Cluster magnetorheological polishing equipment

Abstract

The utility model discloses cluster magneto-rheological polishing equipment, and relates to the technical field of polishing equipment, the cluster magneto-rheological polishing equipment comprises a workbench, a polishing cylinder, a polishing driving mechanism, a lifting mechanism and a clamping jig, the polishing cylinder is rotatably arranged on the workbench, the polishing driving mechanism is arranged between the workbench and the polishing cylinder, and the lifting mechanism is arranged on the workbench. The clamping jig is arranged on the lifting mechanism; a magnet is arranged at the bottom of the polishing barrel, magneto-rheological polishing liquid used for polishing the optical element is contained in the polishing barrel, and the polishing driving mechanism is used for driving the polishing barrel to rotate; the clamping jig is used for clamping an optical element, and the lifting mechanism is used for driving the clamping jig to descend so that the clamped optical element can be put into the magnetorheological polishing liquid to be polished. The cluster magneto-rheological polishing equipment solves the problem that precision machining of optical elements is difficult.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing equipment, in particular to a cluster magnetorheological polishing equipment. Background Art

[0002] With the rapid growth of market demand for ultra-smooth optical components, the performance requirements for optical components are getting higher and higher. There are many types of optical component materials, and currently they are mainly concentrated in silicon, germanium, microcrystalline glass and their doped composite materials. The low plasticity, brittle damage, microcracks and easy damage to the surface layer during processing increase the difficulty of processing, resulting in poor surface quality, high energy consumption, low efficiency and simple machinable structure of optical components. The commonly used mechanical polishing, ultrasonic polishing, electrochemical polishing and other methods have high labor intensity, low polishing efficiency and low workpiece surface polishing quality, and cannot meet the use requirements of optical components. Therefore, high-precision and high-efficiency processing of optical components is an urgent problem to be solved in the process of expanding their application. Utility Model Content

[0003] In view of the above defects in the prior art, the utility model provides a cluster magnetorheological polishing device, which is intended to solve the problem of difficulty in precision machining of optical elements.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is:

[0005] A cluster magnetorheological polishing device comprises a workbench, a polishing cylinder, a polishing drive mechanism, a lifting mechanism and a clamping fixture, wherein the polishing cylinder is rotatably arranged on the workbench, the polishing drive mechanism is arranged between the workbench and the polishing cylinder, and the clamping fixture is arranged on the lifting mechanism; a magnet is arranged at the bottom of the polishing cylinder, and the polishing cylinder contains magnetorheological polishing liquid for polishing optical elements, and the polishing drive mechanism is used to drive the polishing cylinder to rotate; the clamping fixture is used to clamp the optical element, and the lifting mechanism is used to drive the clamping fixture to descend so as to place the clamped optical element into the magnetorheological polishing liquid for polishing.

[0006] There are multiple magnets, and all the magnets are arranged in a circular array with the axis of the polishing cylinder as the center axis.

[0007] Wherein, the opening end of the polishing cylinder is tapered.

[0008] In which, a bearing seat is arranged on the workbench, a rotating shaft coaxial with the polishing cylinder is arranged at the bottom of the polishing cylinder, the rotating shaft is arranged in the bearing seat, and the polishing drive mechanism includes a rotating drive member arranged on the workbench, and a transmission mechanism arranged between the rotating drive member and the rotating shaft.

[0009] Among them, the lifting mechanism includes a bracket, a mounting frame slidably arranged on the bracket, and a vertical linear motion mechanism arranged on the bracket, the vertical linear motion mechanism is used to drive the mounting frame to rise or fall, and the clamping fixture is arranged on the mounting frame with an adjustable lateral position.

[0010] Among them, the bracket includes a base, two columns vertically arranged on the base, and a crossbeam arranged between the two columns, the two columns are respectively provided with vertical guide shafts, the two vertical guide shafts are respectively slidably provided with connecting seats, and the mounting frame is arranged on the two connecting seats.

