A Micro-LED laser transfer device

Abstract

The utility model discloses a Micro-LED laser transfer device, including an upper cabinet, a marble base, the marble base is arranged in the upper cabinet; a horizontal displacement module, the horizontal displacement modules are two and perpendicular to each other; a first rotary fine-tuning platform, the first rotary fine-tuning platform is arranged at the upper end of the horizontal displacement module; a cubic frame, the cubic frame is arranged at the upper end of the first rotary fine-tuning platform; a transfer component, the transfer component is arranged in the cubic frame; a laser vision module, the laser vision module is arranged directly above the cubic frame; the transfer component includes an original substrate part, a receiving base part and an omnidirectional fine-tuning part arranged on the receiving base part. The transfer component is arranged in a closed upper cabinet to isolate the influence of external environmental factors on the transfer quality; at the same time, it can be moved and the levelness can be adjusted. There is no obvious exposed circuit on the appearance. A variety of adjustment methods are used to fine-tune the chip and the substrate.

Description

Technical Field

[0001] The utility model belongs to the technical field of Micro-LED, and in particular relates to a Micro-LED laser transfer device. Background Art

[0002] In recent years, Micro-LED has been regarded as a new generation of display panel technology after LCD and OLED due to its low power consumption, fast response, long life and high light efficiency. The full name of Micro-LED in English is Micro Light Emitting Diode, which is called micro light-emitting diode in Chinese, and can also be written as μLED. It is a solid self-luminous display technology that makes traditional LED thin-film, miniaturized and matrixed, reduces the pixel distance from millimeter level to micrometer level, and is highly integrated on a chip. In the field of Micro-LED, after the chip grows on the source substrate, a large number of Micro-LED chips need to be separated from the source substrate and transferred to the target substrate or driver circuit board through some high-precision equipment to meet application requirements. This step is called mass transfer technology.

[0003] The Chinese patent document with publication number CN112967976B discloses a mass transfer device and a transfer method, wherein the mass transfer device includes a lifting mechanism, a transfer substrate, a piezoelectric structure and a current monitor; the lifting mechanism is fixed to the transfer substrate; at least one piezoelectric structure is fixed on the surface of the transfer substrate on the side away from the lifting mechanism; the number of the current monitors is equal to the number of the piezoelectric structures, and each current monitor is electrically connected to the corresponding piezoelectric structure.

[0004] In the actual chip transfer process, many factors affect the final transfer result, such as the airflow generated by the motion mechanism, impurities mixed in the air and other external environmental factors, visual recognition errors or positioning errors caused by individual differences between different chips, and insufficient motion accuracy of the moving mechanism or control mechanism. Utility Model Content

[0005] In order to overcome the technical problem in the prior art that the success rate of chip transfer is extremely low due to the small size of Micro-LED chips and high positioning precision requirements, one purpose of the utility model is to provide a Micro-LED laser transfer device, which isolates the influence of the external environment while being compatible with the individual differences between different chips, thereby improving the transfer success rate.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a Micro-LED laser transfer device, including an upper cabinet, which can be optionally closed; a marble base, which is horizontally arranged at the lower end of the upper cabinet; a horizontal displacement module, which has two horizontal displacement modules and is arranged in upper and lower layers on the marble base, and the displacement directions of the two horizontal displacement modules are perpendicular to each other; a first rotary fine-tuning table, which is arranged at the upper end of the horizontal displacement module located above; a cubic frame, which is arranged at the upper end of the first rotary fine-tuning table; a transfer assembly, which is arranged in the cubic frame; a laser vision module, which is arranged on the marble base and is located directly above the cubic frame; wherein the transfer assembly includes an original substrate portion arranged at the upper end of the cubic frame, a receiving base portion longitudinally slidably connected to the cubic frame, and an omnidirectional fine-tuning portion arranged on the receiving base portion.

[0007] The transfer assembly is enclosed in the upper cabinet to isolate the influence of external environmental factors on the transfer quality. At the same time, the direction of the chip array is adjusted to correspond to the direction of the horizontal displacement module through the first rotary fine-tuning stage, and the micro-structural features of the receiving substrate are adjusted to correspond to the chip on the original substrate through the omnidirectional fine-tuning part, thereby eliminating the positioning and transfer errors caused by chip differences and improving the transfer success rate.

