Light splitting device

Abstract

The utility model belongs to the technical field of laser scribing, and particularly relates to a light splitting device, which comprises a first turning prism, a second turning prism and a light splitting device, the light splitting assembly is arranged on a light emitting path of the first turning prism so as to split the first reflection laser into two beams of split lasers which are parallel up and down, and the split lasers are sent in the light path direction of the first reflection laser; by arranging the light splitting assembly, the light splitting assembly can split one beam of first reflection laser into two beams of vertically parallel split lasers, so that the split lasers are distributed layer by layer in the height direction, the utilization rate of the equipment space can be improved, and when the same number of laser beams are needed, compared with original laser plane distribution, the light splitting efficiency is improved. The number of optical devices can be reduced, the space occupied by each optical device is reduced, and the cost of the optical devices is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of laser scribing, and in particular relates to a light splitting device. Background Art

[0002] During the production process of perovskite cells, the substrate needs to be scratched. In order to split a beam of light into multiple beams, in the related technology, publication number: CN116931254A divides the incident light into multiple beams in the same plane through a branching mechanism. Since the light beams are not layered, this solution requires many optical devices and each optical device occupies a large space, and the required equipment integration requirements are high, resulting in high cost and bulky equipment.

[0003] Therefore, in order to solve the problem in the prior art that laser spectrometry requires many optical devices and each optical device occupies a large space, and the required equipment has a high degree of integration, it is necessary to provide a spectrometer. Utility Model Content

[0004] In order to solve the technical problems mentioned in the background technology, the purpose of the utility model is to provide a spectroscopic device.

[0005] In order to solve the above technical problems, the utility model provides a spectrometer, including: a first turning prism, reflecting the first laser emitted by the laser into a first reflected laser; a light splitting component, which is arranged on the light output path of the first turning prism to split the first reflected laser into two parallel branch laser beams, so that the branch lasers are sent along the optical path direction of the first reflected laser.

[0006] Furthermore, the light splitting assembly includes a first beam splitting prism and a second turning prism, and the second turning prism is arranged on the upper part of the first beam splitting prism; wherein the first beam splitting prism splits a single first reflected laser beam into two orthogonal branch laser beams; one of the branch laser beams is sent along the same direction of the first reflected laser, and the other branch laser beam is reflected by the second turning prism and sent along the same direction of the first reflected laser.

[0007] Furthermore, the second turning prism is slidably disposed on the upper portion of the first beam splitting prism.

[0008] Furthermore, the light splitting assembly also includes a first adjustment seat, a first support platform is movably provided on the upper part of the first adjustment seat, and the first beam splitting prism is arranged on the upper part of the first support platform.

[0009] Furthermore, a 1 / 2 wave plate is arranged between the light splitting component and the first turning prism.

[0010] Furthermore, a plurality of levels of splitting components are arranged on the light output path of the light splitting component, and the splitting components of each level are arranged in series in sequence along the corresponding light path. The first-level splitting component uses the obtained branched laser as an incident laser to split each beam of branched laser into two groups of second lasers arranged in the same direction along the first laser, and sends them along the same direction of the branched lasers; wherein the splitting component of the previous level divides N groups of second lasers into 2N groups of second lasers as output lasers and emits them into the splitting component of the next level, thereby forming multiple groups of parallel second lasers.

[0011] Furthermore, the light splitting component includes a second beam splitting prism, a third turning prism and at least two fourth turning prisms; the second beam splitting prism of the first stage splits a single group of branch lasers into two groups of orthogonal second lasers; one group of second lasers is sent along the same direction of the first reflected laser, and the other group of second lasers is refracted by the fourth turning prism in turn and finally reflected by the third turning prism and sent along the same direction of the first reflected laser; wherein the light inlet of the second beam splitting prism of the next stage is arranged in the light emitting direction of the third turning prism of the previous stage.

[0012] Furthermore, at least two 1 / 2 wave plates are arranged between the first and second beam splitting prisms and the light splitting component, and are arranged in sequence along the third direction to correspond to the laser emitted by the first light splitting component.

[0013] Furthermore, at least two 1 / 2 wave plates are arranged between the third turning prism and the second beam splitting prism, and are arranged in sequence along the third direction to correspond to the laser projected by the second beam splitting prism.

[0014] Furthermore, at least two 1 / 2 wave plates are arranged between the fourth turning prisms, and are arranged in sequence along the third direction to correspond to the laser reflected by the second beam splitting prism.

[0015] Furthermore, the light splitting component further comprises a second adjustment seat, a second support platform sliding along the first direction is arranged on the upper part of the second adjustment seat, and the fourth turning prism is arranged on the upper part of the second support platform.

