Coating equipment

Abstract

The present application provides a coating device, including: a vacuum chamber, grounded; a flow plate; a carrier plate and a flow plate are arranged in the vacuum chamber at intervals, a reaction area is formed between the carrier plate and the flow plate, and the reaction area is used to accommodate materials to perform a process; an electrode rod, one end of which is electrically connected to the flow plate, and the other end is used to be electrically connected to a power supply; a shielding cover, which is arranged on the flow plate, a discharge gap is left between the shielding cover and the flow plate, and the shielding cover and the flow plate are insulated; a shielding grounding component, which is connected to the shielding cover, is used to ground the shielding cover. The shielding cover is grounded so that the shielding cover and the vacuum chamber are at the same potential, and the flow plate as an anode and the grounded shielding cover discharge in the discharge gap, thereby preventing the flow plate from discharging to areas other than the carrier plate and the shielding cover in the vacuum chamber, avoiding the generation of glow, and reducing the power loss of the power supply and the generated dust.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic material coating, and in particular to a coating device. Background Art

[0002] At present, the coating processes of photovoltaic materials, such as ALD (atomic layer deposition) process and PEALD (plasma enhanced atomic layer deposition) process, all require the use of coating equipment in a vacuum environment. A uniform flow plate is often used in coating equipment to achieve uniform gas flow, but the uniform flow plate after power is turned on may discharge to other areas in the vacuum chamber, resulting in glow, which not only consumes power but also causes an increase in dust. Utility Model Content

[0003] In view of the above, it is necessary to provide a coating device that can avoid the generation of glow, reduce the power loss of the power supply and the generation of dust.

[0004] A coating device comprises: a vacuum chamber, which is grounded; a flow plate, which is arranged in the vacuum chamber; a carrier plate and the flow plate are arranged in the vacuum chamber with intervals, a reaction area is formed between the carrier plate and the flow plate, and the reaction area is used to accommodate materials to execute a process; an electrode rod is passed through the vacuum chamber, one end of the electrode rod is electrically connected to the flow plate, and the other end of the electrode rod is used to be electrically connected to a power supply; a shielding cover is arranged in the vacuum chamber and covers the flow plate, a discharge gap is left between the shielding cover and the flow plate, and the shielding cover and the flow plate are insulated; a shielding grounding component is connected to the shielding cover and is used to ground the shielding cover.

[0005] Through the coating equipment provided by the present application, in actual use, the power supply outputs current to the flow plate through the electrode rod, the flow plate forms an anode, the carrier plate forms a cathode, an electric field is formed between the flow plate and the carrier plate, and the process gas generates plasma under the action of the electric field to achieve coating. In this process, the shielding cover is grounded through the shielding grounding component, so that the shielding cover and the vacuum chamber are at the same potential, and the flow plate as the anode and the grounded shielding cover discharge nearby between the discharge gap, thereby preventing the flow plate from discharging to areas other than the carrier plate and the shielding cover in the vacuum chamber, avoiding the generation of glow. On the other hand, the shielding cover made of metal material does not need to be integrally processed and formed during processing and manufacturing, which is equivalent to ceramic material, which is easier to process and manufacture, reducing production costs, reducing power loss and dust generated.

[0006] In some embodiments, the shielding grounding assembly includes a conductive seat, a conductive tape and a fixing member; wherein the conductive seat is fixed and electrically connected to the shielding cover; one end of the conductive tape is detachably connected to the conductive seat through the fixing member and is electrically connected to the conductive seat, and the other end of the conductive tape is electrically connected to the vacuum chamber; when the number of the shielding grounding assemblies is multiple groups, the multiple groups of shielding grounding assemblies are arranged at intervals around the shielding cover.

[0007] In some embodiments, the conductive seat is fixed with a fixing nut; the fixing member includes a fixing bolt, which is threadedly connected to the fixing nut and cooperates with the conductive seat to clamp the conductive belt.

[0008] In some embodiments, a fixed column is provided in the vacuum chamber, and the fixed column extends in the vertical direction. The upper end of the fixed column is fixedly connected to the vacuum chamber, and the lower end of the fixed column is passed through the shielding cover and fixedly connected to the flow equalizer plate. The lower end of the fixed column is sleeved with a first insulating ring, and the lower end surface of the first insulating ring is in contact with the shielding cover.

[0009] In some embodiments, the shielding cover is made of metal.

[0010] In some embodiments, the discharge gap is mm-mm.

