Cleaning component for tail gas treatment pipeline and tail gas treatment system

Abstract

The utility model relates to a cleaning component for a tail gas treatment pipeline and a tail gas treatment system. The cleaning component comprises a closing unit, a cleaning unit and a first driving unit. By adopting a sealing technology, the reaction space is sealed by using the sealing unit, so that the problem that a reaction product is easy to leak due to unsealing of a reaction tube is solved; the cleaning unit is arranged to be of a spiral structure, moves back and forth under the action of the first driving unit to clean powder attached to the pipe wall and can go deep into the bent pipe to clean, cleaning is efficient and timely, and the problem that blockage is easily caused due to the fact that the bent part of the reaction pipe cannot be cleaned is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment in the semiconductor industry, and in particular to a cleaning component for a tail gas treatment pipeline and a tail gas treatment system. Background Art

[0002] TCS is trichlorosilane, a compound with the chemical formula SiHCI3. It is a colorless liquid with a pungent odor. It is easily oxidized in the air to produce silicon oxide and chloride. The hydrolysis of trichlorosilane refers to the reaction of trichlorosilane with water to produce silicon dioxide powder, hydrogen chloride and hydrogen. Among them, silicon dioxide powder is difficult to clean and will adhere to the tube wall, affecting the normal reaction process.

[0003] At present, there are some tail gas treatment equipments on the market, among which CN219151035U discloses a pipeline cleaning device for tail gas treatment equipment of EPI epitaxial process, including a feed pipe, a reaction pipe and a hydrolysis box, the feed pipe is for trichlorosilane to enter, the feed pipe is connected with the reaction pipe, the reaction pipe is connected with the hydrolysis box, the hydrolysis box is provided with a discharge pipe and an outlet pipe, the discharge pipe is for silicon dioxide powder to be discharged, the outlet pipe is for hydrogen to be discharged, a control part and a sliding disk are provided at the pipe mouth of the reaction tube, the sliding disk is located in the reaction tube and slides, an elastic part is provided on the peripheral surface of the sliding disk, the elastic part abuts against the inner wall of the reaction tube, and the control part is used to control the sliding of the sliding disk. Part of the silicon dioxide powder produced by the hydrolysis of trichlorosilane is adsorbed on the inner wall of the reaction tube, and the control cylinder makes the piston rod control the sliding of the sliding disk in the reaction tube to make the silicon dioxide powder adsorbed on the inner wall of the reaction tube fall off.

[0004] However, this device still has some problems. First, the process of the piston tube controlling the sliding of the sliding disk cannot ensure the airtightness of the inside, which may cause leakage of harmful gases. Secondly, the discharge pipe is connected to the outside world, which may easily lead to the entry of oxygen and affect the reaction process and generate impurities. In addition, the piston cannot handle the curved part of the reaction pipeline. During the sliding process of the piston, silica powder will accumulate in the curved part of the pipeline, causing pipeline blockage. At the same time, this equipment cannot cooperate well with the actual production situation of the equipment, which may easily cause the device to run all the time, wasting resources or the operating rate cannot meet the requirements, and the reaction products are not effectively collected and processed.

[0005] There is no effective solution to the problems in the related technology, such as the reaction tube is not airtight, which may cause leakage of reaction products, oxygen may easily enter and affect the reaction process, the curved parts of the reaction tube cannot be cleaned, which may cause blockage, intelligent control is not possible, and the reaction products are not separated and collected. Utility Model Content

[0006] The purpose of the utility model is to provide a cleaning component for an exhaust gas treatment pipeline and an exhaust gas treatment system in view of the deficiencies in the prior art, so as to solve the problems existing in the related technology that the reaction tube is not airtight and easily causes leakage of reaction products, oxygen is easy to enter and affect the reaction process, the curved part of the reaction tube cannot be cleaned and easily causes blockage, intelligent control cannot be performed, and the reaction products are not separated and collected.

[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0008] The first aspect of the utility model is to provide a cleaning component for an exhaust gas treatment pipeline, comprising:

[0009] A sealing unit, which is detachably disposed at the end of the tail gas treatment pipeline and is used to seal the tail gas treatment pipeline;

[0010] A cleaning unit, the cleaning unit is made of an elastic deformable material, the cleaning unit is spiral, the cleaning unit is movably arranged at the bottom of the closed unit, and is slidably connected to the exhaust gas treatment pipeline, and is used to reciprocate along the axial direction of the exhaust gas treatment pipeline to remove silicon dioxide attached to the exhaust gas treatment pipeline;

[0011] A first driving unit is disposed on the top of the enclosed unit and connected to the cleaning unit, and is used to drive the cleaning unit to reciprocate along the axial direction of the exhaust gas treatment pipeline.