[0016] Furthermore, the first turning prism, the second turning prism, the third turning prism and the fourth turning prism are right-angle prisms.

[0017] Furthermore, a reflective prism is arranged in the light emitting direction of the light splitting component at the rear end.

[0018] Beneficial effects of the utility model:

[0019] By setting up a light splitting component, the light splitting component can split a beam of first reflected laser into two parallel branch lasers, so that the branch lasers are distributed in layers in the height direction, which can improve the utilization rate of the equipment space. When the same number of laser beams are required, compared with the original laser plane distribution, the number of optical devices can be reduced and the space occupied by each optical device can be reduced, thereby reducing the cost of optical devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a schematic structural diagram of the squint viewing angle of some embodiments of the light splitting device of the utility model;

[0022] Figure 2 It is a schematic diagram of the side view structure of some embodiments of the light splitting device of the utility model;

[0023] Figure 3 It is a schematic diagram of the structure of some embodiments of the light splitting device of the utility model from a top view perspective.

[0024] In the figure:

[0025] The first turning prism, 110, the wave plate, 120, the reflecting prism, 130, the first laser, 131, the first reflected laser, 132, the branching laser, 133, the second laser, 200, the light splitting assembly, 210, the first beam splitting prism, 220, the second turning prism, 230, the first adjusting seat, 240, the first supporting platform, 300, the light splitting assembly, 310, the second beam splitting prism, 320, the third turning prism, 330, the fourth turning prism, 340, the second adjusting seat, 350, and the second supporting platform. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] like Figures 1 to 3As shown, at least one embodiment provides a spectroscopic device, including: a first turning prism 100, which reflects a first laser 130 emitted by a laser (not shown in the figure) into a first reflected laser 131; a light splitting component 200, which is arranged on the light output path of the first turning prism 100 to split the first reflected laser 131 into two parallel branch lasers 132 in the upper and lower directions, so that the branch lasers 132 are sent along the light path direction of the first reflected laser 131; the first turning prism 100 can efficiently reflect the first laser 130 into the first reflected laser 131 and inject it into the light inlet of the light splitting component 200; by setting the light splitting component 200, the light splitting component 200 can split a beam of the first reflected laser 131 into two parallel branch lasers 132 in the upper and lower directions, so that the branch lasers 132 are distributed in layers in the height direction, which can improve the utilization rate of the equipment space. When the same number of laser beams are required, compared with the original laser plane distribution, the number of optical devices can be reduced and the space occupied by each optical device can be reduced, thereby reducing the cost of the optical devices.

[0028] In some embodiments, see Figures 1 to 3 The light splitting component 200 includes a first beam splitting prism 210 and a second turning prism 220, wherein the second turning prism 220 is arranged on the upper part of the first beam splitting prism 210, and the first beam splitting prism 210 splits the single first reflected laser beam 131 into two orthogonal branch laser beams 132; wherein one branch laser beam 132 is sent along the same direction as the first reflected laser beam 131, and the other branch laser beam 132 is reflected by the second turning prism 220 and sent along the same direction as the first reflected laser beam 131; by setting the light splitting component 200, the light splitting component The first beam splitting prism 210 of 200 splits the single first reflected laser beam 131 into two orthogonal branch laser beams 132, one of which is sent in the same direction as the first reflected laser beam 131, and the second turning prism 220 reflects the other branch laser beam 132 to be sent in the same direction as the first reflected laser beam 131, thereby splitting the light beam and reducing the number of subsequent splitting components 300, making the structure of the splitting device of the utility model more compact, reducing the number of optical devices and reducing the space occupied by each optical device, thereby reducing the cost of optical devices.

[0029] In some embodiments, see Figures 1 to 3 The second turning prism 220 is slidably arranged on the upper part of the first beam splitting prism 210; the staff makes the second turning prism 220 slide horizontally, so that the reflection point of the light beam reflected by the first beam splitting prism 210 to the second turning prism 220 changes, thereby adjusting the spacing between the branched lasers 132.

[0030] In some embodiments, see Figures 1 to 3The light splitting assembly 200 also includes a first adjustment seat 230, and a first support platform 240 is movably provided on the upper part of the first adjustment seat 230, and the first beam splitting prism 210 is arranged on the upper part of the first support platform 240; the first support platform 240 is movably provided on the first adjustment seat 230, and the first beam splitting prism 210 can adjust the incident angle with the first reflected laser 131 through movement, so that the first reflected laser 131 is perpendicular to the end face of the first beam splitting prism 210 and enters the first beam splitting prism 210.

