Silicon source and carbon source gas pretreatment device

Abstract

The utility model discloses a silicon source and carbon source gas pretreatment device which comprises a mounting assembly, a filter assembly, a transfer assembly, a temporary purification assembly, a first electric valve, a second electric valve, an exhaust pipe, a shunt pipe, a connecting block and a motor, the temporary purification assembly is arranged on the left side of the top of the mounting assembly, the second electric valve communicates with the top of the temporary purification assembly, the first electric valve is arranged on the top of the filtering assembly, and the flow dividing pipe communicates with the top of the first electric valve. The silicon source and carbon source gas pretreatment device provided by the utility model has the advantages of good cleaning effect and high working efficiency, and solves the problems that the filter screen is easy to block when the pretreatment device in the prior art filters impurities, and the machine needs to be closed during cleaning, so that the filtering quality is reduced, and the cleaning cost is reduced. And the production progress of the silicon-carbon material is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon-carbon material preparation, in particular to a silicon source and carbon source gas pretreatment device. Background Art

[0002] Silicon-carbon material is a new type of material with broad application prospects. It has the advantages of high temperature stability, good electrical conductivity, high mechanical strength, and good chemical stability. Therefore, studying the preparation method of silicon-carbon materials is of great significance for expanding its application field. This article will introduce several common preparation methods of silicon-carbon materials, including chemical vapor deposition, pyrolysis, and solution method.

[0003] Gas pretreatment first pretreats the gases of the silicon source and the carbon source to remove impurities and unstable components, and then introduces the pretreated gases into the reaction device, controls the reaction temperature and gas flow rate, and allows the silicon source and the carbon source to react and deposit on the surface of the substrate. However, the pretreatment device of the prior art is prone to clogging the filter when filtering impurities, and the machine needs to be shut down for cleaning, which not only reduces the quality of filtration, but also reduces the production progress of silicon-carbon materials. Therefore, there is an urgent need for a silicon source and carbon source gas pretreatment device to overcome the above-mentioned defects. Utility Model Content

[0004] The utility model aims to provide a silicon source carbon source gas pretreatment device, which has the advantages of good cleaning effect and high working efficiency, so as to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a silicon source carbon source gas pretreatment device, comprising an installation component, a filter component, a transfer component, a temporary purification component, a first electric valve, a second electric valve, an exhaust pipe, a shunt pipe, a connecting block and a motor, wherein the filter component is arranged on the right side of the top of the installation component, the temporary purification component is arranged on the left side of the top of the installation component, the second electric valve is connected to the top of the temporary purification component, the first electric valve is arranged on the top of the filter component, the shunt pipe is connected to the top of the first electric valve, the transfer component is arranged on the right side of the filter component, the filter component comprises a containing box, a cleaning brush, a filter plate, a connecting column, a rubber ring, a discharge trough and a first one-way valve, the transfer component comprises an electric telescopic rod, a storage box, a holding box, a holding plate and a pressure switch, the temporary purification component comprises a temporary purification box and a second one-way valve, the installation component comprises a stable base, a first connecting rod and a second connecting rod, the connecting block is arranged on the left side of the filter component, and the exhaust pipe is arranged at the bottom of the filter component.

[0006] Furthermore, the first connecting rods are fixedly installed on the right side of the top of the stable base, the second connecting rods are fixedly installed on the left side of the top of the stable base, the top of the first connecting rods is fixedly connected to the bottom of the containing box, the top of the second electric valve is connected to the bottom of the left side of the shunt pipe, and the left side of the connecting block is fixedly connected to the right side of the temporary purification box.

[0007] Furthermore, the top of the containing box is connected to the bottom of the first electric valve, the filter plate is fixedly installed in the inner cavity of the containing box, the discharge trough is opened inside the filter plate, the cleaning brush is arranged on the top of the filter plate, and the right side of the connecting block is fixedly connected to the left side of the containing box.

[0008] Furthermore, the connecting column rotates inside the filter plate through a bearing, the motor is fixedly installed at the bottom of the containing box, and the output shaft of the motor penetrates into the inner cavity of the containing box and is fixedly connected to the bottom of the connecting column.

[0009] Furthermore, the top of the connecting column is fixedly connected to the bottom of the cleaning brush, the rubber ring is fixedly installed on the bottom of the filter plate, the containing box is arranged at the bottom of the rubber ring, and the storage box is connected to the right side of the containing box.

[0010] Furthermore, the electric telescopic rods are fixedly installed on the right side of the storage box, the left side of the storage box passes through the inner cavity of the containing box and is fixedly connected to the right side of the containing box, the pressure switches are fixedly installed on both sides of the bottom of the inner cavity of the containing box, and the containing plate is fixedly installed on the top of the pressure switch.