[0008] Furthermore, the horizontal displacement module includes a base, a sliding seat horizontally slidably connected to the base, and a linear motor arranged on the base and transmission connected to the sliding seat; the horizontal displacement module located above is arranged at the upper end of the sliding seat of the horizontal displacement module located below; the first rotary fine-tuning platform is arranged at the upper end of the sliding seat located above; and the horizontal displacement module located below is arranged at the upper end of the marble base.

[0009] The high-precision movement of the horizontal displacement module drives the transfer assembly to move relative to the laser vision module, and the laser vision module selectively emits laser to transfer the chip on the original substrate to the receiving base.

[0010] Specifically, an L-shaped sheet metal is arranged on the periphery of the linear motor of the upper horizontal displacement module; a straight-line sheet metal is arranged on the sliding seat of the upper horizontal displacement module; and drag chains are arranged between the straight-line sheet metal and the L-shaped sheet metal, and between the L-shaped sheet metal and the marble base.

[0011] The lines of the transfer assembly and the horizontal displacement module are received by the two drag chains, thereby making the appearance of the device neat and preventing the lines from being damaged by accidental touching.

[0012] Furthermore, the upper cabinet includes a frame structure and a sealing plate arranged in the frame; at least one side wall of the frame structure is rotatably connected to at least one door; a lower cabinet for accommodating electrical components is arranged at the lower end of the upper cabinet; and height-adjusting legs are respectively arranged at the four corners of the lower end of the lower cabinet.

[0013] The marble base is adjusted to a horizontal state by the four height adjustment legs, which helps to improve the transfer accuracy.

[0014] Specifically, a cantilever is arranged on the outside of the frame structure; an industrial control screen is arranged at the end of the cantilever; and a main switch and an indicator light are arranged on the outer wall of the lower cabinet.

[0015] Specifically, wheels are arranged at the lower end of the lower cabinet; the wheels can selectively abut against the ground.

[0016] The transfer device is stand-alone and modularly designed, and the wheels facilitate movement of the transfer device to a designated working position; when the height-adjusting legs raise the transfer device, the wheels are separated from the ground and the marble base is leveled.

[0017] Furthermore, the omnidirectional fine-tuning part includes two horizontal fine-tuning platforms arranged at the bottom of the cubic frame and a second rotary fine-tuning platform arranged below the receiving base; the two horizontal fine-tuning platforms are layered up and down and arranged perpendicular to each other; the transfer assembly also includes a lifting module arranged between the upper end of the horizontal fine-tuning platform located above and the lower end of the second rotary fine-tuning platform.

[0018] Specifically, a pressure sensor is arranged between the upper end of the second rotary fine-tuning stage and the lower end of the receiving base.

[0019] The lifting module is electrically controlled to lift and lower, and according to the feedback of the pressure sensor, it drives the receiving base part and the original substrate part to fit together with a certain pressure, thereby improving the transfer accuracy and success rate.

[0020] Furthermore, a bracket is vertically arranged on the upper end of the marble base; a cross arm is horizontally arranged on the upper end of the bracket; the laser vision module is arranged at the end of the cross arm; a U-shaped wire rack is arranged at the upper end of the cross arm; and the end of the wire rack is located directly above the laser vision module.

[0021] Specifically, the laser vision module includes a longitudinal fine-tuning platform arranged at the end of the cross arm, a lens arranged on the longitudinal fine-tuning platform, a camera arranged on the lens, and a laser arranged on the lens; the laser vision module slides longitudinally driven by the longitudinal fine-tuning platform.

[0022] The relative height between the laser vision module and the transfer assembly is fine-tuned by the longitudinal fine-tuning platform, so that the camera can be clearly positioned and a reasonable peeling laser intensity is provided, which helps to improve the transfer quality and accuracy.

[0023] Compared with the prior art, the beneficial effects of the present invention are:

[0024] 1. By placing the transfer assembly in a closed upper cabinet, the influence of external environmental factors on the transfer quality is isolated; at the same time, the upper cabinet can be easily moved with the assistance of wheels, and the levelness of the marble base can be adjusted.

[0025] 2. The appearance of the transfer equipment is neat, all circuits are stored and organized, and there are no obvious exposed circuits on the appearance. During the operation of the equipment or the replacement of the substrate and base, the circuits will not be pulled or accidentally touched, causing equipment shutdown and damage.

