Sealing ring and semiconductor vacuum equipment

Abstract

The utility model discloses a sealing ring and semiconductor vacuum equipment, which relates to the field of semiconductor technology, wherein the sealing ring includes a sealing strip and a first connecting strip, one end of the sealing strip is provided with a first plug-in portion, and the other end of the sealing strip is provided with a first slot; one end of the first connecting strip is provided with a second plug-in portion, and the other end of the first connecting strip is provided with a second slot; the second plug-in portion is plugged into the first slot, and the first plug-in portion is plugged into the second slot, so that the sealing strip and the first connecting strip are detachably connected to form a large-diameter sealing ring; the first plug-in portion is plugged into the first slot, so that the sealing strip forms a small-diameter sealing ring. The technical solution provided by the utility model can be adapted to be installed in exhaust pipes of different sizes, thereby improving the sealing effect of semiconductor vacuum equipment.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a sealing ring and semiconductor vacuum equipment. Background Art

[0002] Semiconductor manufacturing often needs to be carried out in semiconductor vacuum equipment that can create a vacuum environment. Semiconductor vacuum equipment generally includes a vacuum box and a cover plate that covers the vacuum box. The cover plate is usually made of quartz and has a high hardness, while the vacuum box is usually made of metal material and also has a high hardness. Therefore, in order to ensure the sealing effect, a sealing ring is used between the cover plate and the vacuum box for sealing.

[0003] However, these traditional sealing rings often have adaptability issues when dealing with installation grooves of different sizes, resulting in poor sealing effects, which in turn increases the risk of contamination of semiconductor equipment. Utility Model Content

[0004] The main purpose of the utility model is to provide a sealing ring and a semiconductor vacuum device, which are designed to be adaptable to being installed in exhaust pipes of different sizes, thereby improving the sealing effect of the semiconductor vacuum device.

[0005] In order to achieve the above-mentioned purpose, the utility model provides a sealing ring, which comprises:

[0006] A sealing strip, wherein one end of the sealing strip is provided with a first plug-in portion, and the other end of the sealing strip is provided with a first slot; and

[0007] A first connecting strip, wherein a second plug-in portion is provided at one end of the first connecting strip, and a second slot is provided at the other end of the first connecting strip;

[0008] The second plug-in portion is plugged into the first slot, and the first plug-in portion is plugged into the second slot, so that the sealing strip and the first connecting strip are detachably connected to form a large-diameter sealing ring;

[0009] The first plug-in portion is plugged into the first slot, so that the sealing strip forms a small-diameter sealing ring.

[0010] In one embodiment, the sealing ring also includes a second connecting strip, a third plug-in portion is provided at one end of the second connecting strip, a third slot is provided at the other end of the second connecting strip, the third plug-in portion is plugged into the first slot, and the second plug-in portion is plugged into the third slot, so that the second connecting strip and the sealing strip can be detachably connected; the length of the second connecting strip is set differently from the length of the first connecting strip.

[0011] In one embodiment, the other end of the sealing strip is provided with a first limiting groove, and the first slot is located at the bottom slot wall of the first limiting groove; the other end of the first connecting strip is provided with a second limiting groove, and the second slot is located at the bottom slot wall of the second limiting groove;

[0012] The second plug-in portion is inserted into the first slot, and the sealing strip is clamped into the first limiting slot; the first plug-in portion is inserted into the second slot, and the sealing strip is clamped into the second limiting slot.

[0013] In one embodiment, the peripheral wall of the first plug-in portion and the peripheral wall of the second plug-in portion are both provided with guiding inclined surfaces.

[0014] In one embodiment, the sealing strip and the first plug-in portion are an integrated structure;

[0015] And / or, the first connecting strip and the second plug-in portion are an integrated structure.

[0016] In one embodiment, the surface of the first plug-in portion is provided with a spiral or wavy texture;

[0017] And / or, the surface of the first connecting strip is provided with a spiral or wavy texture.

[0018] In one embodiment, the sealing strip and the first connecting strip are both components made of high temperature resistant and corrosion resistant synthetic rubber or silicone material.

[0019] In one embodiment, the first plug-in portion and the first slot are interference fit or clearance fit;

[0020] And / or, the second plug-in portion and the second slot are interference fit or clearance fit.

