A window structure of magnetron sputtering equipment
By designing barrier components in magnetron sputtering equipment, the problem of windows being blocked during coating is solved, and the effect of reducing coating probability and extending the service life of windows is achieved.
Patent Information
- Application Number
- CN202421525151.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-01
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2034-07-01
AI Technical Summary
Existing coating equipment cannot block the viewing windows, resulting in the viewing windows being coated during sputtering processing. After long-term use, the viewing windows will be blocked and affected by normal use.
A magnetron sputtering equipment window structure is designed, including a coating equipment housing, a viewing window, a transparent baffle and a barrier assembly. When observing through the observation port, use a barrier component to block the observation window to reduce the probability of coating.
It effectively reduces the probability that the observation window is coated, thereby extending the service life of the window and avoiding the risk of the window being blocked.
Smart Images
Figure CN222715442U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of coating equipment, in particular to a window structure of magnetron sputtering equipment. Background Art
[0002] Magnetron sputtering coating machine is suitable for coating metal film (copper, aluminum, etc.) functional film on PET and non-woven fabrics; it is mainly used in: flexible circuit boards, thin film capacitors, ITO transparent conductive films, thin film solar cells, car / train / ship films, flexible solar cell FPD flat panel displays, flexible display devices, etc. The coating equipment needs to be equipped with a window when in use to observe the internal conditions of the sputtering coating equipment.
[0003] With respect to the above-mentioned related technologies, the inventors believe that the following defects exist: the existing coating equipment cannot shield the window during use, which results in coating the window during sputtering; after long-term use, the window will still be shielded, affecting the normal use of the window. Utility Model Content
[0004] In order to solve the above problems, the utility model provides a window structure of a magnetron sputtering device.
[0005] The above technical purpose of the utility model is achieved through the following technical solutions: a magnetron sputtering equipment window structure, including a coating equipment shell, an observation port is opened through the side wall of the coating equipment shell, an observation window is fixedly arranged in the observation port, a transparent baffle is fixedly arranged in the observation port, the side wall of the observation window abuts against the side wall of the transparent baffle, and a blocking component for blocking the transparent baffle is arranged on the coating equipment shell.
[0006] By adopting the above technical solution, when the staff needs to observe the inside of the coating equipment, the staff observes the inside of the coating equipment through the observation port. During this process, when the staff does not need to observe, the staff needs to activate the blocking component to block the observation port, thereby reducing the probability of the observation window being coated, thereby reducing the probability of the observation window being blocked.
[0007] Furthermore, a slide groove is provided on the inner top wall of the observation port, and limiting grooves are symmetrically provided on the inner wall of the slide groove. The blocking assembly includes a slide plate slidably arranged in the slide groove and two limiting blocks slidably arranged in the two limiting grooves respectively. The slide plate and the limiting blocks are fixed to each other, and the bottom surface of the slide plate abuts against the inner bottom wall of the observation port.
[0008] By adopting the above technical solution, when the staff does not need to observe, the staff needs to slide the slide downward, and then the limit block slides downward with the slide under the action of the slide, so that the bottom surface of the slide abuts against the inner bottom wall of the observation port, and then the slide blocks the observation port, thereby reducing the probability of the observation window being coated. In this process, the limit block reduces the stability of the slide during the sliding process, thereby improving the stability of the device.
[0009] Furthermore, a rotating groove is provided on the side wall of the coating equipment shell, and a receiving groove is provided on the inner wall of the rotating groove. A rotating rod is rotatably arranged in the rotating groove, and a first bevel gear is fixedly arranged on the side wall of the rotating rod. The upper end of the slide is threadedly connected with a threaded rod, and the upper end of the threaded rod penetrates the coating equipment shell and extends into the receiving groove. A second bevel gear is fixedly arranged on the upper surface of the threaded rod, and the first bevel gear and the second bevel gear are meshed with each other.
[0010] By adopting the above technical solution, when the staff needs to slide the skateboard, the staff needs to rotate the rotating rod, so that the first bevel gear rotates synchronously with the rotating rod under the action of the rotating rod, so that the second bevel gear rotates under the action of the first bevel gear, and then the threaded rod rotates synchronously with the second bevel gear under the action of the second bevel gear, so that the skateboard slides under the action of the threaded rod, thereby reducing the difficulty of sliding the skateboard for the staff, thereby reducing the difficulty of the staff's work.