[0026] 3. The first rotary fine-tuning stage adjusts the direction of the chip array to correspond to the direction of the horizontal displacement module. The omnidirectional fine-tuning part adjusts the microstructure characteristics of the receiving substrate to correspond to the chip on the original substrate. Through a variety of adjustment methods, the transfer equipment can be compatible with different types of chips, and can fine-tune the chip and substrate during operation, which increases process control and improves the transfer success rate.

[0027] 4. The horizontal displacement module drives the transfer component to move relative to the laser vision module. The laser emits laser to transfer the chip on the original substrate to the receiving substrate. The displacement is controlled by visual positioning and automated program to realize laser transfer fully automatically with high transfer accuracy and success rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the utility model;

[0029] Figure 2 It is a structural schematic diagram of the upper cabinet of the utility model;

[0030] Figure 3 It is a structural schematic diagram of the lower cabinet of the utility model;

[0031] Figure 4 It is a structural schematic diagram of a marble base and a horizontal displacement module of the utility model;

[0032] Figure 5 It is a structural schematic diagram of the transfer assembly of the utility model;

[0033] Figure 6 It is a structural schematic diagram of the laser vision module of the present utility model.

[0034] In the figure: 11, lower cabinet; 111, switch; 12, upper cabinet; 13, door; 14, height adjustment leg; 15, cantilever; 16, industrial control screen; 17, wheel; 21, marble base; 22, horizontal displacement module; 221, drag chain; 222, L-shaped sheet metal; 223, straight sheet metal; 23, first rotary fine-tuning platform; 31, cubic frame; 32, lifting module; 33, horizontal fine-tuning platform; 34, receiving base; 35, original substrate; 36, second rotary fine-tuning platform; 37, pressure sensor; 41, bracket; 411, cross arm; 412, wire rack; 42, laser; 43, longitudinal fine-tuning platform; 44, camera; 45, lens. DETAILED DESCRIPTION

[0035] The present invention is further described below in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form a new embodiment.

[0036] In the description of the present invention, it should be noted that directional words, such as the terms "center", "lateral", "longitudinal", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating directions and positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of narrating the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and cannot be understood as limiting the specific protection scope of the present invention.

[0037] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. Therefore, the definition of "first" and "second" features can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "several" is two or more, unless otherwise clearly and specifically defined.

[0038] In the present invention, unless otherwise specified and limited, the terms "setting", "installation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can also be a mechanical connection; it can be directly connected, or it can be connected through an intermediate medium, or two elements can be internally connected. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] See also Figure 1-Figure 6A Micro-LED laser transfer device includes a lower cabinet 11; an upper cabinet 12, wherein the upper cabinet 12 is arranged at the upper end of the lower cabinet 11; a marble base 21, wherein the marble base 21 is horizontally arranged at the bottom end of the upper cabinet 12; a horizontal displacement module 22, wherein there are two horizontal displacement modules 22, and the horizontal displacement modules 22 are arranged in upper and lower layers on the marble base 21, and the displacement directions of the two horizontal displacement modules 22 are perpendicular to each other; a first rotary fine-tuning platform 23, wherein the first rotary fine-tuning platform 23 is arranged at the upper end of the horizontal displacement module 22 located above; a cubic frame 31, wherein the cubic frame 31 is arranged at the upper end of the first rotary fine-tuning platform 23; a transfer component, wherein the transfer component is arranged in the cubic frame 31; and a laser vision module, wherein the laser vision module is arranged on the marble base 21 and is located directly above the cubic frame 31.

[0040] The transfer assembly includes an original substrate part 35 arranged at the upper end of the cubic frame 31, a receiving base part 34 longitudinally slidably connected to the cubic frame 31, and an omnidirectional fine-tuning part arranged on the receiving base part 34; the omnidirectional fine-tuning part includes two horizontal fine-tuning platforms 33 arranged at the bottom of the cubic frame 31 and a second rotary fine-tuning platform 36 arranged below the receiving base part 34; the two horizontal fine-tuning platforms 33 are layered up and down and arranged perpendicular to each other; the transfer assembly also includes a lifting module 32 arranged between the upper end of the horizontal fine-tuning platform 33 located above and the lower end of the second rotary fine-tuning platform 36; a pressure sensor 37 is arranged between the upper end of the second rotary fine-tuning platform 36 and the lower end of the receiving base part 34.

