Cleaning equipment

Abstract

The utility model discloses a cleaning device, which relates to the technical field of silicon wafer cleaning. The cleaning device includes a conveying mechanism and a collecting box. The conveying mechanism includes a conveyor belt, at least part of which is located in a drying tunnel to receive broken silicon wafers; the collecting box is located at the end of the conveyor belt in the conveying direction, and is used to collect broken silicon wafers. According to the cleaning device of the embodiment of the utility model, the automatic collection and transfer of broken silicon wafers is realized by setting a conveying mechanism. By setting a collecting box. When the broken silicon wafers are transported to this position by the conveyor belt, they will naturally fall into the collecting box, so that the broken silicon wafers can be stored in a centralized manner, which is convenient for subsequent processing or recycling. Therefore, this cleaning device has a high degree of automation, reducing the tediousness of manual cleaning. At the same time, through the coordinated use of the conveying mechanism and the collecting box, the collection process of broken silicon wafers is made more efficient and orderly.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer cleaning, in particular to a cleaning device. Background Art

[0002] As the production capacity of the silicon wafer industry continues to expand, cleaning equipment is also undergoing rapid updates and iterations. Since the efficiency of old cleaning equipment can no longer meet current production requirements, many cleaning equipment have to be widened and lengthened to adapt to new production needs. However, this change has brought challenges to the daily cleaning of cleaning equipment, especially in the drying tunnel, where cleaning silicon fragments has become particularly difficult and inconvenient.

[0003] Therefore, there is room for improvement in cleaning equipment. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a cleaning device with a high degree of automation, which can reduce the tediousness of manual cleaning.

[0005] According to some embodiments of the present invention, the cleaning device comprises a conveying mechanism and a collecting box. The conveying mechanism comprises a conveyor belt, at least part of which is located in the drying tunnel to receive broken silicon wafers; the collecting box is located at the end of the conveyor belt in the conveying direction and is used to collect the broken silicon wafers.

[0006] According to the cleaning equipment of the embodiment of the utility model, the automatic collection and transfer of broken silicon wafers is realized by setting a conveying mechanism. By setting a collection box. When the broken silicon wafers are transported to this position by the conveyor belt, they will naturally fall into the collection box, so that the broken silicon wafers can be stored in a centralized manner, which is convenient for subsequent processing or recycling. Therefore, this cleaning equipment has a high degree of automation and reduces the tediousness of manual operation. At the same time, through the coordinated use of the conveying mechanism and the collection box, the collection process of broken silicon wafers is made more efficient and orderly.

[0007] According to some embodiments of the cleaning device of the present invention, there are at least two collecting boxes arranged along a first direction, and each collecting box is drawable along the first direction; wherein the first direction is perpendicular to the conveying direction.

[0008] According to some embodiments of the cleaning equipment of the present invention, the top of the collection box has an opening; the side walls of the collection box include a first side wall and a second side wall opposite to each other, the first side wall and the second side wall are arranged along the conveying direction, the first side wall is located directly below the conveyor belt, and the end of the conveyor belt in the conveying direction is located between the first side wall and the second side wall.

[0009] According to some embodiments of the cleaning device of the present invention, the first side wall is an inclined wall, and the first side wall extends upward and in a direction away from the second side wall.

[0010] According to some embodiments of the cleaning device of the present invention, the angle between the first side wall and the horizontal direction is α, which satisfies 30°≤α≤60°.

[0011] According to some embodiments of the cleaning equipment of the present invention, the conveying mechanism further includes: a mounting frame; a driving wheel and a driven wheel, wherein the driving wheel and the driven wheel are arranged at intervals along the conveying direction and are rotatably mounted on the mounting frame respectively; and the conveyor belt is wound around the driving wheel and the driven wheel.

[0012] According to some embodiments of the cleaning equipment of the present invention, the position of at least one of the driving wheel and the driven wheel in the conveying direction is adjustable relative to the mounting frame, so that the distance between the driving wheel and the driven wheel in the conveying direction is adjustable.