[0031] In some embodiments, see Figures 1 to 3 A 1 / 2 wave plate 110 is arranged between the light splitting component 200 and the first turning prism 100. By setting the 1 / 2 wave plate 110 and rotating the 1 / 2 wave plate 110, the power of the first reflected laser 131 is adjusted so that the power of the first reflected laser 131 is not affected, thereby improving the scratching quality.

[0032] In some embodiments, see Figures 1 to 3 , a multi-stage splitting component 300 is arranged on the light output path of the splitting component 200, and the splitting components 300 of each stage are sequentially arranged in series along the corresponding light path. The first-stage splitting component 300 uses the obtained branched laser 132 as the incident laser to divide each beam of the branched laser 132 into two groups of second lasers 133 arranged in the same direction along the first laser 130, and sends them along the same direction of the branched laser 132; wherein the splitting component 300 of the previous stage divides N groups of second lasers 133 into 2N groups of second lasers 133 as the output lasers and emits them into the splitting component 300 of the next stage, thereby forming multiple groups of parallel second lasers 133; by setting the splitting component Component 300, a group of split lasers 132 (one group consists of two beams, one upper and one lower) incident from the light splitting component 200 into the split laser component 300 will be split by the split laser component 300 into two groups of second lasers 133 (two beams of second lasers 133 in each group) arranged along the same direction of the first laser 130, and sent along the same direction of the first reflected laser 131, thereby doubling the light beam. As a result, the second laser 133 will be doubled after passing through a split laser component 300. By setting N split laser components 300, the number of second lasers 133 after passing through the splitting device of the utility model is 2 to the power of (N+1), and the splitting effect is good, thereby improving the scribing efficiency.

[0033] In some embodiments, see Figures 1 to 3The light splitting component 300 includes a second beam splitting prism 310, a third turning prism 320 and at least two fourth turning prisms 330; the first-stage second beam splitting prism 310 splits the single-group branch laser 132 into two groups of orthogonal second lasers 133; one group of the second lasers 133 is sent along the same direction of the first reflected laser 131, and the other group of the second lasers 133 is refracted by the fourth turning prism 330 in turn and finally reflected by the third turning prism 320 and sent along the same direction of the first reflected laser 131; the light inlet of the second beam splitting prism 310 of the next stage is set in the light emitting direction of the third turning prism 320 of the previous stage; the light splitting A group of branch lasers 132 emitted by the component 200 can be divided into two orthogonal second lasers 133 by the second beam splitting prism 310; one of the second lasers 133 is emitted along the same direction of the first reflected laser 131 to the light inlet of the second beam splitting prism 310 of the next splitting component 300, and the other second laser 133 is reflected by the fourth turning prism 330 and emitted to the third turning prism 320 in turn, and the third turning prism 320 reflects and emits the other second laser 133 to the light inlet of the second beam splitting prism 310 of the next level of splitting component 300; after passing through the first level of splitting component 300, the second lasers 133 are changed from one group to two groups, and the number of lasers is doubled.

[0034] In some embodiments, see Figures 1 to 3 At least two 1 / 2 wave plates are arranged between the first and second beam splitting prisms 310 and the light splitting assembly 200; they are arranged along the arrangement of the branch laser 132 to correspond to the branch laser 132; by setting the 1 / 2 wave plate 110 and the first turning prism, the 1 / 2 wave plate 110 is rotated to adjust the power of the branch laser 132, so that the power of the branch laser 132 will not be affected, thereby improving the scribing quality.

[0035] In some embodiments, see Figures 1 to 3 At least two 1 / 2 wave plates 110 are arranged between the third turning prism 320 and the second beam splitting prism 310; they are arranged along the arrangement of the second laser 133 to correspond to the second laser 133; by setting the 1 / 2 wave plate 110, rotating the 1 / 2 wave plate 110, and adjusting the power of the second laser 133, the power of the second laser 133 will not be affected, thereby improving the scratching quality.

[0036] In some embodiments, see Figures 1 to 3The spectroscopic component 300 also includes a second adjustment seat 340, and a second support platform 350 is movably provided on the upper part of the second adjustment seat 340, and the fourth turning prism 330 is arranged on the upper part of the second support platform 350; the second support platform 350 is movably provided on the second adjustment seat 340, and the fourth turning prism 330 can adjust the incident angle with the second laser 133 through movement, so that the second laser 133 is better reflected by the fourth turning prism 330.