[0041] The lifting module 32 includes a fixed part, a sliding part longitudinally connected to the upper end of the fixed part, and a lifting motor provided on the fixed part and connected to the sliding part. The lifting module 32 drives the receiving base part 34 and the original substrate part 35 to fit with a certain pressure; the two horizontal fine adjustment platforms 33 and the second rotary fine adjustment platform 36 are used to adjust the relative position relationship between the receiving base part 34 and the original substrate part 35.

[0042] The horizontal displacement module 22 includes a base, a sliding seat horizontally slidably connected to the base, and a linear motor arranged on the base and transmission-connected to the sliding seat; the linear motor is provided with an electromagnetic direct-drive structure for driving the sliding seat to slide; the horizontal displacement module 22 located above is arranged at the upper end of the sliding seat of the horizontal displacement module 22 located below; the first rotary fine-tuning platform 23 is arranged at the upper end of the sliding seat located above; the horizontal displacement module 22 located below is arranged at the upper end of the marble base 21.

[0043] An L-shaped sheet metal 222 is arranged on the periphery of the linear motor of the upper horizontal displacement module 22; a straight-line sheet metal 223 is arranged on the sliding seat of the upper horizontal displacement module 22; and a drag chain 221 is arranged between the straight-line sheet metal 223 and the L-shaped sheet metal 222, and between the L-shaped sheet metal 222 and the marble base 21, respectively.

[0044] The upper cabinet body 12 includes a frame structure and a sealing plate arranged in the frame; at least one side wall of the frame structure is rotatably connected to at least one door 13; height-adjusting legs 14 are respectively provided at the four corners of the lower end of the lower cabinet body 11; wheels 17 are respectively provided at the four corners of the lower end of the lower cabinet body 11; a cantilever 15 is provided on the outside of the frame structure; an industrial control panel 16 is provided at the end of the cantilever 15; the outer wall of the lower cabinet body 11 is provided with a main switch 111 and an indicator light.

[0045] A bracket 41 is vertically arranged on the upper end of the marble base 21; a cross arm 411 is horizontally arranged on the upper end of the bracket 41; the laser vision module is arranged at the end of the cross arm 411; a U-shaped wire rack 412 is arranged on the upper end of the cross arm 411; the end of the wire rack 412 is located directly above the laser vision module.

[0046] The laser vision module includes a longitudinal fine-tuning platform 43 arranged at the end of the cross arm 411, a lens 45 arranged on the longitudinal fine-tuning platform 43, a camera 44 arranged on the lens 45, and a laser 42 arranged on the lens 45; the laser vision module slides longitudinally under the drive of the longitudinal fine-tuning platform 43.

[0047] Usage process:

[0048] Leveling: Install an upper glass slide on the original substrate part 35, and install a lower glass slide on the receiving base part 34; control the lifting module 32 to rise, so that the upper glass slide and the lower glass slide collide and squeeze until the force value indicated by the pressure sensor 37 reaches the preset value (the pressure value required for the substrate and the base during transfer), and the lifting module 32 stops rising

[0049] Control the gap: the lifting module 32 descends, and the stamp material with Micro-LED is attached to the lower end of the upper glass slide. The structure from bottom to top is chip-stamp-glass. The glass with the base material that can pick up Micro-LED is placed on the upper end of the lower glass slide, facing upward. According to the height when the original substrate part 35 and the receiving base part 34 are leveled, the sum of the thickness of the stamp, base, chip and the desired gap is calculated, and the lifting stroke of the lifting module 32 is set so that the pressure value when the stamp material with Micro-LED and the base material are pressed against each other is the above preset value.

[0050] Alignment: A specific square scanning area is established around the central circular frame through a visual algorithm, and it is ensured that this area can accommodate at most one intact Micro-LED chip. The two horizontal displacement modules 22 are manually controlled to move until there is exactly one complete Micro-LED chip in the scanning area, and the two horizontal displacement modules 22 are controlled to move by themselves through visual guidance positioning until the center of the chip coincides with the center of the circular frame of the field of view. (The central circular frame and the laser spot are adjusted in advance to be in the same position and size, and the array direction of the chip is adjusted to be parallel to the movement direction of the two horizontal displacement modules 22 by rotating the first rotary fine-tuning stage 23).

[0051] Special case: The receiving substrate material may have customized microstructures, such as rectangular protrusions, and the size and arrangement order are consistent with the chip arrangement. It is necessary to adjust the two horizontal fine-tuning stages 33 and the second rotary fine-tuning stage 36 to make the chip on the upper glass slide correspond to the microstructure of the lower glass slide one by one, and then perform alignment.

