Automatic loading and unloading device

By designing an automatic up-and-down device, the coordinated work of the lifting platform, rotating platform, clamping component and adjustment component is solved, and the problem of low automation in chip testing is realized, the chip is automatically retrieved, adjusted and tested, and the testing efficiency is improved.

CN222728961UActive Publication Date: 2025-04-08SIDEA SEMICON EQUIP (SHENZHEN) CO LTD
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Patent Information

Application Number
CN202420927307.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-29
Publication Date
2025-04-08
Estimated Expiration
2034-04-29

AI Technical Summary

Technical Problem

The degree of automation during the existing chip test process is low, resulting in low efficiency in manual up and down chip operation.

Method used

An automatic up-and-down plate device is designed, including a frame, a pick-up and placement mechanism, an adjustment mechanism and a storage box. Through the coordinated work of the lifting table, a rotating table, a clamping assembly and a adjustment assembly, the automatic chip pick-up, adjustment and testing are realized.

Benefits of technology

The chip is automatically picked up, adjusted and tested, which improves the testing efficiency, reduces manual operation time, and improves production efficiency.

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Abstract

The utility model discloses an automatic loading and unloading device, which includes a frame, a pick-and-place mechanism, an adjustment mechanism and a storage box; the pick-and-place mechanism is installed on the frame, the pick-and-place mechanism includes a lifting platform, a rotating platform, a base and a clamping assembly, the lifting platform is installed on the frame, the rotating platform is rotatably arranged on the top of the lifting platform, the base is connected to the rotating platform, the clamping assembly includes a first driving member and a clamping claw, the first driving member is used to drive the clamping claw to slide along the base; the adjustment mechanism includes a mounting frame and an adjustment assembly, the mounting frame has a mounting cavity, the adjustment assembly is arranged in the mounting cavity, the adjustment assembly has an adjustment platform, the mounting frame and the lifting platform are spaced apart, and the mounting cavity is provided with a mounting opening on one side of the lifting platform; the storage box is installed on the mounting frame, the storage box has a storage cavity, and the storage cavity is provided with a storage opening on one side of the lifting platform. The automatic loading and unloading device of the utility model has a high degree of automation, liberates manual labor, and improves the testing efficiency of chips.
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Description

Technical Field

[0001] The utility model relates to the technical field of chip detection, in particular to an automatic chip loading and unloading device. Background Art

[0002] In the testing of semiconductor chips, the chip to be tested must first be placed on the wafer carrier of the test probe station and adjusted to the correct position. The wafer carrier is then used to absorb and stabilize the chip for testing. The chip is then removed after the test is completed.

[0003] Usually, the chip is manually placed on the wafer stage and adjusted before testing, and the chip is also manually unloaded after testing. This traditional manual loading and unloading method has a low chip change rate and takes a long time to complete a chip change, which is not conducive to improving production efficiency.

[0004] Therefore, it is necessary to provide an automatic loading and unloading device to solve the above-mentioned technical problems. Utility Model Content

[0005] The main purpose of the utility model is to provide an automatic chip loading and unloading device, aiming to solve the problem of low automation in the existing chip testing process.

[0006] In order to achieve the above-mentioned purpose, the utility model provides an automatic loading and unloading device comprising:

[0007] frame;

[0008] A pick-and-place mechanism, the pick-and-place mechanism is installed on the frame, the pick-and-place mechanism includes a lifting platform, a rotating platform, a base and a clamping assembly, the lifting platform is installed on the frame, the rotating platform is rotatably arranged on the top of the lifting platform, the base is connected to the rotating platform, and the clamping assembly includes a first driving member and a clamping claw, the first driving member is used to drive the clamping claw to slide along the base;

[0009] An adjustment mechanism, the adjustment mechanism comprising a mounting frame and an adjustment component, the mounting frame having a mounting cavity, the adjustment component being arranged in the mounting cavity, the adjustment component having an adjustment platform, the mounting frame being spaced apart from the lifting platform, and the mounting cavity having a mounting opening on a side facing the lifting platform;

[0010] A material storage box is installed on the mounting frame, and the material storage box has a material storage cavity, and a material storage opening is opened on one side of the material storage cavity facing the lifting platform.

[0011] Optionally, a slide rail is provided on the base, and the slide rail extends along the length direction of the base. The clamping assembly also includes a slider, a connecting plate and a first driving member. The slider is slidably connected to the slide rail, the connecting plate connects the slider and the clamp, and the first driving member is used to drive the slider and drive the clamp to slide along the slide rail.

