Spraying direction adjusting device and spraying tank
By designing the spray direction adjustment device, the multi-angle adjustment of the spray head is achieved by using the connecting rod and the driving mechanism, the problem of inability to spray in multiple directions in silicon wafer cleaning is solved and the cleaning efficiency is improved.
Patent Information
- Application Number
- CN202421434736.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-21
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-06-21
AI Technical Summary
In the prior art, multi-dimensional spray cleaning cannot be achieved during the cleaning process of silicon wafers, resulting in low cleaning efficiency.
A spray direction adjustment device is designed, including a connecting rod assembly and a driving mechanism, which drives the rotating shaft and the spray pipe to rotate through the cylinder to realize multi-angle adjustment of the spray head.
Through this device, the silicon wafer can achieve multi-directional spray cleaning during the cleaning process, improving the cleaning efficiency and effect.
Smart Images
Figure CN222753887U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of photovoltaic silicon wafer manufacturing, and specifically relates to a spray direction adjustment device and a spray tank. Background Art
[0002] The silicon wafer manufacturing process in the related art requires multiple cleanings. Some cleaning processes require the use of a spray pipe to spray the silicon wafer. The spray head of the existing tank is fixed and cannot clean the silicon wafer in all directions.
[0003] Therefore, how to solve the problem that silicon wafers cannot be cleaned in all directions is a technical problem that urgently needs to be solved in this field. Utility Model Content
[0004] The utility model aims to provide a spray direction adjustment device and a spray tank to solve the above technical problems.
[0005] In order to solve the above technical problems, the utility model provides a spray direction adjustment device, including: a connecting rod assembly, including at least one connecting rod, one end of the connecting rod clamps the end of the spray pipe, and the other end is provided with a long hole, and a bolt is passed through the long hole; and a driving mechanism, which drives the bolt to move in a direction that is at an oblique angle to the length direction of the connecting rod, so that when the bolt reciprocates in the long hole, the connecting rod drives the spray pipe to rotate.
[0006] Furthermore, the spray pipe is provided with spray heads, and the spray heads are evenly distributed along the cylindrical generatrix of the spray pipe.
[0007] Furthermore, the connecting rod is provided with two, namely a first connecting rod and a second connecting rod; one end of the long hole provided with the first connecting rod and the second connecting rod is hingedly connected to form a hinge point; and the bolt passes through the hinge point.
[0008] Furthermore, the driving mechanism is configured as a cylinder, and an induction switch is provided on the cylinder, and the induction switch controls the movement of the cylinder to drive the bolt to move.
[0009] Furthermore, the piston rod of the cylinder is connected to a joint; and the joint is connected to the hinged portion of the first connecting rod and the second connecting rod.
[0010] Furthermore, a water pipe is passed through one end of the connecting rod that clamps the end of the spray pipe; one end of the water outlet of the water pipe is connected to the spray pipe; and one end of the water inlet of the water pipe is connected to a water supply device.
[0011] Furthermore, a rotating shaft is sleeved on the outer wall of the water pipe, and the rotating shaft is driven to rotate when the connecting rod rotates.
[0012] Furthermore, a bearing is sleeved on the rotating shaft, and the bearing is connected to the spray tank; a clamping shaft is provided on the rotating shaft, and the clamping shaft is provided at the end of the connecting rod where the long hole is not provided; the bearing is connected to the end of the spray pipe; the water inlet of the water pipe extends from the clamping shaft; and a sealing ring is provided between the bearing and the spray tank.
[0013] In the second aspect, the utility model also provides a spray trough, characterized in that it includes: a trough body, at least one spray pipe is arranged in at least one trough body along the length direction of the trough; one end of the spray pipe is connected to a connecting seat, and the connecting seat is arranged on the inner wall of the trough body; and a spray direction adjustment device, and the direction adjustment mechanism is rotatably connected to the trough body.
[0014] Furthermore, a connecting seat is provided on the inner wall of the trough body; one end of the spray pipe is connected to the connecting rod, and the other end is connected to the connecting seat.
[0015] The beneficial effect of the utility model is that when the spray direction adjustment device and the spray tank are used to clean silicon wafers, the rotating shaft is displaced by pushing the connecting rod by the cylinder, and the rotating shaft then drives the spray pipe and the spray head to adjust the spray direction; the connecting rod is arranged on one side of the outer wall of the tank body of the spray tank, and through the push of the cylinder, the spray heads on the spray pipe can adjust the spray directions towards each other at the same time.
[0016] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.
[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0019] Figure 1 is an overall diagram of a spray direction adjustment device and a spray tank provided in some embodiments;
[0020] Figure 2 is a diagram of a spray direction adjustment device provided in some embodiments;
[0021] Figure 3 is an enlarged view of point A provided in some embodiments;
[0022] Figure 4 It is a side view of a spray direction adjustment device provided in some embodiments.