[0013] According to some embodiments of the cleaning equipment of the present invention, the conveying mechanism further includes: a driving motor, which is fixed to the mounting frame and is used to drive the driving wheel; the conveying mechanism further includes a protective plate, which is located on at least one side of the conveyor belt in the first direction.

[0014] According to some embodiments of the cleaning equipment of the present invention, the conveying mechanism also includes: at least one intermediate roller arranged between the driving wheel and the driven wheel, and both ends of the intermediate roller are movably connected to the mounting frame to make the relative position of the intermediate roller and the driving wheel and / or the driven wheel in the conveying direction adjustable.

[0015] According to some embodiments of the cleaning equipment of the present invention, a positioning device is provided between two adjacent collection boxes to achieve positioning between the collection boxes; the positioning device includes: a first positioning portion and a second positioning portion that are adapted to each other; the first positioning portion and the second positioning portion are respectively arranged on the outer side walls of the two adjacent collection boxes that are close to each other.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1It is a schematic diagram of the structure of the cleaning device in some embodiments of the utility model;

[0019] Figure 2 It is a schematic diagram of the structure of the transmission mechanism in some embodiments of the utility model;

[0020] Figure 3 Schematic diagram of the position of the conveying mechanism and the collecting box in some embodiments of the utility model;

[0021] Figure 4 It is a schematic diagram of the arrangement of the collecting boxes in some embodiments of the utility model.

[0022] Reference numerals:

[0023] Cleaning equipment 100,

[0024] Conveying mechanism 10, conveying belt 11, mounting frame 12, driving wheel 13, driven wheel 14, intermediate roller 15, driving motor 16, protective plate 17,

[0025] Collection box 20, opening 21, first side wall 22, second side wall 23, positioning device 24, first positioning portion 241, second positioning portion 242,

[0026] Drying tunnel 30. DETAILED DESCRIPTION

[0027] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0028] In the description of the present utility model, it should be understood that the terms "upper", "lower", "left", "right", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] Reference below Figure 1-Figure 4 The cleaning device 100 according to the embodiment of the present invention is described. The application field of the cleaning device 100 is not limited, and can be applied in the manufacturing industry, the electronic industry, etc.

[0031] like Figure 1 As shown, the cleaning device 100 according to the embodiment of the present invention comprises: a conveying mechanism 10 and a collecting box 20. The conveying mechanism 10 comprises a conveying belt 11, at least part of which is located in the drying tunnel 30 to receive broken silicon wafers.

[0032] Here, the conveyor belt 11 in the conveying mechanism 10 can be completely located in the drying tunnel 30. When the broken silicon wafers fall onto the conveyor belt 11, the conveyor belt 11 can move the broken silicon wafers along a predetermined conveying direction.

[0033] Or, if Figure 1 As shown, a portion of the conveyor belt 11 in the conveying mechanism 10 is located inside the drying tunnel 30, and another portion extends outside the drying tunnel 30. The portion of the conveyor belt 11 outside the drying tunnel 30 is usually arranged at a position that is convenient for observation and operation, so that the staff can directly see the flow of broken silicon wafers. This helps the staff to promptly discover and handle any abnormal situation, such as blockage of the conveyor belt 11, scattering of broken silicon wafers, etc.

[0034] The structural type of the conveyor belt 11 is not limited. According to the application environment of the cleaning equipment, the conveyor belt 11 can be a linear conveyor belt 11, a turning conveyor belt 11, or an inclined conveyor belt 11.

[0035] The collecting box 20 is located at the end of the conveyor belt 11 in the conveying direction and is used to collect the broken silicon wafers, thereby ensuring that the broken silicon wafers can be collected in an orderly and efficient manner.

[0036] In the present application, the shape of the collecting box 20 is flexible, and it can be an elongated box body, a square box body, or a cylindrical box body.