[0011] There are two sets of the vertical linear motion mechanisms, the two vertical linear motion mechanisms are correspondingly arranged on the two columns, and the two connecting seats are correspondingly connected to the two vertical linear motion mechanisms.

[0012] The workbench is longitudinally slidably arranged on the base and located between the two columns. The base is provided with a longitudinal linear motion mechanism for driving the workbench to move longitudinally, and the workbench is arranged on the longitudinal linear motion mechanism.

[0013] Wherein, a longitudinal guide shaft with a slider is arranged on the base, and the workbench is arranged on the slider of the longitudinal guide shaft.

[0014] Wherein, the vertical linear motion mechanism and the longitudinal linear motion mechanism are both screw-nut transmission mechanisms.

[0015] By adopting the above technical solution, the beneficial effects of the utility model are:

[0016] The cluster magnetorheological polishing equipment provided by the utility model has a magnet at the bottom of its polishing cylinder, and the polishing cylinder is filled with magnetorheological polishing liquid. The magnetorheological polishing liquid will produce a magnetorheological effect under the action of a magnetic field, so that the magnetorheological polishing liquid forms a flexible small grinding head at the magnet. When the polishing drive mechanism drives the polishing cylinder to rotate, the flexible small grinding head also rotates and moves rapidly relative to the optical element on the clamping fixture, so that the surface of the optical element is subjected to a large shear force, so that the surface material of the optical element is removed, and the purpose of polishing and grinding is achieved. Compared with the prior art, the cluster magnetorheological polishing equipment of the utility model is an efficient and accurate flexible polishing equipment, which can be applied to optical elements of any geometric shape, does not have the problem of tool wear and optical element damage, meets the requirements of optical element precision processing, and thus solves the problem of difficulty in optical element precision processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the cluster magnetorheological polishing equipment of the utility model;

[0018] Figure 2 yes Figure 1 The structural diagram of the other side;

[0019] Figure 3 yes Figure 1 Schematic diagram of the structure of the middle polishing cylinder;

[0020] In the figure: 1. workbench; 2. polishing cylinder; 21. cylinder body; 22. cylinder bottom; 23. mounting plate; 24. partition; 25. accommodating chamber; 3. clamping fixture; 4. optical element; 5. magnet; 6. bearing seat; 7. rotating shaft; 8. rotating drive member; 9. belt transmission mechanism; 10. mounting frame; 11. base; 12. column; 13. beam; 14. vertical guide shaft; 15. connecting seat; 16. longitudinal guide shaft; 17. vertical linear motion mechanism; 18. longitudinal linear motion mechanism. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solutions and advantages of the utility model more clearly understood, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0022] like Figures 1 to 3 As shown, this embodiment discloses a cluster magnetorheological polishing equipment, including a workbench 1, a polishing cylinder 2, a polishing drive mechanism, a lifting mechanism and a clamping fixture 3. The polishing cylinder 2 is rotatably arranged on the workbench 1, the polishing drive mechanism is arranged between the workbench 1 and the polishing cylinder 2, and the clamping fixture 3 is arranged on the lifting mechanism; a magnet 5 is arranged at the bottom of the polishing cylinder 2, and the polishing cylinder 2 is filled with a magnetorheological polishing liquid (not shown in the figure) for polishing the optical element, and the polishing drive mechanism is used to drive the polishing cylinder 2 to rotate; the clamping fixture 3 is used to clamp the optical element 4, and the lifting mechanism is used to drive the clamping fixture 3 to descend so as to place the clamped optical element 4 into the magnetorheological polishing liquid for polishing.

[0023] The magnetorheological polishing liquid in the cluster magnetorheological polishing device of this embodiment will produce a magnetorheological effect under the action of a magnetic field, so that the magnetorheological polishing liquid forms a flexible small grinding head at the magnet. When the polishing drive mechanism drives the polishing cylinder to rotate, the flexible small grinding head also rotates and moves rapidly relative to the optical element on the clamping fixture, so that the surface of the optical element is subjected to a large shear force, so that the surface material of the optical element is removed, and the purpose of polishing and grinding is achieved. Compared with the prior art, the cluster magnetorheological polishing device of the utility model is an efficient and accurate flexible polishing device, which can be applied to optical elements of any geometric shape, does not have the problem of tool wear and optical element damage, meets the requirements of optical element precision processing, and thus solves the problem of difficulty in precision processing of optical element materials.