[0011] Furthermore, a limiting rod is fixedly arranged on the inner top wall of the accommodating groove, a limiting hole is opened on the upper surface of the second bevel gear, the limiting rod and the limiting hole match each other, and the diameter of the bottom end of the limiting rod is larger than the diameter of the upper end.
[0012] By adopting the above technical solution, when the second bevel gear rotates, the limit rod and the second bevel gear rotate relative to each other. During this process, since the diameter of the bottom end of the limit rod is larger than the diameter of the upper end, the limit rod limits the second bevel gear, thereby reducing the probability of the second bevel gear shaking during rotation, thereby improving the stability of the device.
[0013] Furthermore, an annular groove is provided on the inner wall of the rotating groove, an annular block is rotatably arranged in the annular groove, and the annular block is fixed to the rotating rod.
[0014] By adopting the above technical solution, when the rotating rod rotates, the annular block rotates synchronously with the rotating rod under the action of the rotating rod. During this process, the side wall of the annular block abuts against the inner wall of the annular groove, thereby reducing the probability of sliding during the rotation of the rotating rod, thereby improving the stability of the device.
[0015] Furthermore, a sealing strip is fixedly provided on the bottom surface of the slide plate.
[0016] By adopting the above technical solution, the sealing strip improves the sealing effect of the slide plate, thereby reducing the probability of the observation window being coated.
[0017] Furthermore, a knob is fixedly provided on the side wall of the rotating rod away from the first bevel gear.
[0018] By adopting the above technical solution, the knob reduces the difficulty for the staff to rotate the rotating rod, thereby reducing the work difficulty of the staff.
[0019] In summary, the utility model has the following beneficial effects:
[0020] 1. In this application, when the staff needs to observe the inside of the coating equipment, the staff observes the inside of the coating equipment through the observation port. During this process, when the staff does not need to observe, the staff needs to start the blocking component to block the observation port, thereby reducing the probability of the observation window being coated, thereby reducing the probability of the observation window being blocked;
[0021] 2. In this application, when the staff does not need to observe, the staff needs to slide the slide plate downward, so that the limit block slides downward with the slide plate under the action of the slide plate, so that the bottom surface of the slide plate abuts against the inner bottom wall of the observation port, and then the slide plate blocks the observation port, thereby reducing the probability of the observation window being coated. In this process, the limit block reduces the stability of the slide plate during the sliding process, thereby improving the stability of the device;
[0022] 3. In the present application, when the staff needs to slide the skateboard, the staff needs to rotate the rotating rod, so that the first bevel gear rotates synchronously with the rotating rod under the action of the rotating rod, so that the second bevel gear rotates under the action of the first bevel gear, and then the threaded rod rotates synchronously with the second bevel gear under the action of the second bevel gear, so that the skateboard slides under the action of the threaded rod, thereby reducing the difficulty of sliding the skateboard for the staff, thereby reducing the difficulty of the staff's work. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;
[0024] Figure 2 is a schematic cross-sectional structure diagram of a blocking component in an embodiment of the utility model;
[0025] Figure 3 This utility model embodiment Figure 2 A is a schematic diagram of the cross-sectional structure;
[0026] Figure 4 This utility model embodiment Figure 2 Schematic diagram of the cross-sectional structure of B.
[0027] In the figure: 1. Coating equipment housing; 11. Observation window; 12. Transparent baffle; 2. Observation port; 21. Slide groove; 22. Limiting groove; 23. Rotation groove; 24. Accommodating groove; 25. Limiting hole; 26. Annular groove; 3. Blocking assembly; 31. Slide plate; 32. Limiting block; 4. Rotating rod; 41. First bevel gear; 42. Threaded rod; 43. Second bevel gear; 5. Limiting rod; 6. Annular block; 7. Sealing strip; 8. Knob. DETAILED DESCRIPTION
[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.
[0029] like Figure 1-4 As shown, the embodiment of the present application discloses a magnetron sputtering device window structure, including a coating device housing 1, an observation window 11, a transparent baffle 12, a blocking assembly 3, a rotating rod 4, a first bevel gear 41, a threaded rod 42, a second bevel gear 43, a limit rod 5 and an annular block 6. The coating device housing 1 is a rectangular parallelepiped structure, and an observation port 2 is provided through the side wall of the coating device housing 1. The observation window 11 is a rectangular parallelepiped structure, and the observation window 11 is fixedly arranged in the observation port 2. The transparent baffle 12 is a rectangular parallelepiped structure, and the transparent baffle 12 is fixedly arranged in the observation port 2, and the side wall of the observation window 11 abuts against the side wall of the transparent baffle 12.