[0012] Optionally, the clamp includes a wafer carrier part, a base plate, a clamping part, a second driving member and a connecting block, the wafer carrier part is located between the base plate and the clamping part and is installed on the base plate, the connecting block connects the base plate and the connecting plate, the wafer carrier part and the clamping part are spaced apart and form a clamping space, and the second driving member is used to drive the clamping part to rise and fall so as to clamp or release the chip located in the clamping space.

[0013] Optionally, the number of the clamping assemblies is two, and the two clamping assemblies are vertically spaced apart above the base; the number of the slide rails is two, and the two slide rails are spaced apart along the width direction of the base; the two sliders are installed on the two slide rails one-to-one, and the two connecting plates connect the two sliders and the clamps one-to-one.

[0014] Optionally, the adjustment assembly includes a turntable, a mounting seat and a third driving member, the turntable is mounted on the mounting seat, the mounting seat is mounted on the mounting frame, the third driving member is used to drive the turntable to rotate relative to the mounting seat, and the top of the turntable forms the adjustment platform.

[0015] Optionally, the turntable includes a circular disc and an extension plate, the circular disc is provided with a plurality of installation grooves arranged at intervals along its circumference, the number of the extension plates is consistent with the number of the installation grooves and corresponds one to one, the extension plates are installed in the corresponding installation grooves and the top of the extension plates is flush with the top of the circular disc.

[0016] Optionally, the lifting platform includes a lifting column, a lifting plate, a ball nut, a screw and a fourth driving component, the lifting column is installed on the lifting plate, the lifting plate is connected to the ball nut, the screw extends vertically, the ball nut is sleeved on the screw, and the fourth driving component is used to drive the screw to rotate, so that the ball nut sleeved on the screw drives the lifting plate and the lifting column to rise or fall, and the rotating platform is installed on the top of the lifting column.

[0017] Optionally, both side walls of the storage box are provided with a plurality of card slots arranged at vertical intervals, the card slots extend along the extension direction of the side walls, and any two opposite card slots are flush with each other and are used for receiving a chip.

[0018] Optionally, the material storage box is detachably connected to the mounting frame.

[0019] Optionally, a plurality of walking wheels are arranged at intervals at the bottom of the frame.

[0020] In the technical scheme of the utility model, the automatic loading and unloading device includes a frame, a pick-up and placement mechanism, an adjustment mechanism and a storage box. The pick-up and placement mechanism includes a lifting platform, a rotating table, a base and a clamping assembly. The lifting platform is installed on the frame. The lifting platform drives the rotating table and the clamping assembly to rise or fall so that the clamping claw corresponds to the storage opening. The clamping claw is used to slide along the base and extend into the storage cavity under the drive of the first driving member to realize the chip picking and placement. The adjustment mechanism includes a mounting frame and an adjustment assembly. The mounting frame has a mounting cavity. The adjustment assembly is arranged in the mounting cavity. The adjustment assembly has an adjustment platform. The mounting frame and the lifting platform are spaced apart. The first driving member drives the clamping claw to slide along the base and extend into the mounting cavity. After the clamping claw enters the mounting cavity, the clamping claw releases the chip to place the chip on the adjustment platform. The adjustment platform adjusts the chip to adjust the chip to a suitable angle and position to achieve chip adjustment; the rotating table rotates relative to the lifting table, and drives the base and the clamp on the rotating table to rotate. The probe test table can be set on both sides of the frame, and the rotating table rotates the clamp to correspond to the probe test table. The first drive member drives the clamp to slide along the base and place the chip on the probe test table, so that the probe test table can detect the chip. The automatic loading and unloading device of the utility model can realize automatic chip retrieval, adjustment, testing and other operations, without manual means to adjust the position of the chip, and after the chip test is completed, the chip can be removed and put back into the storage box. It has a high degree of automation, liberates manual labor, and improves chip testing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0022] Figure 1 This is a schematic diagram of the main structure of the automatic loading and unloading device in the embodiment of the utility model;

[0023] Figure 2 It is a three-dimensional structural schematic diagram of the automatic loading and unloading device in the embodiment of the utility model;

[0024] Figure 3 A three-dimensional structural schematic diagram of the base and the clamping assembly in the embodiment of the utility model;

[0025] Figure 4 A schematic diagram of a front view of the base and the clamping assembly in an embodiment of the utility model;

[0026] Figure 5 A schematic diagram of the structure of a clamping assembly in an embodiment of the utility model;

[0027] Figure 6 A schematic diagram of the structure of the adjustment component in the embodiment of the utility model;

[0028] Figure 7 A schematic diagram of the structure of the lifting platform and the rotating platform in the embodiment of the utility model;

[0029] Figure 8 It is a structural schematic diagram of a material storage box in an embodiment of the utility model.