[0024] The magnetorheological polishing fluid in this embodiment includes magnetic particles, abrasive particles, a base carrier liquid and additives. The magnetic particles are dispersed as a dispersed phase in the base carrier liquid as a carrier. During the polishing process, the abrasive particles mainly play a role in polishing the optical element 4. The additive can increase the suspension time of the magnetic particles in the magnetorheological polishing fluid. Among them, the magnetic particles are preferably carbonyl iron powder, the additive is preferably sodium dodecyl sulfate powder, the abrasive particles are preferably cerium oxide, and the base carrier liquid is preferably deionized water.

[0025] For the configuration of the polishing liquid, if you want to configure 200g of magnetorheological polishing liquid, first take the following materials: 70g of carbonyl iron powder, 100g of deionized water, 12g of cerium oxide, and 18g of sodium dodecyl sulfate. First, mix the deionized water with 18g of sodium dodecyl sulfate, heat the temperature to 75°C, and then stir thoroughly for half an hour until the sodium dodecyl sulfate is completely dissolved to obtain a surfactant solution; then mix the newly obtained surfactant solution with 70g of carbonyl iron powder, stir thoroughly for about an hour until there is no precipitation, and obtain a magnetorheological fluid; finally, mix the magnetorheological fluid with 12g of cerium oxide, stir thoroughly for about an hour until precipitation to obtain a magnetorheological polishing liquid. During the entire configuration process, the liquid is 75°C, and the stirring speed is kept at 55r / min during the stirring process to reduce the generation of foam.

[0026] The polishing cylinder 2 in this embodiment includes a cylinder body 21, a cylinder bottom 22 and a mounting plate 23. The cylinder body 21 is open at both ends and a partition 24 integral with the cylinder body 21 is arranged inside the cylinder body 21. One end of the cylinder body 21 and the partition 24 together form a receiving cavity 25 for containing magnetorheological polishing liquid. The cylinder bottom 22 is detachably arranged on the other open end of the cylinder body 21 and the cylinder bottom 22, the cylinder body 21 and the partition 24 together form a mounting cavity. The mounting plate 23 is fixedly arranged in the mounting cavity, and the magnet 5 is embedded on the mounting plate 23. Of course, the magnet 5 can also choose other installation methods, which are selected according to actual needs, and this embodiment does not limit this.

[0027] In this embodiment, a plurality of magnets 5 are provided, and all magnets 5 are arranged in a circular array with the axis of the polishing cylinder 2 as the central axis. In this arrangement, the uniform distribution of the flexible small grinding heads is achieved, which facilitates the uniform polishing of the optical element. The magnet 5 in this embodiment is preferably a magnet, and of course an electromagnet can also be selected, which is specifically selected according to actual needs, and this embodiment does not limit this.

[0028] In this embodiment, the opening end of the polishing cylinder 2 close to the accommodating cavity is tapered, so as to avoid the magnetorheological polishing liquid splashing out of the polishing cylinder 2 during the rotation of the polishing cylinder 2.

[0029] Since the bearing seat has the characteristics of being able to accept comprehensive loads, compact structure, sensitive rotation, and easy maintenance, a bearing seat 6 is arranged on the workbench in this embodiment, and a rotating shaft 7 coaxial with the polishing cylinder 2 is arranged on the bottom of the polishing cylinder 2, and the rotating shaft 7 is arranged in the bearing seat 6. The polishing drive mechanism in this embodiment includes a rotating drive member 8 arranged on the workbench 1, and a transmission mechanism arranged between the rotating drive member 8 and the rotating shaft 7.

