Wafer production conveying device

Abstract

The utility model discloses a wafer production conveying device, and relates to the field of conveying devices. The wafer production conveying device comprises a conveying box body, a protection mechanism is arranged outside the conveying box body, the protection mechanism comprises a protection plate, the protection plate is arranged above the conveying box body in a sliding mode, the protection plate protects the wafer conveying process, an outer frame plate is arranged above the conveying box body, and a limiting plate is arranged in the outer frame plate in a sliding mode. The limiting plate is fixedly connected to the side face of the protection plate. According to the wafer production conveying device, by arranging the protection plate, the protection plate can be driven by the threaded rod to move, the protection plate is arranged outside the wafer, the position of the wafer is protected and fixed, if the wafer needs to be taken out, only the position of the protection plate needs to be moved, and normal taking out of the wafer in the later period is not affected; movement of the wafer in the transportation process is reduced, and the protection effect of the wafer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of conveying devices, in particular to a wafer production conveying device. Background Art

[0002] Wafers are made of high-purity single-crystal silicon and have very high purity and flatness. They are one of the basic materials for the manufacture of electronic devices and integrated circuits. Wafers need to undergo multiple processing steps during production. After the molding process is completed, the wafers need to be stacked inside the conveyor box to facilitate placing multiple groups of wafers on the conveyor vehicle and transporting them to other processing areas.

[0003] At present, there is a problem that during the movement of the wafer reproduction conveyor box, the wafer box may be separated from the conveyor box due to vibration and other conditions;

[0004] The existing method of conveying wafer production is to place the wafers in the production process inside a conveyor box. In order to prevent multiple groups of wafers from being squeezed and rubbed against each other during the conveying process and causing damage, a partition is set between each group of wafers. At this time, the gaps between the wafers will be larger. In order to facilitate the removal of the wafers after transportation, the height of the conveyor box is set lower. The conveyor box will be subject to external influences such as vibration during the process of conveying the wafers, which will cause the wafers to deviate from their position inside the conveyor box. At this time, if the conveyor box falls over, the wafers will fall out of the conveyor box, causing damage to the wafers during the conveying process. If a protective effect is set above the conveyor box, it will make it difficult to remove the wafers after transportation. Therefore, we propose a wafer production conveying device. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides a wafer production conveying device, which solves the existing problem that the wafer production conveying box may be separated from the conveying box due to vibration and the like during movement.

[0006] To achieve the above objectives, the utility model is implemented through the following technical solutions: a wafer production and conveying device, including a conveying box main body, a protective mechanism is arranged on the outside of the conveying box main body, the protective mechanism includes a protective plate, which is slidably arranged above the conveying box main body, and the protective plate protects the wafer conveying process; an outer frame plate is arranged above the conveying box main body, and the outer frame plate is used to fix the position of the protective plate; a limit plate is slidably arranged inside the outer frame plate, and the limit plate is fixedly connected to the side of the protective plate, and the limit plate is used to limit the position of the protective plate during movement.

[0007] Preferably, an arc-shaped plate is installed inside the conveying box body, and a partition is fixedly connected to the outside of the arc-shaped plate.

[0008] Preferably, a baffle is fixedly connected to the top of the conveying box body, and supporting plates are fixedly connected to both ends of the conveying box body.

[0009] Preferably, the upper surface of the conveying box body is fixedly connected to a bottom plate, the protective plate is slidably connected to the upper surface of the bottom plate, and the outer frame plate is fixedly connected to the upper surface of the bottom plate.

[0010] Preferably, side panels are fixedly connected to both sides of the outer frame plate, and the protective plate is slidably connected to the outside of the side panels.

[0011] Preferably, a top plate is fixedly connected to the upper surface of the protective plate, and the top plate is slidably connected above the outer frame plate.

[0012] Preferably, an auxiliary plate is fixedly connected to the back side of the protective plate, a threaded rod is rotatably connected inside the auxiliary plate, and the threaded rod is threadedly connected to the inside of the outer frame plate.

[0013] Preferably, the end of the limiting plate is fixedly connected to the limiting block, and the outer surface of the limiting block abuts against the outer surface of the outer frame plate.