[0021] The utility model also provides a semiconductor vacuum device, the semiconductor vacuum device comprising:

[0022] A vacuum seat, wherein the vacuum seat is provided with a vacuum chamber;

[0023] A vacuum pump, wherein the vacuum pump is provided with an air inlet;

[0024] an air extraction pipeline, one end of which is fixed to the air inlet, and the other end of which is connected to the vacuum chamber; and

[0025] As described above, the sealing ring is sleeved on the outer wall of the air extraction pipe and elastically abuts against the wall of the air inlet hole.

[0026] The sealing ring of the technical solution of the utility model comprises a sealing strip and a first connecting strip, wherein a first plug-in portion is provided at one end of the sealing strip, and a first slot is provided at the other end of the sealing strip; a second plug-in portion is provided at one end of the first connecting strip, and a second slot is provided at the other end of the first connecting strip; the second plug-in portion is plugged into the first slot, and the first plug-in portion is plugged into the second slot, so that the sealing strip and the first connecting strip are detachably connected to form a large-diameter sealing ring; the first plug-in portion is plugged into the first slot, so that the sealing strip forms a small-diameter sealing ring; BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0028] Figure 1 This is a schematic diagram of the structure after the two ends of the sealing strip of the sealing ring provided by the utility model are assembled;

[0029] Figure 2 This is a schematic diagram of the structure of the sealing strip of the sealing ring provided by the utility model after both ends are disassembled;

[0030] Figure 3 This is a schematic structural diagram of the first connecting strip of the sealing ring provided by the utility model.

[0031] Description of Figure Numbers:

[0032] 10. Sealing strip; 11. First plug-in portion; 12. First slot; 13. First limiting groove; 20. First connecting strip; 21. Second plug-in portion; 22. Second slot; 23. Second limiting groove.

[0033] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0036] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0037] Semiconductor manufacturing often needs to be carried out in semiconductor vacuum equipment that can create a vacuum environment. Semiconductor vacuum equipment generally includes a vacuum box and a cover plate that covers the vacuum box. The cover plate is usually made of quartz and has a high hardness, while the vacuum box is usually made of metal material and also has a high hardness. Therefore, in order to ensure the sealing effect, a sealing ring is used between the cover plate and the vacuum box for sealing.

[0038] However, these traditional sealing rings often have adaptability issues when dealing with installation grooves of different sizes, resulting in poor sealing effects, which in turn increases the risk of contamination of semiconductor equipment.

[0039] Therefore, the utility model provides a sealing ring.

[0040] See also Figures 1 to 3 In one embodiment of the utility model, the sealing ring includes a sealing strip 10 and a first connecting strip 20, one end of the sealing strip 10 is provided with a first plug-in portion 11, and the other end of the sealing strip 10 is provided with a first slot 12; one end of the first connecting strip 20 is provided with a second plug-in portion 21, and the other end of the first connecting strip 20 is provided with a second slot 22; the second plug-in portion 21 is plugged into the first slot 12, and the first plug-in portion 11 is plugged into the second slot 22, so that the sealing strip 10 and the first connecting strip 20 can be detachably connected to form a large-diameter sealing ring; the first plug-in portion 11 is plugged into the first slot 12, so that the sealing strip 10 forms a small-diameter sealing ring.

[0041] First, the utility model realizes the adjustability of the sealing ring diameter through a unique structural design. When a large diameter sealing ring needs to be formed, the sealing strip 10 and the first connecting strip 20 are detachably connected by inserting the second plug-in portion 21 of the first connecting strip 20 into the first slot 12 of the sealing strip 10, and inserting the first plug-in portion 11 of the sealing strip 10 into the second slot 22 of the first connecting strip 20, so as to form a large diameter sealing ring. This design is not only convenient for installation and replacement, but also can flexibly adjust the size of the sealing ring according to the needs of the working environment in actual application, greatly improving the application range of the sealing ring.

[0042] Secondly, when forming a small diameter sealing ring, the utility model also shows its structural superiority. By directly plugging the first plug-in portion 11 of the sealing strip 10 into the first slot 12, a small diameter sealing ring can be formed simply and quickly without the need for additional components or complicated conversion processes, thereby reducing manufacturing costs and improving production efficiency.

