Edge ring three-coordinate measuring clamp
By designing a three-coordinate measurement fixture using PEEK cushion, differential head adjustment nut and built-in magnet, the problems of fixed instability, scratches and large measurement errors in traditional measurements are solved, and higher measurement accuracy and operation convenience are achieved.
Patent Information
- Application Number
- CN202421546986.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-02
- Publication Date
- 2025-04-18
- Estimated Expiration
- 2034-07-02
AI Technical Summary
When measuring RTP EDGE RING with traditional three-coordinate RING, the fixing method can easily lead to displacement, the product can be taken and placed inconveniently, scratches can easily cause thickness measurement, and the measurement error is large.
A three-coordinate measurement fixture of edge ring is designed, using a combination of PEEK block and a differential head adjustment nut. Through the magnetic suction connection of the built-in magnet, the product is not scratched during the measurement process. The point-to-point mode measurement is achieved through the coordination of the fixture base and the L-shaped adjustment block, and the impact of warpage on the measurement results is reduced.
It effectively avoids the displacement and scratch problems of the product during the measurement process, improves the accuracy and reliability of the measurement, especially when measuring the thickness, reduces errors and facilitates the pick-up and placement of the product.
Smart Images
Figure CN222768206U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of measurement, in particular to an edge ring three-coordinate measurement fixture. Background Art
[0002] With the rise of photovoltaic, electronic and semiconductor industries, people's demand for chips is increasing dramatically. However, after the chips are refined from SO2 to single crystal silicon, the annealing process of high-end chips reaches 1350℃ in the process of further wafer manufacturing. With the advancement of the 5nm process and the requirements for chip stability, the metal impurity content in the atmosphere of high-temperature annealing of wafers is required to be extremely low, which means that the edge ring (hereinafter referred to as RTP EDGE RING) that is in direct contact with the wafer must have very low metal impurities. This leads to us avoiding the contact of related parts with metal substances as much as possible during the production and manufacturing of RTP EDGE RING. Traditional RTP EDGE RING measurement fixtures generally use PEEK material tips with three-coordinate marble platforms or ceramic plates.
[0003] The RTP EDGE RING three-dimensional coordinate measuring fixture is a device specially designed for the precise measurement of microelectronic products, and is often used in conjunction with a three-dimensional coordinate measuring machine. Its construction usually adopts high-precision materials, such as alloys or engineering plastics, to ensure that the fixture firmly fixes the RTP EDGE RING during the measurement process, thereby improving the measurement accuracy and reliability. The working principle is to firmly fix the RTP EDGE RING on the measuring platform through a precise clamping mechanism or fine-tuning device to keep its position stable and ensure accurate measurement results;
[0004] In the traditional measurement process, using three-dimensional coordinate measurement of RTP EDGE RING often faces several problems: First, the fixing method is easy to cause displacement. At present, the common practice is to directly place the RTP EDGE RING on a marble platform or a ceramic plate with high flatness. However, since the RTP EDGE RING itself is thin and light, and it is usually not fixed with glue to avoid contamination, even if the top of the PEEK material is used for fixing during the measurement process, the product is still easily affected by the measuring force of the three-dimensional coordinate probe and displaced, thereby affecting the accuracy of the measurement results; secondly, this contact method is also easy to cause product scratches. After the RTP EDGE RING contacts the marble platform, due to the good flatness of the marble platform, the RTP EDGE RING is easy to adsorb on it, which brings great difficulties to the product's placement and placement, and it is very easy to cause scratches or abrasions on the product during operation; finally, using the RTP EDGE RING to measure thickness may also cause large errors. The thickness of the RTP EDGE RING at its thinnest point is about 0.35mm. If a micrometer or other measuring tools are used, it is easy to damage the product. At the same time, when the bottom of the RTP EDGE RING is attached to the marble platform for thickness measurement, it is also easily affected by the warping of the edge ring, which further increases the possibility of measurement errors. Therefore, an edge ring three-coordinate measurement fixture is proposed to solve the above problem. Utility Model Content
[0005] In order to make up for the above shortcomings, the utility model provides an edge ring three-coordinate measurement fixture, which aims to improve the problems of inconvenient product placement, easy scratches and inaccurate thickness measurement when using traditional three-coordinate measurement of RTP EDGE RING products in the prior art.
