Dual-channel spectral confocal measurement device

Abstract

The utility model provides a dual-channel spectral confocal measurement device, including two measuring heads, a first fiber jumper, a second fiber jumper and a controller, the two measuring heads are the same spectral confocal displacement measurement lens, the controller is provided with a first light source, a second light source, a first fiber coupler, a second fiber coupler, an optical fiber line and a collection imaging unit, the two measuring heads are respectively connected to the first fiber coupler and the second fiber coupler through the first fiber jumper and the second fiber jumper, the first light source and the second light source are respectively connected to the first fiber coupler and the second fiber coupler through the optical fiber line, the first fiber coupler and the second fiber coupler are connected to the collection imaging unit through the optical fiber line, and the signals fed back by the two measuring heads are acquired and analyzed through the collection imaging unit. The device has low cost and high efficiency.

Description

Technical Field

[0001] The utility model relates to the field of photoelectric measurement, in particular to a dual-channel spectral confocal measurement device. Background Art

[0002] Spectral confocal technology measures distance by analyzing wavelength information. The specific principle is as follows: the wide-spectrum composite light (usually white light) emitted by the light source is dispersed by the dispersion lens group to form monochromatic light of different wavelengths. The light focus of each wavelength corresponds to a specific distance value. When the measuring light is directed to the surface of the object and reflected back, only the monochromatic light that meets the confocal condition can be captured by the spectrometer through the small hole or slit. By calculating the detected focal wavelength, it can be converted into the corresponding distance data.

[0003] The current spectral confocal thickness measuring device generally has a single measuring head, which is used to measure the surface shape of the object being measured. If double-sided measurement is required, one side is measured first and then the other side is measured, and the data of the two sides are combined. This operation is complicated and inefficient. Alternatively, two spectral confocal thickness measuring devices are directly used at the same time, which is costly and occupies a large space.

[0004] Therefore, it is necessary to design a dual-channel spectral confocal measurement device to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a dual-channel spectral confocal measurement device with low cost and high efficiency.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a dual-channel spectral confocal measurement device, comprising two measuring heads, a first fiber jumper, a second fiber jumper and a controller, the two measuring heads are the same spectral confocal displacement measurement lens, the controller is provided with a first light source, a second light source, a first fiber coupler, a second fiber coupler, an optical fiber line and a collection imaging unit, the two measuring heads are respectively connected to the first fiber coupler and the second fiber coupler through the first fiber jumper and the second fiber jumper, the first light source and the second light source are respectively connected to the first fiber coupler and the second fiber coupler through optical fiber lines, the first fiber coupler and the second fiber coupler are connected to the collection imaging unit through optical fiber lines, and the collection imaging unit is used to acquire and analyze the signals fed back by the two measuring heads.

[0007] As a further improved technical solution of the utility model, the collection imaging unit includes an aperture, a first lens, a dispersion prism, a reflector, a second lens and an image sensor in sequence along the optical path, and the first fiber optic coupler and the second fiber optic coupler are connected to the aperture through optical fiber lines.

[0008] As a further improved technical solution of the utility model, the first lens is a collimating lens, and the second lens is a converging lens.

[0009] As a further improved technical solution of the utility model, the dispersion prism is an equilateral prism.

[0010] As a further improved technical solution of the utility model, the controller is provided with a first interface, a second interface, a control switch and a display screen, the two measuring heads are respectively inserted into the first interface and the second interface, the display screen is connected to the image sensor, and the control switch is a start button of the controller.

[0011] As a further improved technical solution of the utility model, the controller is also provided with a serial port and a network port, which are external communication interfaces.

[0012] As a further improved technical solution of the utility model, a terminal block is also provided on the controller.

[0013] As a further improved technical solution of the utility model, the optical image sensor is an area array CCD.