[0037] In some solutions, the collection box 20 has sufficient capacity to accommodate a certain number of broken silicon wafers, aiming to reduce the number of times the staff frequently empties the collection box 20, thereby improving the overall working efficiency of the cleaning equipment. However, the collection box 20 becomes relatively heavy when filled with broken silicon wafers, which makes it difficult for the staff to take and move it. In order to solve the above problem, in the present application, there are at least two collection boxes 20.

[0038] Optionally, universal wheels are provided at the bottom of the collection box 20, thereby improving the flexibility and convenience of the collection box 20.

[0039] In some embodiments, Figure 2 As shown, there are at least two collecting boxes 20 arranged along a first direction, and each collecting box 20 is drawable along the first direction; wherein the first direction is perpendicular to the conveying direction.

[0040] Such arrangement can enhance the flexibility and operation convenience of the collection box 20. Wherein, the first direction is perpendicular to the conveying direction, which means that the collection box 20 is arranged transversely at the end of the conveyor belt 11, which is convenient for the staff to operate and manage.

[0041] This allows the number of collection boxes 20 to be adjusted according to actual needs. Figure 2 There are two collecting boxes 20 arranged along the first direction, and the two collecting boxes 20 are arranged in sequence along the first direction. When a collecting box 20 is full of broken silicon wafers, the staff can easily pull it out from the end of the conveyor belt 11, and then clean it or replace it with a new collecting box 20. Since the collecting boxes 20 are pulled out individually, compared with handling the entire full collection box 20 at one time, the method of taking them out separately can reduce the labor intensity of the staff and improve work efficiency.

[0042] Optionally, there are three or four collecting boxes 20 arranged along the first direction, which helps to improve the convenience of the staff in operating the collecting boxes 20.

[0043] In some embodiments, Figure 2-Figure 3 As shown, the collecting box 20 has an opening 21 at the top so that the broken silicon wafers can fall freely into the collecting box 20.

[0044] The side wall of the collection box 20 includes a first side wall 22 and a second side wall 23 opposite to each other, and the first side wall 22 and the second side wall 23 are arranged along the conveying direction, that is, the direction of the broken silicon wafers from the starting point to the end point of the conveyor belt 11. The first side wall 22 is located directly below the conveyor belt 11 to ensure that the broken silicon wafers on the conveyor belt 11 can fall directly into the collection box 20.

[0045] The end of the conveyor belt 11 in the conveying direction is located between the first side wall 22 and the second side wall 23. This arrangement allows the broken silicon wafers to smoothly slide into the collection box 20 at the end of the conveyor belt 11.

[0046] Optionally, in some embodiments not shown in the figures, the second side wall 23 is higher than the first side wall 22. This arrangement can form a barrier, effectively preventing the broken silicon wafers from flying out of the collecting box 20 when falling into the collecting box 20 due to the initial velocity of the conveyor belt 11 or the inertia of the broken silicon wafers. By increasing the height of the second side wall 23, it can be ensured that when the broken silicon wafers slide down at the end of the conveyor belt 11, even if they are affected by a certain initial velocity, they can be blocked by the second side wall 23 and remain in the collecting box 20.

[0047] In some optional embodiments, such as Figure 3 As shown, the bottom of the collection box 20 is tilted so that the broken silicon wafers falling into the collection box 20 can automatically slide to one end of the collection box 20, which is convenient for subsequent cleaning and transportation.

[0048] In some embodiments, the first side wall 22 is an inclined wall, and the first side wall 22 extends upward and in a direction away from the second side wall 23 .

[0049] In this way, the collecting box 20 is easier to insert under the conveyor belt 11 during installation or movement, thereby reducing obstacles during installation and speeding up the operation.

