A material transfer device

Abstract

The utility model relates to the technical field of semiconductor processing equipment, and specifically to a material transfer device, including a mounting frame, a driving component, a lifting cantilever, a suspension component and a conveying component; the material transfer of the workpiece can be realized, the operation is more convenient, the manual operation is reduced, and the work efficiency is improved; the lifting cantilever is driven to move by setting the driving component, and the workpiece fixture is placed on the first accommodating structure of the lifting cantilever, and reciprocating motion in the vertical direction is achieved to complete the loading of the workpiece; at the same time, a suspension component is arranged on the conveying component, and after the lifting cantilever and the workpiece fixture thereon move to the top end, the workpiece fixture is placed on the second accommodating structure of the suspension component, and then the conveying component is used to achieve movement in other directions to realize the transfer of the workpiece, and then complete the subsequent process processing.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a material transfer device. Background Art

[0002] In the field of semiconductor processing technology, there are usually multiple process steps, each of which contains multiple processing steps. It is usually necessary to transfer the workpiece between multiple different processing steps. Most of the transfer operations in the prior art still use manual operation, which is cumbersome and inefficient. At the same time, manual operation is prone to pollution problems, which has an adverse effect on the yield of semiconductor processing and dust-free processing. Therefore, based on the above problems, the prior art needs to be further improved. Utility Model Content

[0003] The purpose of the utility model is to provide a material transfer device to solve the prior art problems existing in the above-mentioned background technology.

[0004] In order to solve the above-mentioned technical problems, the technical solution provided by the utility model is as follows: a material transfer device is provided, including a mounting frame, a driving assembly, a lifting cantilever, a suspension assembly and a conveying assembly, the driving assembly is arranged on the mounting frame, the lifting cantilever is driven by the driving assembly to move in the vertical direction, the lifting cantilever is provided with a first accommodating structure for loading a workpiece fixture, the suspension assembly is arranged on the conveying assembly and is driven by the conveying assembly to move in the horizontal direction, and the suspension assembly is provided with a second accommodating structure for loading a workpiece fixture.

[0005] Based on the above technical solution, the workpiece clamp includes a clamp body, a connecting rod and a support rod. The connecting rod is symmetrically arranged at the top end of the clamp body, and the support rod is fixedly arranged at the top end of the connecting rod.

[0006] Based on the above technical solution, the first accommodating structure includes a placing frame, a accommodating groove and a positioning frame. The placing frame is symmetrically arranged on the outer wall of the lifting cantilever, the accommodating groove is arranged on the inner side of the placing frame for accommodating the connecting rod, and the positioning frame is arranged between the two accommodating grooves. The positioning frame is symmetrically provided with guide grooves, and the bottom end of the support rod is provided with a guide column, and the guide column is adapted to the guide groove structure.

[0007] On the basis of the above technical solution, the driving assembly includes a driving motor and a transmission mechanism, the transmission mechanism is arranged in the mounting frame, the driving motor drives the transmission mechanism to move, and the lifting cantilever is arranged on the transmission mechanism.

[0008] On the basis of the above technical solution, the transmission mechanism is configured as a screw nut pair, and the lifting cantilever is fixedly arranged on the nut of the screw nut pair.

[0009] Based on the above technical solution, the suspension assembly includes a suspension body and a suspension frame, the suspension body is fixedly arranged on the conveying assembly through a connecting piece, the suspension frame is fixedly arranged at the bottom end of the suspension body, and the second accommodating structure is arranged on the suspension frame.

[0010] Based on the above technical solution, the second accommodating structure includes a support block and a storage groove, the support block is symmetrically arranged at both ends of the suspension frame, the storage groove is arranged on the inner side of the support block, and the storage groove is adapted to the support rod structure.

[0011] Based on the above technical solution, the cross-sectional shape of the storage groove is set to be an inverted trapezoid or a V-shape.

[0012] Based on the above technical solution, the conveying assembly is configured as a magnetic suspension structure, which includes a stator assembly and a mover assembly. The mover assembly is suspended above the stator assembly, and the suspension assembly is fixed to the top of the mover assembly through a connecting piece.