[0030] Description of Figure Numbers:

[0031] Label name Label name 100 Automatic loading and unloading device 2421 Slide Section 1 frame 2422 Base Plate 2 Pick and place mechanism 2423 Clamping part 3 Adjustment mechanism 2424 Second driving member 4 Storage box 2425 Connection Block 21 Lifting platform 2426 Clamping space 22 Rotating table 321 Turntable 23 Base 322 Mounting Seat 24 Clamping components 323 The third drive 241 First drive member 3211 Adjustment platform 242 Gripper 3212 disc 31 Mounting bracket 3213 Extension plate 32 Adjustment components 3214 Mounting slot 311 Mounting cavity 211 Lifting Columns 3111 Mounting port 212 lifting board 41 Storage cavity 213 Ball Nut 411 Storage port 214 Screw 231 Slide rails 215 Fourth driving member 243 slider 42 Card slot 244 Connecting plate 11 Travel wheel 200 chip

[0032] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0035] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present utility model are only used to explain the position of the user in a certain posture (such as the attached Figures 1 to 4 The relative position relationship, movement status, etc. between the various components under the specific posture are shown. If the specific posture changes, the directional indication will also change accordingly.

[0036] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0038] The utility model provides an automatic loading and unloading device.

[0039] like Figures 1 to 3 As shown, the automatic loading and unloading device 100 includes a frame 1, a pick-up and placement mechanism 2, an adjustment mechanism 3 and a storage box 4. The pick-up and placement mechanism 2 is installed on the frame 1. The pick-up and placement mechanism 2 includes a lifting platform 21, a rotating platform 22, a base 23 and a clamping assembly 24. The lifting platform 21 is installed on the frame 1, and the rotating platform 22 is rotatably arranged on the top of the lifting platform 21. The base 23 is connected to the rotating platform 22. The clamping assembly 24 includes a first driving member 241 and a clamping claw 242. The first driving member 241 is used to drive the clamping claw 242 to move along the base 23 slides; the adjusting mechanism 3 includes a mounting frame 31 and an adjusting component 32, the mounting frame 31 has a mounting cavity 311, the adjusting component 32 is arranged in the mounting cavity 311, the adjusting component 32 has an adjusting platform 3211, the mounting frame 31 is spaced apart from the lifting platform 21, and the mounting cavity 311 is provided with a mounting opening 3111 on the side of the lifting platform 21; the storage box 4 is installed on the mounting frame 31, the storage box 4 has a storage cavity 41, and the storage cavity 41 is provided with a storage opening 411 on the side of the lifting platform 21.

[0040] In the above embodiment, during the use of the automatic loading and unloading device 100, the lifting platform 21 drives the rotating platform 22 and the clamping assembly 24 to rise or fall, so that the clamping claw 242 corresponds to the storage port 411, and the clamping claw 242 is used to slide along the base 23 and extend into the storage cavity 41 under the drive of the first driving member 241. When the clamping claw 242 extends into the storage cavity 41, the clamping claw 242 clamps the chip 200, and the first driving member 241 drives the clamping claw 242 to withdraw from the storage cavity 41, so that the clamping claw 242 takes out the chip 200 in the storage cavity 41, thereby realizing the chip 200 taking operation, and then the lifting platform 21 drives the rotating platform 22 and the clamping assembly 24 to descend until the clamping claw is The first driving member 241 drives the clamping jaw 242 to slide along the base 23 and extend into the installation cavity 311. After the clamping jaw 242 enters the installation cavity 311, the clamping jaw 242 releases the chip 200 to place the chip 200 on the adjustment platform 3211. The adjustment platform 3211 adjusts the chip 200 to adjust the chip 200 to a suitable angle and position. After that, the clamping jaw 242 slides along the base 23 again and extends into the installation cavity 311, and clamps the chip 200 on the adjustment platform 3211 to remove the chip 200 on the adjustment platform 3211. The rotating table 22 is used to drive the base 23 to rotate. The clamping jaw 242 is made to correspond to the external probe test bench. Specifically, the rotating table 22 rotates relative to the lifting table 21, and drives the base 23 and the clamping jaw 242 on the rotating table 22 to rotate. The probe test bench can be set on the front and back sides of the frame 1. The rotating table 22 rotates the clamping jaw 242 to correspond to the probe test bench. The first driving member 241 drives the clamping jaw 242 to slide along the base 23 and place the chip 200 on the probe test bench, so that the probe test bench can detect the chip 200. When the probe test bench has completed the test of the chip 200, the first driving member 241 drives it to move to the probe test bench, and the clamping jaw 242 clamps the chip 200 on the probe test bench. The rotating table 22 drives the base 23 to rotate and drives the base 23 to return to its original position, the lifting seat rises and makes the clamping claw 242 correspond to the storage port 411, and the first driving member 241 drives the clamping claw 242 to extend into the storage cavity 41 again, and the clamping claw 242 releases the tested chip 200 and puts it into the storage cavity 41, and repeats this process. The automatic loading and unloading device 100 in this embodiment can realize the automatic chip 200 loading, adjustment, testing and other operations, without manual means to adjust the position of the chip 200, and after the chip 200 is tested, the chip 200 can be removed and put back into the storage box 4, with a high degree of automation, freeing up manpower and improving the testing efficiency of the chip 200.

