Spraying pipeline cleaning device and drying pipeline system

Abstract

The utility model discloses a spraying pipeline cleaning device and a drying pipeline system, which comprise a cleaning unit connected with a spraying pipeline, and the spraying pipeline is used for spraying introduced drying liquid into a drying unit through a spraying opening to carry out a drying treatment process; the cleaning unit is used for introducing flushing fluid into the injection pipeline and cleaning the injection pipeline and the injection orifice when the introduction of the drying fluid into the injection pipeline is stopped, and introducing purging gas into the injection pipeline after the introduction of the flushing fluid is stopped so as to clean the injection pipeline and the injection orifice. And the spraying pipeline and the spraying opening are blow-dried after being cleaned. The automatic cleaning device can automatically clean attachments accumulated on the inner wall of the injection pipeline and in the injection orifice on line, so that the process quality and reliability are ensured, the maintenance time is saved, and meanwhile, secondary pollution possibly caused by disassembly in the past is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a spray pipeline cleaning device and a drying pipeline system. Background Art

[0002] Usually, the wafer is dried by spraying IPA (isopropyl alcohol) through a spray pipe in a drying tank. However, since the IPA liquid often contains tiny precipitates, or the inner wall of the IPA container or the delivery pipe material itself has tiny particles or precipitates attached, the IPA liquid will be contaminated. Although the drying tank is equipped with a filter, it is difficult to completely filter out these contaminants, and they will accumulate in the IPA spray pipe and nozzle to form attachments. Once these attachments are sprayed onto the wafer surface along with the IPA through the spray pipe, they will cause particle contamination on the wafer surface, which will affect the wafer quality and process reliability. Therefore, the spray pipe and nozzle need to be cleaned and maintained.

[0003] However, the existing drying tanks do not have the function of online cleaning of the injection pipeline and the injection port, and are unable to reduce the deposits accumulated in the injection pipeline and the injection port. Therefore, only when the wafer is contaminated by the deposit particles, the injection pipeline is removed and the inner wall of the injection pipeline and the injection port are cleaned offline. Not only does the cleaning process take a long time, but it is also easy to cause secondary pollution when installing the cleaned injection pipeline. Utility Model Content

[0004] The purpose of the utility model is to overcome the above-mentioned defects in the prior art and provide a spray pipeline cleaning device and a drying pipeline system.

[0005] To achieve the above purpose, the technical solution of the utility model is as follows:

[0006] The utility model provides a jet pipeline cleaning device, comprising:

[0007] A cleaning unit connected to a spray pipeline, wherein the spray pipeline is used to spray the introduced drying liquid into the drying unit through the spray port to perform a drying process;

[0008] The cleaning unit is used to pass a flushing liquid into the injection pipeline to clean the injection pipeline and the injection port when the drying liquid is stopped from being passed into the injection pipeline, and to pass a purge gas into the injection pipeline to clean and dry the injection pipeline and the injection port after the flushing liquid is stopped.

[0009] Further, the cleaning unit includes a first cleaning unit and a second cleaning unit, the first cleaning unit includes a first cleaning pipeline, one end of the first cleaning pipeline is connected to the first end of the injection pipeline, and the other end of the first cleaning pipeline is connected to a flushing liquid supply end, the second cleaning unit includes a second cleaning pipeline, one end of the second cleaning pipeline is connected to the second end of the injection pipeline, and the other end of the second cleaning pipeline is connected to a purge gas supply end, when the flushing liquid supply end passes the flushing liquid to the first end of the injection pipeline through the first cleaning pipeline to perform the cleaning, the second cleaning pipeline is closed, and when the purge gas supply end passes the purge gas to the second end of the injection pipeline through the second cleaning pipeline to perform the drying after cleaning, the first cleaning pipeline is closed.

[0010] Further, the injection pipeline is connected to a liquid supply unit, and the liquid supply unit includes a liquid supply pipeline, one end of the liquid supply pipeline is connected to the second end of the injection pipeline, and the other end of the liquid supply pipeline is connected to a drying liquid supply end. When the drying liquid supply end passes the drying liquid to the second end of the injection pipeline through the liquid supply pipeline to perform the drying treatment process, the first cleaning pipeline and the second cleaning pipeline are closed, and when the cleaning or the drying after cleaning is performed, the liquid supply pipeline is closed.

[0011] Furthermore, it also includes a control unit for controlling the opening or closing of the first cleaning pipeline, the second cleaning pipeline and the liquid supply pipeline.

