MPCVD sealing structure

Abstract

An MPCVD sealing structure comprises a reaction cavity and a waveguide cavity, the reaction cavity is communicated with the waveguide cavity through a connecting ring, an antenna is arranged in the reaction cavity, the upper end of the antenna is connected with a connecting rod, and the connecting rod penetrates through the connecting ring and the waveguide cavity and extends out of the waveguide cavity. The upper end of the antenna and the upper end of the inner cavity of the reaction cavity are respectively provided with a lower rubber ring and an upper rubber ring which are corresponding in position, quartz closed rings are installed in the upper rubber ring and the lower rubber ring, and one end, extending out of the waveguide cavity, of the connecting rod is fixedly provided with a fixed locking upper ring. An adjusting locking lower ring located between the fixed locking upper ring and the waveguide cavity is arranged on the connecting rod in a sliding mode, and a spring is further arranged between the adjusting locking lower ring and the waveguide cavity. Under the action of the spring, the antenna is stretched upwards, so that the quartz closed ring is tightly combined with the upper rubber ring and the lower rubber ring, and the sealing performance of the reaction cavity is remarkably improved; all the adjusting screws can be synchronously adjusted at the same time, and the adjusting efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of MPCVD equipment, in particular to an MPCVD sealing structure. Background Art

[0002] In the diamond production process, MPCVD is considered to be one of the best methods for producing high-quality diamonds. Microwaves propagate through waveguides, and under the action of coaxial antennas, plasma is generated in a sealed cavity composed of a quartz ring, antenna, and cavity. The plasma causes the filled process gas to undergo chemical vapor deposition, thereby producing diamond products.

[0003] Traditional MPCVD equipment is usually provided with a quartz ring (i.e., quartz window), and substrate stages (i.e., copper plates) and chamber bottom plates are respectively provided at both ends of the quartz ring, and sealing flat pads are provided at the parts where the quartz ring contacts the substrate stage and the parts where the quartz ring contacts the chamber bottom plate, so that a closed chamber is formed in the quartz ring. An antenna penetrating the chamber bottom plate is also provided, and it is necessary that the quartz and the rubber rings on the antenna and the reaction chamber are fitted and sealed to ensure the sealing of the reaction chamber. Now, a tensioning spring is usually provided at the other end of the antenna. Under the elastic force of the tensioning spring, the end of the antenna away from the substrate stage has a tendency to extend outward, thereby making the substrate stage and the quartz ring closely combined, and the quartz ring and the chamber bottom plate are also closely combined. However, since the elasticity of the tensioning spring will deteriorate during use, the sealing mechanism will not be able to achieve a good sealing effect, so the sealing effect of relying solely on the tensioning spring is not good, so an additional adjustment structure is also required for sealing.

[0004] Therefore, an MPCVD sealing structure is needed to solve this problem. Utility Model Content

[0005] In view of the above situation, in order to overcome the defects of the prior art, the purpose of the present invention is to provide an MPCVD sealing structure to effectively solve the above problems.

[0006] The technical solution is as follows: the utility model comprises a reaction cavity and a waveguide cavity, the reaction cavity is connected with the waveguide cavity through a connecting ring, an antenna is arranged in the reaction cavity, the upper end of the antenna is connected with a connecting rod, the connecting rod passes through the connecting ring and the waveguide cavity and extends out of the waveguide cavity, the upper end of the antenna and the upper end of the inner cavity of the reaction cavity are respectively provided with a lower rubber ring and an upper rubber ring with corresponding positions, a quartz closing ring is installed in the upper rubber ring and the lower rubber ring, a fixed locking upper ring is fixedly installed on the end of the connecting rod extending out of the waveguide cavity, an adjusting locking lower ring located between the fixed locking upper ring and the waveguide cavity is slidably arranged on the connecting rod, a spring is provided between the adjusting locking lower ring and the waveguide cavity, the two ends of the spring are respectively connected with the lower end of the adjusting locking lower ring and the upper end of the waveguide cavity, a plurality of adjusting screws are also rotatably installed on the adjusting locking lower ring, and the adjusting screws are threadedly connected with the fixed locking upper ring.