[0041] In one embodiment, a slide rail 231 is provided on the base 23, and the slide rail 231 extends along the length direction of the base 23. The clamping assembly 24 also includes a slider 243 and a connecting plate 244. The slider 243 is slidably connected to the slide rail 231, and the connecting plate 244 connects the slider 243 and the clamping jaw 242. The first driving member 241 is used to drive the slider 243 and drive the clamping jaw 242 to slide along the slide rail 231. In this embodiment, by setting the slide rail 231 and the slider 243 to be slidably connected, the clamping jaw 242 can play a guiding role and move stably during the sliding process of the clamping jaw 242 along the base 23. The connecting plate 244 plays the role of connecting the clamping jaw 242 and the slider 243. The first driving member 241 in this embodiment is a motor, and the driving of the clamping jaw 242 is realized by belt transmission. In other embodiments, the first driving member 241 can also be a cylinder, or the clamping jaw 242 can adopt a robot clamping jaw 242, which is not limited in this embodiment.

[0042] In one embodiment, please refer to Figure 4 and Figure 5 The clamping claw 242 includes a carrier part 2421, a base plate 2422, a clamping part 2423, a second driving member 2424 and a connecting block 2425. The carrier part 2421 is located between the base plate 2422 and the clamping part 2423 and is installed on the base plate 2422. The connecting block 2425 connects the base plate 2422 and the connecting plate 244. The carrier part 2421 and the clamping part 2423 are spaced apart to form a clamping space 2426. The second driving member 2424 is used to drive the clamping part 2423 to rise and fall so as to clamp or release the chip 200 located in the clamping space 2426. In this embodiment, the carrier portion 2421 is used to support the chip 200. Since the clamping claw 242 in this embodiment only clamps one end of the chip 200, the carrier portion 2421 can prevent the end of the chip 200 away from the clamping claw 242 from falling due to gravity, thereby preventing the chip 200 from being damaged. The connecting block 2425 plays a role in connecting the bottom plate 2422 and the connecting plate 244, so that after the first driving member 241 drives the connecting plate 244 to move, the bottom plate 2422 can be driven to move through the connecting block 2425, thereby driving the clamping claw 242 to move along the base 23. The carrier portion 2421 and the clamping portion 2423 are spaced apart to form a clamping space 2423. 426, the carrier part 2421 is located below the clamping part 2423. The second driving member 2424 in this embodiment can be a cylinder. The clamping part 2423 can realize rising or falling movement under the drive of the second driving member 2424. When the second driving member 2424 drives the clamping part 2423 to descend, the carrier part 2421 cooperates with the clamping part 2423 to clamp the chip 200 located in the clamping space. When the second driving member 2424 drives the clamping part 2423 to rise, the clamping part 2423 and the carrier part 2421 release the chip 200 located in the clamping space 2426, thereby clamping or releasing the chip 200.