[0012] In some of the embodiments, the enclosed unit comprises:

[0013] A closing element, which is detachably disposed at an end of the exhaust gas treatment pipeline and is used to seal the exhaust gas treatment pipeline;

[0014] A first connecting element, which is disposed at the bottom end of the closing element and is detachably connected to the exhaust gas treatment pipeline;

[0015] A through hole element is provided through the closing element and is used for allowing the first driving unit to pass through.

[0016] In some embodiments, the cleaning unit comprises:

[0017] A middle axis element, the end of which is connected to the first driving unit and is used for reciprocating along the axial direction of the exhaust gas treatment pipeline under the action of the first driving unit;

[0018] A spiral cleaning element is arranged on the outside of the central axis element and is used to reciprocate along the axial direction of the exhaust gas treatment pipeline under the action of the central axis element to remove silicon dioxide attached to the exhaust gas treatment pipeline.

[0019] In some embodiments, the first driving unit includes:

[0020] a first driving element, the first driving element being disposed on the top of the closed unit;

[0021] The first movable element has two ends connected to the first driving element and the cleaning unit respectively, and is used to drive the cleaning unit to reciprocate along the axial direction of the exhaust gas treatment pipeline under the action of the first driving element.

[0022] In some of the embodiments, the enclosed unit further comprises:

[0023] A first sealing element is disposed at the top end of the closing element and above the through-hole element, and is used for sealing the through-hole element.

[0024] The second aspect of the utility model is to provide an exhaust gas treatment system, comprising:

[0025] A reaction component, wherein the reaction component is used for reacting trichlorosilane with water to obtain a reaction product, wherein the reaction product includes hydrogen, hydrogen chloride, and silicon dioxide;

[0026] The cleaning component as described in the first aspect, wherein the cleaning component is disposed at the end of the reaction component and is used to clean the silicon dioxide attached to the reaction component;

[0027] a buffer component, the buffer component being in communication with the reaction component and being used for storing the reaction product;

[0028] A separation component, which is disposed inside the buffer component and is used to separate hydrogen chloride and silicon dioxide;

[0029] a first collecting component, the first collecting component being in communication with the buffer component and being used for collecting hydrogen;

[0030] a second collecting component, the second collecting component being in communication with the buffer component and being used for collecting hydrogen chloride;

[0031] A third collecting component is communicated with the buffer component and is used for collecting silicon dioxide.

[0032] In some of the embodiments, the reaction component comprises:

[0033] Reaction unit; the reaction unit is used for allowing trichlorosilane to react with water to obtain a reaction product.

[0034] In some of these embodiments, the reaction unit comprises:

[0035] A reaction element, the end of which is provided with the cleaning component and is slidably connected to the cleaning component, and is used for allowing trichlorosilane to react with water to obtain a reaction product;

[0036] a first conveying element, the first conveying element being in communication with the reaction element and the tail gas conveying system, respectively, and being used for conveying the tail gas to the reaction element;

[0037] a second conveying element, the second conveying element being in communication with the reaction element and the water supply system, respectively, and being used for conveying water to the reaction element;

[0038] A second connecting element is arranged at the end of the reaction element and is detachably connected to the cleaning component.

[0039] In some embodiments, the reaction unit further comprises:

[0040] A heat exchange element is arranged outside the reaction element and is used to exchange heat generated by the reaction element.

[0041] In some embodiments, the buffer component includes:

[0042] A buffer unit is communicated with the reaction component and is used for storing reaction products.

[0043] In some embodiments, the buffer unit includes:

[0044] a buffer element, the buffer element being connected to the reaction component, the first collecting component, the second collecting component, and the third collecting component respectively, and being used for storing reaction products;

[0045] an inlet element, the inlet element being disposed at a side of the buffer component and being in communication with the reaction component, and being used for conveying a reaction product of the reaction component to the buffer component;

[0046] A first outlet element, which is disposed at a side of the buffer element and is connected to the first collecting component, and is used for outputting the reaction product hydrogen;

[0047] A second outlet element, which is disposed at a side of the buffer element and is in communication with the second collecting component and is used for outputting the reaction product, hydrogen chloride;

[0048] a third outlet element, the third outlet element being disposed at the bottom of the buffer element and being in communication with the third collecting component for outputting the reaction product, silicon dioxide;

[0049] A third connecting element is disposed inside the buffer element and connected to the separation component.

