Semiconductor detection system and position adjusting device thereof

Abstract

The utility model provides a semiconductor detection system and a position adjusting device thereof, and belongs to the technical field of optical instrument detection. The position adjusting device provided by the utility model comprises a fixed seat, the movable seat comprises an adjusting part which is movably arranged on the fixed seat along the first direction; the mounting part protrudes out of the adjusting part in the first direction, and a part of the mounting part is located on the side, away from the adjusting part, of the fixing base in the first direction and used for mounting a sensor; and the adjusting mechanism is connected to the adjusting part and is used for driving the adjusting part to move relative to the fixed seat along the first direction so as to adjust the position of the sensor on the mounting part. According to the position adjusting device provided by the invention, the sensor can go deep into the detection position on the surface of the wafer in the semiconductor detection system, so that the detection precision can be remarkably improved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical instrument detection, in particular to a semiconductor detection system and a position adjustment device thereof. Background Art

[0002] In semiconductor optical defect detection equipment, displacement sensors are generally used to accurately detect the height of the upper surface of the wafer, and the displacement sensors usually need to be assisted by a position adjustment mechanism to be accurately moved to the upper surface of the wafer.

[0003] At present, the existing position adjustment device generally includes a fixed seat and an adjustment seat detachably arranged on the fixed seat. The displacement sensor is arranged on the adjustment seat and is moved with the movement of the adjustment seat. However, since the detection system densely places various detection lenses in the detection area and the overall size of the adjustment seat is large, the adjustment seat cannot carry the displacement sensor deep into the detection area. The displacement sensor can only be moved to a place far away from the detection area for detection, which makes the detection accuracy of the displacement sensor low.

[0004] In view of this, the present utility model is proposed. Utility Model Content

[0005] The utility model provides a semiconductor detection system and a position adjustment device thereof, so as to solve the technical problem that the existing position adjustment device cannot penetrate into the detection area and thus causes low detection accuracy.

[0006] The first aspect of the utility model provides a position adjustment device, comprising: a fixed seat; a movable seat, comprising: an adjustment part, movably arranged on the fixed seat along a first direction; and a mounting part, protruding from the adjustment part along the first direction, and a part of the mounting part is located on a side of the fixed seat away from the adjustment part in the first direction, so as to install a sensor; and an adjustment mechanism, connected to the adjustment part, used to drive the adjustment part to move relative to the fixed seat along the first direction, so as to adjust the position of the sensor on the mounting part.

[0007] In this scheme, the position adjustment device mainly includes a fixed seat, a movable seat and an adjustment mechanism; wherein the adjustment part of the movable seat is movably arranged on the fixed seat along the first direction, the adjustment mechanism is connected to the adjustment part to drive the adjustment part to move relative to the fixed seat along the first direction, and the mounting part of the movable seat protrudes from the adjustment part along the first direction, and the part of the mounting part is located on the side of the fixed seat away from the adjustment part in the first direction, and this part can be installed with a sensor; under the action of the adjustment mechanism, the adjustment part can move relative to the fixed seat along the first direction, thereby driving the mounting part to move along the first direction to achieve the position adjustment of the sensor on the mounting part. Therefore, in the case of a narrow space in the detection area, the fixed seat and the adjustment mechanism can be arranged outside the detection area, and the sensor part installed on the mounting part can be arranged in the detection area, and the mounting part can adjust the position of the sensor in the detection area under the driving action of the adjustment mechanism, so that the sensor is closer to the wafer surface, which significantly improves the detection accuracy of the sensor.

[0008] In a further embodiment of the present invention, the mounting portion includes: a first rod portion extending along a first direction to a side of the fixing seat away from the adjusting portion; and a second rod portion connected to the first rod portion and arranged at a preset angle with the first rod portion for mounting the sensor.

[0009] In a further scheme of the utility model, the mounting portion is formed with a clamping cavity, a deformation cavity connected to the clamping cavity, and a connecting hole connected to the deformation cavity; the position adjustment device also includes a clamping fastener, which is passed through the connecting hole and is configured to be able to squeeze the cavity wall of the deformation cavity or cancel the squeezing of the cavity wall of the deformation cavity, so that the clamping cavity can expand or contract for placing or clamping the sensor.

[0010] In a further embodiment of the present invention, the clamping cavity includes a clamping hole section and at least one deformation groove section connected to the clamping hole section, and each deformation groove section is formed by the inner wall of the clamping cavity being recessed inwardly; the groove wall of each deformation groove section is configured to deform when the clamping fastener squeezes the cavity wall of the deformation cavity or cancels the squeezing of the cavity wall of the deformation cavity, so as to expand or contract the clamping cavity.

