A single planetary fixture for coating large-aperture optical elements and a vacuum coating machine

Abstract

The present application provides a single planetary fixture for coating large-aperture optical elements and a vacuum coating machine, which are applied to the field of large-aperture coating equipment design and optical coating process technology, and include: a revolving umbrella frame, a single planetary umbrella frame and a counterweight module; the revolving umbrella frame is installed inside the vacuum chamber of the vacuum coating machine through a revolving axis; the single planetary umbrella frame is arranged below the revolving umbrella frame, wherein the single planetary umbrella frame is installed and connected to the revolving umbrella frame through a first rotation axis; the counterweight module is arranged above the revolving umbrella frame, and the counterweight module is installed and connected to the revolving umbrella frame through a second rotation axis, and is used to balance the torque of the single planetary umbrella frame; the single planetary fixture requires a small number of moving parts and a low complexity of the mechanical system, which effectively reduces the diameter of the vacuum chamber of the required coating machine, thereby reducing the size of the entire coating machine, reducing the manufacturing, operation and maintenance costs of the coating machine, and allowing the user to quickly and accurately counterweight according to specific application requirements, thereby solving the problem of counterweight during coating.

Description

Technical Field

[0001] The present application relates to the field of large-aperture coating equipment design and optical coating process technology, and specifically to a large-aperture optical element coating single planetary fixture and vacuum coating machine. Background Art

[0002] Large-aperture optical systems are widely used in many high-tech fields, such as space science research, astronomical optics, ground-based space target detection and identification, etc., because of their significant effects in improving system angular resolution and energy collection capabilities, as well as their advantages in reducing system total weight and volume. With the development of technology, large-aperture systems show two obvious trends: one is the continuous increase in aperture, and the other is the increasingly stringent requirements for technical indicators, which brings higher challenges to the processing and manufacturing of large-aperture optical components.

[0003] In the manufacturing process of optical components, optical coating is a crucial final process, which directly determines the performance indicators of optical components. At present, for the coating clamping of large-aperture optical components with no hole in the center or an aperture less than 150 mm, if a revolving umbrella frame is used for clamping, the uniformity of the film layer in the central area cannot be corrected, resulting in the film layer uniformity failing to meet the application standard. In order to solve this problem, it is usually necessary to use a more complex revolving two-stage planetary fixture, such as a double planetary fixture or a three-planet or more fixture, to improve the uniformity of the film layer. However, this clamping method requires that the vacuum chamber diameter of the coating machine is at least twice the diameter of the large-aperture optical component, which makes the size of the coating machine too large, which not only increases the complexity of the design and manufacturing of the coating machine, but also significantly increases the manufacturing cost.

[0004] Based on this, a new coating fixture for large-aperture optical components is needed. Utility Model Content

[0005] In view of this, the embodiments of the present specification provide a new single planetary fixture for coating large-aperture optical elements, which is applied to the field of large-aperture coating equipment design and optical coating process technology.

[0006] The embodiments of this specification provide the following technical solutions:

[0007] The embodiment of this specification provides a large-aperture optical element coating single planetary fixture, including: a revolution umbrella holder, a single planetary umbrella holder and a counterweight module;

[0008] The revolving umbrella stand is installed inside the vacuum chamber of the vacuum coating machine via the revolving shaft;

[0009] The single planetary umbrella stand is arranged below the revolving umbrella stand, wherein the single planetary umbrella stand is connected to the revolving umbrella stand via a first rotation axis and is used to clamp a large-aperture optical element to be coated;

[0010] The counterweight module is arranged above the revolving umbrella frame, and the counterweight module is installed and connected to the revolving umbrella frame through a second rotation axis, and is used to balance the moment of the single planetary umbrella frame;

[0011] Wherein, the first rotation shaft is connected to the revolution shaft through a first revolution and rotation gear set, so that the single planetary umbrella frame rotates while following the revolution shaft in revolution;

[0012] The second rotation shaft is connected to the revolving shaft via a second revolving and rotating gear set, so that the counterweight module rotates while following the revolving shaft in revolving;

[0013] Furthermore, the distance between the first rotation axis and the revolution axis is set to a first preset distance, and the distance between the second rotation axis and the revolution axis is set to a second preset distance, so that based on the first preset distance and the second preset distance, the single planetary umbrella stand holding a large-aperture optical element is counterweighted by the weight of the counterweight module.

[0014] The embodiment of the present specification also provides a vacuum coating machine, which includes a vacuum chamber, and the large-aperture optical element coating single planetary fixture is arranged inside the vacuum chamber.