[0014] The utility model discloses a wafer production and conveying device, which has the following beneficial effects: the wafer production and conveying device, by placing the wafer inside the conveying box body, at this time the wafer is placed above the arc plate, and a partition is arranged between each group of wafers, and then the threaded rod is rotated so that the bottom end of the threaded rod is rotated inside the auxiliary plate, and at this time the threaded rod will push the protective plate to move toward the position of the wafer until the outer surface of the protective plate contacts the outer surface of the wafer, and by setting the protective plate, the protective plate can be moved under the drive of the threaded rod, and the protective plate is arranged on the outside of the wafer, which has a protective and fixing effect on the position of the wafer, and if the wafer needs to be taken out, it only needs to move the position of the protective plate, which will not affect the normal removal of the wafer at a later time, reduces the movement of the wafer during transportation, increases the protective effect of the wafer, and will not affect the normal use of the conveying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is an exploded view of the structure above the conveying box of the utility model;

[0018] Figure 3 This is an exploded view of the external structure of the protective plate of the utility model;

[0019] Figure 4 It is an exploded view of the external structure of the limit plate of the utility model.

[0020] In the figure: 1. conveying box body; 101. support plate; 2. protective plate; 201. bottom plate; 202. threaded rod; 203. limit plate; 204. partition plate; 205. arc plate; 206. limit block; 207. baffle; 208. outer frame plate; 209. auxiliary plate; 210. side plate; 211. top plate. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model is described clearly and completely. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] The embodiment of the present application provides a wafer production conveying device, which solves the existing problem that the wafer box may be separated from the conveying box due to vibration and other conditions during the movement of the wafer reproduction conveying box.

[0023] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0024] The utility model embodiment discloses a wafer production and conveying device.

[0025] According to the attached Figure 1-4 As shown, it includes a conveying box body 1, and a protective mechanism is arranged on the outside of the conveying box body 1. The protective mechanism includes a protective plate 2, which is slidably arranged above the conveying box body 1, and the protective plate 2 protects the wafer conveying process. The outer frame plate 208 is arranged above the conveying box body 1, and the outer frame plate 208 is used to fix the position of the protective plate 2. The limit plate 203 is slidably arranged inside the outer frame plate 208, and the limit plate 203 is fixedly connected to the side of the protective plate 2, and the limit plate 203 is used to limit the protective plate 2 during movement.

[0026] By placing the wafers inside the conveying box body 1, at this time the wafers are placed above the arc plate 205, and a partition 204 is arranged between each group of wafers, and then the threaded rod 202 is rotated so that the bottom end of the threaded rod 202 rotates inside the auxiliary plate 209, and the threaded rod 202 moves the thread inside the outer frame plate 208 during the rotation process. At this time, the threaded rod 202 will push the protective plate 2 to move toward the position of the wafer until the outer surface of the protective plate 2 contacts the outer surface of the wafer.

[0027] An arc-shaped plate 205 is installed inside the conveying box body 1, a partition plate 204 is fixedly connected to the outside of the arc-shaped plate 205, a baffle 207 is fixedly connected to the top of the conveying box body 1, both ends of the conveying box body 1 are fixedly connected to the support plate 101, the upper surface of the conveying box body 1 is fixedly connected to the bottom plate 201, the protective plate 2 is slidably connected to the upper surface of the bottom plate 201, and the outer frame plate 208 is fixedly connected to the upper surface of the bottom plate 201.

[0028] By setting up the protective plate 2, the protective plate 2 can be moved under the drive of the threaded rod 202. The protective plate 2 is set on the outside of the wafer to protect and fix the position of the wafer. At the same time, the curved surface of the protective plate 2 fits the curved surface of the wafer, so that the setting of the protective plate 2 will not cause damage to the wafer. At the same time, the limit plate 203 and the outer frame plate 208 can support and limit the movement of the protective plate 2. If you want to take out the wafer, you only need to move the position of the protective plate 2, and the operation is simple.