[0011] In a further scheme of the utility model, the deformation cavity includes an extrusion cavity section and a deformation hole section, the extrusion cavity section is located between the clamping cavity and the deformation hole section, and the connecting hole is arranged corresponding to the extrusion cavity section and is connected to the extrusion cavity section; the hole wall of the deformation hole section is arranged to be able to deform when the clamping fastener extrudes the cavity wall of the extrusion cavity section or cancels the extrusion of the cavity wall of the extrusion cavity section, so as to expand or contract the deformation cavity.

[0012] In a further scheme of the utility model, the mounting portion is further provided with a deformation groove, and the deformation groove and the connecting hole are located on two opposite sides of the deformation cavity; the groove wall of the deformation groove is configured to be able to deform when the clamping fastener squeezes the cavity wall of the deformation cavity or cancels the squeezing of the cavity wall of the deformation cavity, so as to expand or contract the clamping cavity, wherein the groove wall of the deformation groove is part of the cavity wall of the deformation cavity and / or part of the cavity wall of the clamping cavity.

[0013] In a further solution of the utility model, the fixing seat includes a guiding portion, and the guiding portion has at least one guiding surface; the guiding surface is arranged to be in line contact with the first rod portion to provide guidance when the mounting portion moves with the adjusting portion.

[0014] In a further embodiment of the present invention, the adjustment mechanism includes: an adjusting fastener, one end of which abuts against one of the fixing seat and the adjusting part, and the other end is threadedly connected to the other of the fixing seat and the adjusting part; and an elastic member, which is sleeved on the adjusting fastener and abuts against the fixing seat and the adjusting part at both ends; wherein the adjusting fastener is configured to drive the adjusting part to move relative to the fixing seat through rotational motion so as to adjust the position of the sensor on the mounting part.

[0015] In a further scheme of the utility model, the adjusting part is provided with a guide channel and a mounting through hole connected to the guide channel; the fixing seat includes: a main body, provided with a threaded hole; and a guide column, which protrudes from the main body along a first direction and is provided with a mounting cavity connected to the threaded hole, and the guide column is accommodated in the guide channel; wherein, the adjusting fastener is passed through the mounting through hole and cooperates with the threaded hole via the mounting cavity, and the depth of the adjusting fastener screwed into the threaded hole is adjusted so that the adjusting part can move back and forth along the guide column.

[0016] In a further embodiment of the present invention, an angle dial is provided on the surface of the adjusting portion, and a reference scale is provided on the surface of the adjusting fastener for determining the rotation angle of the adjusting fastener;

[0017] The rotation angle of the adjusting fastener is used to determine the moving distance of the adjusting portion in the first direction together with the thread parameters of the adjusting fastener.

[0018] The second aspect of the utility model provides a semiconductor detection system having a detection area, including a sensor, a plurality of detection mechanisms and a position adjustment device as described above; the sensor is arranged on a mounting portion, and the plurality of detection mechanisms are arranged in the detection area;

[0019] The adjusting part is located outside the detection area in the first direction, and the mounting part can move within the detection area to move the sensor to the wafer surface located in the detection area.

[0020] In summary, the semiconductor detection system and position adjustment device provided by the present invention have at least the following beneficial effects:

[0021] By optimizing the structural design of the position adjustment device, the position adjustment device can have higher spatial adaptability. When faced with a small detection area in a semiconductor detection system, the fixed seat and the adjustment mechanism of the position adjustment device can be arranged outside the detection area, while the mounting portion of the movable seat can be partially arranged in the detection area space, and the position of the sensor can be adjusted along the first direction with the cooperation of the adjustment mechanism, the adjustment portion and other components, so that the position of the sensor can be closer to the wafer surface, thereby effectively improving the detection accuracy of the sensor.

[0022] Other features and advantages of the semiconductor detection system and position adjustment device provided by the present invention will be described in detail in the subsequent specific implementation methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the specific implementation or the prior art description. Obviously, the drawings described below are some implementations of the utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0024] Figure 1 A schematic diagram of a module of a semiconductor detection system provided by an embodiment of the utility model;

[0025] Figure 2 A schematic diagram of the overall structure of a position adjustment device provided in an embodiment of the utility model;

[0026] Figure 3 An axonometric cross-sectional view of a position adjustment device provided by an embodiment of the utility model;

[0027] Figure 4 A schematic diagram of a partial structure of a second rod portion provided in an embodiment of the utility model;

[0028] Figure 5 A schematic diagram of sensor installation provided by an embodiment of the utility model;

[0029] Figure 6 A schematic diagram of the overall structure of the mobile base provided by an embodiment of the utility model;

[0030] Figure 7 A schematic diagram of the overall structure of a fixing base provided in an embodiment of the utility model;

[0031] Figure 8 A schematic diagram of the overall structure of the adjusting fastener provided in the embodiment of the utility model;

[0032] Fig. 9A planar cross-sectional view of a position adjustment device provided by an embodiment of the utility model;

[0033] Fig.10 A schematic structural diagram of a position adjustment device provided by an embodiment of the utility model along a first direction viewing angle.