[0011] In some embodiments, the vacuum chamber is provided with an air inlet column, which is used to provide process gas to the flow plate; the shielding cover is provided with a positioning hole, the air inlet column is passed through the positioning hole and connected to the flow plate; the coating equipment also includes an insulating sleeve, which is passed through the positioning hole and sleeved on the air inlet column to ensure insulation between the air inlet column and the shielding cover.

[0012] In some embodiments, a support block is provided at the lower end of the insulating sleeve, and the support block is located between the shielding cover and the flow equalizer plate. The shielding cover and the flow equalizer plate are respectively supported on the upper and lower sides of the support block.

[0013] In some embodiments, the vacuum chamber is provided with a fixed column, which is parallel to the insulating sleeve; the shielding cover is provided with a through hole corresponding to the fixed column; the fixed column is passed through the through hole and is detachably connected to the flow equalizer plate; when there are multiple fixed columns, the fixed columns are arranged at intervals around the flow equalizer plate.

[0014] In some embodiments, the coating equipment further includes an insulating component and a sealing component; the insulating component is disposed at the connection between the electrode rod and the vacuum chamber; and the sealing component is disposed between the insulating component, the electrode rod and the vacuum chamber.

[0015] In some embodiments, the insulating assembly includes a first insulating member and a second insulating member, the electrode rod is passed through the first insulating member and the second insulating member, and the second insulating member is covered on the first insulating member; the sealing assembly includes a first sealing ring and a second sealing ring, the first sealing ring is arranged between the first insulating member, the second insulating member and the electrode rod, and the second sealing ring is arranged between the second insulating member and the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the internal structure of the coating equipment according to an embodiment of the present application.

[0017] Figure 2It is a schematic structural diagram of the vacuum chamber, shielding grounding assembly, electrode rod, air intake column, shielding cover, flow equalizing plate and carrier plate of an embodiment of the present application.

[0018] Figure 3 It is a schematic structural diagram of the vacuum chamber, the shielding grounding assembly and the shielding cover of an embodiment of the present application.

[0019] Figure 4 It is a schematic diagram of the structure of the electrode rod, air intake column, fixed column, shielding cover and flow equalizing plate of an embodiment of the present application.

[0020] Figure 5 It is a schematic diagram of the assembly relationship of the vacuum chamber, electrode rod, insulation component and sealing component of the embodiment of the present application.

[0021] Figure 6 It is an exploded view of the insulating assembly, mounting block and locking block of an embodiment of the present application.

[0022] Main component symbols

[0023] Vacuum chamber 10

[0024] Fixed column 11

[0025] Connection hole 12

[0026] Mounting block 13

[0027] Card hole 131

[0028] Locking block 14

[0029] Make way hole 141

[0030] Fixed slot 142

[0031] Carrier board 20

[0032] First insulating ring 21

[0033] Flow plate 30

[0034] Discharge gap 31

[0035] Shielding cover 40

[0036] Shielding slot 41

[0037] Communication hole 42

[0038] Second insulating ring 43

[0039] Positioning hole 44

[0040] Perforation 45

[0041] Shielding grounding assembly 50

[0042] Conductive seat 51

[0043] Conductive tape 52

[0044] Fixing hole 521

[0045] Fixing 53

[0046] Fixing nut 54

[0047] Electrode rod 60

[0048] Intake column 70

[0049] Insulation sleeve 71

[0050] Support block 711

[0051] Insulation assembly 80

[0052] First insulating member 81

[0053] First mounting hole 811

[0054] Flange 812

[0055] Second insulating member 82

[0056] Second mounting hole 821

[0057] Storage tank 822

[0058] The third insulating member 83

[0059] The third mounting hole 831

[0060] Seal assembly 90

[0061] First sealing ring 91

[0062] Second sealing ring 92

[0063] The third sealing ring 93

[0064] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0065] In the description of the embodiments of the present application, when an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a centrally disposed element at the same time. When an element is considered to be "disposed on" another element, it may be directly disposed on the other element or there may be a centrally disposed element at the same time. In the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected, or it may be indirectly connected through an intermediate medium, or it may be internal communication between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0066] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0067] To this end, an embodiment of the present application provides a coating device, which is used to coat materials. The coating process can be an ALD (atomic layer deposition) process or a PEALD (plasma enhanced atomic layer deposition) process, etc., which can achieve the technical effect of avoiding the generation of glow and reducing production costs.

