Three-stage vacuum pump set using water-cooling variable-frequency integrated motor

Abstract

The utility model relates to a three-stage vacuum pump set using a water-cooling variable-frequency integrated motor. The dry type vacuum pump comprises a roots vacuum pump, a roots pump support frame, a rack and an air inlet flange, and is characterized by further comprising a two-stage dry type vacuum pump, an upper pump and lower pump connecting flange, an electric control system, an exhaust silencer, a communication line connector and a power line connector, and the two-stage dry type vacuum pump is composed of a high-pressure-difference roots vacuum pump and a dry type screw vacuum pump; the two-stage dry vacuum pump is installed on the rack and located under the roots vacuum pump; an air outlet of the roots vacuum pump is connected with an air inlet of the two-stage dry vacuum pump through the upper and lower pump connecting flange, and the exhaust silencer is connected with an air outlet of the two-stage dry vacuum pump; and a shell of the high-pressure-difference roots vacuum pump and a shell of the dry-type screw vacuum pump in the two-stage dry-type vacuum pump are provided with cooling water jackets. The Roots vacuum pump is reasonable in structural design, small in size and capable of dealing with the large-load working condition, and the overall failure rate of the Roots vacuum pump is reduced.

Description

Technical Field

[0001] The utility model relates to a three-stage vacuum pump group using a water-cooled variable frequency integrated motor, in particular to a group consisting of a Roots vacuum pump and a two-stage dry vacuum pump, which is mainly used in the fields of semiconductors, lithium batteries, chemical medicine, photovoltaics, etc. Background Art

[0002] At present, the application of two-stage vacuum pump sets and three-stage vacuum pump sets is becoming more and more common.

[0003] The commonly used two-stage vacuum pump groups mainly have the following problems: 1. Under working conditions of high pumping speed and high load, the stability of the Roots vacuum pump will be reduced, and the vacuum pump is prone to jamming; 2. It cannot cope with working conditions requiring a large pumping speed range and can only maintain a higher or lower pumping speed, and cannot take into account a variety of pumping speed requirements.

[0004] The commonly used three-stage vacuum pump groups mainly have the following problems: 1. The overall structure of the three-stage vacuum pump group is complex, and it is prone to problems such as resonance and abnormal noise; 2. The overall size of the three-stage vacuum pump group is large, and a larger space is required for installation. Utility Model Content

[0005] The purpose of the utility model is to overcome the above-mentioned deficiencies in the prior art and to provide a three-stage vacuum pump group using a water-cooled variable frequency integrated motor which has a reasonable structural design, a small size, can cope with large load conditions, and reduce the overall failure rate of the Roots vacuum pump.

[0006] The technical solution adopted by the utility model to solve the above problems is: the three-stage vacuum pump group using a water-cooled variable frequency integrated motor includes a Roots vacuum pump, a Roots pump support frame, a frame and an air intake flange, the Roots vacuum pump is fixed to the frame through the Roots pump support frame, and the air intake flange is installed at the air inlet of the Roots vacuum pump. Its structural characteristics are: it also includes a two-stage dry vacuum pump, upper and lower pump connecting flanges, an electric control system, an exhaust silencer, a cooling water inlet joint, a cooling water return joint, a communication line joint and a power line joint, the two-stage dry vacuum pump is composed of a high-pressure differential Roots vacuum pump and a dry screw vacuum pump, and the two-stage dry vacuum pump is installed on the frame , and the two-stage dry vacuum pump is located directly below the Roots vacuum pump; the air outlet of the Roots vacuum pump is connected to the air inlet of the two-stage dry vacuum pump through the upper and lower pump connecting flanges, and the exhaust muffler is connected to the air outlet of the two-stage dry vacuum pump; the housing of the high-pressure difference Roots vacuum pump and the housing of the dry screw vacuum pump in the two-stage dry vacuum pump are both provided with cooling water jackets, and the cooling water inlet joint and the cooling water return joint are connected to the cooling water jacket through a cooling water pipe; the electronic control system, the communication line joint and the power line joint are all installed on the rack, and the electronic control system, the communication line joint and the power line joint are all connected to the Roots vacuum pump and the two-stage dry vacuum pump.