[0050] In some of the embodiments, the separation component comprises:

[0051] A filter unit, the filter unit is arranged inside the buffer component and is used to separate hydrogen chloride and silicon dioxide;

[0052] A pushing unit, the pushing unit is movably disposed inside the buffer component and is used to push the silicon dioxide toward the third collecting component;

[0053] A second driving unit is disposed on the buffer component and connected to the pushing unit, and is used to drive the pushing unit.

[0054] In some embodiments, the filtering unit comprises:

[0055] A filter element, which is disposed on the buffer component and located at the end of the second collecting component, and is used to filter the reaction product, silicon dioxide;

[0056] A fourth connecting element is disposed on the filter element and connected to the buffer component.

[0057] In some embodiments, the pushing unit includes:

[0058] A pushing element is movably disposed inside the buffer component and is used for pushing the silicon dioxide in the buffer component into the third collecting component.

[0059] In some embodiments, the second driving unit includes:

[0060] a second driving element, the second driving element being disposed at the bottom of the buffer component;

[0061] The second movable element has two ends connected to the second driving element and the pushing unit respectively, and is used to drive the pushing unit to move under the action of the second driving element.

[0062] In some embodiments, the first collecting component includes:

[0063] a first conveying unit, the first conveying unit being in communication with the buffer component and being used for conveying the hydrogen stored in the buffer component;

[0064] The first collecting unit is connected to the first conveying unit and is used to collect the hydrogen conveyed by the first conveying unit.

[0065] In some embodiments, the first conveying unit includes:

[0066] A third conveying element is connected to the buffer component and is used to convey hydrogen, a reaction product of the buffer component.

[0067] In some embodiments, the first collecting unit includes:

[0068] A first collecting element is connected to the first conveying unit and is used to collect the reaction product hydrogen gas conveyed by the first conveying unit.

[0069] In some embodiments, the first collecting component further comprises:

[0070] A first monitoring unit is disposed inside the first collecting component and connected to the control component, and is used to monitor the pressure inside the first collecting component.

[0071] In some embodiments, the first monitoring unit includes:

[0072] A pressure monitoring element is disposed in the first collecting component and connected to the control component, and is used for monitoring the pressure of the first collecting component and transmitting the pressure to the control component.

[0073] In some embodiments, the second collecting component includes:

[0074] a second conveying unit, the second conveying unit being in communication with the buffer component and being used for conveying the hydrogen chloride stored in the buffer component;

[0075] The second collecting unit is communicated with the second conveying unit and is used for collecting the hydrogen chloride conveyed by the second conveying unit.

[0076] In some embodiments, the second conveying unit includes:

[0077] A fourth conveying element is connected to the buffer unit and is used to convey hydrogen chloride, a reaction product of the buffer unit.

[0078] In some embodiments, the second collecting unit includes:

[0079] A second collecting element is communicated with the second conveying unit and is used for collecting the reaction product hydrogen chloride conveyed by the second conveying unit.

[0080] In some embodiments, the second collecting component further comprises:

[0081] The second monitoring unit is arranged inside the second collecting component and connected to the control component to monitor the state of the liquid inside the second collecting component.

[0082] In some embodiments, the second monitoring unit includes:

[0083] A pH monitoring element is disposed inside the second collecting component and connected to the control component, and is used to monitor the pH value of the second collecting component and transmit the pH value to the control component.

[0084] In some embodiments, the second monitoring unit includes:

[0085] A liquid level monitoring element is disposed inside the second collecting component and connected to the control component, and is used for monitoring the liquid level information of the second collecting component and transmitting the liquid level information to the control component.

[0086] In some of the embodiments, the third collecting component comprises:

[0087] a third conveying unit, the third conveying unit being disposed at the bottom of the buffer component and being in communication with the buffer component, and being used for conveying the silicon dioxide stored in the buffer component;

[0088] A third collecting unit is communicated with the third conveying unit and is used for collecting the silicon dioxide conveyed by the third conveying unit.

[0089] In some embodiments, the third conveying unit includes:

[0090] A fifth conveying element is connected to the buffer unit and is used to convey the reaction product silicon dioxide of the buffer unit.

[0091] In some of the embodiments, the third collecting unit comprises:

[0092] A third collecting element is connected to the third conveying unit and is used to collect the reaction product silicon dioxide conveyed by the third conveying unit.

[0093] In some of the embodiments, it also includes:

[0094] A control component is connected to the cleaning component, the reaction component, the separation component, the first collecting component, and the second collecting component respectively.