[0023] In the figure:
[0024] 10. trough body, 11. angle code, 12. cylinder, 13. induction switch, 20. joint, 21. bolt, 22. long hole, 30. first connecting rod, 31. rotating shaft, 32. clamping shaft, 33. bearing, 34. sealing ring, 40. second connecting rod, 50. water outlet, 51. spray pipe, 52. spray head, 53. connecting seat, 60. water inlet, 70. drain outlet. DETAILED DESCRIPTION
[0025] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0026] In the related art, the silicon wafer manufacturing process needs to undergo multiple cleanings. Some cleaning processes require the use of a spray pipe to spray the silicon wafer. The spray head of the existing tank is fixed and cannot clean the silicon wafer in all directions.
[0027] Therefore, how to solve the problem that silicon wafers cannot be cleaned in all directions is a technical problem that urgently needs to be solved in this field.
[0028] like Figure 1 As shown, at least one embodiment provides a spray direction adjustment device, including: a connecting rod assembly, including at least one connecting rod, the connecting rod is used to adjust the spray direction of the spray pipe 51, so that it can achieve multi-angle spray cleaning. One end of the connecting rod clamps the end of the spray pipe 51, the connecting rod is connected to the spray pipe 51, and the spray pipe 51 is driven to rotate when the connecting rod moves. A long hole 22 is provided at the other end, and a bolt 21 is penetrated in the long hole 22; when the bolt 21 moves in the long hole 22, the connection between the connecting rod and the spray pipe 51 will rotate. And a driving mechanism, the movement direction of the bolt 21 driven by the connecting rod is at an oblique angle to the length direction of the connecting rod, so that when the bolt 21 reciprocates in the long hole 22, the connecting rod drives the spray pipe 51 to rotate. The driving mechanism pushes the bolt 21 to move, and when the bolt 21 moves, the connection between the connecting rod and the spray pipe 51 will rotate, so that the rotation of the spray pipe 51 can achieve multi-angle spray cleaning.
[0029] In some embodiments, a spray head 52 is provided on the spray pipe 51, and the spray head 52 is evenly distributed along the cylindrical busbar of the spray pipe 51. Such a distribution method can make the spray cleaning more efficient. When the spray pipe 51 rotates, the spray head 52 also rotates to perform multi-directional spray cleaning.
[0030] In some embodiments, in order to meet different spraying requirements and achieve higher efficiency, multiple spray pipes 51 and multiple connecting rods can be set. The connecting rods are provided with two, namely the first connecting rod 30 and the second connecting rod 40; the first connecting rod 30 and the second connecting rod 40 are provided with a long hole 22 at one end, which is hingedly connected to form a hinge point; the bolt 21 passes through the hinge point. The first connecting rod 30 and the second connecting rod 40 are hingedly connected to form a hinge point, and the bolt 21 passes through the hinge point, that is, the driving mechanism pushes the bolt 21 to drive the first connecting rod 30 and the second connecting rod 40 to rotate.
[0031] In some embodiments, the driving mechanism is configured as a cylinder 12, and a sensing switch 13 is provided on the cylinder 12, and the sensing switch 13 controls the movement of the cylinder 12 to drive the movement of the bolt 21. The sensing switch 13 can control the movement and stop of the cylinder 12, thereby controlling the movement and stop of the bolt 21, that is, controlling the rotation and stop of the spray pipe 51.
[0032] In some embodiments, the piston rod of the cylinder 12 is connected to the joint 20; and the joint 20 is connected to the hinged portion of the first connecting rod 30 and the second connecting rod 40. The joint 20 connects the hinged portion of the first connecting rod 30 and the second connecting rod 40 and the piston rod of the cylinder 12. When the piston rod drives the joint 20 to move, the first connecting rod 30 and the second connecting rod 40 move, that is, the spray pipe 51 rotates.
[0033] In some embodiments, a water pipe is passed through one end of the connecting rod that holds the end of the spray pipe 51; one end of the water pipe's water outlet 50 is connected to the spray pipe 51; one end of the water pipe's water inlet 60 is connected to a water supply device. The water pipe passes through the connecting rod, and the water pipe rotates when the connecting rod moves.
[0034] In some embodiments, the outer wall of the water pipe is sleeved with a rotating shaft 31, and the connecting rod rotates to drive the rotating shaft 31 to rotate. The cylinder 12 pushes the connecting rod to drive the rotating shaft 31 to move, and the rotating shaft 31 then drives the spray pipe 51 and the spray head to adjust the spray direction.