[0034] The reference numerals are as follows:

[0035] 100, position adjustment device; Z, first direction;

[0036] 10. Fixed seat;

[0037] 11. guide portion; 111. guide surface; 12. main body; 121. threaded hole; 13. guide column; 131. mounting cavity;

[0038] 20. Mobile seat;

[0039] 21. adjusting portion; 211. guide channel; 212. mounting through hole;

[0040] 22, mounting portion; 221, first rod portion; 222, second rod portion; 22A, clamping cavity; 22A1, clamping hole section; 22A2, deformation groove section; 22B, deformation cavity; 22B1, extrusion cavity section; 22B2, deformation hole section; 22C, connecting hole; 22D, deformation groove;

[0041] 30. Adjustment mechanism; 31. Adjustment fastener; 32. Elastic member;

[0042] 40. Clamping fasteners;

[0043] 200, sensor;

[0044] 300. Testing agency;

[0045] 1000. Semiconductor inspection system. DETAILED DESCRIPTION

[0046] In the description of the present invention, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear to indicate the orientation or position relationship, unless otherwise specified, they are understood to be based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0047] In addition, if there is a feature defined as "first" or "second", it is only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Features defined as "first" or "second" may explicitly or implicitly include at least one of the defined features. If there is a description of "plurality", the general meaning is to include at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0048] In this utility model, unless otherwise clearly specified and limited, the terms such as "install", "connect", "connect", "fix" and so on should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection, it can be a direct connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to the specific circumstances.

[0049] In the description of this specification, if the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" appear, it means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction.

[0050] refer to Figure 1 As shown, the semiconductor inspection system 1000 provided by the embodiment of the present invention has an inspection area, and the semiconductor inspection system 1000 includes a sensor 200 , a plurality of inspection mechanisms 300 and a position adjustment device 100 .

[0051] A wafer is placed in the detection area, and a plurality of detection mechanisms 300 are arranged in the detection area and used to detect the wafer. Specifically, the plurality of detection mechanisms 300 may be various detection lenses.

[0052] The sensor 200 is disposed on the position adjustment device 100 and can move along the first direction Z under the action of the position adjustment device 100 to penetrate into the wafer surface within the detection area to collect signals.

[0053] It should be noted that the detection area in the embodiment of the utility model refers to the spatial area where the wafer is located. The first direction Z can be a direction perpendicular to the upper surface of the wafer, or a direction with a certain angle to the upper surface of the wafer. This application does not impose any specific restrictions.

[0054] refer to Figure 2 As shown, the position adjustment device 100 includes a fixed seat 10, a movable seat 20 and an adjustment mechanism 30. The movable seat 20 includes an adjustment portion 21 and a mounting portion 22. The adjustment portion 21 is movably arranged on the fixed seat 10 along a first direction Z. The mounting portion 22 protrudes from the adjustment portion 21 along the first direction Z, and a portion of the mounting portion 22 is located on a side of the fixed seat 10 away from the adjustment portion 21 in the first direction Z, so as to install the sensor 200. The adjustment mechanism 30 is connected to the adjustment portion 21, and is used to drive the adjustment portion 21 to move relative to the fixed seat 10 along the first direction Z, so as to adjust the position of the sensor 200 on the mounting portion 22.

[0055] It can be understood that the adjusting portion 21 in this embodiment is movably disposed on the fixing seat 10 along the first direction Z, and the adjusting portion 21 is connected to the adjusting mechanism 30, so that the adjusting portion 21 can be moved relative to the fixing seat 10 along the first direction Z under the action of the adjusting mechanism 30. The mounting portion 22 protrudes from the adjusting portion 21 along the first direction Z, and the portion of the mounting portion 22 located on the side of the fixing seat 10 away from the adjusting portion 21 in the first direction Z can be installed with the sensor 200, so that the adjusting mechanism 30 can drive the adjusting portion 21 along the first direction Z, thereby driving the mounting portion 22 to move in the first direction Z, so as to adjust the position of the sensor 200. Therefore, based on the spatially separated design of the adjustment part 21 and the mounting part 22 of the movable seat 20, the position adjustment device 100 can have higher spatial adaptability. When the space of the detection area of ​​the semiconductor detection system 1000 is narrow, the fixed seat 10, the adjustment part 21 of the movable seat 20 and the adjustment mechanism 30 can all be arranged outside the detection area, and the mounting part 22 of the movable seat 20 can pass through the gaps between the multiple detection mechanisms 300 and extend into the detection area. At the same time, the mounting part 22 can move along the first direction Z in the detection area under the action of the adjustment mechanism 30 to adjust the position of the sensor 200, thereby not only making the space occupied by the position adjustment device 100 in the detection area lower, but also effectively improving the detection accuracy of the sensor.

[0056] Specifically, in order to better adapt to the narrow space of the detection area so that the mounting portion 22 can be less constrained by the multiple detection mechanisms 300 in the detection area during movement, the mounting portion 22 can be designed in a rod-shaped body, a plate-shaped body or other specific shapes that occupy less space.

