A vacuum unit for single crystal growth

Abstract

The utility model belongs to the field of semiconductor technology, and specifically discloses a vacuum unit for single crystal growth, including a unit shell, a Roots vacuum pump and a screw vacuum pump are fixedly installed inside the unit shell, a plate heat exchanger is arranged inside the unit shell, a built-in water tank is fixedly installed inside the unit shell, a circulating water pump is arranged on the built-in water tank, a connecting pipe is fixedly connected to the Roots vacuum pump, an air intake redirection mechanism is arranged on the connecting pipe, and the air intake redirection mechanism includes a fixed platform fixedly connected to the top of the unit shell. When the vacuum unit for single crystal growth is installed in a limited space, the angle of the air intake pipe in the horizontal direction can be adjusted through the air intake redirection mechanism. This design allows the angle of the air intake pipe to be flexibly adjusted during installation and maintenance to avoid conflicts with other pipelines or equipment, so that the equipment is effectively arranged in the optimal position.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a vacuum unit for single crystal growth. Background Art

[0002] Single crystal silicon pulling equipment is the key equipment for producing single crystal silicon rods, and the vacuum system is an indispensable component of single crystal silicon pulling equipment. The design and application of the vacuum system plays a vital role in the single crystal silicon pulling process, and is of great significance for ensuring the quality of single crystal silicon rods and improving production efficiency.

[0003] At present, in the photovoltaic and semiconductor single crystal growth processes, molecular pumps or diffusion pumps are mostly used in the high vacuum stage, and sliding valve vacuum pumps, rotary vane vacuum pumps or dry vacuum pumps are mostly used in the rough vacuum stage. When installing a vacuum unit in a limited space, if the angle of the air inlet pipe is not appropriate, it may cause conflicts between pipelines or equipment, or hinder the installation or maintenance of other key components, making it impossible for the equipment to be effectively arranged in the optimal position. Utility Model Content

[0004] In view of this, the purpose of the present invention is to solve the shortcomings of the background technology and to propose a vacuum unit for single crystal growth to solve the problems in the prior art.

[0005] In order to achieve the above objectives, the utility model provides a vacuum unit for single crystal growth, including a unit shell, a Roots vacuum pump and a screw vacuum pump are fixedly installed inside the unit shell, a plate heat exchanger is arranged inside the unit shell, a built-in water tank is fixedly installed inside the unit shell, a circulating water pump is arranged on the built-in water tank, a connecting pipe is fixedly connected to the Roots vacuum pump, and an air intake redirection mechanism is arranged on the connecting pipe.

[0006] Preferably, the air intake redirecting mechanism includes a fixed platform fixedly connected to the top of the unit casing, the inner surface of the fixed platform is fixedly sleeved with the outer surface of the connecting pipe, the top of the unit casing is fixedly connected to a fixed shaft, the outer surface of the fixed shaft is rotatably connected to a gear rack, and the air intake angle of the intake pipe can be adjusted through the air intake redirecting mechanism to adapt to different installation environments.

[0007] Preferably, a shifting platform is fixedly connected to the top of the gear rack, and an air intake pipe is fixedly sleeved on the inner surface of the shifting platform.

[0008] Preferably, one end of the connecting pipe away from the Roots vacuum pump is fixedly connected to a bellows, one end of the bellows away from the connecting pipe is fixedly connected to one end of the intake pipe, and one end of the connecting pipe close to the bellows is fixedly connected to a first connecting frame.

[0009] Preferably, the end of the first connecting frame away from the connecting pipe is rotatably connected to a frame shaft, the outer surface of the frame shaft is rotatably connected to a second connecting frame, and the end of the second connecting frame away from the frame shaft is fixedly connected to an end of the intake pipe close to the bellows.

[0010] Preferably, a knob is rotatably connected to the top of the unit housing, a driving gear is fixedly sleeved on the outer surface of the knob, and the outer surface of the driving gear is meshingly connected to the outer surface of the gear rack.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] 1. When the vacuum unit for single crystal growth is installed in a limited space, the intake pipe can be adjusted in the horizontal direction through the intake redirection mechanism. This design allows the angle of the intake pipe to be flexibly adjusted during installation and maintenance to avoid conflicts with other pipes or equipment, so that the equipment can be effectively arranged in the optimal position.

[0013] 2. The three-leaf Roots vacuum pump of the vacuum unit for single crystal growth has lower noise and heat generation than the ordinary two-leaf Roots vacuum pump, while the dry screw vacuum pump has better dust discharge capacity than the variable pitch one. Combined with the self-circulating water cooling heat exchange system, it can effectively complete the heat exchange cycle, has good cooling effect, and reduces the risk of scaling inside the vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the overall structure of this application;

[0015] Figure 2 This is a schematic diagram of the surface structure of the gear rack of this application;

[0016] Figure 3 For this application Figure 2 Enlarged view of point a in the middle.