[0052] Automated printing: Set the width and height step lengths (i.e. the width and length of the Micro-LED chip matrix) to allow the laser to trigger once at each matrix point to achieve automated laser printing.

[0053] The above description is only a specific embodiment of the present invention, but the technical features of the present invention are not limited thereto. Any changes or modifications made by any technician in the field of the present invention are included in the patent scope of the present invention.

Claims

1. A Micro-LED laser transfer device, characterized in that: Included An upper cabinet, which is optionally enclosed; A marble base, the marble base being horizontally arranged at the bottom end of the upper cabinet; Horizontal displacement modules, there are two horizontal displacement modules, which are arranged in layers on the marble base, and the displacement directions of the two horizontal displacement modules are perpendicular to each other; A first rotary fine-tuning platform, wherein the first rotary fine-tuning platform is arranged at an upper end of the horizontal displacement module located above; A cubic frame, the cubic frame being arranged at the upper end of the first rotary fine-tuning table; a transfer assembly, the transfer assembly being disposed within the cubic frame; A laser vision module, which is disposed on the marble base and is located directly above the cubic frame; The transfer assembly includes an original substrate portion arranged at the upper end of the cubic frame, a receiving base portion longitudinally slidably connected to the cubic frame, and an omnidirectional fine-tuning portion arranged on the receiving base portion.

2. The transfer device according to claim 1, characterized in that: The horizontal displacement module comprises a base, a sliding seat horizontally slidably connected to the base, and a linear motor arranged on the base and transmission-connected to the sliding seat; the horizontal displacement module located above is arranged on the upper end of the sliding seat of the horizontal displacement module located below; the first rotary fine-tuning platform is arranged on the upper end of the sliding seat located above; The horizontal displacement module located below is arranged on the upper end of the marble base.

3. The transfer device according to claim 2, characterized in that: An L-shaped sheet metal is arranged on the periphery of the linear motor of the upper horizontal displacement module; a straight-line sheet metal is arranged on the sliding seat of the upper horizontal displacement module; and drag chains are arranged between the straight-line sheet metal and the L-shaped sheet metal, and between the L-shaped sheet metal and the marble base.

4. The transfer device according to any one of claims 1 to 3, characterized in that: The upper cabinet includes a frame structure and a sealing plate arranged in the frame; at least one side wall of the frame structure is rotatably connected to at least one door; a lower cabinet for accommodating electrical components is arranged at the lower end of the upper cabinet; and height-adjusting legs are respectively arranged at the four corners of the lower end of the lower cabinet.

5. The transfer device according to claim 4, characterized in that: A cantilever is arranged on the outside of the frame structure; an industrial control panel is arranged at the end of the cantilever; and a main switch and an indicator light are arranged on the outer wall of the lower cabinet.

6. The transfer device according to claim 4, characterized in that: The lower end of the lower cabinet is provided with wheels; the wheels can selectively abut against the ground.

7. The transfer device according to any one of claims 1 to 3, characterized in that: The omnidirectional fine-tuning part includes two horizontal fine-tuning platforms arranged at the bottom of the cubic frame and a second rotary fine-tuning platform arranged below the receiving base; the two horizontal fine-tuning platforms are layered up and down and arranged perpendicular to each other; the transfer assembly also includes a lifting module arranged between the upper end of the horizontal fine-tuning platform located above and the lower end of the second rotary fine-tuning platform.

8. The transfer device according to claim 7, characterized in that: A pressure sensor is arranged between the upper end of the second rotary fine adjustment stage and the lower end of the receiving base.

9. The transfer device according to any one of claims 1 to 3, characterized in that: A bracket is vertically arranged on the upper end of the marble base; a cross arm is horizontally arranged on the upper end of the bracket; the laser vision module is arranged at the end of the cross arm; a U-shaped wire rack is arranged on the upper end of the cross arm; the end of the wire rack is located directly above the laser vision module.

10. The transfer device according to claim 9, characterized in that: The laser vision module includes a longitudinal fine-tuning platform arranged at the end of the cross arm, a lens arranged on the longitudinal fine-tuning platform, a camera arranged on the lens, and a laser arranged on the lens; the laser vision module slides longitudinally under the drive of the longitudinal fine-tuning platform.

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