[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an edge ring three-coordinate measurement fixture, comprising a bottom plate, a T-shaped base is arranged on the upper front side of the bottom plate, an L-shaped adjustment block is arranged on the upper part of the T-shaped base, a differential head adjustment nut is arranged on the front middle side of the L-shaped adjustment block, and the rear end of the differential head adjustment nut passes through the L-shaped adjustment block, an arc groove is opened on the upper middle side of the L-shaped adjustment block, and two clamp mechanisms are equidistantly arranged on the upper rear side of the bottom plate;
[0007] As a further description of the above technical solution: the clamp mechanism includes a square base, two square bases are equidistantly fixedly connected to the upper rear side of the bottom plate, the square base and the clamp base are connected by positioning pins, a first groove is opened on the upper middle side of the clamp base, a first magnet is arranged inside the first groove, the first magnet is magnetically connected to the second magnet, the second magnet is arranged inside the second groove at the bottom of the PEEK block, and the rear of the PEEK block is snap-connected with a handle;
[0008] As a further description of the above technical solution: annular grooves are provided on both sides of the bottom of the T-shaped base;
[0009] As a further description of the above technical solution: two threaded holes are equidistantly provided on the upper front side of the bottom plate;
[0010] As a further description of the above technical solution: the annular grooves correspond to the threaded holes one by one, and bolts are arranged inside the annular grooves and are threadedly connected to the threaded holes of the bottom plate;
[0011] As a further description of the above technical solution: the upper part of the clamp base and the L-shaped adjustment block is provided with an edge ring;
[0012] As a further description of the above technical solution: the lower part of the PEEK pressing block and the rear end of the differential head adjusting nut are both in contact with the edge ring;
[0013] As a further description of the above technical solution: anti-slip pads are fixedly connected to the four corners of the bottom of the base plate at equal distances.
[0014] The utility model has the following beneficial effects:
[0015] 1. In the utility model, through the cooperation of structures such as PEEK pressing blocks, two PEEK pressing blocks with built-in magnets are introduced axially into the RTP EDGE RING to ensure that the product is pressed without scratching it. A differential head adjustment nut is introduced radially. The minimum pitch of the traditional thread adjustment cannot reach the micron level, ensuring that the product is fixed without crushing it.
[0016] 2. In the utility model, with the cooperation of the fixture base and the L-shaped adjustment block and other structures, a point-to-point mode is adopted when measuring the thickness. The probe can take points on the upper and lower surfaces of the ring for measurement, and two points on the upper and lower surfaces at the same position are measured to avoid the influence of the warpage of the edge ring on the thickness result. In addition, placing the edge ring on the upper part of the fixture base and the L-shaped adjustment block is convenient for taking and placing. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 This is the overall structure diagram of an edge ring three-coordinate measurement fixture proposed by the utility model;
[0018] Figure 2 This is a bottom view of an edge ring three-coordinate measurement fixture proposed by the utility model;
[0019] Figure 3 for Figure 1 The enlarged view of point A in the middle;
[0020] Figure 4 for Figure 1 Detailed breakdown of the fixture mechanism in the overall structure diagram;
[0021] Figure 5 for Figure 1 A cross-sectional view of the clamp mechanism in the overall structure diagram.
[0022] Legend:
[0023] 1. Base plate; 2. T-type base; 3. Clamp mechanism; 301. Square base; 302. Clamp base; 303. Positioning pin; 304. First groove; 305. First magnet; 306. Second magnet; 307. PEEK pressure block; 308. Handle; 309. Second groove; 4. Bolt; 5. Edge ring; 6. Anti-slip pad; 7. Annular groove; 8. L-type adjustment block; 9. Differential head adjustment nut; 10. Arc groove; 11. Threaded hole. DETAILED DESCRIPTION
[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0025] Reference Figure 1-Figure 3 The utility model provides an embodiment: an edge ring three-coordinate measuring fixture, comprising a base plate 1, a T-shaped base 2 is arranged on the upper front side of the base plate 1, an L-shaped adjusting block 8 is arranged on the upper part of the T-shaped base 2, a differential head adjusting nut 9 is arranged on the front middle side of the L-shaped adjusting block 8, and the rear end of the differential head adjusting nut 9 passes through the L-shaped adjusting block 8, an arc groove 10 is opened on the upper middle side of the L-shaped adjusting block 8, and two clamp mechanisms 3 are equidistantly arranged on the upper rear side of the base plate 1.
[0026] While ensuring that the edge ring 5 is tightened without being scratched, a differential head adjustment nut 9 is radially introduced. The minimum pitch of traditional thread adjustment cannot reach the micron level, which ensures that the product is fixed without being crushed. Therefore, when fixing the edge ring 5, it is necessary to operate carefully to avoid crushing the product.
[0027] Reference Figure 4-Figure 5 The clamp mechanism 3 includes a square base 301. Two square bases 301 are equidistantly fixedly connected to the upper rear side of the base plate 1. The square base 301 and the clamp base 302 are connected by positioning pins 303. A first groove 304 is opened on the upper middle side of the clamp base 302. A first magnet 305 is arranged inside the first groove 304. The first magnet 305 is magnetically connected to the second magnet 306. The second magnet 306 is arranged inside the second groove 309 at the bottom of the PEEK pressing block 307. The rear part of the PEEK pressing block 307 is snap-connected with a handle 308. The clamp base 302 and the upper part of the L-shaped adjustment block 8 are provided with an edge ring 5. The lower part of the PEEK pressing block 307 and the rear end of the differential head adjustment nut 9 are in contact with the edge ring 5.