[0068] See also Figure 1 and Figure 2 The coating equipment includes a vacuum chamber 10, a carrier plate 20, a flow plate 30, a shielding cover 40, a shielding grounding assembly 50, an electrode rod 60 and a power supply. Among them, the vacuum chamber 10 is grounded. The carrier plate 20, the flow plate 30 and the shielding cover 40 are all arranged in the vacuum chamber 10. The carrier plate 20 is fixedly connected to the vacuum chamber 10, and the carrier plate 20 and the flow plate 30 are spaced apart in the vacuum chamber 10. A reaction area is formed between the carrier plate 20 and the flow plate 30, and the reaction area is used to accommodate materials to perform the process. The carrier plate 20 is grounded. There is a gap between the flow plate 30 and the shielding cover 40 and they are parallel to each other, and one side of the flow plate 30 faces the carrier plate 20. The shielding cover 40 is covered on the current equalizer plate 30 , a discharge gap 31 is left between the shielding cover 40 and the current equalizer plate 30 , the shielding cover 40 and the current equalizer plate 30 are insulated, the shielding grounding component 50 is connected to the shielding cover 40 , and the shielding grounding component 50 grounds the shielding cover 40 .

[0069] The electrode rod 60 is inserted through the vacuum chamber 10 and the shielding cover 40, one end of the electrode rod 60 is located in the vacuum chamber 10 and is electrically connected to the current equalizer 30, and the other end of the electrode rod 60 is located outside the vacuum chamber 10 and is electrically connected to the power supply. Exemplarily, the power supply uses a radio frequency power supply with a frequency of 13.56 MHz, and the vacuum chamber 10 is grounded to improve the safety of the equipment, and the carrier plate 20 as the cathode is grounded, so that the radio frequency power supply can discharge to the ground during operation, ensuring the normal operation of the radio frequency power supply.

[0070] The vacuum chamber 10 is provided with an air inlet column 70 , which is used to be connected to a gas source outside the vacuum chamber 10 . One end of the air inlet column 70 is passed through the shielding cover 40 and connected to the flow equalizer 30 .

[0071] In actual use, the gas source provides process gas to the flow plate 30 through the gas inlet column 70, and the power supply outputs current to the flow plate 30 through the electrode rod 60. The flow plate 30 forms an anode, and the carrier plate 20 forms a cathode. An electric field is formed between the flow plate 30 and the carrier plate 20, and the process gas generates plasma under the action of the electric field to achieve film coating. In this process, the shielding cover 40 is grounded, so that the shielding cover 40 and the vacuum chamber 10 are at the same potential. The flow plate 30 as the anode and the grounded shielding cover 40 discharge in the discharge gap 31, thereby preventing the flow plate 30 from discharging to the area other than the carrier plate 20 and the shielding cover 40 in the vacuum chamber 10, avoiding the generation of glow, and reducing the power loss of the power supply and the generated dust.

[0072] In this embodiment, the shielding cover 40 is conductive, and the shielding cover 40 is electrically connected to the vacuum chamber 10 through the shielding grounding component 50, so that the shielding cover 40 and the vacuum chamber 10 are at the same potential, and the shielding cover 40 is grounded. The shielding cover 40 made of metal does not need to be integrally processed during processing and manufacturing, which is easy to process and manufacture, reducing production costs, and is easy to process holes, grooves and other structures, which is convenient for assembly or fixation with other positioning structures. Exemplarily, the shielding cover 40 is made of metal and stainless steel sheet metal is used to make the shielding cover 40 have good conductivity and hardness, and the overall weight is relatively light.

[0073] In other embodiments, the shielding cover 40 may also be made of insulating material, such as being integrally formed of ceramic material. The shielding cover 40 prevents the generation of glow by shielding electromagnetic waves.

[0074] For the convenience of description, the following directional description is made with reference to the direction of the coating equipment during normal use.

[0075] In this embodiment, a reaction space is formed inside the vacuum chamber 10, and the shielding cover 40, the flow plate 30 and the carrier 20 are fixed in the reaction space, wherein the flow plate 30 is located directly above the carrier 20, and the shielding cover 40 is arranged above the flow plate 30.

[0076] Exemplarily, the vacuum chamber 10 is an open-and-closed chamber structure. When feeding is required, the vacuum chamber 10 can be opened, and the material can be placed on the carrier 20, and the vacuum chamber 10 can be closed; after the coating is completed, the vacuum chamber 10 can be opened and the material can be taken out. The shielding cover 40 and the vacuum chamber 10 are both made of stainless steel sheet metal, so that the vacuum chamber 10 has good electrical conductivity, lower processing difficulty and cost, stronger hardness, and lighter overall weight.