[0057] refer to Figure 3In an optional embodiment of the utility model, the mounting portion 22 includes: a first rod portion 221, extending along the first direction Z to a side of the fixing seat 10 away from the adjusting portion 21; and a second rod portion 222, connected to the first rod portion 221 and arranged at a preset angle with the first rod portion 221, for mounting the sensor 200.

[0058] The mounting portion 22 in this embodiment mainly includes a first rod portion 221 and a second rod portion 222. One end of the first rod portion 221 protrudes from the adjusting portion 21, and the other end extends along the first direction Z to a side of the fixing seat 10 away from the adjusting portion 21, and is connected to the second rod portion 222. The second rod portion 222 and the first rod portion 221 are designed to form a preset angle. After the sensor 200 is installed on the second rod portion 222, the first rod portion 221 can be arranged outside the detection area along with the adjusting portion 21 and other components, while the second rod portion 222 can be partially located in the detection area, so that the sensor 200 can be driven by the first rod portion 221 to adjust its position, thereby making the position movement of the mounting portion 22 more flexible, thereby increasing the proximity of the sensor 200 to the detection position, and further improving the detection accuracy.

[0059] The angle between the first rod portion 221 and the second rod portion 222 can be flexibly designed according to the arrangement of other detection lenses and other components in the detection area, so as to avoid the detection lenses and other components in the detection area as much as possible, so that the sensor 200 can penetrate into the detection area to get closer to the detection position of the wafer surface; for example, Figure 3 As shown, the angle between the first rod portion 221 and the second rod portion 222 can be designed to be 90°.

[0060] To effectively fix the sensor 200 to the mounting portion 22, refer to Figure 4 and Figure 5 As shown, in an optional embodiment of the utility model, the mounting portion 22 is formed with a clamping cavity 22A, a deformation cavity 22B connected to the clamping cavity 22A, and a connecting hole 22C connected to the deformation cavity 22B; the position adjustment device 100 also includes a clamping fastener 40, the clamping fastener 40 is passed through the connecting hole 22C and is configured to be able to squeeze the cavity wall of the deformation cavity 22B or cancel the squeezing of the cavity wall of the deformation cavity 22B, so that the clamping cavity 22A can expand or contract, for placing or clamping the sensor 200.

[0061] In this embodiment, the second rod portion 222 can be made of elastic material, and the clamping cavity 22A, deformation cavity 22B and connecting hole 22C formed by the mounting portion 22 can be designed at the end of the second rod portion 222 away from the first rod portion 221, wherein the clamping cavity 22A is connected with the deformation cavity 22B, and the deformation cavity 22 is connected with the connecting hole 22C. The clamping fastener 40 is passed through the connecting hole 22C. The clamping fastener 40 can squeeze the cavity wall of the deformation cavity 22B to make the deformation cavity 22B produce elastic deformation, thereby driving the deformation and expansion of the clamping cavity 22A, so that the sensor 200 can be placed in or taken out of the clamping cavity 22A. The clamping fastener 40 can also cancel the squeezing of the cavity wall of the deformation cavity 22B, so that the clamping cavity 22A can recover and shrink under the action of elastic force, thereby clamping the sensor 200 in the clamping cavity 22A, so that it is stably fixed on the mounting portion 22.

[0062] Specifically, when the clamping fastener 40 squeezes the wall of the deformation cavity 22B, the wall of the deformation cavity 22B will be deformed, and the wall of the deformation cavity 22B stretches the wall of the clamping cavity 22A to deform it, so that the clamping cavity 22A expands; conversely, when the squeezing of the wall of the deformation cavity 22B is cancelled, the wall of the deformation cavity 22B and the wall of the clamping cavity 22A will shrink and deform, so that the clamping cavity 22A shrinks.

[0063] The openings of the clamping cavity 22A and the deformation cavity 22B in this embodiment can be designed to be oriented towards the first direction Z, or can be designed to be oriented towards other directions other than the first direction Z. The design can be specifically based on the detection requirements of the sensor. The connecting hole 22C can be specifically opened on the side of the deformation cavity 22B to allow the clamping fastener 40 to pass through and squeeze or cancel the cavity wall of the deformation cavity 22B.

[0064] It should be clarified that the clamping fastener 40 in this embodiment can specifically be a top screw, which passes through the connecting hole 22C to apply extrusion force to the cavity wall of the deformation cavity 22B. At the same time, the top screw has a smaller volume and cross-sectional area, which can further reduce the space occupied by the mounting part 22 in the detection area, so that the sensor 200 can more easily penetrate into the detection area.