[0012] Furthermore, the first cleaning pipeline is provided with a first control valve, the second cleaning pipeline is provided with a second control valve, and the liquid supply pipeline is provided with a third control valve, and the control unit includes a controller, and the controller connects the first control valve to the third control valve; when performing the drying process, the controller controls the first control valve and the second control valve to be closed so that the first cleaning pipeline and the second cleaning pipeline are shut off, and the third control valve is opened so that the liquid supply pipeline is connected; when performing the cleaning, the controller controls the second control valve and the third control valve to be closed so that the second cleaning pipeline and the liquid supply pipeline are shut off, and the first control valve is opened so that the first cleaning pipeline is connected; when performing the blow-drying after the cleaning, the controller controls the first control valve and the third control valve to be closed so that the first cleaning pipeline and the liquid supply pipeline are shut off, and the second control valve is opened so that the second cleaning pipeline is connected.

[0013] Further, the injection pipeline includes a first injection pipeline and a second injection pipeline arranged in parallel, and the first injection pipeline and the second injection pipeline are used to simultaneously spray the drying liquid onto the upper surface and the lower surface of the treatment object placed in the drying unit through the injection ports respectively provided therein to perform the drying treatment process, the first cleaning pipeline is connected to the first injection pipeline and the second injection pipeline at the first end, and the second cleaning pipeline and the liquid supply pipeline are connected to the first injection pipeline and the second injection pipeline at the second end.

[0014] Further, the drying unit includes a drying tank, and / or the injection pipeline includes a PTFE tube, or the inner wall of the injection pipeline is provided with a PTFE coating.

[0015] Furthermore, a heating unit is provided on the second cleaning pipeline for heating the purge gas flowing therethrough, the controller is connected to the heating unit, and / or one end of the second cleaning pipeline and one end of the liquid supply pipeline are merged into one at the second end.

[0016] The utility model also provides a drying pipeline system, comprising a spray pipeline provided with a spray port arranged in a drying unit, a liquid supply unit connected to the spray pipeline, and the above-mentioned spray pipeline cleaning device.

[0017] Further, the liquid supply unit includes a liquid supply pipeline, one end of the liquid supply pipeline is connected to the injection pipeline, and the other end of the liquid supply pipeline is connected to a drying liquid tank serving as a drying liquid supply end. The first cleaning pipeline of the injection pipeline cleaning device is connected to the rinsing liquid tank serving as a rinsing liquid supply end, and the rinsing liquid tank supplies the rinsing liquid to the injection pipeline through the first cleaning pipeline, so as to clean the injection pipeline and the injection port. The second cleaning pipeline of the injection pipeline cleaning device is connected to a purge gas tank serving as a purge gas supply end, and the purge gas tank supplies purge gas to the injection pipeline through the second cleaning pipeline for drying after cleaning. The purge gas tank is also connected to the drying liquid tank through a carrier gas pipeline to provide the purge gas as a carrier gas to the drying liquid tank through the carrier gas pipeline. The drying liquid tank supplies the drying liquid carried by the carrier gas to the injection pipeline through the liquid supply pipeline, so as to be sprayed into the interior of the drying unit through the injection port for a drying treatment process.

[0018] It can be seen from the above technical scheme that the utility model connects the cleaning unit to the injection pipeline, can clean the injection pipeline and the injection port provided therein by introducing a flushing liquid into the injection pipeline, and can dry the injection pipeline and the injection port after cleaning by introducing a purge gas into the injection pipeline, thereby achieving online cleaning of the deposits accumulated on the inner wall of the injection pipeline and in the injection port, ensuring the process quality and reliability, saving maintenance time, and avoiding the secondary pollution that may be caused by disassembly in the past. The utility model has the following advantages:

[0019] (1) By setting up a controller, automatic control of the cleaning process can be achieved.

[0020] (2) By installing control valves at both ends of the spray pipeline, it is possible to prevent the drying liquid in the drying process and the flushing liquid in the cleaning process from affecting the other pipeline;

[0021] (3) Using PTFE material to make the injection pipeline can effectively reduce the accumulation of attachments.

[0022] (4) The drying efficiency is improved by arranging a heating unit to heat the purge gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The present invention is a schematic structural diagram of a jet pipe cleaning device according to a preferred embodiment of the present invention.

[0024] Figure 2 The present invention is a flow chart of a preferred embodiment of the present invention for cleaning a spray pipeline. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0026] The specific implementation of the utility model is further described in detail below in conjunction with the accompanying drawings.