[0014] The dual-channel spectral confocal measurement device of the utility model includes two identical spectral confocal measurement heads, which are connected to the corresponding interfaces of the controller. The dual-channel measurement heads can simultaneously measure the position information of the same surface of the object to be measured, and can also synchronously measure the position information of both sides of the object to be measured, so as to quickly obtain the surface morphology information and the thickness information of the object to be measured. It is highly efficient and low in cost. In addition, the dual measurement heads use one controller, which occupies a small space. The controller uses a prism as a dispersion element, which is convenient for process control during mass production. Since the processing technology of the prism is mature, the main control is the appearance. The area array camera is used as the image acquisition component, and the position installation is more flexible, which provides the possibility for dual-channel signal reception. The setting of the reflector also further reduces the volume of the controller, making it more practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the dual-channel spectral confocal measurement device of the utility model.

[0016] Figure 2 It is a schematic diagram of the structure of the collection and imaging unit of the utility model.

[0017] Figure 3 This is a schematic diagram of the connection relationship between the measuring head of the utility model and the internal structure of the controller.

[0018] Figure 4 This is a schematic diagram of the controller of the utility model.

[0019] Figure 5This is a dual-channel display image of the utility model. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] Reference Figure 1 A dual-channel spectral confocal measurement device of this embodiment includes two measuring heads 1, a first fiber jumper 101, a second fiber jumper 102 and a controller 3. The two measuring heads 1 are the same spectral confocal displacement measurement lenses. The controller 3 is provided with a first light source 301, a second light source 302, a first fiber coupler 303, a second fiber coupler 304, an optical fiber line 305 and a collection imaging unit 4. The two measuring heads 1 are respectively connected to the first fiber coupler 303 and the second fiber coupler 304 through the first fiber jumper 101 and the second fiber jumper 102, respectively. The first light source 301 and the second light source 302 are respectively connected to the first fiber coupler 303 and the second fiber coupler 304 through the optical fiber line 305. The first fiber coupler 303 and the second fiber coupler 304 are connected to the collection imaging unit 4 through the optical fiber line 305. The signals fed back by the two measuring heads are acquired and analyzed through the collection imaging unit 4. The first light source 301 and the second light source 302 are LED white light sources.

[0022] Specific reference Figure 2 The collecting imaging unit 4 includes an aperture 401, a first lens 402, a dispersion prism 403, a reflector 404, a second lens 405 and an image sensor 406 along the optical path. The first fiber coupler 303 and the second fiber coupler 304 are connected to the aperture 401 through the optical fiber line 305. The single-wavelength optical signals reflected by the two measuring heads 1 are collected into the aperture 401 through the optical fiber line 305, and after entering the aperture 401 and diverging, they enter the first lens 402, the dispersion prism 403, the reflector 404, the second lens 405 and the image sensor 406 in sequence. The data analysis system in the image sensor analyzes and processes the signal data information of the two measuring heads. The first lens 402 is a collimating lens, which is used to collimate the divergent incident light and eliminate chromatic aberration. The collimated light is incident on the dispersion prism 403 to generate dispersion. The second lens 405 is a converging lens, which converges the light onto the image sensor 406. The dispersion prism 403 is an equilateral prism. The image sensor 406 is a CCD array, which is convenient for optical path debugging.

[0023] Reference Figure 4The controller 3 is provided with a first interface 31, a second interface 32, a control switch 33 and a display screen 34. The two measuring heads 1 are respectively inserted into the first interface 31 and the second interface 32. The interface positions must not be connected incorrectly, otherwise the accuracy will be affected. The display screen 34 is connected to the image sensor 406 to display the measurement results. The display screen 34 can display the values ​​of the dual channels, which is convenient for observation during use. The control switch 33 is the start button of the controller 1. The controller 3 is also provided with a serial port 35, a network port 36 and a terminal block 37. The serial port 35 and the network port 36 are external communication interfaces, through which data can be transmitted. The terminal block 304 is used to power the controller and contact and send signals.