[0043] In one embodiment, there are two clamping assemblies 24, which are arranged vertically above the base 23 at intervals. There are two slide rails 231, which are arranged at intervals along the width direction of the base 23. Two sliders 243 are mounted on the two slide rails 231 in a one-to-one correspondence, and two connecting plates 244 connect the two sliders 243 and the clamping claws 242 in a one-to-one correspondence. In this embodiment, by setting two clamping assemblies 24, the automatic loading and unloading device 100 in this embodiment can be used with two probe test benches. Specifically, the two probe test benches can be respectively arranged on the front and rear sides of the frame 1. Each clamping assembly 24 can clamp a chip 200, and through the rotation of the rotating table 22, the chips 200 clamped by the two clamping assemblies 24 can be placed in the two probe test benches in a one-to-one correspondence for detection, thereby increasing the test efficiency of the chips 200.

[0044] In one embodiment, please refer to Figure 6 The adjustment assembly 32 includes a turntable 321, a mounting seat 322, and a third driving member 323. The turntable 321 is mounted on the mounting seat 322, and the mounting seat 322 is mounted on the mounting frame 31. The third driving member 323 is used to drive the turntable 321 to rotate relative to the mounting seat 322. The top of the turntable 321 forms an adjustment platform 3211. In this embodiment, the mounting seat 322 is mounted on the mounting frame 31 to achieve the fixation of the mounting seat 322. The bottom of the turntable 321 can be connected to a rotating shaft. The third driving member 323 can drive the turntable 321 to rotate by driving the rotating shaft of the bottom plate 2422 of the turntable 321 to drive the turntable 321 to rotate, thereby driving the chip 200 placed on the top of the turntable 321 to rotate, so as to achieve the adjustment of the chip 200.

[0045] Based on the above embodiment, the turntable 321 includes a circular disk 3212 and an extension plate 3213. The circular disk 3212 is provided with a plurality of installation grooves 3214 arranged at intervals along its circumference. The number of the extension plates 3213 is consistent with the number of the installation grooves 3214 and corresponds to each other. The extension plates 3213 are installed in the corresponding installation grooves 3214 and the top of the extension plates 3213 is arranged flush with the top of the circular disk 3212. In this embodiment, by providing a plurality of installation grooves 3214 along the circumference of the circular disk 3212 and arranging an extension plate 3213 in each installation groove 3214, the bearing area of ​​the circular disk 3212 in this embodiment is increased, so that the extension part can support the chip 200, and the top of the extension part is arranged flush with the top of the circular disk 3212, so that the chip 200 above the circular disk 3212 can be placed stably.

[0046] In one embodiment, please refer to Figure 7The lifting platform 21 includes a lifting column 211, a lifting plate 212, a ball nut 213, a screw 214 and a fourth driving member 215. The lifting column 211 is installed on the lifting plate 212, the lifting plate 212 is connected to the ball nut 213, the screw 214 extends vertically, the ball nut 213 is sleeved on the screw 214, and the fourth driving member 215 is used to drive the screw 214 to rotate, so that the ball nut sleeved on the screw 214 drives the lifting plate 212 and the lifting column 211 to rise or fall, and the rotating platform 22 is installed on the top of the lifting column 211. In this embodiment, the fourth driving member 215 drives the screw rod 214 to rotate so that the ball nut 213 sleeved on the screw rod 214 rises or falls relative to the screw rod 214. The ball nut 213 is connected to the lifting plate 212. The lifting column 211 is installed above the lifting plate 212. When the ball nut 213 rises or falls, it can synchronously drive the lifting plate 212 and the lifting column 211 to rise or fall. The lifting and lowering are achieved through the screw rod 214 and the ball nut 213, which can provide higher precision and stability. In other embodiments, the bottom plate 2422 of the lifting platform 21 can also be provided with a lifting cylinder, and the lifting platform 21 can be driven to rise or fall by extending or retracting the output shaft of the lifting cylinder.

[0047] In one embodiment, both side walls of the material storage box 4 are provided with a plurality of slots 42 arranged at intervals in the vertical direction, the slots 42 extend along the extension direction of the side walls, and any two opposite slots 42 are arranged flush and used for a chip 200 to be inserted. In this embodiment, by providing the slots 42 on both side walls of the material storage box 4, the chips 200 placed in the material storage cavity 41 can be arranged at intervals, and any two adjacent chips 200 will not contact each other, and it is convenient for the clamping claw 242 to take out the chip 200 from the material storage cavity 41.

[0048] In one embodiment, please refer to Figure 8 , the material storage box 4 is detachably connected to the mounting frame 31. In this embodiment, the material storage box 4 is detachably connected to the mounting frame 31. When the chips 200 in one material storage box 4 are all tested and need to be replaced with the next group of chips 200 for testing, the operator can put the chips 200 in a new material storage box 4 and replace the material storage box 4 to achieve rapid replacement of the chips 200, thereby increasing the test efficiency of the automatic loading and unloading device 100 in this embodiment.