[0027] refer to Figure 1The utility model provides a spray pipeline cleaning device, comprising a cleaning unit connected to the spray pipeline 11 .

[0028] The spray pipeline 11 is provided in the drying unit. A spray port 113 is provided on the pipe wall of the spray pipeline 11. A plurality of spray ports 113 can be provided in sequence along the length direction of the spray pipeline 11. The spray pipeline 11 is used to spray the drying liquid introduced into the spray pipeline 11 into the drying unit through the spray port 113, so as to perform a drying process on the processing object (e.g., wafer) placed in the drying unit.

[0029] Since the drying liquid (such as IPA liquid) used in the drying process often contains tiny precipitates, or the inner wall of the drying liquid container or the material of the conveying pipeline itself has tiny particles or precipitates attached, the drying liquid liquid will be polluted. Moreover, these pollutants are difficult to be completely filtered out by filtering, so they will accumulate in the drying liquid injection pipeline 11 and the injection port 113 to form attachments. Through the injection pipeline cleaning device of the utility model, the injection pipeline 11 and the injection port 113 can be cleaned and maintained online without removing the injection pipeline 11.

[0030] Among them, the cleaning unit is used to pass flushing liquid into the injection pipeline 11 when the drying liquid is stopped from being passed into the injection pipeline 11, so as to clean the injection pipeline 11 and the injection port 113, and after stopping the flushing liquid, pass purge gas into the injection pipeline 11 to clean and dry the injection pipeline 11 and the injection port 113.

[0031] refer to Figure 1 In some embodiments, the cleaning unit includes a first cleaning unit and a second cleaning unit. The first cleaning unit includes a first cleaning line 20. The second cleaning unit includes a second cleaning line 19.

[0032] Among them, one end of the first cleaning pipeline 20 is connected to the first end of the injection pipeline 11 (the right end is shown in the figure); the other end of the first cleaning pipeline 20 is connected to the flushing liquid supply end 25. The first end of the injection pipeline 11 is originally a closed end. After being connected to one end of the first cleaning pipeline 20, the first end of the injection pipeline 11 becomes an open end that communicates with the first cleaning pipeline 20. Through the flushing liquid supply end 25, flushing liquid (for example, ultrapure water (deionized water)) is introduced into the injection pipeline 11 from the first end of the injection pipeline 11 along the first cleaning pipeline 20, so that the flushing liquid flows to the second end of the injection pipeline 11 under pressure and is ejected from the injection port 113, so as to perform high-pressure cleaning on the inner wall of the injection pipeline 11 and the side wall of the injection port 113 (also regarded as the inner wall of the injection pipeline 11), and effectively remove the attachments accumulated in the injection pipeline 11 and the injection port 113.

[0033] One end of the second cleaning pipeline 19 is connected to the second end of the injection pipeline 11 (the left end is shown in the figure); the other end of the second cleaning pipeline 19 is connected to the purge gas supply end 24. The purge gas (for example, nitrogen or inert gas) is introduced into the injection pipeline 11 from the second end (the opposite end of the first end) of the injection pipeline 11 along the second cleaning pipeline 19 through the purge gas supply end 24, so that the purge gas flows toward the first end of the injection pipeline 11 under pressure and is ejected from the injection port 113 to perform high-pressure purge on the residual flushing liquid inside the injection pipeline 11, thereby achieving rapid drying of the injection pipeline 11 and the injection port 113 to ensure the reliability of the injection pipeline 11 when continuing the drying process.

[0034] It is worth noting that when the flushing liquid supply end 25 passes the flushing liquid to the first end of the injection pipeline 11 through the first cleaning pipeline 20 to clean the injection pipeline 11 and the injection port 113, the second cleaning pipeline 19 needs to be shut off. Correspondingly, when the purge gas supply end 24 passes the purge gas to the second end of the injection pipeline 11 through the second cleaning pipeline 19 to dry the injection pipeline 11 and the injection port 113 after cleaning, the first cleaning pipeline 20 needs to be shut off. When the injection pipeline 11 and the injection port 113 are cleaned as described above, it is necessary to stop passing the drying liquid to the injection pipeline 11.

[0035] refer to Figure 1 . In some embodiments, the injection pipeline 11 is connected to a liquid supply unit. The liquid supply unit includes a liquid supply pipeline 18. One end of the liquid supply pipeline 18 is connected to the second end of the injection pipeline 11; the other end of the liquid supply pipeline 18 is connected to a drying liquid supply end 21. A drying liquid (for example, IPA liquid) is introduced into the injection pipeline 11 from the second end of the injection pipeline 11 through the drying liquid supply end 21 along the liquid supply pipeline 18, so that the drying liquid flows toward the first end of the injection pipeline 11 under pressure and is sprayed out from the injection port 113 to perform a drying process, quickly remove moisture on the surface of the treatment object placed in the drying unit, and achieve drying of the surface of the treatment object.

