TCO conductive glass and battery

By adopting a double-layer structure of a fluorine-antimony co-doped tin oxide film layer and a fluorine-doped tin oxide film layer in the TCO conductive glass, the problem that the resistance of the TCO conductive glass in the prior art is difficult to further reduce, and a lower plane resistance at the same thickness is achieved.

CN222764226UActive Publication Date: 2025-04-15HUNAN KIBING SOLAR TECH CO LTD
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Patent Information

Application Number
CN202420266107.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-02-02
Publication Date
2025-04-15
Estimated Expiration
2034-02-02

AI Technical Summary

Technical Problem

In the prior art, when fluorine is doped with tin oxide, the film layer thickness is constant, and after the doping concentration of fluorine in the film layer reaches the optimal level, the resistance of the TCO conductive glass is difficult to further reduce.

Method used

The TCO conductive glass adopts a double-layer structure, wherein the first transparent conductive layer is a fluorine-doped tin oxide film layer, and the second transparent conductive layer is a fluorine-antimony co-doped tin oxide film layer. The surface resistance of the conductive layer is further reduced through doping of antimony elements and the mutual permeation between the fluorine-antimony co-doped tin oxide film layer and the fluorine-doped tin oxide film layer.

Benefits of technology

When the conductive layer thickness is certain, the surface resistance of TCO conductive glass is effectively reduced and its electrical properties are improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a TCO conducting glass and battery, the TCO conducting glass comprises a substrate and a conducting layer arranged on the substrate, the conducting layer comprises a first transparent conducting layer and a second transparent conducting layer, the first transparent conducting layer is a fluorine doped tin oxide film layer, and the second transparent conducting layer is a fluorine doped tin oxide film layer. And the second transparent conductive layer is a fluorine-antimony co-doped tin oxide film layer. According to the TCO conductive glass provided by the utility model, the surface resistance can be further reduced when the thickness of the conductive layer is fixed.
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Description

Technical Field

[0001] The utility model relates to the technical field of conductive glass, in particular to TCO conductive glass and a battery. Background Art

[0002] TCO (Transparent Conductive Oxides) glass, or transparent conductive oxide-coated glass, is a flat glass surface coated with a uniform layer of a transparent conductive oxide film (TCO film) through physical or chemical coating methods. The film materials primarily include oxides of indium (In), antimony (Sb), zinc (Zn), and cadmium (Cd), as well as their composite oxides. Physically, TCO film is also a semiconductor optoelectronic material. It can increase the number of carriers through doping and other methods, resulting in a degenerate system. Due to its excellent optoelectronic properties, such as wide bandgap, low resistivity, high visible light transmittance, and high infrared spectral reflectivity, it has long been widely used in solar cells, flat-panel displays, organic light-emitting diodes, low-emissivity glass, special-purpose window coatings, transparent thin-film transistors, and flexible electronic devices.

[0003] Fluorine-doped tin oxide is a highly effective TCO conductive glass and is widely used in solar cells. Fluorine-doped tin oxide is the core technology for TCO conductive glass and plays a decisive role in its electrical and optical properties. However, existing technologies for fluorine-doped tin oxide limit the film thickness, making it difficult to further reduce the resistance of the TCO conductive glass after reaching the optimal fluorine doping concentration. Utility Model Content

[0004] The main purpose of the utility model is to provide a TCO conductive glass and a battery, aiming to solve the problem in the prior art that when fluorine is doped with tin oxide, the film thickness is constant and the resistance of the TCO conductive glass is difficult to further reduce after the fluorine doping concentration in the film reaches an optimal level.

[0005] To achieve the above objectives, the present invention proposes a TCO conductive glass, comprising a substrate and a conductive layer disposed on the substrate, wherein the conductive layer comprises a first transparent conductive layer and a second transparent conductive layer, wherein the first transparent conductive layer is a fluorine-doped tin oxide film layer, and the second transparent conductive layer is a fluorine-antimony co-doped tin oxide film layer.

[0006] Optionally, the first transparent conductive layer is located between the substrate and the second transparent conductive layer.

[0007] Optionally, the thickness of the first transparent conductive layer is 200 nm to 800 nm.