[0077] In this embodiment, a shielding groove 41 is provided on the bottom surface of the shielding cover 40, and the shielding groove 41 corresponds to the current equalizer plate 30. The current equalizer plate 30 is accommodated in the shielding groove 41, so that the shielding cover 40 shields the side and top surfaces of the current equalizer plate 30, and the side and top surfaces of the current equalizer plate 30 are spaced from the inner wall of the shielding groove 41 to form a discharge gap 31. The discharge gap 31 can prevent the current equalizer plate 30 from contacting and conducting with the shielding cover 40.

[0078] In this embodiment, the discharge gap 31 is 1 mm to 3 mm to prevent the discharge gap 31 from being too large, which may cause excessive process gas to enter between the flow plate 30 and the shielding cover 40 and cause an increase in dust. Exemplarily, the discharge gap 31 may be 1 mm, 2 mm or 3 mm. It is understood that in other embodiments, the discharge gap 31 may be adjusted according to actual needs.

[0079] See also Figure 2 and Figure 3 In this embodiment, the shielding grounding assembly 50 includes a conductive seat 51, a conductive belt 52 and a fixing member 53. The conductive seat 51 is fixed and electrically connected to the shielding cover 40. One end of the conductive belt 52 is detachably connected to the conductive seat 51 through the fixing member 53 and is electrically connected to the conductive seat 51; the other end of the conductive belt 52 is electrically connected to the vacuum chamber 10.

[0080] When the material needs to be plated, the conductive tape 52 can be fixed to the conductive seat 51 through the fixing member 53, and the vacuum chamber 10 and the shielding cover 40 are electrically connected through the conductive tape 52 and the conductive seat 51, so that the shielding cover 40 is grounded. When the shielding cover 40 needs to be disassembled, the conductive tape 52 can be disassembled from the conductive seat 51 through the fixing member 53, so that the user can disassemble and assemble the shielding cover 40 conveniently.

[0081] In this embodiment, the conductive seat 51 is made of conductive material, and a fixing nut 54 is welded to the conductive seat 51. The fixing member 53 includes a fixing bolt, and the fixing bolt is matched with the fixing nut 54. The fixing bolt is threadedly connected to the fixing nut 54, and cooperates with the conductive seat 51 to clamp the end of the conductive belt 52, so that the end of the conductive belt 52 is pressed against the conductive seat 51, so that the conductive seat 51 and the conductive belt 52 are electrically connected by contact.

[0082] When disassembly is required, the fixing bolt can be screwed out of the fixing nut 54 to separate the conductive belt 52 from the conductive seat 51. When installation is required, the end of the conductive belt 52 can be placed between the fixing bolt and the conductive seat 51, and the fixing bolt can be tightened on the fixing nut 54, which is convenient for users to disassemble and assemble.

[0083] Exemplarily, the conductive seat 51 is made of stainless steel sheet metal, and the bottom surface of the conductive seat 51 is fixed to the upper side of the shielding cover 40 by screws, so that the conductive seat 51 is electrically connected to the shielding cover 40. A through hole is provided on the upper part of the conductive seat 51, and a fixing nut 54 is welded to one side of the upper part of the conductive seat 51 and communicates with the through hole for connection by a fixing bolt. The conductive belt 52 is formed by a plurality of metal rings interlocking with each other, and the conductive belt 52 can form an electrical connection by directly contacting the conductive seat 51, and the fixing bolt can be passed through the metal ring of the conductive belt 52 and threadedly connected to the fixing nut 54; or, the conductive belt 52 can also be wrapped around the fixing bolt.

[0084] It is worth noting that the fixing member 53 in this embodiment adopts a bolted structure to achieve the detachable connection between the conductive seat 51 and the conductive belt 52. In other embodiments, other detachable structures such as a clamping structure, a snap-on structure, etc. may also be adopted; illustratively, the fixing member 53 can be a conductive clip welded to the conductive seat 51, and the conductive clip achieves electrical connection between the conductive seat 51 and the conductive belt 52 by clamping the conductive belt 52. This application does not impose any restrictions on this.

[0085] In the present embodiment, a plurality of shielding and grounding components 50 are provided. When there are a plurality of shielding and grounding components 50 , the plurality of shielding and grounding components 50 are arranged at intervals around the shielding cover 40 .

[0086] Each group of shielding components includes a conductive seat 51, a conductive belt 52 and a fixing member 53. The plurality of conductive seats 51 are arranged at intervals around the shielding cover 40. The plurality of conductive belts 52 are connected to the plurality of conductive seats 51 one by one through the plurality of fixing members 53.