[0013] The beneficial effects of the technical solution provided by the utility model are:

[0014] The utility model provides a material transfer device, which realizes the transfer of workpiece loading, is more convenient to operate, reduces manual operation, and improves work efficiency; a driving component is set to drive the movement of the lifting cantilever, and the workpiece fixture is placed on the first accommodating structure of the lifting cantilever to achieve reciprocating motion in the vertical direction to complete the loading of the workpiece; at the same time, a suspension component is set on the conveying component, and after the lifting cantilever and the workpiece fixture thereon move to the top end, the workpiece fixture is placed on the second accommodating structure of the suspension component, and then the conveying component is used to achieve movement in other directions to realize the transfer of the workpiece, and then complete the subsequent process processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional structural schematic diagram of the mounting frame, driving assembly and lifting cantilever in the utility model;

[0016] Figure 2 yes Figure 1 Side view of

[0017] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle;

[0018] Figure 4 It is a structural schematic diagram of the suspension component and the conveying component in the utility model;

[0019] Figure 5 It is a structural schematic diagram of the stator assembly and the mover assembly in the utility model;

[0020] Figure 6 It is a structural schematic diagram of the stator assembly in the utility model; DETAILED DESCRIPTION

[0021] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0022] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] In the description of the present invention, it should be understood that the terms "left", "right", "front", "back", "top", "bottom", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0024] like Figures 1 to 6 As shown, a material transfer device includes a mounting frame 1, a driving assembly, a lifting cantilever 2, a suspension assembly 3 and a conveying assembly 4, the driving assembly is arranged on the mounting frame 1, the lifting cantilever 2 is driven by the driving assembly to move in the vertical direction, the lifting cantilever 2 is provided with a first accommodating structure for loading a workpiece fixture 5, the suspension assembly 3 is arranged on the conveying assembly 4 and is driven by the conveying assembly 4 to move in the horizontal direction, and the suspension assembly 3 is provided with a second accommodating structure for loading the workpiece fixture 5.

[0025] The utility model provides a material transfer device, which realizes the transfer of workpiece loading, is more convenient to operate, reduces manual operation, improves work efficiency, and also reduces pollution caused by manual operation, thereby improving product processing yield; a driving component is set to drive the movement of the lifting cantilever 2, and the workpiece fixture 5 is placed on the first accommodating structure of the lifting cantilever 2 to achieve reciprocating motion in the vertical direction to complete the loading of the workpiece; at the same time, a suspension component 3 is set on the conveying component 4, and after the lifting cantilever 2 and the workpiece fixture 5 thereon move to the top end, the workpiece fixture 5 is placed on the second accommodating structure of the suspension component 3, and then the conveying component 4 is used to achieve movement in other directions to realize the transfer of the workpiece, thereby completing the subsequent process.

[0026] Based on the above technical solution, the workpiece fixture 5 includes a fixture body 51 , a connecting rod 52 and a support rod 53 . The connecting rod 52 is symmetrically arranged at the top of the fixture body 51 , and the support rod 53 is fixedly arranged at the top of the connecting rod 52 .

[0027] On the basis of the above technical solution, the first accommodating structure includes a placing frame 61, a accommodating groove 62 and a positioning frame 63. The placing frame 61 is symmetrically arranged on the outer wall of the lifting cantilever 2. The accommodating groove 62 is arranged on the inner side of the placing frame 61 for accommodating the connecting rod 52. The positioning frame 63 is arranged between the two accommodating grooves 62. The positioning frame 63 is symmetrically provided with guide grooves 631. The bottom end of the support rod 53 is provided with a guide column 531, and the guide column 531 is adapted to the guide groove 631 structure.