[0008] Optionally, the thickness of the first transparent conductive layer is 300 nm to 750 nm.

[0009] Optionally, the second transparent conductive layer has a thickness of 5 nm to 200 nm.

[0010] Optionally, the second transparent conductive layer has a thickness of 20 nm to 150 nm.

[0011] Optionally, a first barrier layer is provided between the substrate and the conductive layer.

[0012] Optionally, a second barrier layer is provided between the first barrier layer and the conductive layer.

[0013] The present invention also provides a battery, which includes the TCO conductive glass described above.

[0014] In the technical solution of the present utility model, the conductive layer of the TCO conductive glass includes a fluorine-antimony co-doped tin oxide film layer and a fluorine-doped tin oxide film layer. The doping of antimony element in the fluorine-antimony co-doped tin oxide film layer can increase the concentration of carriers. At the same time, the fluorine-antimony co-doped tin oxide film layer and the fluorine-doped tin oxide film layer will penetrate each other, thereby further reducing the surface resistance of the TCO conductive glass when the thickness of the conductive layer is constant. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0016] Figure 1 This is a schematic structural diagram of an embodiment of the TCO conductive glass provided by the present invention;

[0017] Figure 2 This is a schematic structural diagram of another embodiment of the TCO conductive glass provided by the present invention.

[0018] Description of Figure Numbers:

[0019] Label name Label name 10 TCO conductive glass 4 Second barrier layer 1 substrate 5 First transparent conductive layer 2 Basecoat 6 Second transparent conductive layer 3 First barrier layer 7 surface layer

[0020] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0023] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0024] Fluorine-doped tin oxide is a highly effective TCO conductive glass and is widely used in solar cells. Fluorine-doped tin oxide is the core technology for TCO conductive glass and plays a decisive role in its electrical and optical properties. However, existing technologies for fluorine-doped tin oxide limit the film thickness, making it difficult to further reduce the resistance of the TCO conductive glass after reaching the optimal fluorine doping concentration.

[0025] Intrinsic SnO2 is an insulating semiconductor, but oxygen vacancies exist in actual SnO2 crystals, forming donor energy levels within the band gap. Therefore, SnO2 thin films are also n-type semiconductors. SnO2 doping can be divided into p-type doping and n-type doping. Because p-type SnO2 thin films are more difficult to convert to p-type, compared to n-type doping of SnO2 thin films that has been put into practical application, it is still in the experimental research stage. Therefore, for large-scale industrial production, it is necessary to start with n-type doping. N-type doping is the process of doping with Group VA and Group VIIA elements to form n-type SnO2 semiconductors. Sb in Group VA elements and Sn are adjacent atoms in the same period, so Sb doping does not cause significant changes in the lattice structure. Sb-doped SnO2 thin films have excellent optical and electrical properties, as well as low cost, good thermal stability, and high hardness.

[0026] In view of this, the present invention proposes a TCO conductive glass, which can further reduce the surface resistance of the TCO conductive glass when the thickness of the conductive layer is constant. Figure 1 This is a schematic structural diagram of an embodiment of the TCO conductive glass provided by the present invention; Figure 2 This is a schematic structural diagram of another embodiment of the TCO conductive glass provided by the present invention.

[0027] In the embodiment of the present utility model, Figures 1 to 2 As shown, the TCO conductive glass 10 includes a substrate 1 and a conductive layer provided on the substrate 1, wherein the conductive layer includes a first transparent conductive layer 5 and a second transparent conductive layer 6, wherein the first transparent conductive layer 5 is a fluorine-doped tin oxide film layer, and the second transparent conductive layer 6 is a fluorine-antimony co-doped tin oxide film layer.

[0028] In the technical solution of the present invention, the conductive layer of the TCO conductive glass 10 includes a fluorine-antimony co-doped tin oxide film layer and a fluorine-doped tin oxide film layer. The doping of antimony element in the fluorine-antimony co-doped tin oxide film layer can increase the concentration of carriers. At the same time, the fluorine-antimony co-doped tin oxide film layer and the fluorine-doped tin oxide film layer will penetrate each other, thereby further reducing the surface resistance of the TCO conductive glass 10 when the thickness of the conductive layer is constant.