[0036] It is worth noting that when the drying liquid supply end 21 passes the drying liquid to the second end of the spraying pipeline 11 through the liquid supply pipeline 18 to perform the drying process, both the first cleaning pipeline 20 and the second cleaning pipeline 19 need to be shut off. When the spraying pipeline 11 is cleaned or blown dry after cleaning by the cleaning unit, the liquid supply pipeline 18 needs to be shut off. This avoids the mutual influence between cleaning the spraying pipeline 11 and performing the normal drying process.

[0037] In some embodiments, one end of the second cleaning pipeline 19 and one end of the liquid supply pipeline 18 are combined at the second end of the injection pipeline 11 to form a path leading to the injection pipeline 11. In other words, one end of the second cleaning pipeline 19 can be connected to the liquid supply pipeline 18, and connected to the liquid supply pipeline 18 at, for example, the connection point A shown in the figure, so as to use the liquid supply pipeline 18 after the connection point A to provide the purge gas to the injection pipeline 11. That is, the second cleaning pipeline 19 shares the same pipe section with the liquid supply pipeline 18 at the second end of the injection pipeline 11. In this way, the original pipeline structure of the drying unit can be maintained to ensure the stability of the drying process.

[0038] refer to Figure 1 In some embodiments, a control unit is further included. The control unit is used to control the opening or closing of the first cleaning pipeline 20, the second cleaning pipeline 19 and the liquid supply pipeline 18, so as to control the automatic cleaning of the spray pipeline 11 in the drying unit during the non-drying process stage.

[0039] In some embodiments, the control unit includes a controller 16 and a control valve.

[0040] The first cleaning pipeline 20 is provided with a first control valve 17 , and the controller 16 is connected to the first control valve 17 .

[0041] The second cleaning pipeline 19 is provided with a second control valve 15 , and the controller 16 is connected to the second control valve 15 .

[0042] A third control valve 13 is provided on the liquid supply pipeline 18 , and the controller 16 is connected to the third control valve 13 .

[0043] When the drying process is performed, the controller 16 controls the first control valve 17 and the second control valve 15 to be closed, so that the first cleaning pipeline 20 and the second cleaning pipeline 19 are cut off, that is, the cleaning unit is closed. At this time, the cleaning unit will not be able to clean the injection pipeline 11. In addition, the controller 16 controls the third control valve 13 to be opened, so that the liquid supply pipeline 18 is connected, so that the liquid supply unit can normally supply drying liquid to the injection pipeline 11 in the drying unit.

[0044] When the spray pipeline 11 needs to be cleaned and is in the cleaning phase, the controller 16 controls the second control valve 15 and the third control valve 13 to close, so that the second cleaning pipeline 19 and the liquid supply pipeline 18 are shut off, that is, the second cleaning unit and the liquid supply unit are closed. The first control valve 17 is opened to conduct the first cleaning pipeline 20, so that the first cleaning unit can pass the flushing liquid into the spray pipeline 11 in the drying unit.

[0045] When drying after cleaning, the controller 16 controls the first control valve 17 and the third control valve 13 to close, so that the first cleaning pipeline 20 and the liquid supply pipeline 18 are shut off, and the second control valve 15 is opened to connect the second cleaning pipeline 19, so that the second cleaning unit can pass the purge gas to the injection pipeline 11 in the drying unit.

[0046] Therefore, by means of different combination controls of the controller 16 on the first control valve 17 to the third control valve 13, the drying process for the treatment object and the cleaning process for the injection pipeline 11 are respectively realized, and mutual interference between the cleaning process and the drying process can be avoided. The control process does not require human intervention, and the reliability of the normal drying process is guaranteed.

[0047] In some embodiments, the first control valve 17 to the third control valve 13 include one-way valves. Each one-way valve can only be opened toward the drying unit to prevent the drying liquid during the drying process and the flushing liquid during the cleaning process from affecting the other pipeline.

[0048] In some embodiments, the one-way valve comprises a pneumatic valve.

