Combined high-capacity liquid storage tank

Abstract

The utility model provides a combined type large-capacity liquid storage tank, which relates to the technical field of liquid storage tanks and comprises a base, a tank body is arranged at the top of the base, a mounting frame is arranged on the bottom surface of the tank body, three mounting grooves are formed in the top surface of the base, three-jaw chucks are arranged in the three mounting grooves, and three fixing bolts are arranged outside the three three-jaw chucks in a surrounding manner. Fixing frames are arranged in the middles of the three three-jaw chucks, a mounting frame on the bottom face of the tank body is in threaded connection with the fixing frames in a mounting groove in the top face of the base through threads at the bottom end, and when the tank body is mounted, a wrench on the surface of the base can be inserted into a square hole to rotate bevel gears of the three-jaw chucks, and the bevel gears drive plane rectangular threads; and then the three claws are driven to move centripetally, so that the three claws clamp the convex part at the bottom of the tank body, the tank body can be in different sizes, but the mounting frame on the bottom surface of the tank body adopts the same standard interface to be matched with the fixing frame in the mounting groove, so that the problem that liquid storage tanks with different capacities cannot be flexibly combined according to storage requirements is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid storage tanks, in particular to a combined large-capacity liquid storage tank. Background Art

[0002] In the semiconductor manufacturing process, many liquid chemicals and pure water are used in process steps such as cleaning, etching, lithography, and implantation. Liquid storage tanks are required for the storage, mixing, or reaction of these liquids. In the semiconductor process, liquid storage tanks are not only containers for storing chemicals and pure water, but also play a variety of functions, such as circulating supply, mixing and modulation, temperature control, emergency discharge, buffer storage, etc. These functions are crucial to ensuring the stability of the semiconductor manufacturing process and product quality.

[0003] However, the existing base can only install tanks of fixed sizes and cannot be flexibly combined into liquid storage tanks of different capacities according to storage needs. Utility Model Content

[0004] The utility model aims to solve the shortcoming in the prior art that liquid storage tanks with different capacities cannot be flexibly combined according to storage requirements, and proposes a combined large-capacity liquid storage tank.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a combined large-capacity liquid storage tank, including a base, a tank body is provided on the top of the base, a mounting frame is provided on the bottom surface of the tank body, three mounting grooves are provided on the top surface of the base, three three-jaw chucks are provided inside the three mounting grooves, three fixing bolts are provided around the outside of the three three-jaw chucks, a fixing frame is provided in the middle of the three three-jaw chucks, through holes are provided at the bottom of the three fixing frames, sealing gaskets are provided in the middle of the three fixing frames, a flow channel is provided at the bottom of the through hole, a liquid outlet pipe is provided on the bottom surface of the base, and three square holes for wrench insertion are provided on the surface of the base.

[0006] Preferably, the three square holes for inserting the three wrenches are arranged on the side of the base in a parallel state, and the spacing between the three square holes for inserting the three wrenches is consistent.

[0007] Preferably, the three three-jaw chucks are all installed in the mounting groove, and the three-jaw chucks are fixed to the top surface of the base by fixing bolts.

[0008] Preferably, the three fixing frames are all welded to the surface of the mounting groove on the top surface of the base, and the sealing gasket is installed in the mounting groove.

[0009] Preferably, the mounting brackets are welded to the bottom surface of the tank body, the mounting brackets are cylindrical, and the surface of the bottom end of the mounting brackets is provided with threads.

[0010] Preferably, the three mounting brackets are all set up in the middle of the three-jaw chuck, and the bottom ends of the mounting brackets are threadedly connected to the fixing bracket.

[0011] Preferably, the three through holes are arranged between the flow channel and the mounting groove, and the liquid outlet pipe is connected to the flow channel.

[0012] Beneficial Effects

[0013] In the utility model, a mounting bracket on the bottom surface of the tank body is threadedly connected with a fixing bracket in a mounting groove on the top surface of the base through a thread at the bottom end. When installed, a wrench on the surface of the base can be inserted into a square hole to rotate the bevel gear of the three-jaw chuck. The bevel gear drives the flat rectangular thread and then drives the three-jaw centripetal movement, so that the three-jaw clamps the raised part of the bottom of the tank body. The tank body can be of different sizes, but the mounting bracket on the bottom surface of the tank body adopts the same standardized interface to adapt to the fixing bracket in the mounting groove, which solves the problem of not being able to flexibly combine into liquid storage tanks of different capacities according to storage needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is an isometric view of the utility model;

[0015] Figure 2 It is a partial left view of the utility model;

[0016] Figure 3 For the utility model Figure 2 A cross-sectional view of

[0017] Figure 4 It is a partial isometric drawing of the utility model;

[0018] Figure 5 It is a partial right side view of the utility model;

[0019] Figure 6 For the utility model Figure 5 sectional view of .