[0065] In some embodiments, the clamping fastener 40 may also be a bolt, and the cavity wall of the deformation cavity 22B may be provided with a screw hole adapted thereto, the screw hole being axially aligned with the connecting hole 22C, and the clamping fastener 40 is connected to the screw hole after passing through the connecting hole 22C, and the cavity wall of the deformation cavity 22B may be elastically deformed by tightening the bolt to drive the clamping cavity 22A to contract, thereby clamping the sensor 200 in the clamping cavity 22A, and the cavity wall of the deformation cavity 22B is restored by loosening the bolt, and the sensor 200 may be placed in or removed from the clamping cavity 22A.

[0066] The clamping cavity 22A in the embodiment of the utility model can be formed by a 360° circular hole, or by a special-shaped hole larger than 180°, and can be flexibly designed while meeting the requirements of placing and removing the sensor 200.

[0067] In some optional embodiments, in order to improve the smoothness during elastic deformation, the clamping cavity 22A is designed with a clamping hole section 22A1 and one or more deformation groove sections 22A2 connected to the clamping hole section 22A1, and each deformation groove section 22A2 is formed by the inner wall of the clamping cavity 22A being recessed inward; the groove wall of each deformation groove section 22A2 is configured to deform when the clamping fastener 40 squeezes the cavity wall of the deformation cavity 22B or cancels the squeezing of the cavity wall of the deformation cavity 22B, so as to expand or contract the clamping cavity 22A.

[0068] refer to Figure 4 As shown, the clamping hole section 22A1 in this embodiment can be formed by a circular hole, and the deformation groove section 22A2 is designed with an inner wall of the clamping hole section 22A1 away from the end of the deformation cavity 22B, and the deformation groove section 22A2 is recessed on the inner wall of the clamping hole section 22A1. When the clamping fastener 40 squeezes the cavity wall of the deformation cavity 22B or cancels the squeezing of the cavity wall of the deformation cavity 22B, the groove wall of the deformation groove section 22A2 can be deformed, so that the clamping cavity 22A is easier to expand or contract; the design of the deformation groove section 22A2 increases the cavity wall area of ​​the clamping cavity 22A, so that the force required when the clamping cavity 22A is deformed is smaller, and the smoothness during elastic deformation is higher, so as to facilitate the placement and removal of the sensor 200.

[0069] It should be noted that in this embodiment, a plurality of deformation groove segments 22A2 may be designed around the inner wall of the clamping hole segment 22A1 , and the specific number and position may be flexibly designed according to the morphology of the sensor 200 and the material of the second rod portion 222 .

[0070] In order to realize that the deformation process of the deformation cavity 22B drives the clamping cavity to expand or contract, in an optional embodiment of the utility model, the deformation cavity 22B includes an extrusion cavity section 22B1 and a deformation hole section 22B2, the extrusion cavity section 22B1 is located between the clamping cavity 22A and the deformation hole section 22B2, and the connecting hole 22C is arranged corresponding to the extrusion cavity section 22B1 and is connected to the extrusion cavity section 22B1; the hole wall of the deformation hole section 22B2 is arranged to be able to deform when the clamping fastener 40 squeezes the cavity wall of the extrusion cavity section 22B1 or cancels the extrusion of the cavity wall of the extrusion cavity section 22B1, so as to expand or contract the deformation cavity 22B.

[0071] It can be understood that the extrusion cavity section 22B1 is located between the clamping cavity 22A and the deformation hole section 22B2, and the clamping cavity 22A is connected with the deformation hole section 22B2. The deformation hole section 22B2 can reduce the stress of the extrusion cavity section 22B1 during the deformation process by the deformation of the hole wall, so that the extrusion cavity section 22B1 can produce elastic deformation under a small action. Since the clamping cavity 22A is connected with the extrusion cavity section 22B1, the extrusion cavity section 22B1 can also drive the clamping cavity 22A to produce deformation during expansion or contraction. The sensor 200 can be expanded or contracted to facilitate the fixation, placement and removal of the sensor 200. In addition, the connecting hole 22C is designed to face the extrusion cavity segment 22B1 and is connected to an inner wall of the extrusion cavity segment 22B1. After the clamping fastener 40 passes through the connecting hole 22C, the extrusion cavity segment 22B1 can be expanded or contracted by squeezing or un-squeezing the other inner wall of the extrusion cavity segment 22B1 opposite to the connecting hole 22C, thereby realizing the deformation of the deformation cavity 22B and driving the clamping cavity 22A to expand or contract.

[0072] In order to further reduce the force required for the deformation of the deformation cavity 22B, in an optional embodiment of the utility model, the mounting portion 22 is further provided with a deformation groove 22D, and the deformation groove 22D and the connecting hole 22C are located on two opposite sides of the deformation cavity 22B; the groove wall of the deformation groove 22D is configured to be able to deform when the clamping fastener 40 squeezes the cavity wall of the deformation cavity 22B or cancels the squeezing of the cavity wall of the deformation cavity 22B, so as to expand or contract the clamping cavity 22A, wherein the groove wall of the deformation groove 22D is part of the cavity wall of the deformation cavity 22B and / or part of the cavity wall of the clamping cavity 22A.