[0050] At the same time, the design of the inclined wall also increases the coverage area of ​​the opening 21 of the collection box 20 to the end of the conveyor belt 11. Since the first side wall 22 extends upward and in a direction away from the second side wall 23, the space of the opening 21 is effectively expanded. This design makes it easier for broken silicon wafers that fall from the end of the conveyor belt 11 to fall into the collection box 20, reducing the possibility of broken silicon wafers being scattered.

[0051] Moreover, the increased coverage area of ​​the opening 21 also means that the collection box 20 can collect broken silicon wafers more efficiently. Even if the broken silicon wafers are unevenly distributed or sputtered at the end of the conveyor belt 11, the collection box 20 can still effectively capture these fragments due to the increased area of ​​the opening 21, thereby improving the collection efficiency.

[0052] In addition, when the broken silicon wafers slide from the conveyor belt 11 to the collection box 20 , they will naturally slide down along the inclined wall surface, so that they are more easily accumulated at the bottom of the collection box 20 , thereby preventing the broken silicon wafers from being scattered in the collection box 20 .

[0053] At the same time, the inclined first side wall 22 and the second side wall 23 together form a gradually shrinking opening, which helps to limit the movement range of the broken silicon wafers. Even if the broken silicon wafers have a certain initial velocity on the conveyor belt 11, due to the guiding effect of the inclined wall and the shrinking of the opening, the broken silicon wafers are more likely to stay in the collection box 20, reducing the risk of flying out.

[0054] In some embodiments, the first side wall 22 has an angle α with the horizontal direction, which satisfies 30°≤α≤60°. For example, the angle α is 30°, 40°, 45°, 50°, 60°, etc. Here, the angle α is controlled within the range of 30°-60°, which can ensure the collection efficiency and maintain the stability of the collection box 20.

[0055] At the same time, within this angle range, the spatial matching degree between the collection box 20 and the conveyor belt 11 is relatively high, which reduces obstacles during installation and is conducive to the convenience of moving or cleaning the collection box 20.

[0056] Optionally, the height of the first side wall 22 from the bottom to the top of the collecting box 20 is 5-8 cm, for example, the height may be 5 cm, 6 cm, 7 cm, 8 cm, etc.

[0057] In some embodiments, Figure 2-Figure 3 As shown, the transmission mechanism 10 further includes: a mounting frame 12 , a driving wheel 13 and a driven wheel 14 .

[0058] At least part of the mounting rack 12 is located in the drying tunnel 30. In this way, the conveyor belt 11 can receive the broken silicon wafers in the drying tunnel 30, thereby improving the transfer efficiency of the broken silicon wafers.

[0059] The driving wheel 13 and the driven wheel 14 are arranged at intervals along the conveying direction and are rotatably mounted on the mounting frame 12. The conveyor belt 11 is wound around the driving wheel 13 and the driven wheel 14.

[0060] Specifically, the upper surface of the conveyor belt 11 is a conveying surface. After the broken silicon wafers fall onto the conveying surface, when the driving wheel 13 drives the conveyor belt 11 to rotate, the conveying surface of the conveyor belt 11 conveys the broken silicon wafers along the conveying direction. Through the arrangement of the driving wheel 13, the driven wheel 14 and the conveyor belt 11, the broken silicon wafers are transported along the conveying direction, ensuring that the broken silicon wafers are smoothly conveyed to the next link.

[0061] In some embodiments, the position of at least one of the driving wheel 13 and the driven wheel 14 in the conveying direction is adjustable relative to the mounting frame 12, so that the spacing between the driving wheel 13 and the driven wheel 14 in the conveying direction is adjustable.

[0062] First, with this configuration, the transmission mechanism 10 can be adjusted accordingly according to different usage scenarios. When the drying tunnel 30 is long, the distance between the driving wheel 13 and the driven wheel 14 can be appropriately increased. On the contrary, when the drying tunnel 30 is short, the distance between the driving wheel 13 and the driven wheel 14 can be reduced to make the transmission efficiency higher.