[0020] Legend:

[0021] 1. Base; 2. Tank body; 3. Liquid outlet pipe; 4. Mounting frame; 5. Three-jaw chuck; 6. Insert wrench into square hole; 7. Fixing bolt; 8. Mounting slot; 9. Fixing frame; 10. Sealing gasket; 11. Through hole; 12. Flow channel. DETAILED DESCRIPTION

[0022] In order to make the technical means, creative features, objectives and effects of the present invention easy to understand, the present invention is further described below in conjunction with specific embodiments and drawings, but the following embodiments are only preferred embodiments of the present invention, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the protection scope of the present invention.

[0023] The specific embodiments of the present utility model are described below in conjunction with the accompanying drawings. Specific embodiment one:

[0025] Reference Figure 1-6 A combined large-capacity liquid storage tank comprises a base 1, a tank body 2 is arranged on the top of the base 1, a mounting frame 4 is arranged on the bottom surface of the tank body 2, three mounting grooves 8 are arranged on the top surface of the base 1, three three-jaw chucks 5 are arranged inside the three mounting grooves 8, three fixing bolts 7 are arranged around the outside of the three three-jaw chucks 5, fixing frames 9 are arranged in the middle of the three three-jaw chucks 5, through holes 11 are arranged at the bottom of the three fixing frames 9, sealing pads 10 are arranged in the middle of the three fixing frames 9, flow channels 12 are arranged at the bottom of the through holes 11, a liquid outlet pipe 3 is arranged on the bottom surface of the base 1, three wrench insertion square holes 6 are arranged on the surface of the base 1, and the three wrenches are inserted into the square holes 6 in a parallel state. The side of the base 1, and the spacing of the three wrenches inserted into the square holes 6 is consistent, the three three-jaw chucks 5 are all installed in the mounting groove 8, and the three-jaw chuck 5 is fixed to the top surface of the base 1 by fixing bolts 7, the three fixing frames 9 are welded to the surface of the mounting groove 8 on the top surface of the base 1, and the sealing gasket 10 is installed in the mounting groove 8, the mounting frames 4 are welded to the bottom surface of the tank body 2, the mounting frames 4 are cylindrical, and the surface of the bottom end of the mounting frames 4 is provided with threads, the three mounting frames 4 are all set in the middle of the three-jaw chuck 5, and the bottom end of the mounting frame 4 is threadedly connected to the fixing frame 9, three through holes 11 are set in the middle of the flow channel 12 and the mounting groove 8, and the liquid outlet pipe 3 is connected to the flow channel 12.