[0035] In some embodiments, the rotating shaft 31 is sleeved with a bearing 33, and the bearing 33 is connected to the spray tank; the rotating shaft 31 is provided with a clamping shaft 32, and the clamping shaft 32 is arranged at the end of the connecting rod where the long hole 22 is not arranged; the bearing 33 is connected to the end of the spray pipe 51; the water inlet 60 of the water pipe extends from the clamping shaft 32. A sealing ring 34 is arranged between the bearing 33 and the spray tank to prevent the liquid from leaking during the spraying. When the cylinder 12 pushes the connecting rod to move, the clamping shaft 32 rotates, and the rotating shaft 31 and the clamping shaft 32 are arranged as one body, that is, the rotating shaft 31 also rotates; the rotating shaft 31 rotates to drive the bearing 33 sleeved thereon to rotate relatively, and the bearing 33 is connected to the tank body 10, that is, the bearing 33 is connected to the spray tank by the spray pipe 51, so when the bearing 33 rotates, the spray pipe 51 also rotates. When the spray pipe 51 rotates, the spray head 52 can be adjusted to spray.
[0036] In some embodiments, a spray tank is further provided, comprising: a tank body, wherein at least one tank body 10 is provided with at least one spray pipe 51 along the length direction of the tank; a spray pipe 51 is provided in the tank body 10 for adjusting the spraying, and a plurality of spray pipes 51 can be provided according to different actual cleaning requirements. In order to better rotate and conveniently connect the spray pipe 51, a connecting seat 53 is provided on the inner wall of the tank body 10; and a spray direction adjustment device, which is rotatably connected to the tank body, and the spray direction adjustment device can adjust the spray tank to realize multi-angle rotation cleaning.
[0037] In some embodiments, in order to better rotate and conveniently connect the spray pipe 51, a connecting seat 53 is provided on the inner wall of the tank body 10; one end of the spray pipe 51 is connected to the connecting rod, and the other end is connected to the connecting seat 53. When one end of the spray pipe 51 is driven to rotate by the connecting rod, the other end also rotates synchronously. When the spray pipe 51 rotates, the spray tank realizes multi-angle rotation cleaning.
[0038] In summary, when the spray direction adjustment device and the spray tank are used to clean silicon wafers, the cylinder pushes the connecting rod to drive the rotating shaft to move, and the rotating shaft then drives the spray pipe and the spray head to adjust the direction of spraying; two connecting rods are arranged on one side of the outer wall of the tank body of the spray tank, and through the push of the cylinder, the spray heads on the upper and lower rows of spray pipes can adjust the spray direction towards each other at the same time.
[0039] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0040] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0041] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.
Claims
1. A spray direction adjustment device, characterized in that: include: The connecting rod assembly comprises at least one connecting rod, one end of which clamps the end of the spray pipe, and the other end of which is provided with a long hole, in which a bolt is passed; as well as The driving mechanism drives the bolt to move in a direction that forms an oblique angle with the length direction of the connecting rod, so that when the bolt reciprocates in the long hole, the connecting rod drives the spray pipe to rotate.
2. The spray direction adjustment device according to claim 1, characterized in that: The spray pipe is provided with spray heads, and the spray heads are evenly distributed along the cylindrical generatrix of the spray pipe.
3. The spray direction adjustment device according to claim 1, characterized in that: The connecting rod is provided with two connecting rods, namely a first connecting rod and a second connecting rod; The first connecting rod is hingedly connected to one end of the long hole provided with the second connecting rod to form a hinge point; The bolt passes through the hinge point.
4. The spray direction adjustment device according to claim 1, characterized in that: The driving mechanism is configured as a cylinder, and an induction switch is disposed on the cylinder. The induction switch controls the movement of the cylinder to drive the bolt to move.
5. The spray direction adjustment device according to claim 4, characterized in that: The piston rod of the cylinder is connected to the joint; and The joint is connected to the hinged portion of the first link and the second link.
6. The spray direction adjustment device according to claim 1, characterized in that: A water pipe is passed through one end of the connecting rod that clamps the end of the spray pipe; One end of the water outlet of the water pipe is connected to the spray pipe; One end of the water inlet of the water pipe is connected to the water supply equipment.
7. The spray direction adjustment device according to claim 6, characterized in that: The outer wall of the water pipe is sleeved with a rotating shaft, and the rotating shaft is driven to rotate when the connecting rod rotates.
8. The spray direction adjustment device according to claim 7, characterized in that: A bearing is sleeved on the rotating shaft, and the bearing is connected to the spray tank; The rotating shaft is provided with a clamping shaft, and the clamping shaft is provided at an end of the connecting rod where no long hole is provided; The bearing is connected to the end of the spray pipe; The water inlet of the water pipe extends out from the clamping shaft; A sealing ring is arranged between the bearing and the spray tank.
9. A spray tank, characterized in that: include: The tank body, at least one tank body is provided with at least one spray pipe along the tank length direction; one end of the spray pipe is connected to a connecting seat, and the connecting seat is provided on the inner wall of the tank body; as well as The spray direction adjustment mechanism according to any one of claims 1 to 8, wherein the direction adjustment mechanism is rotatably connected to the trough body.
10. The spray tank according to claim 9, characterized in that: The inner wall of the tank body is provided with a connecting seat; One end of the spray pipe is connected to the connecting rod, and the other end is connected to the connecting seat.