[0029] It is understood that the substrate 1 can be a glass substrate 1 commonly used in existing TCO conductive glass 10, for example, a glass substrate 1 containing SiO2, Al2O3, B2O3, MgO, CaO, SrO, BaO, ZrO2, Na2O, and K2O as basic components, but is not limited to glass substrates 1 with the above compositions. The thickness of the substrate 1 is not particularly limited and can range from 1.0 mm to 6.0 mm, preferably from 1.2 mm to 4.0 mm. Regarding the structure of the conductive layer, the second transparent conductive layer 6 can be located between the substrate 1 and the first transparent conductive layer 5, or the first transparent conductive layer 5 can be located between the substrate 1 and the second transparent conductive layer 6.

[0030] In some embodiments of the present invention, the first transparent conductive layer 5 is located between the substrate 1 and the second transparent conductive layer 6. When the first transparent conductive layer 5 is located between the substrate 1 and the second transparent conductive layer 6, it is beneficial to further reduce the surface resistance of the TCO conductive glass 10.

[0031] In some embodiments of the present invention, the thickness of the first transparent conductive layer 5 is 200 nm to 800 nm. When the thickness of the first transparent conductive layer 5 is within the above range, it is beneficial to reduce the sheet resistance of the TCO conductive glass 10. The thickness of the first transparent conductive layer 5 can be 200 nm, 250 nm, 300 nm, 350 nm, 400 nm, 450 nm, 500 nm, 550 nm, 600 nm, 650 nm, 700 nm, 750 nm, or 800 nm.

[0032] In some embodiments of the present invention, the thickness of the first transparent conductive layer 5 is 300 nm to 750 nm. A more suitable thickness range of the first transparent conductive layer 5 is conducive to further reducing the surface resistance of the TCO conductive glass 10.

[0033] In some embodiments of the present invention, the thickness of the second transparent conductive layer 6 is 5 nm to 200 nm. When the thickness of the second transparent conductive layer 6 is within this range, it is beneficial to reduce the sheet resistance of the TCO conductive glass 10 and reduce the impact on the visible light transmittance of the TCO conductive glass 10. The thickness of the second transparent conductive layer 6 can be 5 nm, 10 nm, 20 nm, 30 nm, 50 nm, 70 nm, 90 nm, 120 nm, 150 nm, 180 nm, or 200 nm.

[0034] In some embodiments of the present invention, the thickness of the second transparent conductive layer 6 is 20 nm to 150 nm. A more suitable thickness range of the second transparent conductive layer 6 is beneficial for further reducing the sheet resistance of the TCO conductive glass 10 and reducing the impact on the visible light transmittance of the TCO conductive glass 10.

[0035] In some embodiments of the present invention, a first barrier layer 3 is disposed between the substrate 1 and the conductive layer. This first barrier layer 3 effectively prevents alkali from diffusing from the substrate 1 and entering the conductive layer, causing deterioration of the conductive layer. This helps ensure the stability of the TCO conductive glass 10 and reduces the sheet resistance of the TCO conductive glass 10. The thickness of the first barrier layer 3 can range from 10 nm to 90 nm, preferably from 20 nm to 70 nm.

[0036] The first barrier layer 3 comprises SiO x C y , SiO2, Si3N4 and SnSiO x The first barrier layer 3 has a good effect in preventing alkali diffusion, which is beneficial to ensuring the stability of the TCO conductive glass 10; wherein the composition of the first barrier layer 3 is SnSiO x When the first barrier layer 3 is formed, it can be a laminated film of SiO2 and SnO2.

[0037] In some embodiments of the present invention, a second barrier layer 4 is provided between the first barrier layer 3 and the conductive layer. This second barrier layer 4 further prevents alkali from diffusing from the substrate 1 into the conductive layer, thereby further ensuring the stability of the TCO conductive glass 10 and reducing the sheet resistance of the TCO conductive glass 10. The thickness of the second barrier layer 4 can range from 5 nm to 70 nm, preferably from 10 nm to 50 nm.