[0011] Furthermore, the first one-way valve is connected to the left side of the bottom of the holding box, the bottom of the first one-way valve is connected to the top of the exhaust pipe, the second one-way valve is connected to the bottom of the temporary purification box, and the bottom of the second one-way valve is connected to the top of the exhaust pipe.

[0012] In summary, due to the adoption of the above technology, the beneficial effects of the utility model are:

[0013] The utility model mainly installs a temporary purification component and a filter component by setting an installation component, mainly processes impurities contained in silicon source and carbon source gases by setting a temporary purification component and a filter component, mainly intercepts the filter component by setting a first electric valve to prevent the gas from being introduced into the interior of the holding box again, and mainly controls the flow of the gas by setting a second electric valve, and mainly facilitates the cleaning and transfer of impurities by setting a transfer component. When in use, the gas is introduced into the interior of the holding box through the first electric valve, at which time the second electric valve is closed, and then the motor is turned on, and the motor drives the connecting column to rotate, and at the same time, the cleaning brush cleans the impurities on the surface of the filter plate, and the connecting column drives the cleaning brush to rotate, so that the cleaned impurities enter the inner cavity of the holding box through the discharge groove, which prevents the surface of the filter plate from being blocked, and collects dust. The filtered gas is discharged into the exhaust pipe through the first one-way valve. When the impurities enter the storage box and reach a certain weight, the pressure of the storage plate is monitored under the action of the pressure switch. When the weight reaches the standard, the first electric valve is closed and the second electric valve is opened through the pressure switch. The gas directly enters the inner cavity of the temporary purification box through the diversion pipe, and is removed by the temporary purification box. At the same time, the motor stops working and the electric telescopic rod drives the storage box to move to the right. When it moves to the designated position, the user opens the door on the surface of the storage box and cleans out the impurities. It has the advantages of good cleaning effect and high work efficiency, and solves the problem that the pretreatment device of the prior art is prone to blockage of the filter when filtering impurities, and the machine needs to be shut down during cleaning, which not only reduces the quality of filtration, but also reduces the production progress of silicon-carbon materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the structure of the utility model from another perspective;

[0016] Figure 3 This is a schematic diagram of the cross-sectional structure of the filter assembly of the utility model;

[0017] Figure 4 It is a schematic diagram of the cross-sectional structure of the storage box of the utility model.

[0018] In the figure: 1. Installation assembly; 11. Stable base; 12. First connecting rod; 13. Second connecting rod; 2. Filter assembly; 21. Receiving box; 22. Cleaning brush; 23. Filter plate; 24. Connecting column; 25. Rubber ring; 26. Discharge chute; 27. First one-way valve; 3. Transfer assembly; 31. Electric telescopic rod; 32. Storage box; 33. Serving box; 34. Serving plate; 35. Pressure switch; 4. Temporary purification assembly; 41. Temporary purification box; 42. Second one-way valve; 5. First electric valve; 6. Second electric valve; 7. Exhaust pipe; 8. Diverter pipe; 9. Connecting block; 10. Motor. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the utility model for which protection is sought, but merely represents the selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0020] The utility model provides Figure 1-4 As shown, a silicon source carbon source gas pretreatment device includes a mounting assembly 1, a filter assembly 2, a transfer assembly 3, a temporary purification assembly 4, a first electric valve 5, a second electric valve 6, an exhaust pipe 7, a shunt pipe 8, a connecting block 9 and a motor 10, wherein the filter assembly 2 is arranged on the right side of the top of the mounting assembly 1, the temporary purification assembly 4 is arranged on the left side of the top of the mounting assembly 1, the second electric valve 6 is connected to the top of the temporary purification assembly 4, the first electric valve 5 is arranged on the top of the filter assembly 2, the shunt pipe 8 is connected to the top of the first electric valve 5, and the transfer assembly 3 is arranged on the top of the filter assembly 2. On the right side of the filter assembly 2, the filter assembly 2 includes a receiving box 21, a cleaning brush 22, a filter plate 23, a connecting column 24, a rubber ring 25, a discharge trough 26 and a first one-way valve 27, the transfer assembly 3 includes an electric telescopic rod 31, a storage box 32, a containing box 33, a containing plate 34 and a pressure switch 35, the temporary purification assembly 4 includes a temporary purification box 41 and a second one-way valve 42, the mounting assembly 1 includes a stable base 11, a first connecting rod 12 and a second connecting rod 13, the connecting block 9 is arranged on the left side of the filter assembly 2, and the exhaust pipe 7 is arranged at the bottom of the filter assembly 2;