[0017] Among them: 1. Unit casing; 2. Roots vacuum pump; 3. Screw vacuum pump; 4. Plate heat exchanger; 5. Built-in water tank; 6. Circulating water pump; 7. Connecting pipe; 8. Fixed platform; 9. Fixed shaft; 10. Gear rack; 11. Shifting platform; 12. Inlet pipe; 13. Bellows; 14. First connecting frame; 15. Frame shaft; 16. Second connecting frame; 17. Turn handle; 18. Driving gear. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0019] See also Figure 1-3 A vacuum unit for single crystal growth includes a unit shell 1, a Roots vacuum pump 2 and a screw vacuum pump 3 are fixedly installed inside the unit shell 1, a plate heat exchanger 4 is arranged inside the unit shell 1, a built-in water tank 5 is fixedly installed inside the unit shell 1, a circulating water pump 6 is arranged on the built-in water tank 5, a connecting pipe 7 is fixedly connected to the Roots vacuum pump 2, and an air intake redirection mechanism is arranged on the connecting pipe 7.

[0020] Through the above technical scheme, the vacuum unit is composed of a Roots vacuum pump 2 as a main pump and a screw vacuum pump 3 as a front pump, and is equipped with a circulating water cooling system. The main pump of the unit adopts a three-leaf Roots vacuum pump 2, which has lower noise and heat generation than the ordinary two-leaf Roots vacuum pump 2; the front pump of the unit adopts an equal-pitch dry screw vacuum pump 3, which has better dust discharge capacity than a variable pitch, and the built-in water tank 5 in the self-circulating water-cooled heat exchange system uses a refrigerant as the circulating coolant. The refrigerant is pumped into the plate heat exchanger 4 by the circulating water pump 6 to take away the heat, and then flows through the vacuum pump interlayer and enters the built-in water tank 5 to complete the heat exchange cycle, with good cooling effect and reduced scaling risk inside the vacuum pump.

[0021] Specifically, the air intake redirection mechanism includes a fixed platform 8 fixedly connected to the top of the unit casing 1, the inner surface of the fixed platform 8 is fixedly sleeved with the outer surface of the connecting pipe 7, the top of the unit casing 1 is fixedly connected with a fixed shaft 9, and the outer surface of the fixed shaft 9 is rotatably connected with a gear rack 10.

[0022] Through the above technical solution, the gear rack 10 will drive the intake pipe 12 to rotate synchronously during the rotation process, so as to adjust the intake angle of the intake pipe 12.

[0023] Specifically, a shifting platform 11 is fixedly connected to the top of the gear rack 10 , and an air intake pipe 12 is fixedly sleeved on the inner surface of the shifting platform 11 .

[0024] Through the above technical solution, the connecting pipe 7 is connected to the air intake pipe 12 through the bellows 13 , and the airflow entering the air intake pipe 12 eventually enters the Roots vacuum pump 2 .

[0025] Specifically, one end of the connecting pipe 7 away from the Roots vacuum pump 2 is fixedly connected to the bellows 13 , one end of the bellows 13 away from the connecting pipe 7 is fixedly connected to one end of the intake pipe 12 , and one end of the connecting pipe 7 close to the bellows 13 is fixedly connected to the first connecting frame 14 .

[0026] Through the above technical solution, the bellows 13 has excellent deformation ability and can produce corresponding deformation as the position of the intake pipe 12 changes.

[0027] Specifically, the end of the first connecting frame 14 away from the connecting pipe 7 is rotatably connected to the frame shaft 15, the outer surface of the frame shaft 15 is rotatably connected to the second connecting frame 16, and the end of the second connecting frame 16 away from the frame shaft 15 is fixedly connected to the end of the intake pipe 12 close to the bellows 13.

[0028] Through the above technical solution, the first connecting frame 14 and the frame shaft 15 cooperate with the second connecting frame 16 to make it relatively stably indirectly connected to the connecting pipe 7 during the rotation of the intake pipe 12, and understand the approximate rotation angle of the intake pipe 12.

[0029] Specifically, a knob 17 is rotatably connected to the top of the unit housing 1 , and a driving gear 18 is fixedly sleeved on the outer surface of the knob 17 . The outer surface of the driving gear 18 is meshedly connected to the outer surface of the gear frame 10 .