[0015] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0016] The large-aperture optical element coating single planetary fixture designed by the utility model comprises: a revolving umbrella frame, a single planetary umbrella frame and a counterweight module, wherein the revolving umbrella frame is installed inside the vacuum chamber of the vacuum coating machine through a revolving shaft, and the single planetary umbrella frame is arranged below the revolving umbrella frame, wherein the single planetary umbrella frame is installed and connected to the revolving umbrella frame through a first rotation shaft, and is used to clamp the large-aperture optical element to be coated, and the counterweight module is arranged above the revolving umbrella frame, and the counterweight module is installed and connected to the revolving umbrella frame through a second rotation shaft, and is used to balance the torque of the single planetary umbrella frame, through the first revolving and rotating gear set, the rotation and revolving motion of the single planetary umbrella frame are coordinated with the motion of the revolving shaft, so as to ensure that the optical element obtains a uniform film layer during the coating process; and the configuration module is arranged above the revolving umbrella frame, so as to effectively realize the torque balance, which can not only reduce the size of the entire coating machine, but also more directly compensate for the weight of the optical element, and improve the efficiency of the counterweight.

[0017] In addition, by arranging the single planetary umbrella frame at the bottom and the configuration module at the top, the space of the vacuum chamber is reasonably and effectively utilized, reducing the demand for the vacuum cavity, large bearings and supporting structures, thereby reducing the complexity and cost of the overall system.

[0018] Therefore, the single planetary fixture requires fewer moving parts and a less complex mechanical system. Compared with traditional dual-planetary or multi-planetary fixtures, it can effectively reduce the vacuum chamber diameter of the required coating machine, thereby reducing the size of the entire coating machine and reducing the manufacturing, operation and maintenance costs of the coating machine; and allows users to quickly and accurately balance weights according to specific application requirements, thereby solving the problem of balancing weights during optical coating of large-aperture components. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application.

[0020] Figure 1 It is a front view of a single planetary fixture for coating large-aperture optical elements in the present application;

[0021] Figure 2 It is a three-dimensional schematic diagram of a single planetary fixture for coating large-aperture optical elements in this application;

[0022] Figure 3 It is a three-dimensional schematic diagram of the existing double planetary fixture;

[0023] In the figure: 1, the revolution axis; 2, the first rotation axis; 3, the first revolution and rotation gear set; 4, the single planetary umbrella frame; 5, the vacuum chamber wall; 6, the second rotation axis; 7, the revolution umbrella frame; 8, the second revolution and rotation gear set; 9, the counterweight module; 10, the double planetary umbrella frame; 11, the third revolution and rotation gear set. DETAILED DESCRIPTION

[0024] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0025] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0026] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0027] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0028] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the examples can be practiced without these specific details.

[0029] Since a large aperture can effectively improve the angular resolution and energy collection capability of the system, and increasing the relative aperture can reduce the total weight and volume of the system, large-aperture optical systems are widely used in high-tech fields such as space science research, astronomical optics, and ground-based space target detection and identification. At present, the development of large-aperture systems presents two major characteristics: one is that the aperture is getting larger and larger, and the other is that the technical indicators are becoming more and more stringent, which poses greater challenges to the processing and manufacturing of large-aperture optical components.

[0030] Optical coating is the final process of optical component manufacturing, which directly determines the performance index of optical components. There are two types of existing large-diameter optical component coating clamping:

[0031] First, for optical elements with a hole in the center (hole diameter of more than 150 mm), a revolving umbrella stand can be used for clamping, which can easily achieve the correction of the uniformity of the film layer, thereby improving the uniformity of the film layer of the effective light aperture.

[0032] Second, for optical components with no central hole or a hole diameter less than 150 mm, if the uniformity of the film layer in the central area cannot be corrected when clamped with a revolving umbrella stand, the uniformity of the film layer will not meet the use requirements. In order to solve this problem, it is usually necessary to use a revolving two-stage planetary fixture (for example, a double planetary fixture or a three-planet fixture or more) such as Figure 3As shown, although the uniformity of the film layer can be improved, this fixture will cause the coating machine to be too large. The diameter of the vacuum chamber of the coating machine is at least twice the diameter of the large-aperture optical element, which increases the complexity of the system, thereby increasing the difficulty of designing and manufacturing the coating machine, and significantly increasing the manufacturing cost and maintenance cost.