[0043] In addition, the structural design of the utility model also has the following advantages: 1. Saving materials: Due to the detachable connection between the sealing strip 10 and the first connecting strip 20, it can be converted between different diameter requirements, reducing material waste caused by different size requirements and achieving raw material savings. 2. Enhanced sealing performance: The sealing ring formed by plug-in connection is tightly connected, which effectively improves the sealing performance and reduces leakage problems caused by poor sealing. 3. Reduce maintenance costs: The detachable design makes the cleaning and maintenance of the sealing ring more convenient and reduces maintenance costs. 4. Environmental protection and energy saving: While meeting the use requirements, the utility model reduces material consumption and waste emissions, which is in line with the development trend of green environmental protection.

[0044] The technical solution of the utility model is to set a sealing strip 10 and a first connecting strip 20, and respectively set a first plug-in portion 11 and a first slot 12 at both ends of the sealing strip 10, and set a second plug-in portion 21 and a second slot 22 at both ends of the first connecting strip 20, so that the user can selectively assemble the sealing strip 10 and the first connecting strip 20 according to the actual size of the exhaust pipe, thereby forming sealing rings with different diameters, which are suitable for the installation of exhaust pipes of different sizes, thereby improving the sealing effect of semiconductor vacuum equipment.

[0045] Optionally, the outer diameter of the first plug-in portion 11 is adapted to match the inner diameter of the second slot 22 , and the outer diameter of the second plug-in portion 21 is adapted to match the inner diameter of the first slot 12 .

[0046] In one embodiment, see Figures 1 to 3The sealing ring also includes a second connecting strip, one end of which is provided with a third plug-in portion, and the other end of the second connecting strip is provided with a third slot, the third plug-in portion is plugged into the first slot 12, and the second plug-in portion 21 is plugged into the third slot, so that the second connecting strip and the sealing strip 10 can be detachably connected; the length of the second connecting strip is set differently from the length of the first connecting strip 20.

[0047] In this embodiment, by adding a second connecting strip having a different length from the first connecting strip 20, 1. Increase the adjustment range: The design of the second connecting strip allows the user to more flexibly connect the two ends of the sealing strip 10 through the cooperation of its third plug-in portion and the third slot. Compared with the prior art, this design significantly increases the adjustable range of the sealing ring, so that it can better adapt to the exhaust channels of different sizes and shapes, and enhance the versatility and adaptability of semiconductor vacuum equipment. 2. Improve the sealing effect: Since the adjustable range of the sealing ring is expanded, the utility model can more effectively adapt to the tiny gaps inside the equipment, significantly improving the sealing effect of the semiconductor vacuum equipment. This not only helps to prevent vacuum leakage and improve the working efficiency of the equipment, but also plays a vital role in ensuring the stability and safety during the experiment or production process. 3. Improve the life of the equipment: By optimizing the connection structure, the probability of damage to the sealing strip 10 caused by thermal expansion and contraction is reduced, thereby improving the life and reliability of the entire semiconductor vacuum equipment. 4. Save materials and costs: The addition of the second connecting strip does not add extra complexity. On the contrary, it simplifies the adjustment process, reduces the waste of unnecessary materials, and helps to reduce production costs.

[0048] In one embodiment, see Figures 1 to 3 A first limiting groove 13 is provided at the other end of the sealing strip 10, and the first insertion slot 12 is located at the bottom groove wall of the first limiting groove 13; a second limiting groove 23 is provided at the other end of the first connecting strip 20, and the second insertion slot 22 is located at the bottom groove wall of the second limiting groove 23; the second plug-in portion 21 is inserted in the first insertion slot 12, and the sealing strip 10 is clamped in the first limiting groove 13; the first plug-in portion 11 is inserted in the second insertion slot 22, and the sealing strip 10 is clamped in the second limiting groove 23.

[0049] In this embodiment, by setting the first limiting groove 13 and the second limiting groove 23, and making the first slot 12 and the second slot 22 respectively located at the bottom groove wall of each limiting groove, the installation accuracy and stability of the sealing strip 10 are effectively improved. During the assembly process, the sealing strip 10 can be firmly clamped in the limiting groove, avoiding the problem of poor sealing effect caused by improper installation of the traditional structure, and significantly improving the overall sealing performance of the product. The plug-in action of the first plug-in part 11 and the second plug-in part 21 is simpler and faster, which not only reduces the installation time, but also reduces the manufacturing cost. This design not only improves the productivity, but also reduces the difficulty of manual operation, which is conducive to large-scale production. The ingenious cooperation between the sealing strip 10 and the limiting groove not only ensures the reliability of the connection system, but also maintains good vibration resistance and durability when facing a complex working environment. This makes the sealing ring suitable for a wider range of scenarios and enhances the market competitiveness of the sealing ring.