[0030] Through the above technical solution, the driving gear 18 can be rotated during the rotation of the knob 17, thereby driving the gear rack 10 meshing therewith to rotate, during which the intake pipe 12 will adjust its angle in the horizontal direction accordingly.

[0031] Working principle: During the use of the semiconductor single crystal pulling vacuum unit, the whole unit can be moved according to the needs. The Roots vacuum pump 2 and the screw vacuum pump 3 used in the unit are both dry vacuum pumps, and there is no oil and gas reflux to cause vacuum chamber pollution, and the circulating water pump 6 can pump the refrigerant into the plate heat exchanger 4 to take away the heat, and then flow through the vacuum pump interlayer and then enter the built-in water tank 5 to complete the heat exchange cycle. Considering that when installing the vacuum unit in a limited space, if the angle of the air intake pipe 12 is not appropriate, it may cause conflicts between pipelines or equipment, or hinder the installation or maintenance of other key components. At this time, the angle of the air intake pipe 12 can be adjusted, that is, rotating the handle 17 to drive the drive gear 18 to rotate, and the gear rack 10 meshing with the drive gear 18 will rotate accordingly, thereby driving the air intake pipe 12 on the inner side of the shift table 11 to rotate. During the process of adjusting the angle of the air intake pipe 12 in the horizontal direction, the bellows 1 3 will produce corresponding deformation and stably connect the intake pipe 12 and the connecting pipe 7. At the same time, during the rotation of the intake pipe 12, the second connecting frame 16 will rotate along the frame shaft 15, so as to cooperate with the first connecting frame 14 to make the intake pipe 12 and the connecting pipe 7 indirectly and stably connected. This indirect connection method transmits force through the rotation of the frame shaft 15, effectively enhances the stability of the system, and avoids falling off or moving due to angle adjustment. At this point, the adjustment of the angle of the intake pipe 12 can be completed. The existence of the bellows 13 is very important in this process. It can produce corresponding deformation as the angle of the intake pipe 12 changes. This deformation can compensate for the length change or position offset that may occur when the intake pipe 12 adjusts its angle, and maintain a stable connection between the connecting pipe 7 and the intake pipe 12. This mechanism not only ensures the airtightness and stability of fluid transmission, but also reduces stress concentration or pipeline connection problems caused by angle adjustment.

[0032] In summary: the vacuum unit in the present application not only provides flexible angle adjustment capability, but also enhances the stability and reliability of the system through deformation compensation of the bellows 13 and a stable indirect connection method. It plays a key role in the installation of the vacuum unit, ensuring that the equipment can operate efficiently in a limited space and reducing possible conflicts or failure risks.

[0033] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A vacuum unit for single crystal growth, comprising a unit housing (1), characterized in that: A Roots vacuum pump (2) and a screw vacuum pump (3) are fixedly installed inside the unit housing (1), a plate heat exchanger (4) is arranged inside the unit housing (1), a built-in water tank (5) is fixedly installed inside the unit housing (1), a circulating water pump (6) is arranged on the built-in water tank (5), a connecting pipe (7) is fixedly connected to the Roots vacuum pump (2), and an air intake redirection mechanism is arranged on the connecting pipe (7); The air intake redirection mechanism comprises a fixed platform (8) fixedly connected to the top of the unit casing (1), the inner surface of the fixed platform (8) being fixedly sleeved with the outer surface of the connecting pipe (7), the top of the unit casing (1) being fixedly connected to a fixed shaft (9), the outer surface of the fixed shaft (9) being rotatably connected to a gear rack (10); The top of the gear rack (10) is fixedly connected to a shifting platform (11), and the inner surface of the shifting platform (11) is fixedly sleeved with an air intake pipe (12); One end of the connecting pipe (7) away from the Roots vacuum pump (2) is fixedly connected to a bellows (13), one end of the bellows (13) away from the connecting pipe (7) is fixedly connected to one end of the air intake pipe (12), and one end of the connecting pipe (7) close to the bellows (13) is fixedly connected to a first connecting frame (14).

2. A vacuum unit for single crystal growth according to claim 1, characterized in that: The end of the first connecting frame (14) away from the connecting pipe (7) is rotatably connected to a frame shaft (15), the outer surface of the frame shaft (15) is rotatably connected to a second connecting frame (16), and the end of the second connecting frame (16) away from the frame shaft (15) is fixedly connected to an end of the intake pipe (12) close to the bellows (13).

3. A vacuum unit for single crystal growth according to claim 2, characterized in that: The top of the unit housing (1) is rotatably connected to a knob (17), the outer surface of the knob (17) is fixedly sleeved with a driving gear (18), and the outer surface of the driving gear (18) is meshingly connected to the outer surface of the gear rack (10).

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