[0033] In the analysis and improvement exploration of the device, it was found that: Figure 3 The double planetary or multi-planetary fixture shown needs to maintain a low center of gravity in order to maintain the stability of the system. The planetary umbrella frames are all set below the revolving umbrella frame. Therefore, in order to achieve uniformity of the film layer on the surface of large-aperture optical elements, a larger vacuum chamber is required to accommodate its structure, which results in the vacuum chamber diameter of the coating machine being at least twice the diameter of the large-aperture optical element.

[0034] In the process of improving the diameter of the vacuum chamber of the coating machine, it was further discovered that the use of double planetary or multi-planetary clamps involves multiple rotating axes and complex motion trajectories, and requires precise balancing of the weight of each planetary frame, which increases the complexity of the balancing process. As the complexity of the system increases, multiple adjustments and optimizations are required to find the best balance point, which results in longer operation time for the adjustment and balancing process, affecting production efficiency.

[0035] Based on this, the embodiment of this specification proposes a new large-aperture optical element coating fixture: Figure 1 and Figure 2 As shown, it includes: a revolving umbrella frame, a single planetary umbrella frame and a counterweight module, which has a simple design, reduces the number of moving parts, and reduces the manufacturing cost and maintenance cost.

[0036] The single planetary umbrella frame is arranged below the revolving umbrella frame, and is used to fix and support the large-aperture optical element. The counterweight module is located above the revolving umbrella frame, and can generate torque balance for the weight of the single planetary umbrella frame and the optical element below, thereby reducing the vibration caused by weight imbalance. By configuring the weight on the upper and lower sides of the revolving umbrella frame, the demand for vacuum chamber space is reduced, thereby effectively reducing the diameter of the vacuum chamber of the vacuum coating machine. In addition, through two independent gear sets, the rotation and revolution speeds of the single planetary umbrella frame and the counterweight module can be accurately controlled respectively, which can adapt to different coating process requirements. Moreover, the independent gear set design helps to improve the maintenance efficiency of the equipment and reduce the maintenance cost. Then, by accurately controlling the movement of the single planetary umbrella frame and the counterweight module, uniform coating can be achieved in a smaller vacuum chamber space, thereby reducing the size of the vacuum chamber and the volume of the entire coating machine. In addition, a first preset distance is set between the first rotation axis and the revolution axis, and a second preset distance is set between the second rotation axis and the revolution axis, so that the motion trajectory of the single planetary umbrella frame and the counterweight module relative to the revolution axis can be accurately controlled, thereby improving the quality and uniformity of the film layer, and reducing the required lever arm length by increasing the weight above, reducing the need for vacuum chambers, large bearings and support structures, thereby reducing the complexity and cost of the overall system, and can also adapt to optical components of different sizes and weights, improving the versatility and adaptability of the fixture.

[0037] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0038] The embodiment of this specification provides a single planetary fixture for coating large-aperture optical elements, such as Figure 1 and Figure 2 As shown, the large-aperture optical element coating single planetary fixture comprises: a revolution umbrella frame, a single planetary umbrella frame and a counterweight module;

[0039] The revolving umbrella stand is installed inside the vacuum chamber of the vacuum coating machine via the revolving shaft;

[0040] The single planetary umbrella stand is arranged below the revolving umbrella stand, wherein the single planetary umbrella stand is connected to the revolving umbrella stand via a first rotation axis and is used to clamp a large-aperture optical element to be coated;

[0041] The counterweight module is arranged above the revolving umbrella frame, and the counterweight module is installed and connected to the revolving umbrella frame through a second rotation axis, and is used to balance the moment of the single planetary umbrella frame;

[0042] Wherein, the first rotation shaft is connected to the revolution shaft through a first revolution and rotation gear set, so that the single planetary umbrella frame rotates while following the revolution shaft in revolution;

[0043] The second rotation shaft is connected to the revolving shaft via a second revolving and rotating gear set, so that the counterweight module rotates while following the revolving shaft in revolving;

[0044] Furthermore, the distance between the first rotation axis and the revolution axis is set to a first preset distance, and the distance between the second rotation axis and the revolution axis is set to a second preset distance, so that based on the first preset distance and the second preset distance, the single planetary umbrella stand holding a large-aperture optical element is counterweighted by the weight of the counterweight module.

[0045] Specifically, the weight of the counterweight module can be adjusted according to the total weight of the single planetary umbrella stand and the large-aperture optical element below, so as to accommodate optical elements of different weights without the need for complex mechanical adjustments.