[0021] More specifically, by setting up the transfer assembly 3, it is mainly convenient to clean and transfer the impurities. When in use, the gas is introduced into the interior of the containing box 21 through the first electric valve 5. At this time, the second electric valve 6 is closed, and then the motor 10 is turned on. The motor 10 drives the connecting column 24 to rotate. At the same time, the cleaning brush 22 cleans the impurities on the surface of the filter plate 23. The connecting column 24 drives the cleaning brush 22 to rotate, so that the cleaned impurities enter the inner cavity of the containing box 33 through the discharge groove 26. First, it prevents the surface of the filter plate 23 from being blocked, and second, it collects dust. The filtered gas is discharged into the interior of the exhaust pipe 7 through the first one-way valve 27. When impurities enter the storage box 33 and reach a certain weight, the pressure of the storage plate 34 is monitored under the action of the pressure switch 35. When the weight reaches the standard, the first electric valve 5 is closed and the second electric valve 6 is opened through the pressure switch 35. The gas directly enters the inner cavity of the temporary purification box 41 through the shunt pipe 8, and the impurities are removed under the action of the temporary purification box 41. At the same time, the motor 10 stops working and the electric telescopic rod 31 drives the storage box 33 to move to the right. When it moves to the specified position, the user opens the door on the surface of the storage box 32 and cleans out the impurities. It has the advantages of good cleaning effect and high work efficiency.

[0022] In some embodiments, the first connecting rod 12 is fixedly installed on the right side of the top of the stable base 11, and the second connecting rod 13 is fixedly installed on the left side of the top of the stable base 11. The top of the first connecting rod 12 is fixedly connected to the bottom of the containing box 21, the top of the second electric valve 6 is connected to the bottom of the left side of the shunt pipe 8, and the left side of the connecting block 9 is fixedly connected to the right side of the temporary purification box 41. More specifically, the bottom of the containing box 21 is fixed by setting the first connecting rod 12, the bottom of the temporary purification box 41 is fixed by setting the second connecting rod 13, and the gas is diverted by setting the shunt pipe 8.

[0023] In some embodiments, the top of the containing box 21 is connected to the bottom of the first electric valve 5, the filter plate 23 is fixedly installed in the inner cavity of the containing box 21, the discharge groove 26 is opened inside the filter plate 23, the cleaning brush 22 is arranged on the top of the filter plate 23, and the right side of the connecting block 9 is fixedly connected to the left side of the containing box 21. More specifically, the discharge groove 26 is arranged to facilitate impurities to enter the inner cavity of the containing box 33, and the rubber ring 25 is arranged to mainly seal the gap between the containing box 33 and the discharge groove 26.

[0024] In some embodiments, the connecting column 24 rotates inside the filter plate 23 through a bearing, the motor 10 is fixedly installed at the bottom of the containing box 21, and the output shaft of the motor 10 passes through the inner cavity of the containing box 21 and is fixedly connected to the bottom of the connecting column 24. More specifically, the motor 10 is set to drive the connecting column 24, thereby indirectly rotating the cleaning brush 22.

[0025] In some embodiments, the top of the connecting column 24 is fixedly connected to the bottom of the cleaning brush 22, the rubber ring 25 is fixedly installed on the bottom of the filter plate 23, the containing box 33 is arranged at the bottom of the rubber ring 25, and the storage box 32 is connected to the right side of the containing box 21. More specifically, by setting the storage box 32, it is convenient to accommodate the containing box 33.

[0026] In some embodiments, the electric telescopic rod 31 is fixedly installed on the right side of the storage box 32, the left side of the storage box 32 passes through the inner cavity of the containing box 21 and is fixedly connected to the right side of the containing box 33, the pressure switches 35 are fixedly installed on both sides of the bottom of the inner cavity of the containing box 33, and the containing plate 34 is fixedly installed on the top of the pressure switch 35. More specifically, the position of the containing box 33 is mainly adjusted by setting the electric telescopic rod 31, and the weight of the containing plate 34 is monitored by setting the pressure switch 35, so as to control the switch of the electrical equipment.

[0027] In some embodiments, the first one-way valve 27 is connected to the left side of the bottom of the containing box 21, and the bottom of the first one-way valve 27 is connected to the top of the exhaust pipe 7. The second one-way valve 42 is connected to the bottom of the temporary purification box 41, and the bottom of the second one-way valve 42 is connected to the top of the exhaust pipe 7. More specifically, the first one-way valve 27 is set to prevent the gas from flowing back to the inner cavity of the containing box 21 through the exhaust pipe 7.