[0063] Secondly, by adjusting the distance between the driving wheel 13 and the driven wheel 14, the tension of the conveyor belt 11 can be adjusted, which helps the operator to control the tension of the conveyor belt 11. When there are fewer broken silicon wafers in the drying tunnel 30, the distance between the driving wheel 13 and the driven wheel 14 can be appropriately increased. On the contrary, when there are more broken silicon wafers in the drying tunnel 30, the load is larger at this time, and the distance between the driving wheel 13 and the driven wheel 14 can be reduced to make the conveyor belt 11 in a tighter state.

[0064] In some embodiments, Figure 2-Figure 3 As shown, the transmission mechanism 10 further includes a drive motor 16, which is fixed to the mounting frame 12 and is used to drive the driving wheel 13. The drive motor 16 is used to provide power. By arranging the drive motor 16 on the mounting frame 12, its stability and reliability during operation are ensured.

[0065] When the driving motor 16 is started, it transmits power to the driving wheel 13 through the transmission belt, causing the driving wheel 13 to start rotating. Since the conveyor belt 11 is wound between the driving wheel 13 and the driven wheel 14 to form a closed loop, when the driving wheel 13 rotates, the conveyor belt 11 will also move accordingly, thereby realizing the transportation of broken silicon wafers.

[0066] Specifically, combined Figure 3 The driving motor 16 is located on a side of the mounting frame 12 close to the collecting box 20 .

[0067] In this way, the drive motor 16 is close to the collection box 20 and the outlet of the drying tunnel 30, and the operator can more conveniently approach the drive motor 16 to start, stop, accelerate and decelerate, etc. This not only improves the convenience of operation, but also helps to respond quickly in an emergency and ensure the safety of the cleaning device 100. At the same time, maintenance personnel can more easily approach the drive motor 16 for inspection, etc.

[0068] like Figure 3 As shown, the conveying mechanism 10 further includes a protective plate 17, which is located on at least one side of the conveying belt 11 in the first direction. This can prevent the broken silicon wafers that may be generated during the conveying process from splashing out, thereby ensuring the safety of the working environment.

[0069] Optionally, there are two protective plates 17, which are respectively located on both sides of the conveyor belt 11 in the first direction. This can effectively prevent the broken silicon wafers from flowing out and prevent the conveyor belt 11 from being unevenly worn.

[0070] Specifically, the height of the protective plate 17 is 5-10 cm. This is conducive to achieving a protective effect and avoiding interference with the inner wall of the drying tunnel 30. For example, the height of the protective plate 17 can be 5 cm, 6 cm, 8 cm, 9 cm, 10 cm, etc.

[0071] In some embodiments, Figure 2-Figure 3 As shown, the conveying mechanism 10 also includes: at least one intermediate roller 15 arranged between the driving wheel 13 and the driven wheel 14, and both ends of the intermediate roller 15 are movably connected to the mounting frame 12 so that the relative position of the intermediate roller 15 and the driving wheel 13 and / or the driven wheel 14 in the conveying direction is adjustable.

[0072] By adjusting the position of the intermediate roller 15, the conveying requirements in different scenarios can be met. For example, when the conveyed broken silicon wafers are heavy, the intermediate roller 15 can be moved closer to the driving wheel 13 or the driven wheel 14 to increase the support force on the conveyor belt 11 and prevent the conveyor belt 11 from sagging or deviating due to heavy pressure.

[0073] At the same time, according to the speed and distance of the conveyor belt 11, the position of the intermediate roller 15 can be adjusted to the optimal state to minimize the resistance and friction during the transmission process, which helps to improve the transmission efficiency and ensure that the broken silicon wafers pass through the transmission mechanism 10 stably and quickly.

[0074] Moreover, by properly adjusting the position of the intermediate roller 15, the bending and twisting of the conveyor belt 11 during the transmission process can be reduced, thereby reducing the risk of wear and damage to the conveyor belt 11. This helps to extend the service life of the conveyor belt 11.