[0026] The surface of the mounting frame 4 on the bottom of the tank body 2 is provided with a thread, and the diameter of the mounting frame 4 is slightly smaller than the diameter of the fixing frame 9 in the mounting groove 8 on the top surface of the base 1. The mounting frame 4 on the bottom of the tank body 2 is connected to the fixing frame 9 by rotation. Since the mounting frame 4 is welded to the bottom surface of the tank body 2, the tank body 2 is installed on the base 1 through the threaded connection between the mounting frame 4 and the fixing frame 9. The mounting frame 4 is welded to the bottom surface of the tank body 2 in a cylindrical shape. The bottom surface of the mounting frame 4 is provided with a through hole 11, and the through hole 11 penetrates into the interior of the tank body 2. There is also a through hole 11 on the surface of the mounting groove 8. The through hole 11 is connected with the flow channel 12 inside the base 1, so that the liquid can flow from the tank body 2 into the installation groove 8 through the through hole 11 of the mounting frame 4, and then flow from the through hole 11 in the installation groove 8 into the flow channel 12 inside the base 1. Since the bottoms of the three tank bodies 2 are all of the same structure, the liquid can flow in the three tank bodies 2. A sealing gasket 10 is provided in the middle of the mounting frame 4, and the sealing gasket 10 is installed in the installation groove 8. When the tank body 2 is installed, the sealing gasket 10 will ensure that no liquid will flow from the mounting frame 4 and the solid body. The threaded connection of the fixed frame 9 leaks out. When the tank body 2 is installed, the volta wrench can be used to insert the three wrenches on the surface of the base 1 into the square hole 6 to rotate the bevel gear of the three-jaw chuck 5. The three wrenches inserted into the square hole 6 are set on the surface of the base 1 in a parallel state, and the three wrenches inserted into the square hole 6 have the same spacing. The bevel gear drives the plane rectangular thread, and then drives the three-jaw to move centripetally. Because the pitch of the plane rectangular thread is equal, the movement distance of the three-jaw is equal, which has the effect of automatic centering. The three-jaw chuck 5 is composed of a large bevel gear and three small bevel gears. The gear is composed of three claws, three small bevel gears and a large bevel gear. The back of the large bevel gear has a flat thread structure, and the three claws are equally installed on the flat thread. When the small bevel gear is turned with a wrench, the large bevel gear rotates, and the flat thread on the back of it makes the three claws approach or withdraw to the center at the same time, so that the three claws of the three-claw chuck 5 clamp the raised part of the bottom of the tank body 2 to complete the fixation of the tank body 2. The tank body 2 can be of different sizes, but the mounting frame 4 on the bottom of the tank body 2 adopts the same standardized interface to adapt to the fixing frame 9 in the mounting groove 8.

[0027] When the tank body 2 is in use, the liquid enters the middle tank body 2 through the liquid inlet pipe on the top surface of the tank cover at the top of the middle tank body 2. The liquid inlet pipe is installed on the top surface of the tank cover through a direct joint. The tank cover is threadedly connected to the top of the tank body 2 through a thread. When the liquid enters the middle tank body 2, the liquid flows into the flow channel 12 of the base 1 through the through hole 11 of the mounting frame 4 on the top surface of the tank body 2. Since the three tank bodies 2 are connected, the liquid inside the three tank bodies 2 will be leveled by pressure. Since two brackets are provided on the surface of the right tank body 2, the brackets are welded to the back of the right tank body 2, and the side pipe is installed on the surface of one of the brackets, and five liquid level detection sensors are provided in the middle of the other bracket. , five liquid level detection sensors are evenly installed in the middle of the bracket in a vertical state, and the side pipe is fixed on the bracket through a fixing frame 9, and the liquid level detection sensor is fixed on the bracket with a fixing bolt 7. The three liquid level detection sensors are all against the side pipe, and the three liquid level detection sensors are all connected to an external power supply. When the liquid enters the right tank body 2, one end of the side pipe is installed on the base 1 through an elbow joint, and the other end of the side pipe is installed on the top surface of the tank cover at the top of the right tank body 2 through an elbow joint. In this way, when the liquid flows into the right tank body 2, part of the liquid will also flow into the side pipe through the elbow joint. At this time, the liquid level detection sensor will emit an ultrasonic pulse. When the wave pulse encounters the liquid surface , will be reflected back to the sensor, and the main board of the liquid level detection sensor processes these signals and transmits them to the control panel, so that the operator can detect the height of the liquid inside the tank body 2 through the operation panel. During the liquid storage process, the inert gas enters the interior of the three tank bodies 2 through the air inlet pipes of the tank covers at the top of the three tank bodies 2. The three air inlet pipes are installed on the top surface of the tank cover at the top of the tank body 2 through direct joints, and three-way joints are installed on the top of the three air inlet pipes. Every two three-way joints are connected with connecting pipes, so that the three air inlet pipes are connected. In this way, when the inert gas is input from the three-way joints at the top of the tank bodies 2 on both sides, it will be transported to the other through the connecting pipes connected to the three-way joints. A three-way joint is connected to realize gas communication. The inert gas will keep the chemical liquid or pure water from contacting with the air, preventing the chemical liquid or pure water from contacting with oxygen in the air, which may cause an oxidation reaction. This oxidation reaction may change the chemical properties of the liquid and affect its effect on semiconductor processing, or various particles and gases in the air, such as dust, bacteria, sulfide gas, etc. These particles and gases may adhere to the surface of the semiconductor, causing defects or pollution, which seriously affects the performance and reliability of the semiconductor. When the liquid in the liquid storage tank is needed, the liquid can be discharged through the liquid outlet pipe 3 of the base 1, and the liquid outlet pipe 3 is installed on the bottom surface of the base 1 through a direct joint. Specific embodiment 2:

[0029] Reference Figure 1-6, a combined large-capacity liquid storage tank, further based on the basic structure in the specific embodiment 1, two ball valves can be provided in the internal flow channel 12 of the base 1, the ball valve is set in the middle of every two tank bodies 2, and the operating rod of the ball valve passes through the base 1, and two liquid outlet pipes 3 are provided on both sides of the liquid outlet pipe 3 on the bottom surface of the base 1, and the three liquid outlet pipes 3 are set in parallel on the bottom surface of the base 1, and the three liquid outlet pipes 3 are set directly below the tank body 2. In this way, when one of the tank bodies 2 leaks, the operating rod of the ball valve on the corresponding side can be rotated. When the operating rod rotates, the valve core is pressed against the valve seat by rotating the valve ball to close the valve, and the fluid flowing from the flow channel 12 to the damaged tank body 2 is cut off. At this time, the liquid outlet pipe 3 on the bottom surface of the damaged tank body 2 is opened to discharge the liquid inside the damaged tank body 2, so that the damaged tank body 2 can be repaired in time to prevent the loss of users caused by untimely repair of the damage to the tank body 2.

[0030] In summary:

[0031] 1. The mounting frame 4 on the bottom of the tank body 2 is threadedly connected to the fixing frame 9 in the mounting groove 8 on the top surface of the base 1 through the thread at the bottom end. When installed, the wrench on the surface of the base 1 can be inserted into the square hole 6 to rotate the bevel gear of the three-jaw chuck 5. The bevel gear drives the flat rectangular thread, and then drives the three-jaw centripetal movement, so that the three-jaw clamps the raised part of the bottom of the tank body 2. The tank body 2 can be of different sizes, but the mounting frame 4 on the bottom of the tank body 2 adopts the same standardized interface to adapt to the fixing frame 9 in the mounting groove 8, which solves the problem of not being able to flexibly combine into liquid storage tanks of different capacities according to storage needs.

[0032] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A combined large-capacity liquid storage tank, comprising a base (1), characterized in that: A tank body (2) is provided on the top of the base (1), a mounting frame (4) is provided on the bottom surface of the tank body (2), three mounting grooves (8) are provided on the top surface of the base (1), three three-jaw chucks (5) are provided inside the three mounting grooves (8), three fixing bolts (7) are provided around the outside of the three three-jaw chucks (5), a fixing frame (9) is provided in the middle of the three three-jaw chucks (5), through holes (11) are provided at the bottom of the three fixing frames (9), sealing pads (10) are provided in the middle of the three fixing frames (9), a flow channel (12) is provided at the bottom of the through hole (11), a liquid outlet pipe (3) is provided on the bottom surface of the base (1), and three wrench insertion square holes (6) are provided on the surface of the base (1).

2. A combined large-capacity liquid storage tank according to claim 1, characterized in that: The three wrenches are inserted into the square holes (6) and are arranged on the side of the base (1) in a parallel state, and the spacing between the three wrenches inserted into the square holes (6) is consistent.

3. A combined large-capacity liquid storage tank according to claim 1, characterized in that: The three three-jaw chucks (5) are all installed in the installation groove (8), and the three-jaw chucks (5) are fixed to the top surface of the base (1) by fixing bolts (7).

4. The combined large-capacity liquid storage tank according to claim 1, characterized in that: The three fixing frames (9) are all welded to the surface of the mounting groove (8) on the top surface of the base (1), and the sealing gasket (10) is installed in the mounting groove (8).

5. The combined large-capacity liquid storage tank according to claim 1, characterized in that: The mounting frames (4) are welded to the bottom surface of the tank body (2); the mounting frames (4) are cylindrical, and the surface of the bottom end of the mounting frames (4) is provided with threads.

6. The combined large-capacity liquid storage tank according to claim 1, characterized in that: The three mounting frames (4) are all set in the middle of the three-jaw chuck (5), and the bottom ends of the mounting frames (4) are threadedly connected to the fixing frame (9).

7. The combined large-capacity liquid storage tank according to claim 1, characterized in that: The three through holes (11) are arranged between the flow channel (12) and the mounting groove (8), and the liquid outlet pipe (3) is connected to the flow channel (12).

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