[0050] In one embodiment, see Figures 1 to 3 The peripheral wall of the first plug-in portion 11 and the peripheral wall of the second plug-in portion 21 are both provided with guiding inclined surfaces.

[0051] In this embodiment, the first plug-in portion 11 and the second plug-in portion 21 are both provided with guide bevels, so that the components can be automatically guided and accurately docked during the plug-in process, effectively improving the connection accuracy and reducing the problem of excessive component gap or poor docking caused by inaccurate plug-in. At the same time, the design of the guide bevel enables the connection components to produce a self-locking effect during the plug-in process, further enhancing the connection stability and reducing the loosening or falling off caused by vibration or external force. The guide bevel design simplifies the assembly process, and the operator does not need to perform complex alignment operations, which reduces the difficulty of assembly and significantly improves the assembly efficiency.

[0052] In one embodiment, see Figures 1 to 3 The sealing strip 10 and the first plug-in portion 11 are an integrated structure; the first connecting strip 20 and the second plug-in portion 21 are an integrated structure. In this way, the sealing strip 10 and the first plug-in portion 11 are processed by an integrated molding process, and the first connecting strip 20 and the second plug-in portion 21 are also processed by an integrated molding process, which further improves the connection tightness between the sealing strip 10 and the first plug-in portion 11, and the connection tightness between the first connecting strip 20 and the second plug-in portion 21.

[0053] In one embodiment, see Figures 1 to 3 The surface of the first plug-in portion 11 is provided with a spiral or wavy texture; the surface of the first connecting strip 20 is provided with a spiral or wavy texture.

[0054] By setting spiral or wavy textures on the surface of the first plug-in portion 11 and the first connecting strip 20, the friction of the plug-in surface is significantly increased, making the connection more firm and stable. Compared with the prior art, the utility model exhibits better anti-slip performance when subjected to external force, effectively avoiding the problem of falling off or loosening that is prone to occur in traditional connection structures. At the same time, due to the design of the texture of the first plug-in portion 11 and the first connecting strip 20, the first plug-in portion 11 and the first connecting strip 20 can be more easily aligned and inserted during the assembly process, thereby improving assembly efficiency and reducing labor costs, and is particularly suitable for large-scale production environments.

[0055] In one embodiment, see Figures 1 to 3 The sealing strip 10 and the first connecting strip 20 are both components made of high temperature resistant and corrosion resistant synthetic rubber or silicone material.

[0056] In this embodiment, since the sealing strip 10 and the first connecting strip 20 are made of high temperature resistant and corrosion resistant materials, they have a longer service life in high temperature and corrosion environments, effectively reducing the maintenance cost and replacement frequency of the product. The high temperature resistant and corrosion resistant synthetic rubber or silicone material has good elasticity and resilience, so that the sealing strip 10 and the first connecting strip 20 can better adapt to various working conditions, ensure the sealing effect, and prevent leakage of media such as gas and liquid.

[0057] In one embodiment, see Figures 1 to 3 The first plug-in portion 11 and the first slot 12 are interference fit or clearance fit; the second plug-in portion 21 and the second slot 22 are interference fit or clearance fit.

[0058] The assembly stability and reliability of the device are significantly improved by adopting the interference fit or clearance fit between the first plug-in portion 11 and the first slot 12, and the interference fit or clearance fit between the second plug-in portion 21 and the second slot 22. In the interference fit mode, due to the interference effect between the parts, the connection is tighter, and the loose assembly caused by vibration or impact is effectively avoided, thereby extending the service life of the device and reducing maintenance costs.

[0059] Secondly, the design of the utility model allows for flexible adjustment of the tightness of the plug-in fit, and interference fit or clearance fit can be selected according to actual application requirements to adapt to different working environments and technical requirements. This design not only ensures structural strength, but also takes into account the convenience of installation and disassembly, greatly improving the convenience of operation.