[0049] refer to Figure 1 In some embodiments, the spray line 11 includes a first spray line 111 and a second spray line 112 arranged horizontally and side by side. The first spray line 111 and the second spray line 112 are used to spray drying liquid to the upper surface and the lower surface of the treatment object placed in the drying unit through the spray ports 113 provided therein to perform a drying treatment process. The first cleaning line 20 is connected to the first spray line 111 and the second spray line 112 at the first end of the spray line 11, and the second cleaning line 19 and the liquid supply line 18 are connected to the first spray line 111 and the second spray line 112 at the second end of the spray line 11.

[0050] In some embodiments, two groups of spray pipelines 11 are provided in the drying unit; each group of spray pipelines 11 includes a first spray pipeline 111 and a second spray pipeline 112. The two groups of spray pipelines 11 are provided on opposite sides of the drying unit, and can spray drying liquid on the upper and lower surfaces of the treatment object from opposite directions to perform a drying treatment process. The first cleaning pipeline 20 is also connected to the two first spray pipelines 111 and the two second spray pipelines 112 in the two groups of spray pipelines 11 at the first end of the spray pipeline 11, and the second cleaning pipeline 19 and the liquid supply pipeline 18 are connected to the two first spray pipelines 111 and the two second spray pipelines 112 in the two groups of spray pipelines 11 at the second end of the spray pipeline 11.

[0051] In some embodiments, the diameter of the first cleaning pipeline 20 is consistent with the diameter of the liquid supply pipeline 18, so that the pressure in the injection pipeline 11 during cleaning is as consistent as possible with the pressure in the injection pipeline 11 during the drying process, avoiding changes in the working pressure of the injection pipeline 11.

[0052] refer to Figure 1 In some embodiments, a heating unit 14 is provided on the second cleaning pipeline 19. The heating unit 14 is used to heat the purge gas flowing through the second cleaning pipeline 19, so as to provide heated hot purge gas to quickly dry the injection pipeline 11 during the purge.

[0053] In some embodiments, the controller 16 is connected to the heating unit 14. When the injection pipeline 11 needs to be dried after cleaning, the controller 16 controls the heating unit 14 to turn on, heat the purge gas flowing therethrough, and heat it to a target temperature to provide heated hot purge gas to quickly dry the injection pipeline 11.

[0054] In some embodiments, the heating unit 14 includes a heater, which may be, for example, a resistive heater.

[0055] In some embodiments, the drying unit includes a drying tank, which can be used to perform a drying process on a processing object (eg, a wafer) using, for example, IPA liquid as a drying liquid.

[0056] In some embodiments, the inner walls of the injection pipeline 11 (including the injection port 113 ) and the pipe sections of the first cleaning pipeline 20 and the liquid supply pipeline 18 located in the drying tank have a surface made of PTFE material.

[0057] In some embodiments, the injection pipeline 11 and the pipe sections of the first cleaning pipeline 20 and the liquid supply pipeline 18 located in the drying tank include PTFE tubes. In which, the injection port 113 is processed on the side wall of the PTFE tube serving as the injection pipeline 11. Using PTFE material to make the injection pipeline 11 can effectively reduce the accumulation of IPA attachments.

[0058] In some embodiments, a PTFE coating is provided on the inner walls of the injection pipeline 11 (including the injection port 113 ) and the pipe sections of the first cleaning pipeline 20 and the liquid supply pipeline 18 located in the drying tank.

[0059] A drying pipeline system of the present invention is further described in detail below through specific implementation modes and in conjunction with the accompanying drawings.

[0060] The utility model discloses a drying pipeline system, comprising a spray pipeline 11 provided with a spray port 113 in a drying unit, a liquid supply unit entering the drying unit from outside the drying unit and connected to the spray pipeline 11, and the spray pipeline cleaning device of the utility model.

[0061] refer to Figure 1 . In some embodiments, the drying unit includes a drying tank; the spray line 11 is horizontally arranged in the drying tank. The liquid supply unit includes a liquid supply line 18, one end of the liquid supply line 18 enters the drying tank and is connected to the left end of the spray line 11, and the other end of the liquid supply line 18 is connected to a drying liquid tank serving as a drying liquid supply end 21. The drying liquid tank is used to store drying liquid, such as IPA. The drying liquid tank supplies IPA drying liquid to the drying tank through the liquid supply line 18, and sprays it onto a processing object placed in the drying tank, such as a wafer surface, through the spray port 113 on the spray line 11 to dry the wafer.