[0030] Specifically, the workbench 1 includes two layers of mounting plates arranged up and down, two bearing seats 6 are provided, and the two bearing seats 6 are respectively arranged on the two layers of mounting plates in correspondence with each other up and down, the rotating shaft 7 is arranged in the two bearing seats 6, and the rotating driving member 8 is arranged on the lower bottom plate; the transmission mechanism is preferably a belt transmission mechanism 9, including a driving pulley arranged on the rotating driving member 8, a driven pulley arranged on the rotating shaft 7, and a belt wound between the driving pulley and the driven pulley. Of course, the transmission mechanism can also select a gear transmission mechanism, a chain transmission mechanism, etc., which is selected according to actual needs, and this embodiment does not limit this.

[0031] Since the brushless motor has low noise and runs smoothly, the rotary drive member 8 in this embodiment is preferably a brushless motor.

[0032] The lifting mechanism in this embodiment includes a bracket, a mounting frame 10 vertically slidably arranged on the bracket, and a vertical linear motion mechanism 17 arranged on the bracket, the vertical linear motion mechanism 17 is used to drive the mounting frame 10 to rise or fall, and the clamping fixture 3 is arranged on the mounting frame 10 in an adjustable lateral position. In this way, the vertical and lateral movement of the clamping fixture 3 is realized, thereby realizing the position adjustment function of the optical element 4.

[0033] Specifically, the bracket includes a base 11, two columns 12 vertically arranged on the base 11, and a crossbeam 13 arranged between the two columns 12, the two columns 12 are respectively provided with vertical guide shafts 14, the two vertical guide shafts 14 are respectively slidably provided with connecting seats 15, and the mounting frame 10 is arranged on the two connecting seats 15.

[0034] The mounting frame 10 in this embodiment includes two transverse guide shafts, and the clamping fixture 3 is fixed on the two transverse guide shafts by screws. When the position of the clamping fixture 3 needs to be adjusted, only the screws need to be loosened to slide the clamping fixture 3 laterally. The position adjustment is convenient and simple, and the adjustment speed is improved.

[0035] In this embodiment, two sets of vertical linear motion mechanisms 17 are provided, and the two sets of vertical linear motion mechanisms 17 are correspondingly provided on the two upright posts 12, and the two connecting seats 15 are correspondingly connected to the two sets of vertical linear motion mechanisms 17. The two sets of vertical linear motion mechanisms 17 simultaneously drive the mounting frame 10 to rise or fall, so that the forces on both sides of the mounting frame 10 are balanced, ensuring that the optical element 4 can be smoothly and accurately dropped into the polishing cylinder 2.

[0036] The workbench 1 in this embodiment is longitudinally slidably arranged on the base 11 and is located between the two columns 12. The base 11 is provided with a longitudinal linear motion mechanism 18 for driving the workbench 1 to move longitudinally. The workbench 1 is arranged on the longitudinal linear motion mechanism 18. In this way, the longitudinal position adjustment of the polishing cylinder 2 is realized.

[0037] In order to improve the linearity and accuracy of the movement of the workbench 1 , in this embodiment, a longitudinal guide shaft 16 with a slider is provided on the base 11 , and the workbench 1 is disposed on the slider of the longitudinal guide shaft 16 .

[0038] The vertical linear motion mechanism 17 and the longitudinal linear motion mechanism 18 in this embodiment are both screw-nut transmission mechanisms, specifically including a stepper motor, a screw arranged on the stepper motor, and a nut threadedly connected to the screw, the stepper motor is arranged on the column 12 or the base 11, and the connecting seat 15 and the workbench 1 are respectively arranged on the corresponding nuts. Of course, the vertical linear motion mechanism 17 and the longitudinal linear motion mechanism 18 can also use other linear motion mechanisms such as cylinders, electric cylinders or hydraulic cylinders, which are selected according to actual needs, and this embodiment does not limit this.