[0075] In some embodiments, Figure 4 As shown, a positioning device 24 is provided between two adjacent collection boxes 20 to realize the positioning between the collection boxes 20; the positioning device 24 includes: a first positioning portion 241 and a second positioning portion 242. The first positioning portion 241 and the second positioning portion 242 are respectively arranged on the outer side walls of the two adjacent collection boxes 20 close to each other.

[0076] In this way, when the collecting boxes 20 are placed, they can be accurately aligned with each other and maintain a stable relative position.

[0077] Optionally, one of the first positioning portion 241 and the second positioning portion 242 is a protruding structure, and the other is a groove structure adapted to the protruding structure. This positioning device 24 allows the protruding portion to naturally slide into the groove when the collection boxes 20 are close to each other, thereby achieving accurate positioning. This positioning device 24 has a simple structure and can provide a stable positioning effect.

[0078] Optionally, one of the first positioning portion 241 and the second positioning portion 242 is a slot structure, and the other is a hook structure adapted to the slot structure. When two adjacent collection boxes 20 are connected by the slot and hook structure, not only can the positioning effect be achieved, but also a strong connection force can be provided to ensure that the collection box 20 is not easily displaced during use.

[0079] Optionally, the first positioning portion 241 and the second positioning portion 242 are magnetic members. The magnetic member may be, for example, a magnet or a magnetic metal. When two adjacent collection boxes 20 are close to each other, they will automatically align and fit together tightly due to the attraction of magnetic force. Magnetic attraction not only provides a stable positioning effect, but also has the characteristics of being fast and convenient, which can significantly improve the operating efficiency.

[0080] It should be noted that, in the description of this application, the meaning of “and / or” includes three parallel solutions. Taking “A and / or B” as an example, it includes solution A, or solution B, or a solution in which both A and B are satisfied.

[0081] See below Figure 1-Figure 4 The cleaning device 100 according to the embodiment of the utility model is described in detail with a specific embodiment. It is worth noting that the following description is only an exemplary description, and is not a specific limitation to the utility model.

[0082] Reference Figure 1 The cleaning device 100 includes: a conveying mechanism 10 , a collecting box 20 and a drying tunnel 30 .

[0083] Reference Figure 2-Figure 3 The conveying mechanism 10 includes: a conveying belt 11, a mounting frame 12, a driving wheel 13, a driven wheel 14, an intermediate roller 15, a driving motor 16 and a protective plate 17.

[0084] At least a portion of the conveyor belt 11 is located in the drying tunnel 30 of the cleaning apparatus 100 to receive the broken silicon wafers.

[0085] Reference Figure 2-Figure 3 The driving wheel 13 and the driven wheel 14 are arranged at intervals along the conveying direction and are rotatably mounted on the mounting frame 12 respectively.

[0086] Reference Figure 3 The conveyor belt 11 is wound around a driving wheel 13 and a driven wheel 14 .

[0087] The driving motor 16 is fixedly mounted on a side of the mounting frame 12 close to the collecting box 20 , and the driving motor 16 is used to drive the driving wheel 13 .

[0088] There is one intermediate roller 15, which is disposed between the driving wheel 13 and the driven wheel 14. Both ends of the intermediate roller 15 are movably connected to the mounting frame 12 so that the relative positions of the intermediate roller 15, the driving wheel 13 and the driven wheel 14 in the conveying direction are adjustable.

[0089] Reference Figure 2 , Figure 4 There are two collecting boxes 20 for collecting broken silicon wafers.

[0090] The two collecting boxes 20 are both located at the end of the conveying belt 11 in the conveying direction, and the two collecting boxes 20 are arranged along a first direction that is perpendicular to the conveying direction.

[0091] The collection box 20 includes an opening 21 , a first side wall 22 , a second side wall 23 and a positioning device 24 .