[0007] Preferably, the three-stage vacuum pump assembly of the utility model further comprises casters and foot cups, and the casters and foot cups are both fixed to the bottom of the frame.

[0008] Preferably, the drive motors in the Roots vacuum pump and the two-stage dry vacuum pump of the utility model are both water-cooled variable frequency integrated motors.

[0009] Preferably, the air inlet of the two-stage dry vacuum pump of the utility model is located directly below the air outlet of the Roots vacuum pump, and the upper and lower pump connecting flanges are in a vertical structure.

[0010] Preferably, sheet metal is provided on the frame of the utility model.

[0011] A control method for a three-stage vacuum pump group using a water-cooled variable frequency integrated motor, characterized in that: the gas circuit of the three-stage vacuum pump group is connected to the gas pipeline of the client through an air intake flange and an exhaust silencer to realize gas transportation; the water circuit of the three-stage vacuum pump group is connected to the cooling water system of the client through a cooling water inlet joint and a cooling water return joint to realize the circulation of the cooling water circuit; the three-stage vacuum pump group is respectively connected to the power supply system of the client and the upper computer electronic control system through a power line joint and a communication line joint to realize the operation of the three-stage vacuum pump group;

[0012] The control method comprises the following steps: the dry screw vacuum pump in the two-stage dry vacuum pump is started first, and after the delayed start procedure set by the electronic control system, the high-pressure differential Roots vacuum pump in the two-stage dry vacuum pump is started again, and finally after the delayed start procedure set by the electronic control system, the Roots vacuum pump is started last.

[0013] Compared with the prior art, the utility model has the following advantages and effects: 1. The Roots vacuum pump and the two-stage dry vacuum pump are connected by upper and lower pump connection flanges, the Roots vacuum pump is supported by a Roots pump support frame, and the two-stage dry vacuum pump is an integral structure, so the entire three-stage vacuum pump group has the same connection interface as the conventional two-stage vacuum pump, and the overall rigidity is stronger, which can more effectively reduce the occurrence of vibration and abnormal noise, run more smoothly, and have a lower failure rate. The average vibration can be reduced by 0.5~1mm / s (the original vibration average is about 2.5mm / s), which can be increased by 20%~40%.

[0014] 2. The high-pressure differential Roots vacuum pump is used in the two-stage dry vacuum pump. Under heavy load conditions, the high-pressure differential Roots vacuum pump in the two-stage dry vacuum pump bears most of the pressure differential, and the Roots vacuum pump bears a small part of the pressure differential. In this way, the Roots vacuum pump and the high-pressure differential Roots vacuum pump in the two-stage dry vacuum pump will not exceed the maximum allowable pressure differential, and can operate stably for a long time under heavy load conditions.

[0015] 3. The three-stage pump structure can reduce the working pressure difference of the Roots vacuum pump to the greatest extent, and can effectively improve the volumetric efficiency from an average of 75% to an average of 85%.

[0016] 4. Compared with a two-stage vacuum pump with the same pumping speed, the minimum pumping speed can be reduced by 30~35%. Due to the improvement of volumetric efficiency, the maximum pumping speed can be increased by 5%~10%, so the overall process width can be increased by about 40%.

[0017] 5. The front pump of the unit adopts an integrated two-stage dry vacuum pump, which has a more compact overall structure, stronger rigidity, and a more stable center of gravity. It can effectively reduce the probability of abnormal vibration and abnormal noise, making the unit run more smoothly and reducing the failure rate of the unit.

[0018] 6. The dry screw vacuum pump part of the two-stage dry vacuum pump and the high-pressure differential Roots vacuum pump part have cooling water jackets on their shells, which enable the high-pressure differential Roots vacuum pump in the two-stage dry vacuum pump, which bears a larger load in the unit system, to have a better cooling effect and reduce the failure rate. The overall monthly failure rate can be reduced by 5%~10%.

[0019] 7. The water-cooled variable frequency integrated motor can provide a stable power source for the unit operation. The excellent sealing and efficient heat dissipation effect can ensure the long-term stable operation of the unit in harsh working environments and under harsh working conditions.