[0037] In some embodiments, see Figures 1 to 3 The first turning prism 100, the second turning prism 220, the third turning prism 320 and the fourth turning prism 330 are right-angle prisms; the right-angle prism can refract the laser into degrees, which is convenient for quickly changing the direction of the laser and reflecting the laser beam to the required laser path.

[0038] In some embodiments, see Figures 1 to 3 A reflective prism 120 is arranged in the light emitting direction of the light splitting component 300 at the rear end; the reflective prism 120 is large in size and easy to install, and can efficiently reflect multiple groups of second lasers 133, meeting the requirements of multi-beam lasers and providing a good laser beam for laser scribing.

[0039] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A laser spectrometer, characterized in that: include: A first turning prism (100) reflects first laser light (130) emitted by the laser into first reflected laser light (131); A light splitting component (200) is arranged on the light output path of the first turning prism (100) to split the first reflected laser (131) into two vertically parallel branch laser beams (132), so that the branch laser beams (132) are transmitted along the light path direction of the first reflected laser (131).

2. A spectroscopic device as claimed in claim 1, characterized in that: The light splitting component (200) comprises a first beam splitting prism (210) and a second turning prism (220), wherein the second turning prism (220) is arranged on the upper part of the first beam splitting prism (210), and the first beam splitting prism (210) splits a single beam of first reflected laser light (131) into two beams of orthogonal branched laser light (132); One of the split laser beams (132) is sent along the same direction as the first reflected laser beam (131), and the other of the split laser beams (132) is reflected by the second turning prism (220) and sent along the same direction as the first reflected laser beam (131).

3. A spectroscopic device as claimed in claim 2, characterized in that: The second turning prism (220) is slidably arranged on the upper part of the first beam splitting prism (210).

4. A spectroscopic device as claimed in claim 3, characterized in that: The light splitting assembly (200) further comprises a first adjustment seat (230), a first support platform (240) being movably provided on the upper part of the first adjustment seat (230), and the first beam splitting prism (210) being provided on the upper part of the first support platform (240).

5. A spectroscopic device as claimed in claim 4, characterized in that: A 1 / 2 wave plate (110) is arranged between the light splitting component (200) and the first turning prism (100).

6. A spectroscopic device as claimed in claim 5, characterized in that: A plurality of light splitting components (300) are arranged on the light output path of the light splitting component (200), and the light splitting components (300) of each level are sequentially arranged in series along the corresponding light path. The light splitting component (300) of the first level uses the obtained branched laser (132) as an incident laser to split each branched laser (132) into two groups of second lasers (133) arranged in the same direction along the first laser (130), and transmits them in the same direction of the branched lasers (132); wherein The beam splitting component (300) of the previous stage splits N groups of second lasers (133) into 2N groups of second lasers (133) as outgoing lasers and emits them into the beam splitting component (300) of the next stage, thereby forming multiple groups of parallel second lasers (133).

7. A spectroscopic device as claimed in claim 6, characterized in that: The light splitting component (300) comprises a second beam splitting prism (310), a third turning prism (320) and at least two fourth turning prisms (330); The second beam splitting prism (310) of the first stage splits the single group of branch laser light (132) into two groups of orthogonal second laser light (133); One group of second lasers (133) is sent along the same direction as the first reflected laser (131), and another group of second lasers (133) is refracted by the fourth turning prism (330) in sequence and finally reflected by the third turning prism (320) and sent along the same direction as the first reflected laser (131); wherein The light inlet of the second beam splitting prism (310) of the next stage is arranged in the light emitting direction of the third turning prism (320) of the previous stage.

8. A spectroscopic device as claimed in claim 7, characterized in that: At least two 1 / 2 wave plates (110) are arranged between the first of the second beam splitting prisms (310) and the light splitting component (200), and are arranged along the arrangement of the split laser light (132) to correspond to the split laser light (132).

9. A spectroscopic device as claimed in claim 8, characterized in that: At least two 1 / 2 wave plates (110) are arranged between the third turning prism (320) and the second beam splitting prism (310), and are arranged along the arrangement of the second laser (133) to correspond to the second laser (133).

10. A spectroscopic device as claimed in claim 9, characterized in that: The light splitting component (300) further comprises a second adjustment seat (340), a second support platform (350) being movably arranged on the upper part of the second adjustment seat (340), and the fourth turning prism (330) being arranged on the upper part of the second support platform (350).

11. A spectroscopic device as claimed in claim 10, characterized in that: The first turning prism (100), the second turning prism (220), the third turning prism (320) and the fourth turning prism (330) are right-angle prisms.

12. A spectroscopic device as claimed in claim 11, characterized in that: A reflective prism (120) is arranged in the light emitting direction of the light splitting component (300) at the rear end.

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