[0049] In one embodiment, a plurality of running wheels 11 are arranged at intervals at the bottom of the frame 1 to facilitate the movement of the frame 1 and to prevent the frame 1 from directly contacting the ground, thereby reducing friction.

[0050] The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. An automatic loading and unloading device, characterized in that: include: frame; A pick-and-place mechanism, the pick-and-place mechanism is installed on the frame, the pick-and-place mechanism includes a lifting platform, a rotating platform, a base and a clamping assembly, the lifting platform is installed on the frame, the rotating platform is rotatably arranged on the top of the lifting platform, the base is connected to the rotating platform, and the clamping assembly includes a first driving member and a clamping claw, the first driving member is used to drive the clamping claw to slide along the base; An adjustment mechanism, the adjustment mechanism comprising a mounting frame and an adjustment component, the mounting frame having a mounting cavity, the adjustment component being arranged in the mounting cavity, the adjustment component having an adjustment platform, the mounting frame being spaced apart from the lifting platform, and the mounting cavity having a mounting opening on a side facing the lifting platform; A material storage box is installed on the mounting frame, and the material storage box has a material storage cavity, and a material storage opening is opened on one side of the material storage cavity facing the lifting platform.

2. The automatic loading and unloading device according to claim 1, characterized in that: The base is provided with a slide rail, and the slide rail extends along the length direction of the base. The clamping assembly also includes a slider and a connecting plate. The slider is slidably connected to the slide rail, and the connecting plate connects the slider and the clamp. The first driving member is used to drive the slider and drive the clamp to slide along the slide rail.

3. The automatic loading and unloading device according to claim 2, characterized in that: The clamp includes a wafer carrier part, a base plate, a clamping part, a second driving member and a connecting block. The wafer carrier part is located between the base plate and the clamping part and is installed on the base plate. The connecting block connects the base plate and the connecting plate. The wafer carrier part and the clamping part are spaced apart to form a clamping space. The second driving member is used to drive the clamping part to rise and fall so as to clamp or release the chip located in the clamping space.

4. The automatic loading and unloading device according to claim 3, characterized in that: There are two clamping assemblies, and the two clamping assemblies are vertically spaced apart above the base. There are two slide rails, and the two slide rails are spaced apart along the width direction of the base. The two sliders are installed on the two slide rails one by one, and the two connecting plates connect the two sliders and the clamps one by one.

5. The automatic loading and unloading device according to claim 1, characterized in that: The adjustment assembly includes a turntable, a mounting seat and a third driving member. The turntable is mounted on the mounting seat, the mounting seat is mounted on the mounting frame, and the third driving member is used to drive the turntable to rotate relative to the mounting seat. The top of the turntable forms the adjustment platform.

6. The automatic loading and unloading device according to claim 5, characterized in that: The turntable includes a circular disc and an extension plate. The circular disc is provided with a plurality of installation grooves arranged at intervals along its circumference. The number of the extension plates is consistent with the number of the installation grooves and corresponds one to one. The extension plates are installed in the corresponding installation grooves and the top of the extension plates is flush with the top of the circular disc.

7. The automatic loading and unloading device according to claim 1, characterized in that: The lifting platform includes a lifting column, a lifting plate, a ball nut, a screw and a fourth driving member. The lifting column is installed on the lifting plate, the lifting plate is connected to the ball nut, the screw extends vertically, the ball nut is sleeved on the screw, and the fourth driving member is used to drive the screw to rotate, so that the ball nut sleeved on the screw drives the lifting plate and the lifting column to rise or fall, and the rotating platform is installed on the top of the lifting column.

8. The automatic film loading and unloading device according to any one of claims 1 to 7, characterized in that: Both side walls of the storage box are provided with a plurality of card slots arranged at intervals along the vertical direction, and the card slots extend along the extension direction of the side walls. Any two opposite card slots are arranged flush and are used for inserting a chip.

9. The automatic film loading and unloading device according to any one of claims 1 to 7, characterized in that: The material storage box is detachably connected to the mounting frame.

10. The automatic film loading and unloading device according to any one of claims 1 to 7, characterized in that: A plurality of walking wheels are arranged at intervals at the bottom of the frame.

Citation Information

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