[0030] When the staff needs to observe the inside of the coating equipment, the staff observes the inside of the coating equipment through the observation port 2. During this process, when the staff does not need to observe, the staff needs to activate the blocking component 3 to block the observation port 2, thereby reducing the probability of the observation window 11 being coated, thereby reducing the probability of the observation window 11 being blocked.
[0031] A slide groove 21 is provided on the inner top wall of the observation port 2, and a limit groove 22 is symmetrically provided on the inner wall of the slide groove 21. The blocking component 3 is arranged on the coating device housing 1, and is used to block the transparent baffle 12. The blocking component 3 includes a slide plate 31 and a limit block 32. The slide plate 31 is a rectangular plate-shaped structure, and the slide plate 31 is slidably arranged in the slide groove 21, and the bottom surface of the slide plate 31 abuts against the inner bottom wall of the observation port 2. The limit block 32 is a rectangular block-shaped structure, and two limit blocks 32 are provided and are slidably arranged in two limit grooves 22 respectively, and the slide plate 31 and the limit block 32 are fixed to each other.
[0032] When the staff does not need to observe, the staff needs to slide the slide plate 31 downward, and then the limit block 32 slides downward with the slide plate 31 under the action of the slide plate 31, so that the bottom surface of the slide plate 31 abuts against the inner bottom wall of the observation port 2, and then the slide plate 31 blocks the observation port 2, thereby reducing the probability of the observation window 11 being coated. In this process, the limit block 32 reduces the stability of the slide plate 31 during the sliding process, thereby improving the stability of the device.
[0033] A rotation groove 23 is provided on the side wall of the coating equipment housing 1, and a receiving groove 24 is provided on the inner wall of the rotation groove 23. The rotating rod 4 is a round rod-shaped structure, and its axis is horizontal. The rotating rod 4 is rotatably set in the rotation groove 23. The first bevel gear 41 is fixedly set on the side wall of the rotating rod 4, and its axis coincides with the axis of the rotating rod 4. The threaded rod 42 is threadedly connected to the upper end of the slide plate 31, and its axis is vertical, and the upper end of the threaded rod 42 passes through the coating equipment housing 1 and extends into the receiving groove 24. The second bevel gear 43 is fixedly set on the upper surface of the threaded rod 42, and its axis coincides with the axis of the threaded rod 42, and the first bevel gear 41 and the second bevel gear 43 are meshed with each other.
[0034] When the staff needs to slide the slide plate 31, the staff needs to rotate the rotating rod 4, so that the first bevel gear 41 rotates synchronously with the rotating rod 4 under the action of the rotating rod 4, so that the second bevel gear 43 rotates under the action of the first bevel gear 41, and then the threaded rod 42 rotates synchronously with the second bevel gear 43 under the action of the second bevel gear 43, so that the slide plate 31 slides under the action of the threaded rod 42, thereby reducing the difficulty of sliding the slide plate 31 for the staff, thereby reducing the difficulty of the staff's work.
[0035] The upper surface of the second bevel gear 43 is provided with a limiting hole 25 , and the limiting rod 5 is fixedly disposed on the inner top wall of the accommodating groove 24 . The limiting rod 5 matches the limiting hole 25 , and the diameter of the bottom end of the limiting rod 5 is greater than the diameter of the upper end.
[0036] When the second bevel gear 43 rotates, the limiting rod 5 and the second bevel gear 43 rotate relative to each other. During this process, since the diameter of the bottom end of the limiting rod 5 is larger than the diameter of the upper end, the limiting rod 5 limits the second bevel gear 43, thereby reducing the probability of the second bevel gear 43 shaking during rotation, thereby improving the stability of the device.
[0037] An annular groove 26 is formed on the inner wall of the rotating groove 23 . The annular block 6 is a circular ring block 6 structure. The annular block 6 is rotatably disposed in the annular groove 26 , and the annular block 6 and the rotating rod 4 are fixed to each other.