[0029] The outer frame plate 208 is fixedly connected to side plates 210 on both sides, the protective plate 2 is slidably connected to the outside of the side plates 210, the upper surface of the protective plate 2 is fixedly connected to a top plate 211, the top plate 211 is slidably connected to the top of the outer frame plate 208, the back of the protective plate 2 is fixedly connected to an auxiliary plate 209, the internal rotation of the auxiliary plate 209 is connected to a threaded rod 202, the threaded rod 202 is threadedly connected to the inside of the outer frame plate 208, the end of the limit plate 203 is fixedly connected to the limit block 206, the outer surface of the limit block 206 is against the outer surface of the outer frame plate 208.

[0030] During the movement of the protective plate 2, the limit plate 203 will slide inside the outer frame plate 208, and the top plate 211 will slide above the outer frame plate 208. The protective plate 2 will also slide outside the side plate 210. The limit plate 203 supports and limits the movement of the protective plate 2. At the same time, the limit block 206 limits the position movement of the limit plate 203. A rubber plate is provided on the outside of the protective plate 2. The rubber plate is made of rubber and can alleviate the friction generated by the contact between the protective plate 2 and the wafer, so that the protective plate 2 can better protect the wafer. The support plate 101 is for the convenience of lifting the conveying box body 1.

[0031] In summary, compared with the prior art, the present invention has the following beneficial effects:

[0032] By placing the wafer inside the conveying box body 1, the wafer is placed above the arc plate 205, and a partition 204 is arranged between each group of wafers, and then the threaded rod 202 is rotated so that the bottom end of the threaded rod 202 is rotated inside the auxiliary plate 209. At this time, the threaded rod 202 will push the protective plate 2 to move toward the position of the wafer until the outer surface of the protective plate 2 contacts the outer surface of the wafer. By setting the protective plate 2, the protective plate 2 can be moved driven by the threaded rod 202. The protective plate 2 is set on the outside of the wafer to protect and fix the position of the wafer. If you want to take out the wafer, you only need to move the position of the protective plate 2, which will not affect the normal removal of the wafer later, reduce the movement of the wafer during transportation, increase the protection effect of the wafer, and will not affect the normal use of the conveying device.

[0033] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A wafer production conveying device, comprising a conveying box body (1), characterized in that: A protection mechanism is arranged outside the transport box body (1), and the protection mechanism comprises: A protective plate (2) is slidably arranged above the conveying box body (1), and the protective plate (2) protects the wafer conveying process; An outer frame plate (208) is arranged above the conveying box body (1), and the outer frame plate (208) is used to fix the position of the protective plate (2); A limit plate (203) is slidably arranged inside the outer frame plate (208); the limit plate (203) is fixedly connected to the side of the protective plate (2); and the limit plate (203) is used to limit the position of the protective plate (2) during movement.

2. The wafer production conveying device according to claim 1, characterized in that: An arc-shaped plate (205) is installed inside the conveying box body (1), and a partition plate (204) is fixedly connected to the outside of the arc-shaped plate (205).

3. The wafer production conveying device according to claim 1, characterized in that: A baffle (207) is fixedly connected to the top of the conveying box body (1), and supporting plates (101) are fixedly connected to both ends of the conveying box body (1).

4. The wafer production conveying device according to claim 1, characterized in that: The upper surface of the conveying box body (1) is fixedly connected to a bottom plate (201), the protective plate (2) is slidably connected to the upper surface of the bottom plate (201), and the outer frame plate (208) is fixedly connected to the upper surface of the bottom plate (201).

5. The wafer production conveying device according to claim 1, characterized in that: Side plates (210) are fixedly connected to both sides of the outer frame plate (208), and the protective plate (2) is slidably connected to the outside of the side plates (210).

6. The wafer production conveying device according to claim 1, characterized in that: The upper surface of the protection plate (2) is fixedly connected to a top plate (211), and the top plate (211) is slidably connected above the outer frame plate (208).

7. The wafer production conveying device according to claim 1, characterized in that: The back of the protective plate (2) is fixedly connected to an auxiliary plate (209), the interior of the auxiliary plate (209) is rotatably connected to a threaded rod (202), and the threaded rod (202) is threadedly connected to the interior of the outer frame plate (208).

8. The wafer production conveying device according to claim 1, characterized in that: The end of the limiting plate (203) is fixedly connected to the limiting block (206), and the outer surface of the limiting block (206) abuts against the outer surface of the outer frame plate (208).

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