storage chambers are configured to store half silicon wafers or whole silicon wafers, the transverse shift seat can be installed on the lifting seat for reciprocating movement along the second direction, the fixed end of the transverse shift driving member is installed on the lifting seat, the driving end of the transverse shift driving member is connected to the transverse shift seat, and the transverse shift driving member is configured to drive the transverse shift seat to reciprocate along the second direction so as to connect each row of storage chambers of the flower basket to the sheet feeding mechanism.

9. The silicon wafer transfer device according to claim 1, characterized in that: The silicon wafer transfer device further includes a second cache line, which is configured to cache empty flower baskets and automatically convey the cached empty flower baskets to the flower basket conveyor belt.

10. The silicon wafer transfer device according to claim 1, characterized in that: Both sides of the main conveyor line are provided with a wafer feeding mechanism, a flower basket lifting and receiving mechanism and a first cache line; the conveyor mechanism is also configured to first move the silicon wafers on the main conveyor line to the wafer feeding mechanism on one side, and after the flower basket in the flower basket lifting and receiving mechanism on one side is full of silicon wafers, move the silicon wafers on the main conveyor line to the wafer feeding mechanism on the other side.

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