[0020] 8. The water-cooled variable frequency integrated motor completely isolates the power source of the motor from the control source of the motor, so that the design of the electric control cabinet does not need to consider the heat dissipation requirements of the inverter, and can effectively improve the sealing of the electric control cabinet, thereby improving the stability of the entire electrical control system and reducing the failure rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model and / or the technical solutions in the prior art, the drawings required for use in the embodiments and / or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a three-dimensional structural schematic diagram of a three-stage vacuum pump group using a water-cooled variable frequency integrated motor in an embodiment of the utility model.

[0023] Figure 2 It is a three-dimensional structural schematic diagram from another perspective of a three-stage vacuum pump group using a water-cooled variable frequency integrated motor in an embodiment of the utility model.

[0024] Figure 3It is a schematic diagram of the main structure of a three-stage vacuum pump group using a water-cooled variable frequency integrated motor in an embodiment of the utility model.

[0025] In the figure: 1- Roots vacuum pump; 2- two-stage dry vacuum pump; 3- upper and lower pump connection flange; 4- Roots pump support frame; 5- electronic control system; 6- frame; 7- air inlet flange; 8- exhaust muffler; 9- casters; 10- foot cup; 11- cooling water inlet connector; 12- cooling water return connector; 13- communication line connector; 14- power line connector. DETAILED DESCRIPTION

[0026] The present invention will be further described in detail below with reference to the accompanying drawings and through examples. The following examples are provided to explain the present invention, but the present invention is not limited to the following examples.

[0027] Example

[0028] See also Figures 1 to 3 The three-stage vacuum pump group using a water-cooled variable frequency integrated motor in this embodiment includes a Roots vacuum pump 1, a two-stage dry vacuum pump 2, an upper and lower pump connecting flange 3, a Roots pump support frame 4, an electronic control system 5, a frame 6, an air intake flange 7, an exhaust muffler 8, casters 9, a foot cup 10, a cooling water inlet connector 11, a cooling water return connector 12, a communication line connector 13 and a power line connector 14, wherein the casters 9 and the foot cup 10 are both fixed to the bottom of the frame 6.

[0029] The Roots vacuum pump 1 in this embodiment is fixed on the frame 6 through the Roots pump support frame 4, the air inlet flange 7 is installed at the air inlet of the Roots vacuum pump 1, the two-stage dry vacuum pump 2 consists of a high-pressure difference Roots vacuum pump and a dry screw vacuum pump, the two-stage dry vacuum pump 2 is installed on the frame 6, and the two-stage dry vacuum pump 2 is located directly below the Roots vacuum pump 1, and the air inlet of the two-stage dry vacuum pump 2 is located directly below the air outlet of the Roots vacuum pump 1.

[0030] The air outlet of the Roots vacuum pump 1 in this embodiment is connected to the air inlet of the two-stage dry vacuum pump 2 through the upper and lower pump connecting flanges 3. The upper and lower pump connecting flanges 3 are vertically structured, and the exhaust muffler 8 is connected to the air outlet of the two-stage dry vacuum pump 2.

[0031] In this embodiment, the housing of the high-pressure differential Roots vacuum pump and the housing of the dry screw vacuum pump in the two-stage dry vacuum pump 2 are both provided with cooling water jackets, and the cooling water inlet connector 11 and the cooling water return connector 12 are connected to the cooling water jackets through cooling water pipes; the electronic control system 5, the communication line connector 13 and the power line connector 14 are all installed on the frame 6, and the electronic control system 5, the communication line connector 13 and the power line connector 14 are all connected to the Roots vacuum pump 1 and the two-stage dry vacuum pump 2.

[0032] The drive motors in the Roots vacuum pump 1 and the two-stage dry vacuum pump 2 in this embodiment are both water-cooled variable frequency integrated motors, and sheet metal is usually provided on the frame 6 .