[0060] The utility model also proposes a semiconductor vacuum device, which includes a vacuum seat, a vacuum pump, an exhaust pipe and the sealing ring. The vacuum seat is provided with a vacuum chamber; the vacuum pump is provided with an air inlet; one end of the exhaust pipe is fixed at the air inlet, and the other end of the exhaust pipe is connected to the vacuum chamber; the sealing ring is sleeved on the outer wall of the exhaust pipe and elastically abuts against the wall of the air inlet. The specific structure of the sealing ring refers to the above embodiment. Since the semiconductor vacuum device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here.

[0061] In the utility model, the utility model adopts a combined structure of a vacuum seat, a vacuum pump, an exhaust pipe and a sealing ring, so that the equipment structure is compact, occupies a small area, and is easy to install and maintain. By adopting the elastic contact between the sealing ring and the outer wall of the exhaust pipe and the wall of the air inlet hole, the exhaust efficiency of the vacuum pump is effectively improved. The structural design of the sealing ring makes it have good sealing performance, effectively prevents the leakage of oil mist inside the vacuum pump, reduces the equipment failure rate, and prolongs the service life of the equipment.

[0062] In the semiconductor manufacturing process, high-efficiency vacuuming is of great significance for ensuring process quality and improving production efficiency. In addition, the design of the sealing ring is also conducive to reducing equipment manufacturing costs and improving product competitiveness. The technical solution of the utility model breaks through the design limitations of traditional vacuum equipment, provides a novel vacuum equipment solution for the semiconductor industry, and represents the development trend of new technologies in the industry.

[0063] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A sealing ring, characterized in that: include: A sealing strip, wherein one end of the sealing strip is provided with a first plug-in portion, and the other end of the sealing strip is provided with a first slot; and A first connecting strip, wherein a second plug-in portion is provided at one end of the first connecting strip, and a second slot is provided at the other end of the first connecting strip; The second plug-in portion is plugged into the first slot, and the first plug-in portion is plugged into the second slot, so that the sealing strip and the first connecting strip are detachably connected to form a large-diameter sealing ring; The first plug-in portion is plugged into the first slot, so that the sealing strip forms a small-diameter sealing ring.

2. The sealing ring according to claim 1, characterized in that: The sealing ring also includes a second connecting strip, one end of which is provided with a third plug-in portion, and the other end of the second connecting strip is provided with a third slot, the third plug-in portion is plugged into the first slot, and the second plug-in portion is plugged into the third slot, so that the second connecting strip and the sealing strip are detachably connected; the length of the second connecting strip is set differently from the length of the first connecting strip.

3. The sealing ring according to claim 1, characterized in that: A first limiting groove is provided at the other end of the sealing strip, and the first slot is located at the bottom slot wall of the first limiting groove; a second limiting groove is provided at the other end of the first connecting strip, and the second slot is located at the bottom slot wall of the second limiting groove; The second plug-in portion is inserted into the first slot, and the sealing strip is clamped into the first limiting slot; the first plug-in portion is inserted into the second slot, and the sealing strip is clamped into the second limiting slot.

4. The sealing ring according to claim 1, characterized in that: The peripheral wall of the first plug-in portion and the peripheral wall of the second plug-in portion are both provided with guiding inclined surfaces.

5. The sealing ring according to claim 1, characterized in that: The sealing strip and the first plug-in portion are an integrated structure; And / or, the first connecting strip and the second plug-in portion are an integrated structure.

6. The sealing ring according to claim 1, characterized in that: The surface of the first plug-in portion is provided with a spiral or wavy texture; And / or, the surface of the first connecting strip is provided with a spiral or wavy texture.

7. The sealing ring according to claim 1, characterized in that: The sealing strip and the first connecting strip are both components made of high temperature resistant and corrosion resistant synthetic rubber or silicone material.

8. The sealing ring according to claim 1, characterized in that: The first plug-in portion and the first slot are interference fit or clearance fit; And / or, the second plug-in portion and the second slot are interference fit or clearance fit.

9. A semiconductor vacuum device, characterized in that: The semiconductor vacuum equipment comprises: A vacuum seat, wherein the vacuum seat is provided with a vacuum chamber; A vacuum pump, wherein the vacuum pump is provided with an air inlet; an air extraction pipeline, one end of which is fixed to the air inlet, and the other end of which is connected to the vacuum chamber; and The sealing ring according to any one of claims 1 to 8, wherein the sealing ring is sleeved on the outer wall of the exhaust pipe and elastically abuts against the wall of the air inlet hole.

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