[0073] The deformation groove 22D and the connecting hole 22C designed in the mounting portion 22 in the present embodiment are respectively located on the opposite sides of the deformation cavity 22B, that is, the deformation groove 22D is located on the side of the extrusion cavity section 22B1 that receives the clamping fastener 40. The design of the deformation groove 22D is conducive to reducing the wall thickness of the cavity wall opposite to the connecting hole 22C, thereby making it easier for the clamping fastener 40 to deform when squeezing the cavity wall of the deformation cavity 22B or canceling the squeezing of the cavity wall of the deformation cavity 22B, so that the expansion or contraction of the clamping cavity 22A is smoother.

[0074] The groove wall of the deformation groove 22D in this embodiment can be designed on the outer wall of the deformation cavity 22B, or on the upper part of the outer wall of the clamping cavity 22A, or can be designed on the outer walls of the deformation cavity 22B and the clamping cavity 22A at the same time, both of which can reduce the wall thickness of the cavity wall opposite to the connecting hole 22C, thereby reducing the force required for the deformation of the deformation cavity 22B.

[0075] To improve the displacement accuracy of the sensor 200, refer to Figure 2 and Figure 7As shown, in an optional embodiment of the utility model, the fixing seat 10 includes a guiding portion 11, and the guiding portion 11 has at least one guiding surface 111; the guiding surface 111 is configured to be in line contact with the first rod portion 221 to provide guidance when the mounting portion 22 moves with the adjusting portion 21.

[0076] It should be noted that the fixing seat 10 in this embodiment can be fixed outside the detection area of ​​the semiconductor detection system 1000 through a supporting assembly. Through the design of one or more guide surfaces 111 on the guide portion 11, the first rod portion 221 is in line contact with the guide surface 111. The first rod portion 221 can be displaced along the first direction Z in cooperation with the guide surface 111, thereby improving the movement accuracy of the mounting portion 22 during the movement of the adjustment portion 21.

[0077] refer to Figure 7 As shown, in some specific embodiments, the fixing seat 10 is in the shape of a square plate as a whole, and the guide portion 11 at one corner of the fixing seat 10 is designed with two adjacent guide surfaces 111, and the two guide surfaces 111 are in line contact with the first rod portion 221, so that the first rod portion 221 is limited by the two guide surfaces 111, and the mounting portion 22 will not move relative to the fixing seat 10 in directions other than the first direction Z (for example, to prevent the mounting portion 22 from rotating relative to the fixing seat 10 as a whole), thereby further improving the movement accuracy of the mounting portion 22 during the movement of the adjustment portion 21. In addition, the first rod portion 221 can be a cylindrical thin rod with a smaller diameter, which can more easily pass through the gaps between multiple detection mechanisms 300 and transport the sensor 200 to the detection position on the wafer surface, so that the position adjustment device 100 is more spatially adaptable.

[0078] To achieve the displacement of the adjustment portion 21 along the first direction Z, refer to Figure 3 and Fig. 9 As shown, in an optional embodiment of the utility model, the adjustment mechanism 30 includes: an adjustment fastener 31, one end of which abuts against one of the fixing seat 10 and the adjustment part 21, and the other end is threadedly connected to the other of the fixing seat 10 and the adjustment part 21; and an elastic member 32, which is sleeved on the adjustment fastener 31 and has two ends abutting against the fixing seat 10 and the adjustment part 21; wherein the adjustment fastener 31 is configured to drive the adjustment part 21 to move relative to the fixing seat 10 through a rotational motion so as to adjust the position of the sensor 200 on the mounting part 22.

[0079] The adjustment mechanism 30 in this embodiment mainly includes an adjustment fastener 31 and an elastic member 32. When one end of the adjustment fastener 31 along the first direction Z abuts against the fixing seat 10, the other end can be threadedly connected to the adjustment portion 21, and when one end of the adjustment fastener 31 along the first direction Z abuts against the adjustment portion 21, the other end can be threadedly connected to the fixing seat 10; the elastic member 32 is sleeved on the adjustment fastener 31 and is coaxial with the adjustment fastener 31. The two ends of the elastic member 32 abut against the fixing seat 10 and the adjustment portion 21 respectively, that is, the elastic member 32 is in a compressed state. When the adjustment mechanism 30 drives the adjustment portion 21 to move, the adjustment fastener 31 rotates by threading with the fixing seat 10 or the adjustment portion 21, thereby driving the adjustment portion 21 to move relative to the fixing seat 10 along the first direction Z, and then the first rod portion 221 protruding from the adjustment portion 21 drives the second rod portion 222 to move, so as to achieve position adjustment of the sensor 200.