[0062] One end of the first cleaning pipeline 20 provided in the spray pipeline cleaning device enters the drying tank and is connected to the right end of the spray pipeline 11, and the other end of the first cleaning pipeline 20 is connected to the flushing liquid tank as the flushing liquid supply end 25. The flushing liquid tank is used to store flushing liquid, such as ultrapure water. The flushing liquid tank provides ultrapure water flushing liquid to the spray pipeline 11 in the drying tank through the first cleaning pipeline 20, and the ultrapure water flushing liquid is sprayed out from the injection port 113 to clean the spray pipeline 11 and the injection port 113.

[0063] One end of the second cleaning pipeline 19 provided in the spray pipeline cleaning device can be connected to the liquid supply pipeline 18, and the other end of the second cleaning pipeline 19 is connected to the purge gas tank as the purge gas supply end 24. The purge gas tank is used to store purge gas, such as nitrogen (or inert gas, such as argon). The purge gas tank provides nitrogen purge gas to the spray pipeline 11 in the drying tank through the second cleaning pipeline 19 via the connection point A along the liquid supply pipeline 18, and the purge gas is sprayed out from the injection port 113 to dry the spray pipeline 11 and the injection port 113 after cleaning.

[0064] In some embodiments, two groups of spray pipelines 11 are provided in the drying tank; each group of spray pipelines 11 includes a first spray pipeline 111 and a second spray pipeline 112. The two groups of spray pipelines 11 are provided on opposite sides of the drying tank, and IPA drying liquid can be sprayed on the upper and lower surfaces of the wafer from opposite directions to perform a drying process. The first cleaning pipeline 20 is connected to the two first spray pipelines 111 and the two second spray pipelines 112 in the two groups of spray pipelines 11 at the right end of the spray pipeline 11, and the second cleaning pipeline 19 and the liquid supply pipeline 18 are connected to the two first spray pipelines 111 and the two second spray pipelines 112 in the two groups of spray pipelines 11 at the left end of the spray pipeline 11.

[0065] In some embodiments, the purge gas tank is further connected to the drying liquid tank through a carrier gas pipeline 23, so as to provide nitrogen purge gas as a carrier gas to the drying liquid tank through the carrier gas pipeline 23. When performing the drying process, the drying liquid tank supplies IPA liquid carried by nitrogen gas to the spray pipeline 11 through the liquid supply pipeline 18 as a drying liquid, and sprays it onto the wafer surface inside the drying tank through the spray port 113 to complete the drying process.

[0066] The drying liquid tank (drying liquid supply end 21), the purge gas tank (purge gas supply end 24) and the flushing liquid tank (flushing liquid supply end 25) constitute a supply unit.

[0067] The controller 16 (control unit) provided in the cleaning device for the spray line 11 is used to control the first control valve 17 to the third control valve 13 to be opened or closed in different combinations, thereby realizing the separate control of the drying process or the cleaning of the spray line 11.

[0068] In some embodiments, a fourth control valve 22 is provided on the carrier gas pipeline 23. The fourth control valve 22 comprises a one-way valve. The one-way valve comprises a pneumatic valve.

[0069] Furthermore, the controller 16 is connected to the fourth control valve 22 to control the fourth control valve 22 to open when a drying process is required, so that the purge gas tank can provide nitrogen as a carrier gas to the drying liquid tank through the carrier gas pipeline 23 .

[0070] In some embodiments, a filter unit 12 is provided on the liquid supply pipeline 18 for filtering the IPA liquid outputted from the drying liquid tank. Further, the filter unit 12 includes a filter, and the filter is provided on the liquid supply pipeline 18 between the connection point A and the drying liquid tank.

[0071] By using the utility model, the injection pipeline 11 can be automatically cleaned and dried with ultrapure water and high-temperature hot nitrogen at any time, so as to avoid the accumulation of attachments on the inner wall of the injection pipeline 11 and around the injection port 113 as much as possible, and no disassembly is required, thereby preventing secondary pollution.

[0072] In some embodiments, the process of using the present invention to clean the injection pipeline 11 is as follows:

[0073] refer to Figure 2 and Figure 1 Before preparing to perform a drying process on the wafers transferred to the drying tank, first confirm whether it is necessary to clean the spray pipe 11 in the drying tank. For example, it can be confirmed whether it is necessary to clean the spray pipe 11 9 minutes before preparing to perform the drying process.