[0087] It can be understood that multiple groups of shielding grounding components 50 simultaneously realize the electrical connection between the vacuum chamber 10 and the shielding cover 40. When a single shielding grounding component 50 is short-circuited, other shielding grounding components 50 can still serve as electrical connections, thereby improving the working stability of the coating equipment.

[0088] In this embodiment, the conductive belt 52 is detachably connected to the vacuum chamber 10 through a mounting member, and the conductive belt 52 and the vacuum chamber 10 are electrically connected by contact. The mounting member can be a bolted structure, a clamping structure, a snap-on structure, etc., which is not limited in this application.

[0089] See also Figure 1and Figure 4 In this embodiment, a connecting hole 42 corresponding to the electrode rod 60 is provided in the middle of the shielding cover 40, and the connecting hole 42 passes through the shielding cover 40 in the vertical direction. The electrode rod 60 extends in the vertical direction, and the lower end of the electrode rod 60 is penetrated in the connecting hole 42 and is electrically connected to the current equalizing plate 30, and the electrode rod 60 and the shielding cover 40 are insulated. Exemplarily, a second insulating ring 43 is provided between the shielding cover 40 and the electrode rod 60, and the aperture of the connecting hole 42 is adapted to the outer diameter of the second insulating ring 43. The second insulating ring 43 is penetrated in the shielding cover 40 and sleeved on the electrode rod 60 to perform insulation treatment at the connection between the electrode rod 60 and the shielding cover 40.

[0090] In this embodiment, the shielding cover 40 is provided with a positioning hole 44 corresponding to the air inlet column 70 , and the positioning hole 44 passes through the shielding cover 40 in a vertical direction.

[0091] The air intake column 70 extends in the vertical direction, the upper end of the air intake column 70 is fixed to the vacuum chamber 10 , the lower end of the air intake column 70 passes through the positioning hole 44 and is welded and fixed to the flow equalizer 30 , and the air intake column 70 and the shielding cover 40 are insulated.

[0092] Exemplarily, the air intake column 70 is made of metal, a pipeline valve structure connected to the gas source is provided on the top of the vacuum chamber 10, the upper end of the air intake column 70 is fixed and connected to the pipeline valve structure, and the air intake column 70 and the vacuum chamber 10 are insulated.

[0093] In this embodiment, there are multiple inlet columns 70, and the multiple inlet columns 70 are arranged at intervals. Multiple inlet columns 70 can simultaneously provide process gas to the flow plate 30 to improve the uniformity of the process gas. Exemplarily, the number of inlet columns 70 is 3, and the shielding cover 40 is provided with a corresponding number of positioning holes 44.

[0094] In this embodiment, the coating device further includes an insulating sleeve 71. The aperture of the positioning hole 44 is adapted to the outer diameter of the insulating sleeve 71, and the insulating sleeve 71 is inserted into the positioning hole 44 and sleeved on the air inlet column 70. The insulating sleeve 71 is insulated at the connection between the air inlet column 70 and the shielding cover 40 to prevent the shielding cover 40 from conducting electricity with the flow equalizer 30 through the air inlet column 70. Exemplarily, the insulating sleeve 71 is made of ceramic material, and the number of the insulating sleeves 71 is consistent with the number of the air inlet columns 70.

[0095] In this embodiment, a support block 711 is provided at the lower end of the insulating sleeve 71, and the support block 711 is located between the shielding cover 40 and the current equalizer plate 30, and the shielding cover 40 and the current equalizer plate 30 are respectively supported on the upper and lower sides of the support block 711. The support block 711 leaves a certain distance between the shielding cover 40 and the current equalizer plate 30 to form a discharge gap 31.

[0096] Furthermore, the insulating sleeve 71 plays a role of bearing and supporting the shielding cover 40 through the support block 711, and plays a role of positioning the shielding cover 40 by cooperating with the positioning hole 44, so that the shielding cover 40 can be stably placed above the flow plate 30, and it is convenient to install and fix the shielding cover 40. Exemplarily, the support block 711 is formed by the insulating sleeve 71 extending outward along its radial direction, and the thickness of the support block 711 is 2 mm, so that the distance of the discharge gap 31 between the shielding cover 40 and the flow plate 30 is 2 mm.