[0028] Two clamp mechanisms 3 are arranged on the upper part of the base plate 1, each of which includes a square base 301, a first magnet 305, a second magnet 306, a PEEK pressure block 307 and a handle 308; a tool is used to place the edge ring 5 on the upper part of the clamp base 302 and the L-shaped adjustment block 8, and then the PEEK pressure block 307 with a handle 308 and a built-in second magnet 306 is used to clamp the product. The middle part of the clamp base 302 is also built with a first magnet 305, and the mutual attraction of the two magnets is used to ensure that the product will not be scratched when it is pressed, so that a point-to-point mode can be used when measuring the thickness. The probe can take points on the upper and lower surfaces of the ring for measurement to avoid the influence of the warpage of the edge ring on the measured thickness result; in addition, placing the edge ring 5 on the upper part of the clamp base 302 and the L-shaped adjustment block 8 is conducive to convenient placement, and anti-slip pads 6 are arranged at the four corners of the bottom of the base plate 1 to ensure stability during the measurement process.
[0029] Working principle: Two clamp mechanisms 3 are arranged on the upper part of the bottom plate 1, each of which includes a square base 301, a first magnet 305, a second magnet 306, a PEEK pressing block 307 and a handle 308; a tool is used to place the edge ring 5 on the upper part of the clamp base 302 and the L-shaped adjustment block 8, and then the PEEK pressing block 307 with a handle 308 and a built-in second magnet 306 is used to clamp the product. The middle part of the clamp base 302 is also built-in with a first magnet 305. The mutual attraction of the two magnets ensures that the product will not be scratched when it is pressed, and the edge ring 5 is not scratched while being pressed. The edge ring 5 radially introduces a micrometer adjustment nut 9. The minimum pitch of the traditional thread adjustment cannot reach the micron level. It is necessary to be careful when fixing the edge ring 5 to avoid crushing the product. When measuring the thickness, a point-to-point mode can be used. The probe can take points on the upper and lower surfaces of the ring for measurement to avoid the influence of the warping of the edge ring on the measured thickness result. In addition, the edge ring 5 is placed on the upper part of the fixture base 302 and the L-shaped adjustment block 8, which is conducive to convenient placement and removal, and anti-slip pads 6 are provided at the four corners of the bottom of the base plate 1 to ensure stability during the measurement process.
[0030] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. An edge ring three-coordinate measurement fixture, comprising a base plate (1), characterized in that: A T-shaped base (2) is arranged on the front upper side of the base plate (1), an L-shaped adjustment block (8) is arranged on the upper part of the T-shaped base (2), a micrometer head adjustment nut (9) is arranged on the front middle side of the L-shaped adjustment block (8), and the rear end of the micrometer head adjustment nut (9) passes through the L-shaped adjustment block (8), an arc groove (10) is arranged on the upper middle side of the L-shaped adjustment block (8), and two clamp mechanisms (3) are equidistantly arranged on the upper rear side of the base plate (1).
2. The edge ring three-coordinate measuring fixture according to claim 1, characterized in that: The clamp mechanism (3) comprises a square base (301), two square bases (301) are equidistantly fixedly connected to the upper rear side of the base plate (1), the square base (301) and the clamp base (302) are connected via positioning pins (303), a first groove (304) is provided on the upper middle side of the clamp base (302), a first magnet (305) is provided inside the first groove (304), the first magnet (305) is magnetically connected to a second magnet (306), the second magnet (306) is provided inside a second groove (309) at the bottom of a PEEK pressing block (307), and a handle (308) is snap-fitted to the rear of the PEEK pressing block (307).
3. The edge ring three-coordinate measuring fixture according to claim 1, characterized in that: Annular grooves (7) are provided on both sides of the bottom of the T-shaped base (2).
4. The edge ring three-coordinate measuring fixture according to claim 1, characterized in that: Two threaded holes (11) are equidistantly arranged on the upper front side of the bottom plate (1).
5. The edge ring three-coordinate measuring fixture according to claim 3, characterized in that: The annular grooves (7) correspond to the threaded holes (11) one by one, and bolts (4) are arranged inside the annular grooves (7) and are threadedly connected to the threaded holes (11) of the base plate (1).
6. The edge ring three-coordinate measuring fixture according to claim 2, characterized in that: The clamp base (302) and the upper part of the L-shaped adjustment block (8) are provided with an edge ring (5).
7. The edge ring three-coordinate measuring fixture according to claim 2, characterized in that: The lower part of the PEEK pressing block (307) and the rear end of the micrometer head adjusting nut (9) are both in contact with the edge ring (5).
8. The edge ring three-coordinate measuring fixture according to claim 1, characterized in that: Anti-slip pads (6) are fixedly connected to the four corners of the bottom of the base plate (1) at equal distances.