[0046] During implementation, the large-aperture optical element is fixed and supported by a single planetary umbrella stand. The weight of the counterweight module is adjusted according to the total weight of the large-aperture element and the single planetary umbrella stand to achieve the best balance, reduce the vibration caused by weight imbalance, and improve the stability of the entire coating system.

[0047] The first rotation axis is connected to the orbital axis via a first orbital rotation gear set, so that the single planetary umbrella frame rotates around the first rotation axis and orbits relative to the orbital axis at the same time; the second rotation axis is connected to the orbital axis via a second orbital rotation gear set, so that the counterweight module rotates around the second rotation axis and orbits relative to the orbital axis at the same time; through two independent gear sets, the movement of the single planetary umbrella frame and the counterweight module can be precisely controlled, and uniform coating can be achieved in a smaller vacuum chamber space, thereby reducing the size of the vacuum chamber and the volume of the entire coating machine.

[0048] In addition, a first preset distance is set between the first rotation axis and the revolution axis, and a second preset distance is set between the second rotation axis and the revolution axis. Through the preset distance, the motion trajectory of the single planetary umbrella frame and the counterweight module relative to the revolution axis can be accurately controlled, thereby improving the quality and uniformity of the film layer. By adjusting the preset distance, it can adapt to optical elements of different sizes and weights, improve the versatility and adaptability of the fixture, and at the same time reduce the size of the vacuum chamber and the volume of the entire coating machine.

[0049] In summary, the single planetary fixture for coating large-aperture optical elements, which is composed of a revolving umbrella frame, a single planetary umbrella frame and a counterweight module, has a simple overall structure, requires few moving parts, occupies a small space, is easy to operate, and can quickly clamp and unload optical elements; and the design structure of the upper counterweight module and the lower single planetary umbrella frame can not only optimize the utilization of the internal space of the vacuum chamber, reduce the size of the vacuum chamber, and thus reduce the volume of the entire coating machine, but also can adapt to optical elements of different weights by adjusting the upper and lower weights, without the need for complex mechanical adjustments, reducing downtime caused by adjustments and calibrations, and improving production efficiency.

[0050] In one embodiment, the first revolving and self-rotating gear set includes: a first self-rotating gear and a first revolving gear, the first self-rotating gear is connected to the first self-rotating shaft, the first revolving gear is connected to the revolving shaft, and the tooth ratio of the first self-rotating gear to the first revolving gear is set according to the uniformity of the coating, so as to control the speed ratio between the rotation of the single planetary umbrella frame and the revolution of the revolving shaft.

[0051] Specifically, the single planetary umbrella frame must not only rotate on its own axis, but also revolve around the orbital axis. Gear sets with different tooth ratios are designed according to the uniformity of the coating. The orbital speed of the single planetary umbrella frame is adjusted relative to the rotation speed, thereby adjusting the orbital-rotation ratio. This can optimize the heating and coating conditions of the optical element during the coating process, and help improve the uniformity of the film layer.

[0052] For example, assuming that the gear on the orbital axis has 30 teeth and the gear on the first self-rotating axis has 10 teeth, then the gear ratio is 3:1. When the gear on the orbital axis rotates 1 circle, the gear on the first self-rotating axis rotates 3 circles, thereby achieving a specific orbital-self-rotation ratio. By changing the gear ratio, the orbital speed of the single planetary umbrella mount can be precisely controlled to meet the coating requirements of optical components of different diameters and shapes, ensuring uniform deposition of the film layer during the entire coating process.

[0053] In one embodiment, a second revolving and rotating gear set is set according to the first revolving and rotating gear set, and the second revolving and rotating gear set includes: a second rotating gear and a second revolving gear, the second rotating gear is connected to the second rotating shaft, the second revolving gear is connected to the revolving shaft, and the tooth ratio of the second rotating gear to the second revolving gear is set according to the torque balance, so as to control the speed ratio between the rotation of the counterweight module and the revolution of the revolving shaft.

[0054] Specifically, a second orbiting and rotating gear set is set according to the first orbiting and rotating gear set, so as to accurately control the movement of the counterweight module and the single planetary umbrella frame, achieve torque balance of the entire system, prevent vibration due to weight imbalance, and thus achieve uniform film deposition and high-quality coating effect.

[0055] In one embodiment, the counterweight module is composed of one or more counterweight modules of different weights.

[0056] Specifically, different numbers of counterweight modules can be selected according to the weight of the optical element to achieve the required moment balance.

[0057] The number and weight of the weight modules can also be adjusted to precisely balance the weight distribution of the optical element, reducing vibration or stress caused by imbalance during the coating process.