[0080] Therefore, since the adjusting fastener 31 is adjusted through threaded cooperation, the position adjustment of the sensor 200 can have a higher adjustment accuracy; and, since the two ends of the elastic member 32 respectively abut the fixing seat 10 and the adjusting part 21, pressure can be applied to the fixing seat 10 and the adjusting part 21, thereby achieving the position fixation of the fixing seat 10 and the adjusting part 21 after the adjustment is stopped, so that the detection stability of the sensor 200 is improved; and due to the coaxial design of the elastic member 32 and the adjusting fastener 31, the force generated by the adjusting fastener 31 and the pressure released by the elastic member 32 are both in the first direction Z, so as to avoid tilting or offset caused by unequal forces in the sensor 200 during the position adjustment process.

[0081] To adapt the installation of the adjustment mechanism 30, refer to Figure 6 , Figure 7 and Fig. 9 As shown, in an optional embodiment of the utility model, the adjusting portion 21 is provided with a guide channel 211 and a mounting through hole 212 connected to the guide channel 211; the fixing seat 10 includes: a main body 12, provided with a threaded hole 121; and a guide column 13, which protrudes from the main body 12 along the first direction Z and is provided with a mounting cavity 131 connected to the threaded hole 121, and the guide column 13 is accommodated in the guide channel 211; wherein, the adjusting fastener 31 is passed through the mounting through hole 212 and cooperates with the threaded hole 121 via the mounting cavity 131, and the depth of the adjusting fastener 31 screwed into the threaded hole 121 is adjusted so that the adjusting portion 21 can move back and forth along the guide column 13.

[0082] The guide column 13 in this embodiment is accommodated in the guide channel 211. The guide channel 211 and the installation cavity 131 of the guide column 13 jointly provide the space required for the arrangement of the adjustment fastener 31 and the elastic member 32. The adjustment fastener 31 passes through the installation through hole 212, the guide channel 211, and the installation cavity 131 in sequence along the first direction Z and is screwed with the threaded hole 121 on the main body 12. After rotating the adjustment fastener 31, the depth of the adjustment fastener 31 screwed into the threaded hole 121 can be adjusted, so that the adjustment part 21 can be displaced along the guide column 13 by the adjustment fastener 31.

[0083] In order to further improve the accuracy of position adjustment, the threads on the fixing seat 10 and the adjusting fastener 31 are both designed with fine pitch threads.

[0084] In some specific embodiments, reference Figure 8 The adjusting fastener 31 can be a hexagonal bolt, and the elastic member 32 can be a compression spring. One end of the head of the adjusting fastener 31 is designed to be at the end of the adjusting portion 21 away from the fixing seat 10 along the first direction Z, and the other end with a thread passes through the adjusting portion 21 and is connected to the threaded hole 121 of the fixing seat 10. Therefore, during the rotation of the hexagonal bolt, the adjusting portion 21 can be driven to move along the first direction Z on the fixing seat.

[0085] refer to Fig.10 As shown, in order to achieve visibility of the adjustment distance of the sensor 200, in an optional embodiment of the utility model, an angle dial is provided on the surface of the adjusting portion 21, and a reference scale is provided on the surface of the adjusting fastener 31 for determining the rotation angle of the adjusting fastener 31; the rotation angle of the adjusting fastener 31 is used to determine the moving distance of the adjusting portion 21 in the first direction Z together with the thread parameters of the adjusting fastener 31.

[0086] Therefore, during the adjustment process, by recording the rotation angle of the reference scale line of the adjusting fastener 31 relative to the surface angle dial of the adjusting part 21, the moving distance of the adjusting part 21 in the first direction Z can be calculated using the formula H=(θ*P) / 360, and then the adjustment distance of the sensor 200 can be obtained; wherein H is the moving distance, θ is the rotation angle, and P is the thread lead.

[0087] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations of the present invention. Those skilled in the art can change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A position adjustment device, characterized in that: include: Fixed seat (10); The mobile seat (20) comprises: An adjusting portion (21) is movably arranged on the fixing seat (10) along a first direction (Z); as well as a mounting portion (22) protruding from the adjusting portion (21) along the first direction (Z), and a portion of the mounting portion (22) being located on a side of the fixing base (10) away from the adjusting portion (21) in the first direction (Z), for mounting a sensor (200); and An adjustment mechanism (30) is connected to the adjustment portion (21) and is used to drive the adjustment portion (21) to move along the first direction (Z) relative to the fixing seat (10) to adjust the position of the sensor (200) on the mounting portion (22).

2. The position adjustment device according to claim 1, characterized in that: The mounting portion (22) comprises: A first rod portion (221) extends along the first direction (Z) to a side of the fixing seat (10) away from the adjusting portion (21); and The second rod portion (222) is connected to the first rod portion (221) and is arranged at a preset angle with the first rod portion (221), and is used for installing the sensor (200).