[0039] When in use, the optical element 4 is clamped on the clamping fixture 3, and the clamped optical element 4 is driven by the lifting mechanism to descend into the magnetorheological polishing liquid in the polishing cylinder 2. The magnetorheological polishing liquid will produce a magnetorheological effect under the action of the magnetic field, so that the magnetorheological polishing liquid forms a flexible small grinding head at the magnet. When the polishing drive mechanism drives the polishing cylinder to rotate, the flexible small grinding head also rotates and moves rapidly relative to the optical element on the clamping fixture, so that the surface of the optical element is subjected to a large shear force, thereby removing the surface material of the optical element to achieve the purpose of polishing.

[0040] The above is only one embodiment of the cluster magnetorheological polishing device of the utility model, and there are more embodiments that are not described here. The utility model is not limited to the above specific implementation methods, and various changes made by ordinary technicians in this field based on the above concept without creative labor are all within the protection scope of the utility model.

Claims

1. A cluster magnetorheological polishing device, characterized in that: It includes a workbench, a polishing cylinder, a polishing drive mechanism, a lifting mechanism and a clamping fixture, wherein the polishing cylinder is rotatably arranged on the workbench, the polishing drive mechanism is arranged between the workbench and the polishing cylinder, and the clamping fixture is arranged on the lifting mechanism; A magnet is arranged at the bottom of the polishing cylinder, a magnetorheological polishing liquid for polishing optical elements is contained in the polishing cylinder, and the polishing drive mechanism is used to drive the polishing cylinder to rotate; The clamping fixture is used to clamp the optical element, and the lifting mechanism is used to drive the clamping fixture to descend so as to place the clamped optical element into the magnetorheological polishing liquid for polishing.

2. The cluster magnetorheological polishing device according to claim 1, characterized in that: There are multiple magnets, and all the magnets are arranged in a circular array with the axis of the polishing cylinder as the center axis.

3. The cluster magnetorheological polishing device according to claim 1, characterized in that: The opening end of the polishing cylinder is tapered.

4. The cluster magnetorheological polishing device according to claim 1, characterized in that: A bearing seat is arranged on the workbench, a rotating shaft coaxial with the polishing cylinder is arranged on the bottom of the polishing cylinder, the rotating shaft is arranged in the bearing seat, and the polishing drive mechanism includes a rotating drive member arranged on the workbench, and a transmission mechanism arranged between the rotating drive member and the rotating shaft.

5. The cluster magnetorheological polishing device according to claim 1, characterized in that: The lifting mechanism includes a bracket, a mounting frame slidably arranged on the bracket, and a vertical linear motion mechanism arranged on the bracket, wherein the vertical linear motion mechanism is used to drive the mounting frame to rise or fall, and the clamping fixture is arranged on the mounting frame with an adjustable lateral position.

6. The cluster magnetorheological polishing device according to claim 5, characterized in that: The bracket includes a base, two columns vertically arranged on the base, and a crossbeam arranged between the two columns. The two columns are respectively provided with vertical guide shafts, and the two vertical guide shafts are respectively slidably provided with connecting seats, and the mounting frame is arranged on the two connecting seats.

7. The cluster magnetorheological polishing device according to claim 6, characterized in that: The vertical linear motion mechanism is provided with two sets, the two vertical linear motion mechanisms are correspondingly arranged on the two upright posts, and the two connecting seats are correspondingly connected to the two vertical linear motion mechanisms.

8. The cluster magnetorheological polishing device according to claim 6, characterized in that: The workbench is longitudinally slidably arranged on the base and is located between the two columns. A longitudinal linear motion mechanism for driving the workbench to move longitudinally is arranged on the base, and the workbench is arranged on the longitudinal linear motion mechanism.

9. The cluster magnetorheological polishing device according to claim 8, characterized in that: A longitudinal guide shaft with a slider is arranged on the base, and the workbench is arranged on the slider of the longitudinal guide shaft.

10. The cluster magnetorheological polishing device according to claim 8, characterized in that: The vertical linear motion mechanism and the longitudinal linear motion mechanism are both screw-nut transmission mechanisms.

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