[0028] Working principle:

[0029] Step 1: When in use, the gas is introduced into the interior of the containing box 21 through the first electric valve 5, and the second electric valve 6 is closed at this time. Then the motor 10 is turned on, and the motor 10 drives the connecting column 24 to rotate. At the same time, the cleaning brush 22 cleans the impurities on the surface of the filter plate 23. The connecting column 24 drives the cleaning brush 22 to rotate, so that the cleaned impurities enter the inner cavity of the containing box 33 through the discharge groove 26, firstly to prevent the surface of the filter plate 23 from being blocked, and secondly to collect dust. The filtered gas is discharged into the interior of the exhaust pipe 7 through the first one-way valve 27;

[0030] Step 2: When impurities enter the interior of the containing box 33 and reach a certain weight, the pressure of the containing plate 34 is monitored under the action of the pressure switch 35. When the weight reaches the standard, the first electric valve 5 is closed and the second electric valve 6 is opened through the pressure switch 35. The gas directly enters the inner cavity of the temporary purification box 41 through the shunt pipe 8, and the impurities are removed by the temporary purification box 41. At the same time, the motor 10 stops working and the electric telescopic rod 31 drives the containing box 33 to move to the right. When it moves to the designated position, the user opens the door on the surface of the storage box 32 and cleans out the impurities, which has the advantages of good cleaning effect and high work efficiency.

[0031] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A silicon source carbon source gas pretreatment device, characterized in that: The invention comprises a mounting assembly (1), a filter assembly (2), a transfer assembly (3), a temporary purification assembly (4), a first electric valve (5), a second electric valve (6), an exhaust pipe (7), a shunt pipe (8), a connection block (9) and a motor (10), wherein the filter assembly (2) is arranged on the right side of the top of the mounting assembly (1), the temporary purification assembly (4) is arranged on the left side of the top of the mounting assembly (1), the second electric valve (6) is connected to the top of the temporary purification assembly (4), the first electric valve (5) is arranged on the top of the filter assembly (2), the shunt pipe (8) is connected to the top of the first electric valve (5), the transfer assembly (3) is arranged on the right side of the filter assembly (2), and the filter assembly (4) is connected to the top of the temporary purification assembly (4). The assembly (2) comprises a containing box (21), a cleaning brush (22), a filter plate (23), a connecting column (24), a rubber ring (25), a discharge trough (26) and a first one-way valve (27); the transfer assembly (3) comprises an electric telescopic rod (31), a storage box (32), a containing box (33), a containing plate (34) and a pressure switch (35); the temporary purification assembly (4) comprises a temporary purification box (41) and a second one-way valve (42); the mounting assembly (1) comprises a stabilizing base (11), a first connecting rod (12) and a second connecting rod (13); the connecting block (9) is arranged on the left side of the filter assembly (2); and the exhaust pipe (7) is arranged at the bottom of the filter assembly (2).

2. The silicon source and carbon source gas pretreatment device according to claim 1, characterized in that: The first connecting rods (12) are fixedly mounted on the right side of the top of the stable base (11), the second connecting rods (13) are fixedly mounted on the left side of the top of the stable base (11), the top of the first connecting rods (12) is fixedly connected to the bottom of the containing box (21), the top of the second electric valve (6) is connected to the bottom of the left side of the shunt pipe (8), and the left side of the connecting block (9) is fixedly connected to the right side of the temporary purification box (41).

3. The silicon source and carbon source gas pretreatment device according to claim 1, characterized in that: The top of the containing box (21) is connected to the bottom of the first electric valve (5), the filter plate (23) is fixedly mounted in the inner cavity of the containing box (21), the discharge trough (26) is opened inside the filter plate (23), the cleaning brush (22) is arranged on the top of the filter plate (23), and the right side of the connecting block (9) is fixedly connected to the left side of the containing box (21).

4. The silicon source and carbon source gas pretreatment device according to claim 1, characterized in that: The connecting column (24) rotates inside the filter plate (23) via a bearing, the motor (10) is fixedly mounted on the bottom of the containing box (21), and the output shaft of the motor (10) penetrates the inner cavity of the containing box (21) and is fixedly connected to the bottom of the connecting column (24).

5. The silicon source and carbon source gas pretreatment device according to claim 1, characterized in that: The top of the connecting column (24) is fixedly connected to the bottom of the cleaning brush (22), the rubber ring (25) is fixedly mounted on the bottom of the filter plate (23), the storage box (33) is arranged at the bottom of the rubber ring (25), and the storage box (32) is connected to the right side of the containing box (21).

6. The silicon source and carbon source gas pretreatment device according to claim 1, characterized in that: The electric telescopic rods (31) are fixedly mounted on the right side of the storage box (32); the left side of the storage box (32) penetrates into the inner cavity of the containing box (21) and is fixedly connected to the right side of the containing box (33); the pressure switches (35) are fixedly mounted on both sides of the bottom of the inner cavity of the containing box (33); and the containing plate (34) is fixedly mounted on the top of the pressure switch (35).

7. The silicon source and carbon source gas pretreatment device according to claim 1, characterized in that: The first one-way valve (27) is connected to the left side of the bottom of the containing box (21), and the bottom of the first one-way valve (27) is connected to the top of the exhaust pipe (7). The second one-way valve (42) is connected to the bottom of the temporary purification box (41), and the bottom of the second one-way valve (42) is connected to the top of the exhaust pipe (7).

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