3. The position adjustment device according to claim 1, characterized in that: The mounting portion (22) is formed with a clamping cavity (22A), a deformation cavity (22B) communicating with the clamping cavity (22A), and a connection hole (22C) communicating with the deformation cavity (22B); The position adjustment device (100) further comprises a clamping fastener (40), wherein the clamping fastener (40) is passed through the connecting hole (22C) and is configured to be able to squeeze the cavity wall of the deformation cavity (22B) or cancel the squeezing of the cavity wall of the deformation cavity (22B) so as to expand or contract the clamping cavity (22A) for placing or clamping the sensor (200).

4. The position adjustment device according to claim 3, characterized in that: The clamping cavity (22A) comprises a clamping hole section (22A1) and at least one deforming groove section (22A2) connected to the clamping hole section (22A1), and each of the deforming groove sections (22A2) is formed by an inner wall of the clamping cavity (22A) being recessed inwardly; The groove wall of each deformation groove segment (22A2) is configured to deform when the clamping fastener (40) squeezes the cavity wall of the deformation cavity (22B) or cancels the squeezing of the cavity wall of the deformation cavity (22B), so as to expand or contract the clamping cavity (22A).

5. The position adjustment device according to claim 3, characterized in that: The deformation chamber (22B) comprises an extrusion chamber section (22B1) and a deformation hole section (22B2), the extrusion chamber section (22B1) is located between the clamping chamber (22A) and the deformation hole section (22B2), and the connecting hole (22C) is arranged corresponding to the extrusion chamber section (22B1) and is connected to the extrusion chamber section (22B1); The hole wall of the deformation hole section (22B2) is arranged to be deformable when the clamping fastener (40) squeezes the cavity wall of the extrusion cavity section (22B1) or cancels the squeezing of the cavity wall of the extrusion cavity section (22B1), so as to expand or contract the deformation cavity (22B).

6. The position adjustment device according to claim 3, characterized in that: The mounting portion (22) is further provided with a deformation groove (22D), and the deformation groove (22D) and the connecting hole (22C) are located on two opposite sides of the deformation cavity (22B); The groove wall of the deformation groove (22D) is configured to be deformable when the clamping fastener (40) squeezes the cavity wall of the deformation cavity (22B) or cancels the squeezing of the cavity wall of the deformation cavity (22B), so as to expand or contract the clamping cavity (22A), wherein the groove wall of the deformation groove (22D) is part of the cavity wall of the deformation cavity (22B) and / or part of the cavity wall of the clamping cavity (22A).

7. The position adjustment device according to claim 2, characterized in that: The fixing seat (10) comprises a guiding portion (11), wherein the guiding portion (11) has at least one guiding surface (111); The guide surface (111) is arranged to be in line contact with the first rod portion (221) so as to provide guidance when the mounting portion (22) moves along with the adjusting portion (21).

8. The position adjustment device according to any one of claims 1 to 7, characterized in that: The regulating mechanism (30) comprises: an adjusting fastener (31), one end of which abuts against one of the fixing seat (10) and the adjusting portion (21), and the other end of which is threadedly connected to the other of the fixing seat (10) and the adjusting portion (21); and An elastic member (32) is sleeved on the adjusting fastener (31) and has two ends abutting against the fixing seat (10) and the adjusting portion (21); The adjusting fastener (31) is configured to drive the adjusting portion (21) to move relative to the fixing seat (10) through a rotational motion, so as to adjust the position of the sensor (200) on the mounting portion (22).

9. The position adjustment device according to claim 8, characterized in that: The adjusting portion (21) is provided with a guide channel (211) and a mounting through hole (212) communicating with the guide channel (211); The fixing seat (10) comprises: a main body (12) provided with a threaded hole (121); and a guide column (13) protruding from the main body (12) along the first direction (Z) and provided with a mounting cavity (131) communicating with the threaded hole (121), and the guide column (13) is received in the guide channel (211); The adjusting fastener (31) is inserted into the mounting through hole (212) and cooperates with the threaded hole (121) via the mounting cavity (131), and the depth of the adjusting fastener (31) screwed into the threaded hole (121) is adjusted so that the adjusting portion (21) can move back and forth along the guide column (13).

10. The position adjustment device according to claim 8, characterized in that: The surface of the adjusting portion (21) is provided with an angle dial, and the surface of the adjusting fastener (31) is provided with a reference scale line for determining the rotation angle of the adjusting fastener (31); The rotation angle of the adjusting fastener (31) is used to determine the moving distance of the adjusting portion (21) in the first direction (Z) together with the thread parameters of the adjusting fastener (31).

11. A semiconductor inspection system having an inspection area, characterized in that: It comprises a sensor (200), a plurality of detection mechanisms (300), and a position adjustment device (100) as claimed in any one of claims 1 to 10; The sensor (200) is arranged on the mounting portion (22), and a plurality of the detection mechanisms (300) are arranged in the detection area; The adjusting portion (21) is located outside the detection area in the first direction (Z), and the mounting portion (22) is movable within the detection area to move the sensor (200) to a wafer surface located in the detection area.

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