[0007] Furthermore, the spring is sleeved on the connecting rod.

[0008] Furthermore, an outer gear ring is rotatably mounted on the upper end of the fixed locking upper ring, a planetary gear is mounted on each adjusting screw, a sun gear is rotatably mounted on the connecting rod, and each planetary gear is meshed with the sun gear and the outer gear ring at the same time.

[0009] The beneficial effects of the utility model are:

[0010] 1. Through the action of the spring, the antenna is stretched upward, so that the quartz sealing ring is tightly combined with the upper and lower rubber rings, thereby significantly improving the sealing performance of the reaction chamber. This design not only ensures the vacuum environment of the reaction chamber, but also ensures the sealing of microwave transmission and avoids microwave leakage.

[0011] 2. Through the design of the adjusting screw, the gap between the fixed locking upper ring and the adjusting locking lower ring can be easily adjusted, so as to achieve a stable adjustment of the antenna stretching degree, thereby ensuring the sealing of the reaction chamber

[0012] 3. The planetary gear combination structure of the sun gear, planetary gear and outer gear ring can realize the synchronous adjustment of all adjusting screws at the same time. This design not only simplifies the adjustment process and improves the adjustment efficiency, but also enhances the stability and reliability of the structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is the front view of the utility model.

[0014] Figure 2 It is a cross-sectional view of the utility model along the AA direction.

[0015] Figure 3 This utility model Figure 2 Enlarged view of B.

[0016] Figure 4 It is a structural schematic diagram of the second embodiment of the utility model. DETAILED DESCRIPTION

[0017] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings.

[0018] Embodiment 1:

[0019] Depend on Figures 1 to 3 The utility model includes a reaction cavity 1 and a waveguide cavity 2. The reaction cavity 1 is a metal vacuum cavity. The reaction cavity 1 is connected to the waveguide cavity 2 through a connecting ring. An antenna 3 is arranged in the reaction cavity. The upper end of the antenna 3 is connected to a connecting rod 4. The connecting rod 4 passes through the connecting ring and the waveguide cavity 2 and extends out of the waveguide cavity 2. The upper end of the antenna 3 and the upper end of the inner cavity of the reaction cavity 1 are also respectively provided with a lower rubber ring 5 and an upper rubber ring 6 corresponding to the position. A quartz sealing ring 7 is installed in the upper rubber ring 6 and the lower rubber ring 5. A fixed locking upper ring 8 is fixedly installed on one end of the connecting rod 4 extending out of the waveguide cavity 2. An adjusting locking lower ring 9 is slidably provided on the connecting rod 4 and is located between the fixed locking upper ring 8 and the waveguide cavity 2. There is also a spring 10 between the adjusting locking lower ring 9 and the waveguide cavity 2. The two ends of the spring 10 are respectively connected to the lower end of the adjusting locking lower ring 9 and the upper end of the waveguide cavity 2. A plurality of adjusting screws 11 are also rotatably installed on the adjusting locking lower ring 9, and the adjusting screws 11 are threadedly connected to the fixed locking upper ring 8.

[0020] The spring 10 is sleeved on the connecting rod 4 .

[0021] Embodiment 2:

[0022] Depend on Figure 4 It is shown that an outer gear ring 12 is rotatably mounted on the upper end of the fixed locking upper ring 8, and a planetary gear 13 is mounted on each adjusting screw 11. A connecting rod with the same diameter can be connected to the adjusting screw 11, so that the planetary gear 13 is mounted on the connecting rod. A sun gear 14 is rotatably mounted on the connecting rod 4, and each planetary gear 13 is meshed with the sun gear 14 and the outer gear ring 12 at the same time. The sun gear 14, the planetary gear 13 and the outer gear ring 12 all use straight teeth.

[0023] During installation, the utility model places the quartz sealing ring 7 between the upper rubber ring 6 and the lower rubber ring 5, and stretches the antenna 3 upwards through the spring 10. Afterwards, each adjusting screw 11 can be rotated to adjust the interval between the fixed locking upper ring 8 and the adjustable locking lower ring 9, so that the antenna 3 is pulled upwards, and the quartz sealing ring 7 is tightly combined with the upper rubber ring 6 and the lower rubber ring 5, thereby achieving the effect of sealing the vacuum and sealing the microwave at the same time.