[0097] In this embodiment, a fixing column 11 is provided in the vacuum chamber 10, and the fixing column 11 extends in the vertical direction, that is, the fixing column 11 and the insulating sleeve 71 are parallel to each other. The shielding cover 40 is provided with a through hole 45 corresponding to the fixing column 11, and the through hole 45 passes through the shielding cover 40 in the vertical direction. The upper end of the fixing column 11 is fixedly connected to the vacuum chamber 10, and the lower end of the fixing column 11 is penetrated through the through hole 45 and fixedly connected to the flow equalizer 30. Exemplarily, the fixing column 11 is made of insulating material, and the upper end of the fixing column 11 is fixedly connected to the vacuum chamber 10 by screws. Alternatively, a first insulating ring 21 is sleeved on the lower end of the fixing column 11, and the lower end surface of the first insulating ring 21 abuts against the shielding cover 40.

[0098] In actual use, the flow plate 30 is suspended and fixed in the vacuum chamber 10 through the fixing column 11 , and at the same time, the shielding cover 40 is supported on the flow plate 30 through the supporting block 711 , so that the flow plate 30 and the shielding cover 40 are fixed.

[0099] In this embodiment, the fixing column 11 is detachably connected to the flow equalizer plate 30. For example, a threaded hole is provided at the lower end of the fixing column 11 and a fixing screw is configured, the flow equalizer plate 30 is provided with a through hole corresponding to the threaded hole, the fixing screw is passed through the flow equalizer plate 30 and is threadedly connected to the threaded hole; in other embodiments, the fixing column 11 and the flow equalizer plate 30 can also be fixed in a detachable manner such as snap fit, latch fit, etc.

[0100] When it is necessary to remove the flow equalizer plate 30 or the shielding cover 40, the flow equalizer plate 30 can be removed from the fixing column 11, and the shielding cover 40 can be separated from the flow equalizer plate 30, so that the insulating sleeve 71 and the fixing column 11 are respectively detached from the shielding cover 40; when it is necessary to install the flow equalizer plate 30 or the shielding cover 40, the shielding cover 40 can be first covered on the flow equalizer plate 30, so that the insulating sleeve 71 and the fixing column 11 are respectively passed through the shielding cover 40, and then the flow equalizer plate 30 can be installed on the fixing column 11, so as to facilitate the user to install and disassemble the flow equalizer plate 30 and the shielding cover 40.

[0101] In this embodiment, a plurality of fixing columns 11 are provided, and when the number of fixing columns 11 is multiple, the fixing columns 11 are arranged at intervals around the flow equalizer 30. The plurality of fixing columns 11 can simultaneously fix the flow equalizer 30, preventing the flow equalizer 30 and the shielding cover 40 from collapsing due to the breakage of a single fixing column 11, thereby improving the installation stability of the flow equalizer 30 and the shielding cover 40. Exemplarily, the number of fixing columns 11 is 12, and the shielding cover 40 is provided with a corresponding number of through holes 45.

[0102] See also Figure 1 and Figure 5 In this embodiment, the coating device further includes an insulating component 80 and a sealing component 90. The insulating component 80 is disposed at the connection between the electrode rod 60 and the vacuum chamber 10 to insulate the electrode rod 60 from the vacuum chamber 10 and prevent electrical conduction between the electrode rod 60 and the vacuum chamber 10. The sealing component 90 is disposed between the insulating component 80, the upper end of the electrode rod 60 and the vacuum chamber 10, and plays a sealing role to prevent the process gas from leaking out of the outside of the vacuum chamber 10.

[0103] See also Figure 5 and Figure 6 In this embodiment, the insulating assembly 80 includes a first insulating member 81, a second insulating member 82 and a third insulating member 83. The first insulating member 81 is in a sleeve shape, and a first mounting hole 811 is provided inside the first insulating member 81. The electrode rod 60 is inserted into the first mounting hole 811.

[0104] The vacuum chamber 10 is provided with a connecting hole 12, which passes through the vacuum chamber 10 in a vertical direction, and the aperture of the connecting hole 12 is adapted to the outer diameter of the first insulating member 81. The first insulating member 81 is passed through the connecting hole 12 and is sleeved on the portion of the electrode rod 60 passing through the connecting hole 12 to perform insulation treatment at the connection between the electrode rod 60 and the vacuum chamber 10.

[0105] The lower end of the first insulating member 81 extends to the inside of the vacuum chamber 10, the upper end of the first insulating member 81 is exposed to the vacuum chamber 10, and a convex edge portion 812 is provided at the upper end of the first insulating member 81. The convex edge portion 812 is used to be clamped on the vacuum chamber 10 to fix the first insulating member 81. Exemplarily, the first insulating member 81 is made of ceramic material, the convex edge portion 812 is formed by the electrode rod 60 extending outward along its radial direction, and the first insulating member 81 is integrally formed.