[0024] Working principle: Refer to Figure 3 The white light emitted by the first light source 301 and the second light source 302 is transmitted to the first fiber coupler 303 and the second fiber coupler 304 respectively through two optical fiber lines 305, and the light is transmitted to the two measuring heads 1 respectively through the first fiber jumper 101 and the second fiber jumper 102. The light of different wavelengths passes through the measuring head 1 to produce axial dispersion, thereby forming a series of focused light spots on the optical axis. The measuring head 1 scans the surface of the sample to be measured, and the light of different wavelengths hits the surface of the object. When the sample to be measured is located in the axial dispersion range, the light of a specific single wavelength is used to measure the sample. After being reflected, it re-enters the measuring head 1, and is transmitted to the first fiber coupler 303 and the second fiber coupler 304 through the first fiber jumper 101 and the second fiber jumper 102, and enters the optical fiber line 305. The returned single-wavelength light is collected by the optical fiber line 305 and diverges in the aperture 401, and is converged by the first lens 402 and then converged to the dispersion prism 403. After passing through the dispersion prism 403, the light enters the reflector 404 and is reflected to the second lens 405. After being converged by the second lens 405, the light is focused on the image sensor 406. Figure 5 501 and 502 are images obtained by two measuring head channels respectively (only to show that two channels correspond to two images, not to indicate that the obtained images must be straight lines). The data can be analyzed by the data processing system and processed by the software algorithm to obtain the peak wavelength. When the object moves within the measuring range, the peak wavelength will change. The extracted peak wavelength has a one-to-one correspondence with the position of the object. The mapping relationship between the peak wavelength and the position of the object can be obtained by calibration. During measurement, the displacement value of the object can be obtained by the change in the peak wavelength. Finally, the corresponding object position information data and images of the two measuring heads are presented on the display screen.

[0025] In addition, the above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. The understanding of this specification should be based on the technical personnel in the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, ordinary technical personnel in the field should understand that the technical personnel in the relevant technical field can still modify or make equivalent substitutions to the present invention, and all technical solutions and improvements thereof that do not depart from the spirit and scope of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A dual-channel spectral confocal measurement device, characterized in that The invention comprises two measuring heads, a first optical fiber jumper, a second optical fiber jumper and a controller. The two measuring heads are identical spectral confocal displacement measuring lenses. The controller is provided with a first light source, a second light source, a first optical fiber coupler, a second optical fiber coupler, an optical fiber line and a collecting imaging unit. The two measuring heads are respectively connected to the first optical fiber coupler and the second optical fiber coupler through the first optical fiber jumper and the second optical fiber jumper. The first light source and the second light source are respectively connected to the first optical fiber coupler and the second optical fiber coupler through optical fiber lines. The first optical fiber coupler and the second optical fiber coupler are connected to the collecting imaging unit through optical fiber lines. The collecting imaging unit is used to acquire and analyze signals fed back by the two measuring heads.

2. The dual-channel spectral confocal measurement device according to claim 1, characterized in that: The collecting imaging unit includes an aperture, a first lens, a dispersion prism, a reflector, a second lens and an image sensor in sequence along the optical path. The first fiber coupler and the second fiber coupler are connected to the aperture through optical fiber lines.

3. The dual-channel spectral confocal measurement device according to claim 2, characterized in that: The first lens is a collimating lens, and the second lens is a converging lens.

4. The dual-channel spectral confocal measurement device according to claim 2, characterized in that: The dispersion prism is an equilateral prism.

5. The dual-channel spectral confocal measurement device according to claim 2, characterized in that: The controller is provided with a first interface, a second interface, a control switch and a display screen. The two measuring heads are respectively inserted into the first interface and the second interface. The display screen is connected to the image sensor. The control switch is a start button of the controller.

6. The dual-channel spectral confocal measurement device according to claim 5, characterized in that: The controller is also provided with a serial port and a network port, which are external communication interfaces.

7. The dual-channel spectral confocal measurement device according to claim 5, characterized in that: The controller is also provided with a terminal block.

8. The dual-channel spectral confocal measurement device according to claim 2, characterized in that: The image sensor is an area array CCD.

Images