[0074] When it is confirmed that the injection pipeline 11 needs to be cleaned, the third control valve 13 on the liquid supply pipeline 18 and the second control valve 15 on the second cleaning pipeline 19 are closed through the controller 16, so that the liquid supply pipeline 18 and the second cleaning pipeline 19 are closed (turned off), and the first control valve 17 on the first cleaning pipeline 20 is opened, so that the first cleaning pipeline 20 is opened (conducted), so that the flushing liquid tank can pass a certain flow of ultrapure water (flushing liquid) to the first end of the injection pipeline 11 in the drying tank through the first cleaning pipeline 20 for cleaning. For example, when cleaning starts, 8LPM ultrapure water can be used to automatically flush the injection pipeline 11 and its injection port 113, and the cleaning duration is 90 seconds. Ultrapure water has a strong deionization function, and the ultrapure water with a flow rate of 8LPM can effectively take away the accumulation inside the injection pipeline 11.

[0075] After the cleaning process is completed, the drying process after cleaning the injection pipeline 11 is entered. The first control valve 17 and the third control valve 13 are closed by the controller 16 to close the first cleaning pipeline 20 and the liquid supply pipeline 18, and the second control valve 15 is controlled to open so that the second cleaning pipeline 19 is opened, so that the purge gas tank can pass a certain flow of hot nitrogen (purge gas) to the second end of the injection pipeline 11 in the drying tank through the second cleaning pipeline 19 for drying. For example, after 90 seconds of cleaning, the first control valve 17 and the third control valve 13 are closed, the second control valve 15 is opened, and the injection pipeline 11 and its injection port 113 are dried using 100LPM and 60°C heated PN2 (pure nitrogen), and the drying duration is 420 seconds. Using 100LPM flow and heated pure nitrogen to automatically dry the cleaned injection pipeline 11 can quickly dry the injection pipeline 11.

[0076] After the entire cleaning process including the cleaning and drying steps is completed, the deposits accumulated on the inner wall of the spray pipe 11 and its spray port 113 can be cleaned up. At this time, the first cleaning pipe 20 and the second cleaning pipe 19 can be closed, and the liquid supply pipe 18 can be opened, so that the drying liquid tank can pass the IPA liquid to the second end of the spray pipe 11 through the liquid supply pipe 18, and the IPA liquid is sprayed on the surface of the wafer in the drying tank for drying.

[0077] On the contrary, when it is confirmed that there is no need (no) to clean the injection pipeline 11, the above-mentioned cleaning process can be skipped, and after completing the preparations before the wafer drying process, keep the first cleaning pipeline 20 and the second cleaning pipeline 19 closed, open the liquid supply pipeline 18, and introduce IPA liquid into the injection pipeline 11 in the drying tank, and spray IPA liquid on the surface of the wafer in the drying tank for drying treatment.

[0078] The entire process can be automatically controlled by the upper computer and / or the lower computer without manual intervention, and the time can be controlled within 9 minutes before the drying process. Compared with the previous method of disassembling the injection pipeline 11 for manual cleaning (taking at least 3 hours), the time can be reduced by 95%, and secondary contamination caused by reinstallation can be avoided.

[0079] In summary, the utility model connects a cleaning unit to the injection pipeline 11, and can clean the injection pipeline 11 and the injection port 113 provided therein by introducing a flushing liquid into the injection pipeline 11, and blow dry the injection pipeline 11 and the injection port 113 after cleaning by introducing a purge gas into the injection pipeline 11, thereby realizing online automatic cleaning of the deposits accumulated on the inner wall of the injection pipeline 11 and in the injection port 113, thereby ensuring process quality and reliability, saving maintenance time, and avoiding secondary pollution that may be caused by disassembly in the past, and having the advantages of realizing automatic control of the cleaning process, preventing impact on existing pipelines, effectively reducing the accumulation of deposits, and high cleaning efficiency.

[0080] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A jet pipe cleaning device, characterized in that: include: A cleaning unit connected to a spray pipeline, wherein the spray pipeline is used to spray the introduced drying liquid into the drying unit through the spray port to perform a drying process; The cleaning unit is used to pass a flushing liquid into the injection pipeline to clean the injection pipeline and the injection port when the drying liquid is stopped from being passed into the injection pipeline, and to pass a purge gas into the injection pipeline to clean and dry the injection pipeline and the injection port after the flushing liquid is stopped.

2. The spray pipe cleaning device according to claim 1, characterized in that: The cleaning unit includes a first cleaning unit and a second cleaning unit. The first cleaning unit includes a first cleaning pipeline, one end of the first cleaning pipeline is connected to the first end of the injection pipeline, and the other end of the first cleaning pipeline is connected to a flushing liquid supply end. The second cleaning unit includes a second cleaning pipeline, one end of the second cleaning pipeline is connected to the second end of the injection pipeline, and the other end of the second cleaning pipeline is connected to a purge gas supply end. When the flushing liquid supply end passes the flushing liquid to the first end of the injection pipeline through the first cleaning pipeline for cleaning, the second cleaning pipeline is closed. When the purge gas supply end passes the purge gas to the second end of the injection pipeline through the second cleaning pipeline for drying after cleaning, the first cleaning pipeline is closed.