[0033] When the three-stage vacuum pump group using a water-cooled variable frequency integrated motor in this embodiment is in use, the gas circuit of the three-stage vacuum pump group is connected to the gas pipeline of the client through the air inlet flange 7 and the exhaust silencer 8 to realize gas transportation; the water circuit of the three-stage vacuum pump group is connected to the cooling water system of the client through the cooling water inlet connector 11 and the cooling water return connector 12 to realize the circulation of the cooling water circuit; the three-stage vacuum pump group is connected to the power supply system of the client and the upper computer electronic control system through the power line connector 14 and the communication line connector 13 respectively to realize the operation of the three-stage vacuum pump group.

[0034] The steps of the control method of the three-stage vacuum pump group using a water-cooled variable frequency integrated motor in this embodiment are as follows: the dry screw vacuum pump in the two-stage dry vacuum pump 2 is started first, and after the delayed start program set by the electronic control system 5, the high-pressure differential Roots vacuum pump in the two-stage dry vacuum pump 2 is started again, and finally, after the delayed start program set by the electronic control system 5, the Roots vacuum pump 1 is started last.

[0035] In addition, it should be noted that the shapes and names of the parts and components of the specific embodiments described in this specification may be different, and the above content described in this specification is only an example of the structure of the utility model. All equivalent changes or simple changes made based on the structure, features and principles described in the patent concept of the utility model are included in the protection scope of the utility model patent. Technicians in the technical field of the utility model can make various modifications or supplements to the specific embodiments described or replace them in a similar manner, as long as they do not deviate from the structure of the utility model or exceed the scope defined by the claims, they should all fall within the protection scope of the utility model.

Claims

1. A three-stage vacuum pump assembly using a water-cooled variable frequency integrated motor, comprising a Roots vacuum pump (1), a Roots pump support frame (4), a frame (6) and an air inlet flange (7), wherein the Roots vacuum pump (1) is fixed to the frame (6) via the Roots pump support frame (4), and the air inlet flange (7) is installed at the air inlet of the Roots vacuum pump (1), characterized in that: It also includes a two-stage dry vacuum pump (2), an upper and lower pump connecting flange (3), an electric control system (5), an exhaust muffler (8), a cooling water inlet connector (11), a cooling water return connector (12), a communication line connector (13) and a power line connector (14). The two-stage dry vacuum pump (2) is composed of a high-pressure differential Roots vacuum pump and a dry screw vacuum pump. The two-stage dry vacuum pump (2) is installed on a frame (6), and the two-stage dry vacuum pump (2) is located directly below the Roots vacuum pump (1); the air outlet of the Roots vacuum pump (1) is connected to the air inlet of the two-stage dry vacuum pump (2) through the upper and lower pump connecting flange (3) and the air inlet of the two-stage dry vacuum pump (2). The exhaust silencer (8) is connected to the air outlet of the two-stage dry vacuum pump (2); the housing of the high-pressure differential Roots vacuum pump and the housing of the dry screw vacuum pump in the two-stage dry vacuum pump (2) are both provided with cooling water jackets, and the cooling water inlet joint (11) and the cooling water return joint (12) are connected to the cooling water jackets through cooling water pipes; the electronic control system (5), the communication line joint (13) and the power line joint (14) are all installed on the frame (6), and the electronic control system (5), the communication line joint (13) and the power line joint (14) are all connected to the Roots vacuum pump (1) and the two-stage dry vacuum pump (2).

2. The three-stage vacuum pump unit using a water-cooled variable frequency integrated motor according to claim 1 is characterized in that: The three-stage vacuum pump assembly further comprises a caster (9) and a foot cup (10), wherein the caster (9) and the foot cup (10) are both fixed to the bottom of the frame (6).

3. The three-stage vacuum pump unit using a water-cooled variable frequency integrated motor according to claim 1 is characterized in that: The drive motors in the Roots vacuum pump (1) and the two-stage dry vacuum pump (2) are both water-cooled variable frequency integrated motors.

4. The three-stage vacuum pump unit using a water-cooled variable frequency integrated motor according to claim 1 is characterized in that: The air inlet of the two-stage dry vacuum pump (2) is located directly below the air outlet of the Roots vacuum pump (1), and the upper and lower pump connecting flanges (3) are in a vertical structure.

5. The three-stage vacuum pump unit using a water-cooled variable frequency integrated motor according to claim 1, characterized in that: The frame (6) is provided with sheet metal.

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