[0106] The second insulating member 82 is located at the upper end of the first insulating member 81. The second insulating member 82 is annular. A second mounting hole 821 is provided inside the second insulating member 82. The electrode rod 60 is inserted into the second mounting hole 821. A receiving groove 822 is provided on one side of the second insulating member 82 facing the first insulating member 81. The receiving groove 822 is matched with the convex edge 812. The second insulating member 82 is covered on the upper end of the first insulating member 81, and the convex edge 812 is received in the receiving groove 822. Exemplarily, the second insulating member 82 is integrally formed by ceramic material.

[0107] The third insulating member 83 is fixed to the upper side of the second insulating member 82. The third insulating member 83 is sleeve-shaped, and a third mounting hole 831 is provided inside the third insulating member 83. The electrode rod 60 is passed through the third mounting hole 831. Exemplarily, the third insulating member 83 is integrally formed by ceramic material.

[0108] The vacuum chamber 10 is provided with a mounting block 13 and a locking block 14, which are located outside the vacuum chamber 10 and are used to fix the first insulating member 81 and the second insulating member 82. The mounting block 13 is fixedly connected to the vacuum chamber 10, and the mounting block 13 is provided with a clamping hole 131 corresponding to the connecting hole 12, the clamping hole 131 passes through the mounting block 13 in the vertical direction, and the aperture of the clamping hole 131 is smaller than the outer diameter of the convex edge 812. The first insulating member 81 is inserted into the clamping hole 131, and the convex edge 812 is clamped on the upper side of the mounting block 13.

[0109] The locking block 14 is located on the upper side of the mounting block 13 and is detachably connected to the mounting block 13. A clearance hole 141 is provided on the upper side of the locking block 14, and the clearance hole 141 passes through the locking block 14 in the vertical direction. The third insulating member 83 and the electrode rod 60 are both inserted into the clearance hole 141, and the third insulating member 83 is sleeved on the electrode rod 60. A fixing groove 142 is provided on the lower side of the locking block 14, and the fixing groove 142 is adapted to the second insulating member 82, and the second insulating member 82 and the flange 812 are accommodated in the fixing groove 142.

[0110] In this way, the locking block 14 and the mounting block 13 can cooperate to clamp the second insulating member 82 and the flange 812, and the second insulating member 82 and the flange 812 are fixed between the locking block 14 and the mounting block 13 to achieve the fixation of the first insulating member 81 and the second insulating member 82. Exemplarily, the mounting block 13 and the locking block 14 are both made of metal, the mounting block 13 is detachably fixed to the outside of the vacuum chamber 10 by screws, and the locking block 14 is detachably fixed to the mounting block 13 by screws.

[0111] When the first insulating member 81 or the second insulating member 82 needs to be disassembled, the locking block 14 can be disassembled from the mounting block 13, and then the first insulating member 81 can be pulled out from the connecting hole 12, and then the first insulating member 81 and the second insulating member 82 can be separated. When the first insulating member 81 and the second insulating member 82 need to be installed, the second insulating member 82 can be covered on the first insulating member 81, and the first insulating member 81 can be inserted into the connecting hole 12, and then the locking block 14 can be fixed to the mounting block 13, so that the user can install or disassemble the insulating assembly 80 conveniently.

[0112] It can be understood that the first insulating member 81 serves as an insulator between the electrode rod 60, the mounting block 13 and the vacuum chamber 10, the second insulating member 82 serves as an insulator between the electrode rod 60 and the locking block 14, and the third insulating member 83 serves as an insulator between the electrode rod 60 and the locking block 14, thereby improving the comprehensiveness of the insulation treatment between the electrode rod 60 and the vacuum chamber 10 and eliminating conduction between the electrode rod 60 and the vacuum chamber 10.

[0113] In this embodiment, the locking block 14 and the mounting block 13 are both made of metal material with a lower hardness than ceramic, so as to reduce the damage to the first insulating member 81 or the second insulating member 82 when the locking block 14 and the mounting block 13 cooperate to clamp the first insulating member 81 and the second insulating member 82, thereby reducing the equipment maintenance cost. Exemplarily, the locking block 14 and the mounting block 13 are both made of aluminum alloy material.

[0114] In this embodiment, the sealing assembly 90 includes a first sealing ring 91, a second sealing ring 92 and a third sealing ring 93. The first sealing ring 91 is sleeved on the electrode rod 60, and the first sealing ring 91 is arranged between the first insulating member 81, the second insulating member 82 and the electrode rod 60. The second sealing ring 92 and the third sealing ring 93 are both arranged between the first insulating member 81 and the vacuum chamber 10. The second sealing ring 92 is sleeved on the first insulating member 81, and the first sealing ring 91 is arranged between the flange 812 and the mounting block 13. The third sealing ring 93 is sleeved between the mounting block 13 and the vacuum chamber 10.