3. The spray pipe cleaning device according to claim 2, characterized in that: The injection pipeline is connected to a liquid supply unit, and the liquid supply unit includes a liquid supply pipeline, one end of the liquid supply pipeline is connected to the second end of the injection pipeline, and the other end of the liquid supply pipeline is connected to a drying liquid supply end. When the drying liquid supply end passes the drying liquid to the second end of the injection pipeline through the liquid supply pipeline to perform the drying treatment process, the first cleaning pipeline and the second cleaning pipeline are closed. When the cleaning or the drying after the cleaning is performed, the liquid supply pipeline is closed.

4. The spray pipe cleaning device according to claim 3, characterized in that: It also includes a control unit for controlling the opening or closing of the first cleaning pipeline, the second cleaning pipeline and the liquid supply pipeline.

5. The spray pipe cleaning device according to claim 4, characterized in that: A first control valve is provided on the first cleaning pipeline, a second control valve is provided on the second cleaning pipeline, and a third control valve is provided on the liquid supply pipeline. The control unit includes a controller, and the controller connects the first control valve to the third control valve; when performing the drying process, the controller controls the first control valve and the second control valve to be closed so that the first cleaning pipeline and the second cleaning pipeline are disconnected, and the third control valve is opened to connect the liquid supply pipeline; when performing the cleaning, the controller controls the second control valve and the third control valve to be closed so that the second cleaning pipeline and the liquid supply pipeline are disconnected, and the first control valve is opened to connect the first cleaning pipeline; when performing the blow-drying after the cleaning, the controller controls the first control valve and the third control valve to be closed so that the first cleaning pipeline and the liquid supply pipeline are disconnected, and the second control valve is opened to connect the second cleaning pipeline.

6. The spray pipe cleaning device according to claim 3, characterized in that: The spray pipeline includes a first spray pipeline and a second spray pipeline arranged in parallel, and the first spray pipeline and the second spray pipeline are used to simultaneously spray the drying liquid onto the upper surface and the lower surface of the treatment object placed in the drying unit through the respective spray ports to perform the drying treatment process, the first cleaning pipeline is connected to the first spray pipeline and the second spray pipeline at the first end, and the second cleaning pipeline and the liquid supply pipeline are connected to the first spray pipeline and the second spray pipeline at the second end.

7. The jet pipe cleaning device according to claim 1, characterized in that: The drying unit includes a drying tank, and / or the injection pipeline includes a PTFE tube, or a PTFE coating is provided on the inner wall of the injection pipeline.

8. The spray pipe cleaning device according to claim 5, characterized in that: The second cleaning pipeline is provided with a heating unit for heating the purge gas flowing therethrough, the controller is connected to the heating unit, and / or one end of the second cleaning pipeline and one end of the liquid supply pipeline are merged into one at the second end.

9. A drying pipeline system, characterized in that: It comprises a spray pipeline provided with a spray port in a drying unit, a liquid supply unit connected to the spray pipeline, and the spray pipeline cleaning device according to any one of claims 1 to 8.

10. The drying pipeline system according to claim 9, characterized in that: The liquid supply unit includes a liquid supply pipeline, one end of which is connected to the injection pipeline, and the other end of which is connected to a drying liquid tank serving as a drying liquid supply end. The first cleaning pipeline of the injection pipeline cleaning device is connected to the rinsing liquid tank serving as a rinsing liquid supply end, and the rinsing liquid tank supplies the rinsing liquid to the injection pipeline through the first cleaning pipeline, so as to clean the injection pipeline and the injection port. The second cleaning pipeline of the injection pipeline cleaning device is connected to a purge gas tank serving as a purge gas supply end, and the purge gas tank supplies purge gas to the injection pipeline through the second cleaning pipeline for drying after cleaning. The purge gas tank is also connected to the drying liquid tank through a carrier gas pipeline to provide the purge gas as a carrier gas to the drying liquid tank through the carrier gas pipeline. The drying liquid tank supplies the drying liquid carried by the carrier gas to the injection pipeline through the liquid supply pipeline, so as to be sprayed into the interior of the drying unit through the injection port for a drying treatment process.

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