[0038] When the rotating rod 4 rotates, the annular block 6 rotates synchronously with the rotating rod 4 under the action of the rotating rod 4. During this process, the side wall of the annular block 6 abuts against the inner wall of the annular groove 26, thereby reducing the probability of sliding during the rotation of the rotating rod 4, thereby improving the stability of the device.
[0039] In order to reduce the probability of the observation window 11 being coated, a sealing strip 7 is fixedly provided on the bottom surface of the slide plate 31. The sealing strip 7 improves the sealing effect of the slide plate 31, thereby reducing the probability of the observation window 11 being coated.
[0040] In order to reduce the working difficulty of the staff, a knob 8 is fixedly arranged on the side wall of the rotating rod 4 away from the first bevel gear 41. The knob 8 reduces the difficulty of the staff to rotate the rotating rod 4, thereby reducing the working difficulty of the staff.
[0041] The use principle of a window structure of a magnetron sputtering device in the present embodiment is: when the staff needs to observe the inside of the coating device, the staff observes the inside of the coating device through the observation port 2. During this process, when the staff does not need to observe, the staff needs to rotate the rotating rod 4, so that the first bevel gear 41 rotates synchronously with the rotating rod 4 under the action of the rotating rod 4, so that the second bevel gear 43 rotates under the action of the first bevel gear 41, and then the threaded rod 42 rotates synchronously with the second bevel gear 43 under the action of the second bevel gear 43, so that the slide plate 31 slides under the action of the threaded rod 42, and then the bottom surface of the slide plate 31 abuts against the inner bottom wall of the observation port 2, so that the slide plate 31 blocks the observation port 2, thereby reducing the probability of the observation window 11 being coated.
[0042] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.
Claims
1. A magnetron sputtering device window structure, comprising a coating device housing (1), characterized in that: An observation port (2) is provided through the side wall of the coating equipment housing (1), an observation window (11) is fixedly provided in the observation port (2), a transparent baffle (12) is fixedly provided in the observation port (2), the side wall of the observation window (11) abuts against the side wall of the transparent baffle (12), and a blocking component (3) for blocking the transparent baffle (12) is provided on the coating equipment housing (1).
2. The window structure of a magnetron sputtering device according to claim 1, characterized in that: A slide groove (21) is provided on the inner top wall of the observation port (2), and a limit groove (22) is symmetrically provided on the inner wall of the slide groove (21). The blocking component (3) comprises a slide plate (31) slidably arranged in the slide groove (21) and two limit blocks (32) slidably arranged in the two limit grooves (22), respectively. The slide plate (31) and the limit blocks (32) are fixed to each other, and the bottom surface of the slide plate (31) abuts against the inner bottom wall of the observation port (2).
3. The window structure of a magnetron sputtering device according to claim 2, characterized in that: A rotating groove (23) is provided on the side wall of the coating equipment housing (1), and a receiving groove (24) is provided on the inner wall of the rotating groove (23). A rotating rod (4) is rotatably arranged in the rotating groove (23), and a first bevel gear (41) is fixedly arranged on the side wall of the rotating rod (4). The upper end of the slide plate (31) is threadedly connected to a threaded rod (42), and the upper end of the threaded rod (42) passes through the coating equipment housing (1) and extends into the receiving groove (24). A second bevel gear (43) is fixedly arranged on the upper surface of the threaded rod (42), and the first bevel gear (41) and the second bevel gear (43) are meshed with each other.
4. The window structure of a magnetron sputtering device according to claim 3, characterized in that: A limiting rod (5) is fixedly arranged on the inner top wall of the accommodating groove (24), a limiting hole (25) is provided on the upper surface of the second bevel gear (43), the limiting rod (5) and the limiting hole (25) match each other, and the diameter of the bottom end of the limiting rod (5) is larger than the diameter of the upper end.
5. The window structure of a magnetron sputtering device according to claim 3, characterized in that: An annular groove (26) is provided on the inner wall of the rotating groove (23), an annular block (6) is rotatably arranged in the annular groove (26), and the annular block (6) and the rotating rod (4) are fixed to each other.
6. The window structure of a magnetron sputtering device according to claim 2, characterized in that: A sealing strip (7) is fixedly arranged on the bottom surface of the slide plate (31).
7. The window structure of a magnetron sputtering device according to claim 3, characterized in that: A knob (8) is fixedly arranged on the side wall of the rotating rod (4) away from the first bevel gear (41).