[0092] The opening 21 is located at the top of the collection box 20 .

[0093] Reference Figure 3 The first side wall 22 and the second side wall 23 are arranged along the conveying direction and are arranged opposite to each other. The first side wall 22 is located directly below the conveyor belt 11, and the end of the conveyor belt 11 in the conveying direction is located between the first side wall 22 and the second side wall 23.

[0094] The first side wall 22 is an inclined wall, and the first side wall 22 extends upward and in a direction away from the second side wall 23 .

[0095] The first side wall 22 includes an angle α with the horizontal direction.

[0096] Reference Figure 4 The positioning device 24 is disposed between two adjacent collecting boxes 20 to achieve positioning between the collecting boxes 20;

[0097] The positioning device 24 includes: a first positioning portion 241 and a second positioning portion 242 that match each other. The first positioning portion 241 and the second positioning portion 242 are respectively arranged on the outer side walls of two adjacent collection boxes 20 that are close to each other.

[0098] Other components of the cleaning device 100 according to the embodiment of the present invention, such as the production line, are known to those skilled in the art and will not be described in detail here.

[0099] In the description of this specification, the description with reference to the terms "embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0100] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A cleaning device having a drying tunnel for drying silicon wafers, characterized in that: The cleaning equipment comprises: A conveying mechanism, the conveying mechanism comprising a conveyor belt, at least a portion of which is located in the drying tunnel to receive the broken silicon wafers; A collecting box is located at the end of the conveyor belt in the conveying direction and is used to collect the broken silicon wafers.

2. The cleaning device according to claim 1, characterized in that: There are at least two collecting boxes arranged along a first direction, and each collecting box can be drawn out along the first direction; Wherein, the first direction is perpendicular to the transmission direction.

3. The cleaning device according to claim 1, characterized in that: The top of the collecting box is open; The side walls of the collection box include a first side wall and a second side wall opposite to each other, the first side wall and the second side wall are arranged along the conveying direction, the first side wall is located directly below the conveyor belt, and the end of the conveyor belt in the conveying direction is located between the first side wall and the second side wall.

4. The cleaning device according to claim 3, characterized in that: The first side wall is an inclined wall, and the first side wall extends upward and in a direction away from the second side wall.

5. The cleaning device according to claim 4, characterized in that: The angle between the first side wall and the horizontal direction is α, which satisfies 30°≤α≤60°.

6. The cleaning device according to claim 1, characterized in that: The transmission mechanism also includes: Mounting frame; A driving wheel and a driven wheel, the driving wheel and the driven wheel are arranged at intervals along the conveying direction and are rotatably mounted on the mounting frame respectively; The conveyor belt is wound around the driving wheel and the driven wheel.

7. The cleaning device according to claim 6, characterized in that: The position of at least one of the driving wheel and the driven wheel in the conveying direction is adjustable relative to the mounting frame, so that the distance between the driving wheel and the driven wheel in the conveying direction is adjustable.

8. The cleaning device according to claim 6, characterized in that: The transmission mechanism further includes: a driving motor, the driving motor is fixed to the mounting frame, and the driving motor is used to drive the driving wheel; The conveying mechanism further includes a protection plate located at least on one side of the conveying belt in the first direction.

9. The cleaning device according to claim 6, characterized in that: The transmission mechanism also includes: At least one intermediate roller is arranged between the driving wheel and the driven wheel, and both ends of the intermediate roller are movably connected to the mounting frame so that the relative position of the intermediate roller and the driving wheel and / or the driven wheel in the conveying direction is adjustable.

10. The cleaning device according to any one of claims 1 to 9, characterized in that: A positioning device is provided between two adjacent collection boxes to achieve positioning between the collection boxes; The positioning device comprises: a first positioning portion and a second positioning portion adapted to each other; the first positioning portion and the second positioning portion are respectively arranged on the outer side walls of two adjacent collection boxes that are close to each other.

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