[0115] By providing the first sealing ring 91, the second sealing ring 92 and the third sealing ring 93, the process gas inside the vacuum chamber 10 is prevented from leaking out of the vacuum chamber 10 through the gap between the first insulating member 81, the second insulating member 82 and the electrode rod 60, the gap between the flange 812 and the mounting block 13, or the gap between the mounting block 13 and the vacuum chamber 10, thereby improving the airtightness between the vacuum chamber 10 and the electrode rod 60.

[0116] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the preferred embodiments, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A coating device, characterized in that: include: A vacuum chamber, grounded; A flow-distributing plate is disposed in the vacuum chamber; A carrier plate is disposed in the vacuum chamber at a distance from the flow-distributing plate, and a reaction area is formed between the carrier plate and the flow-distributing plate, wherein the reaction area is used to accommodate materials to perform a process; An electrode rod is inserted into the vacuum chamber, one end of the electrode rod is electrically connected to the flow plate, and the other end of the electrode rod is electrically connected to a power source; A shielding cover is arranged in the vacuum chamber and covers the flow plate, a discharge gap is arranged between the shielding cover and the flow plate, and the shielding cover and the flow plate are insulated; The shielding grounding component is connected to the shielding cover and is used for grounding the shielding cover.

2. The coating device according to claim 1, characterized in that: The shielding grounding assembly comprises a conductive seat, a conductive belt and a fixing member; wherein the conductive seat is fixed and electrically connected to the shielding cover; one end of the conductive belt is detachably connected to the conductive seat through the fixing member and is electrically connected to the conductive seat, and the other end of the conductive belt is electrically connected to the vacuum chamber; In the case that there are multiple groups of the shielding and grounding components, the multiple groups of the shielding and grounding components are arranged at intervals around the shielding cover.

3. The coating device according to claim 2, characterized in that: The conductive seat is fixed with a fixing nut; the fixing member includes a fixing bolt, which is threadedly connected to the fixing nut and cooperates with the conductive seat to clamp the conductive belt.

4. The coating device according to claim 1, characterized in that: A fixing column is arranged in the vacuum chamber, and the fixing column extends in the vertical direction. The upper end of the fixing column is fixedly connected to the vacuum chamber, and the lower end of the fixing column is passed through the shielding cover and fixedly connected to the flow equalizer plate. A first insulating ring is sleeved on the lower end of the fixing column, and the lower end surface of the first insulating ring abuts against the shielding cover.

5. The coating device according to claim 1, characterized in that: The shielding cover is made of metal.

6. The coating device according to claim 1, characterized in that: The discharge gap is mm-mm.

7. The coating device according to claim 1, characterized in that: The vacuum chamber is provided with an air inlet column, and the air inlet column is used to provide process gas to the flow plate; The shielding cover is provided with a positioning hole, and the air intake column is passed through the positioning hole and connected to the flow equalizer; The coating device also includes an insulating sleeve, which is passed through the positioning hole and sleeved on the air intake column to insulate the air intake column from the shielding cover.

8. The coating device according to claim 7, characterized in that: A support block is provided at the lower end of the insulating sleeve, and the support block is located between the shielding cover and the flow equalizer plate. The shielding cover and the flow equalizer plate are respectively supported on the upper and lower sides of the support block.

9. The coating device according to claim 8, characterized in that: The vacuum chamber is provided with a fixing column, and the fixing column and the insulating sleeve are parallel to each other; the shielding cover is provided with a through hole corresponding to the fixing column; the fixing column is passed through the through hole and is detachably connected to the flow equalizer; In the case that there are multiple fixing columns, the fixing columns are arranged at intervals around the flow equalizer plate.

10. The coating device according to claim 1, characterized in that: The coating equipment further includes an insulating component and a sealing component; the insulating component is arranged at the connection between the electrode rod and the vacuum chamber; the sealing component is arranged between the insulating component, the electrode rod and the vacuum chamber.

11. The coating device according to claim 10, characterized in that: The insulating assembly comprises a first insulating member and a second insulating member, the electrode rod is passed through the first insulating member and the second insulating member, and the second insulating member is covered on the first insulating member; The sealing assembly includes a first sealing ring and a second sealing ring. The first sealing ring is arranged between the first insulating member, the second insulating member and the electrode rod, and the second sealing ring is arranged between the second insulating member and the vacuum chamber.

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