[0058] You can also quickly replace weight modules of different weights to accommodate optical components of different weights or quickly adjust the weight, thereby improving operational flexibility and efficiency.

[0059] In one embodiment, the weight counterweight module is proportioned according to the total weight of the large-aperture optical element and the single planetary umbrella stand;

[0060] Based on moment balance, the weight of the counterweight module is obtained according to the total weight of the large-aperture optical element and the single planetary umbrella stand, the first preset distance, and the second preset distance.

[0061] In one embodiment, the outer shape of the counterweight module is any one of the following shapes: disc, frustum, cylinder, cuboid, cube, or ring, which not only helps to maintain the balance of the optical element during the coating process and reduce deformation or stress caused by uneven weight distribution; it is also easy to install and disassemble, making it convenient to quickly replace the counterweight module between different coating tasks.

[0062] In one embodiment, the counterweight module is a high-density metal material, and is configured to balance the total weight of the large-aperture optical element and the single planetary umbrella mount by limiting the volume of the counterweight module. The metal material includes any one or more of the following: lead, steel, iron, and zinc.

[0063] Specifically, the selection of a material with a high density can obtain a greater torque while keeping the length of the lever arm (ie, the distance from the counterweight module to the rotation axis) unchanged, thereby balancing the system more effectively.

[0064] The use of dense metal materials can produce the required torque changes with smaller mass changes, thereby adjusting the counterweight more accurately, simplifying the overall mechanical design and reducing manufacturing costs.

[0065] The use of high-density metal materials can reduce the volume of the counterweight module, thereby reducing vibration during high-speed rotation or movement, making the system easier to control and adjust.

[0066] In one embodiment, a single planetary fixture for coating large-aperture optical elements is located inside a vacuum chamber of a vacuum coating machine.

[0067] In one embodiment, the utility model designs a single planetary fixture with a vacuum chamber diameter of 2000 mm, and the structural schematic diagram is as follows: Figure 1 As shown, the specific parameters are as follows:

[0068] Diameter of revolution umbrella frame: 1900mm;

[0069] Distance from the first rotation axis to the revolution axis: D = 200mm

[0070] Maximum diameter of single planetary umbrella stand: 1400mm

[0071] Therefore, the preparation of thin films for large-aperture optical elements with a maximum diameter of 1350 mm can be completed, assuming that the total weight of the 1350 mm large-aperture optical element and the single planetary umbrella frame is 1000 kg.

[0072] Design the distance between the second rotation axis and the revolution axis: L = 450mm,

[0073] Weight of counterweight module: 1000*200 / 450=444.4kg calculated based on moment balance, a lead block with higher density is used as the counterweight module.

[0074] Therefore, by adopting the single planetary fixture for coating large-aperture optical elements of the utility model, a coating machine with a vacuum chamber diameter of 2000mm can be realized to complete the coating of 1350mm large-aperture optical elements, and the surface of the large-aperture elements has no dead corners and good uniformity; if a normal binary planetary fixture or above is used, the diameter of the vacuum chamber of the coating machine needs to be at least 2800mm.

[0075] In one embodiment, the utility model designs a single planetary fixture with a vacuum chamber diameter of 2500 mm, and the structural schematic diagram is as follows: Figure 1 As shown, the specific parameters are as follows:

[0076] Diameter of the revolution umbrella frame: 2400mm;

[0077] Distance from the first rotation axis to the revolution axis: D = 250mm

[0078] Maximum diameter of single planetary umbrella stand: 1900mm

[0079] Therefore, the preparation of thin films for large-aperture optical elements with a maximum diameter of 1850 mm can be completed, assuming that the total weight of the 1850 mm large-aperture optical element and the single planetary umbrella frame is 2000 kg.

[0080] Design the distance between the second rotation axis and the revolution axis: L = 600mm,

[0081] Weight of counterweight module: 2000*250 / 600=833.33kg calculated based on moment balance, a steel block with higher density is used as the counterweight module.

[0082] Therefore, by adopting the single planetary fixture for coating large-aperture optical elements of the utility model, a coating machine with a vacuum chamber diameter of 2500mm can be realized to complete the coating of 1850mm large-aperture optical elements, and the surface of the large-aperture elements has no dead corners and good uniformity; if a normal binary planetary fixture or above is used, the diameter of the vacuum chamber of the coating machine needs to be at least 3700mm.

[0083] By precisely controlling the movement of the counterweight module, uniform coating can be achieved in a smaller vacuum chamber space, thereby reducing the size of the vacuum chamber and the entire coating machine.