[0024] It should be noted that the interval between the fixed locking upper ring 8 and the adjustable locking lower ring 9 can be adjusted by rotating each adjusting screw 11 respectively, or the structure of the second embodiment can be adopted, by rotating the outer gear ring 12 so that the outer gear ring 12 drives each planetary gear 13 to rotate at the same time, thereby causing each adjusting screw 11 to rotate at the same time, thereby adjusting the interval between the fixed locking upper ring 8 and the adjustable locking lower ring 9.

[0025] The beneficial effects of the utility model are:

[0026] 1. Through the action of the spring, the antenna is stretched upward, so that the quartz sealing ring is tightly combined with the upper and lower rubber rings, thereby significantly improving the sealing performance of the reaction chamber. This design not only ensures the vacuum environment of the reaction chamber, but also ensures the sealing of microwave transmission and avoids microwave leakage.

[0027] 2. Through the design of the adjusting screw, the gap between the fixed locking upper ring and the adjusting locking lower ring can be easily adjusted, so as to achieve a stable adjustment of the antenna stretching degree, thereby ensuring the sealing of the reaction chamber

[0028] 3. The planetary gear combination structure of the sun gear, planetary gear and outer gear ring can realize the synchronous adjustment of all adjusting screws at the same time. This design not only simplifies the adjustment process and improves the adjustment efficiency, but also enhances the stability and reliability of the structure.

[0029] The above-mentioned specific implementation modes / embodiments are specific implementation modes of the utility model, which are used to illustrate the concept of the utility model, are explanatory and exemplary, and should not be interpreted as limiting the implementation modes of the utility model and the scope of the utility model. In addition to the embodiments described herein, those skilled in the art can also adopt other obvious technical solutions based on the contents disclosed in the claims and the specification of this application. These technical solutions include technical solutions that make any obvious replacements and modifications to the embodiments described herein, which are within the scope of protection of the utility model. In particular, as long as there is no structural conflict, the various technical features mentioned in each embodiment can be combined in any way. The utility model is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. An MPCVD sealing structure, comprising a reaction chamber (1) and a waveguide chamber (2), wherein the reaction chamber (1) is connected to the waveguide chamber (2) via a connecting ring, an antenna (3) is arranged in the reaction chamber, the upper end of the antenna (3) is connected to a connecting rod (4), the connecting rod (4) passes through the connecting ring and the waveguide chamber (2) and extends out of the waveguide chamber (2), characterized in that: The upper end of the antenna (3) and the upper end of the inner cavity of the reaction cavity (1) are respectively provided with a lower rubber ring (5) and an upper rubber ring (6) in corresponding positions. A quartz sealing ring (7) is installed in the upper rubber ring (6) and the lower rubber ring (5). One end of the connecting rod (4) extending out of the waveguide cavity (2) is fixedly installed with a fixed locking upper ring (8). An adjusting locking lower ring (9) located between the fixed locking upper ring (8) and the waveguide cavity (2) is slidably arranged on the connecting rod (4). There is also a spring (10) between the adjusting locking lower ring (9) and the waveguide cavity (2). The two ends of the spring (10) are respectively connected to the lower end of the adjusting locking lower ring (9) and the upper end of the waveguide cavity (2). A plurality of adjusting screws (11) are also rotatably installed on the adjusting locking lower ring (9). The adjusting screws (11) are threadedly connected to the fixed locking upper ring (8).

2. The MPCVD sealing structure according to claim 1, characterized in that: The spring (10) is sleeved on the connecting rod (4).

3. The MPCVD sealing structure according to claim 1, characterized in that: An outer gear ring (12) is rotatably mounted on the upper end of the fixed locking upper ring (8), a planetary gear (13) is mounted on each adjusting screw (11), a sun gear (14) is rotatably mounted on the connecting rod (4), and each planetary gear (13) is meshed with the sun gear (14) and the outer gear ring (12) at the same time.

Images