[0028] By providing a first accommodating structure on the lifting cantilever 2, the positioning and bearing of the workpiece fixture 5 are facilitated, the positioning is more precise, the operation is more convenient, and the loading process is more stable; specifically, the support rod 53 is placed on the placement frame 61, and the guide column 531 provided on the support rod 53 is adapted to the guide groove 631 provided on the positioning frame 63, so as to realize the rapid positioning between the workpiece fixture 5 and the lifting cantilever 2, complete the rapid loading of the workpiece, and make the operation more convenient, wherein the two symmetrically arranged connecting rods 52 are located in the two accommodating grooves 62, so as to realize the bearing of the workpiece fixture 5.

[0029] On the basis of the above technical solution, the driving assembly includes a driving motor 7 and a transmission mechanism. The transmission mechanism is arranged in the mounting frame 1. The driving motor 7 drives the transmission mechanism to move. The lifting cantilever 2 is arranged on the transmission mechanism.

[0030] On the basis of the above technical solution, the transmission mechanism is configured as a screw nut pair, and the lifting cantilever 2 is fixedly disposed on the nut of the screw nut pair.

[0031] In a preferred embodiment, the transmission mechanism adopts a screw-nut pair mechanism, and the lifting cantilever 2 is arranged on the nut of the screw-nut pair, driving the lifting cantilever 2 and the workpiece fixture 5 thereon to reciprocate in the vertical direction of the z-axis; in other preferred embodiments, other commonly used mechanical transmission components can also be used to achieve drive, as long as the reciprocating motion of the lifting cantilever in the vertical direction can be achieved.

[0032] Based on the above technical solution, the suspension assembly 3 includes a suspension body 31 and a suspension frame 32. The suspension body 31 is fixedly arranged on the conveying assembly 4 through a connecting member 33. The suspension frame 32 is fixedly arranged at the bottom end of the suspension body 31. The second accommodating structure is arranged on the suspension frame 32.

[0033] Based on the above technical solution, the second accommodating structure includes a support block 81 and a storage groove 82. The support block 81 is symmetrically arranged at both ends of the suspension bracket 32, and the storage groove 82 is arranged on the inner side of the support block 81. The storage groove 82 is adapted to the support rod 53 structure.

[0034] Based on the above technical solution, the cross-sectional shape of the storage groove 82 is set to be an inverted trapezoid or a V-shape.

[0035] By providing the suspension assembly 3, the workpiece after loading can be transported, and then the workpiece can be transported to the required processing position through the conveying assembly 4 for corresponding processing. Preferably, in the second accommodating structure of the suspension assembly 4, the support rod 53 on the workpiece fixture 5 is positioned by the support block 81, and the support rod 53 is carried by the storage groove 82, so that the workpiece fixture 5 can be quickly placed on the suspension assembly 3, and the workpiece can be quickly shelved, thereby improving the efficiency of transportation. Specifically, the workpiece fixture 5 is transported to the corresponding position of the suspension assembly 3 by the movement of the lifting cantilever 2. At this time, the height of the workpiece fixture 5 on the lifting cantilever 2 is higher than the height of the transfer point on the suspension assembly 3, that is, the position of the accommodating support rod 53, and then the lifting cantilever 2 moves downward again. In this process, the guide column 531 on the workpiece fixture 5 is separated from the guide groove 631 on the positioning frame 63, and the support rod 53 of the workpiece fixture is placed in the storage groove 82 to achieve positioning and placement; after the transportation is completed, the workpiece fixture 5 carrying the workpiece is transported to the corresponding station by the conveying assembly 4 for processing of different processes.

[0036] Based on the above technical solution, the conveying component 4 is configured as a magnetic suspension structure, and the magnetic suspension structure includes a stator component 41 and a mover component 42. The mover component 42 is suspended above the stator component 41, and the suspension component 3 is fixed to the top of the mover component 42 through a connecting member 33.