[0084] The embodiment of the present specification also provides a vacuum coating machine, which includes a vacuum chamber, and the large-aperture optical element coating single planetary fixture is arranged inside the vacuum chamber.

[0085] The vacuum coating machine of the embodiment of this specification can be used to perform Figure 1 The single planetary fixture for coating large-aperture optical elements in the illustrated embodiment has similar implementation principles and technical effects, which will not be described in detail here.

[0086] In this specification, the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the embodiments described later, the description is relatively simple, and the relevant parts can be referred to the partial description of the previous embodiments.

[0087] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A single planetary fixture for coating large-aperture optical elements, characterized in that: include: Revolution parachute frame, single planet parachute frame and counterweight module; The revolving umbrella stand is installed inside the vacuum chamber of the vacuum coating machine via the revolving shaft; The single planetary umbrella stand is arranged below the revolving umbrella stand, wherein the single planetary umbrella stand is connected to the revolving umbrella stand via a first rotation axis and is used to clamp a large-aperture optical element to be coated; The counterweight module is arranged above the revolving umbrella frame, and the counterweight module is installed and connected to the revolving umbrella frame through a second rotation axis, and is used to balance the moment of the single planetary umbrella frame; Wherein, the first rotation shaft is connected to the revolution shaft through a first revolution and rotation gear set, so that the single planetary umbrella frame rotates while following the revolution shaft in revolution; The second rotation shaft is connected to the revolving shaft via a second revolving and rotating gear set, so that the counterweight module rotates while following the revolving shaft in revolving; Furthermore, the distance between the first rotation axis and the revolution axis is set to a first preset distance, and the distance between the second rotation axis and the revolution axis is set to a second preset distance, so that based on the first preset distance and the second preset distance, the single planetary umbrella stand holding a large-aperture optical element is counterweighted by the weight of the counterweight module.

2. The single planetary fixture for coating large-aperture optical elements according to claim 1, characterized in that: The first revolving and rotating gear set includes: a first rotating gear and a first revolving gear, the first rotating gear is connected to the first rotating shaft, the first revolving gear is connected to the revolving shaft, and the gear ratio between the first rotating gear and the first revolving gear is set according to the uniformity of the coating, so as to control the speed ratio between the rotation of the single planetary umbrella frame and the revolution of the revolving shaft.

3. The single planetary fixture for coating large-aperture optical elements according to claim 2, characterized in that: A second revolving and rotating gear set is set according to the first revolving and rotating gear set, and the second revolving and rotating gear set includes: a second rotating gear and a second revolving gear, the second rotating gear is connected to the second rotating shaft, the second revolving gear is connected to the revolving shaft, and the tooth ratio of the second rotating gear to the second revolving gear is set according to the torque balance, so as to control the speed ratio between the rotation of the counterweight module and the revolution of the revolving shaft.

4. The single planetary fixture for coating large-aperture optical elements according to claim 1, characterized in that: The counterweight module is composed of one or more counterweight modules of different weights.

5. The single planetary fixture for coating large-aperture optical elements according to claim 4, characterized in that: The weight counterweight module is proportioned according to the total weight of the large-aperture optical element and the single planetary umbrella stand; Based on moment balance, the weight of the counterweight module is obtained according to the total weight of the large-aperture optical element and the single planetary umbrella stand, the first preset distance, and the second preset distance.

6. The single planetary fixture for coating large-aperture optical elements according to claim 5, characterized in that: The outer shape of the counterweight module is any one of the following shapes: disc-shaped, truncated cone, cylindrical, rectangular parallelepiped, cube, and ring.

7. The single planetary fixture for coating large-aperture optical elements according to claim 5, characterized in that: The counterweight module is made of high-density metal material and is configured to balance the total weight of the large-aperture optical element and the single planetary umbrella mount by limiting the volume of the counterweight module. The metal material includes any one or more of the following: lead, steel, iron, and zinc.

8. The single planetary fixture for coating large-aperture optical elements according to claim 1, characterized in that: The large-aperture optical element coating single planetary fixture is located inside the vacuum chamber of the vacuum coating machine.

9. The single planetary fixture for coating large-aperture optical elements according to claim 1, characterized in that: The first preset distance is smaller than the second preset distance.

10. A vacuum coating machine, characterized in that: The vacuum coating machine comprises a vacuum chamber, and the large-aperture optical element coating single planetary fixture according to claims 1 to 9 is arranged inside the vacuum chamber.

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