[0038] The second barrier layer 4 comprises SiO 2 or Si 3 N 4 . The second barrier layer 4 has a good effect of preventing alkali diffusion, which is beneficial to ensuring the stability of the TCO conductive glass 10 .

[0039] In some embodiments of the present invention, a primer layer 2 is provided between the substrate 1 and the first barrier layer 3. The primer layer 2 can effectively eliminate the color difference that may occur in the TCO conductive glass 10, and can also adjust the color of the TCO conductive glass 10. The thickness of the primer layer 2 can be 5nm to 50nm, preferably, 10nm to 40nm. It should be noted that when the composition of the first barrier layer 3 is SiO x C y , or the first barrier layer 3 is a stacked film of SiO2 and SnO2 (SnSiOx ), the first barrier layer 3 can adjust the color by adjusting the composition and changing the refractive index, and the primer layer 2 may not be provided.

[0040] The primer layer 2 comprises one of SnO2, TiO2 and ZnO. The primer layer 2 has a good effect of adjusting color.

[0041] In some embodiments of the present invention, a surface layer 7 is provided on the side of the conductive layer away from the substrate 1. This surface layer 7 helps further meet the conductivity and haze requirements of the TCO conductive glass 10. The thickness of the surface layer 7 can be 5 nm to 70 nm, preferably 10 nm to 60 nm.

[0042] The surface layer 7 comprises SnO2, TiO2, ZnO and SiO x C y The surface layer 7 has a good effect on regulating conductivity and haze.

[0043] It can be understood that the primer layer 2, the first barrier layer 3, the second barrier layer 4, the first transparent conductive layer 5, the second transparent conductive layer 6 and the surface layer 7 can all be prepared by deposition, and the deposition method includes one of online chemical vapor deposition, offline chemical vapor deposition, sputtering, chemical plating and wet coating. Preferably, online chemical vapor deposition is used for preparation. Online chemical vapor deposition (online CVD) refers to the process of continuously manufacturing the substrate 1 by moving the glass ribbon in the molten tin liquid and then slowly cooling it. During the movement of the glass ribbon, the desired film layer is continuously sprayed on the upper surface of the glass ribbon. More specifically, while the glass is in a hot state on the float production line, a gas raw material is sprayed onto the glass surface to react and form the desired layer. The use of online chemical vapor deposition to prepare TOC conductive glass is beneficial to reducing production costs.

[0044] The present invention further provides a battery comprising TCO conductive glass 10. The battery comprises all the technical solutions of the TCO conductive glass 10 and thus also has all the beneficial effects brought about by the above technical solutions, which will not be described in detail here. The battery comprises a solar thin film battery.

[0045] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made based on the contents of the present invention specification and drawings, or direct / indirect application in other related technical fields, are included in the patent protection scope of the present invention.

Claims

1. A TCO conductive glass, characterized in that: The invention comprises a substrate and a conductive layer arranged on the substrate, wherein the conductive layer comprises a first transparent conductive layer and a second transparent conductive layer, wherein the first transparent conductive layer is a fluorine-doped tin oxide film layer, and the second transparent conductive layer is a fluorine-antimony co-doped tin oxide film layer.

2. The TCO conductive glass according to claim 1, characterized in that: The first transparent conductive layer is located between the substrate and the second transparent conductive layer.

3. The TCO conductive glass according to claim 1, characterized in that: The thickness of the first transparent conductive layer is 200 nm to 800 nm.

4. The TCO conductive glass according to claim 3, characterized in that: The thickness of the first transparent conductive layer is 300 nm to 750 nm.

5. The TCO conductive glass according to claim 1, characterized in that: The thickness of the second transparent conductive layer is 5 nm to 200 nm.

6. The TCO conductive glass according to claim 5, characterized in that: The thickness of the second transparent conductive layer is 20 nm to 150 nm.

7. The TCO conductive glass according to claim 1, characterized in that: A first barrier layer is disposed between the substrate and the conductive layer.

8. The TCO conductive glass according to claim 7, characterized in that: A second barrier layer is disposed between the first barrier layer and the conductive layer.

9. A battery, characterized in that: The invention comprises the TCO conductive glass as claimed in any one of claims 1 to 8.