[0037] In a preferred embodiment, the conveying component 4 is configured as a magnetic suspension structure, that is, a stator component 41 and a mover component 42 are used to realize contactless track conveying, which can effectively avoid the adverse effects of debris or particles generated by friction and the like during the use of the contact track on the semiconductor processing process, realize dust-free processing, and ensure the quality of workpiece processing. More preferably, the stator component 41 adopts a permanent magnet array, and the mover component 42 adopts a coil with an iron core. The permanent magnet array can form a static magnetic field. The mover is installed above the stator, and the stator is arranged in N / S poles. The PLC generates a pulse voltage / current to the driver of the mover to drive the coil to generate a magnetic field that is mutually exclusive with the stator, so that the mover produces relative motion. The number of pulses generated forms a closed-loop control with the encoder, so that the distance of the mover movement can be accurately controlled.

[0038] It should be noted that the movement between the stator assembly and the mover assembly is achieved through interaction of magnetic fields, which is based on the working principle in the prior art, and the present application does not involve improvements to the specific structure and principle.

[0039] The basic principle and main features of the utility model are shown and described above. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments. Therefore, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the appended claims rather than the above description. Therefore, it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

[0040] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A material transfer device, characterized in that: The invention comprises a mounting frame (1), a driving assembly, a lifting cantilever (2), a suspension assembly (3) and a conveying assembly (4), wherein the driving assembly is arranged on the mounting frame (1), the lifting cantilever (2) is driven by the driving assembly to move in a vertical direction, the lifting cantilever (2) is provided with a first accommodating structure for loading a workpiece fixture (5), the suspension assembly (3) is arranged on the conveying assembly (4) and is driven by the conveying assembly (4) to move in a horizontal direction, and the suspension assembly (3) is provided with a second accommodating structure for loading the workpiece fixture (5).

2. A material transfer device according to claim 1, characterized in that: The workpiece clamp (5) comprises a clamp body (51), a connecting rod (52) and a support rod (53), wherein the connecting rod (52) is symmetrically arranged at the top end of the clamp body (51), and the support rod (53) is fixedly arranged at the top end of the connecting rod (52).

3. A material transfer device according to claim 2, characterized in that: The first accommodating structure comprises a placing frame (61), an accommodating groove (62) and a positioning frame (63); the placing frame (61) is symmetrically arranged on the outer wall of the lifting cantilever (2); the accommodating groove (62) is arranged on the inner side of the placing frame (61) for accommodating the connecting rod (52); the positioning frame (63) is arranged between the two accommodating grooves (62); the positioning frame (63) is symmetrically provided with guide grooves (631); the bottom end of the support rod (53) is provided with a guide column (531); the guide column (531) and the guide groove (631) structure are adapted to each other.

4. A material transfer device according to claim 1, characterized in that: The driving assembly comprises a driving motor (7) and a transmission mechanism, wherein the transmission mechanism is arranged in the mounting frame (1), the driving motor (7) drives the transmission mechanism to move, and the lifting cantilever (2) is arranged on the transmission mechanism.

5. A material transfer device according to claim 4, characterized in that: The transmission mechanism is provided as a screw nut pair, and the lifting cantilever (2) is fixedly provided on the nut of the screw nut pair.

6. A material transfer device according to claim 1, characterized in that: The suspension assembly (3) comprises a suspension body (31) and a suspension frame (32); the suspension body (31) is fixedly arranged on the conveying assembly (4) via a connecting piece (33); the suspension frame (32) is fixedly arranged at the bottom end of the suspension body (31); and the second accommodating structure is arranged on the suspension frame (32).

7. A material transfer device according to claim 1, characterized in that: The second accommodating structure comprises a support block (81) and a storage groove (82), wherein the support block (81) is symmetrically arranged at two ends of the suspension frame (32), and the storage groove (82) is arranged on the inner side of the support block (81), and the storage groove (82) is structurally compatible with the support rod (53).

8. A material transfer device according to claim 7, characterized in that: The cross-sectional shape of the storage groove (82) is set to be an inverted trapezoid or a V-shape.

9. A material transfer device according to claim 1, characterized in that: The conveying assembly (4) is configured as a magnetic suspension structure, the magnetic suspension structure comprising a stator assembly (41) and a mover assembly (42), the mover assembly (42) being suspended above the stator assembly (41), and the suspension assembly (3) being fixedly disposed on the top of the mover assembly (42) via a connecting piece (33).

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