[0095] In some of the embodiments, it also includes:

[0096] A feeding component is communicated with the second collecting component and is used for supplying an alkaline solution to the second collecting component.

[0097] In some of the embodiments, the feed component comprises:

[0098] A feeding unit is communicated with the second collecting part and is used for supplying an alkaline solution to the second collecting part.

[0099] In some of the embodiments, the feeding unit comprises:

[0100] a feeding element, the feeding element being in communication with the second collecting part and being used for supplying an alkaline solution to the second collecting part;

[0101] A sixth conveying element is connected to the feeding element and the second collecting component respectively, and is used for conveying the alkaline solution to the second collecting component.

[0102] The utility model adopts the above technical solution, and compared with the prior art, has the following technical effects:

[0103] The utility model discloses a cleaning component and a tail gas treatment system for a tail gas treatment pipeline. The reaction component is provided with a sealing technology to provide a closed space for the reaction of trichlorosilane and water, thereby solving the problem that the reaction tube is not airtight and easily causes the reaction product to leak. The cleaning component is provided in a spiral shape, so that not only the reaction product silicon dioxide attached to the inner wall of the reaction component can be cleaned off in time, but also the curved tube can be cleaned deeply, and the cleaning is efficient and timely, thereby solving the problem that the curved part of the reaction tube cannot be cleaned and easily causes blockage. The reaction product enters the buffer component and is stored and separated, and the first conveying component, the first collecting component, the second conveying component, the second collecting component, the third conveying component, the third collecting component and the buffer component form a closed space, which is not connected to the outside world, effectively avoiding the pressure caused by the leakage of the reaction product to the environment or avoiding the entry of oxygen to affect the reaction process, and effectively separating and collecting the reaction products, thereby solving the problem that oxygen easily enters and affects the reaction process and the reaction products are not separated and collected. The tail gas treatment system is intelligently controlled by providing a control component, and cleaning and collection are performed as needed, thereby reasonably utilizing resources and reducing the influence of human factors on the reaction. BRIEF DESCRIPTION OF THE DRAWINGS

[0104] Figure 1 is a schematic diagram of a cleaning component according to an embodiment of the utility model;

[0105] Figure 2 is a schematic diagram of a closed unit according to an embodiment of the utility model (I);

[0106] Figure 3is a schematic diagram of a cleaning unit according to an embodiment of the utility model;

[0107] Figure 4 is a schematic diagram of a first driving unit according to an embodiment of the utility model;

[0108] Figure 5 is a schematic diagram of a closed unit according to an embodiment of the utility model (II);

[0109] Figure 6 is a schematic diagram of an exhaust gas treatment system according to an embodiment of the utility model;

[0110] Figure 7 is a schematic diagram of a reaction unit according to an embodiment of the utility model (I);

[0111] Figure 8 is a schematic diagram of a buffer unit according to an embodiment of the utility model;

[0112] Fig. 9 is a schematic diagram of a separation component according to an embodiment of the utility model;

[0113] Fig.10 is a schematic diagram of a filter unit according to an embodiment of the utility model;

[0114] Fig.11 is a schematic diagram of a pushing unit according to an embodiment of the utility model;

[0115] Fig.12 is a schematic diagram of a second driving unit according to an embodiment of the utility model;

[0116] Fig.13 is a schematic diagram of a first collecting component according to an embodiment of the utility model (I);

[0117] Fig.14 is a schematic diagram of a second collecting component according to an embodiment of the utility model (I);

[0118] Fig.15 is a schematic diagram of a third collecting component according to an embodiment of the utility model;

[0119] Fig.16 is a schematic diagram of a control component according to an embodiment of the utility model;

[0120] Fig.17 is a schematic diagram of a reaction unit according to an embodiment of the utility model (II);

[0121] Fig.18 is a schematic diagram of a feeding component according to an embodiment of the utility model;

[0122] Fig.19is a schematic diagram of a first collecting component according to an embodiment of the utility model (II);

[0123] Fig. 20 2 is a schematic diagram of the second collecting component according to an embodiment of the utility model.

[0124] The accompanying drawings are denoted as follows:

[0125] 100, cleaning component; 110, closing unit; 111, closing element; 112, first connecting element; 113, through-hole element; 114, first sealing element; 120, cleaning unit; 121, middle shaft element; 122, spiral cleaning element; 130, first driving unit; 131, first driving element; 132, first movable element;

[0126] 200, reaction component; 210, reaction unit; 211, reaction element; 212, first conveying element; 213, second conveying element; 214, second connecting element; 215, heat exchange element;

[0127] 300, buffer component; 310, buffer unit; 311, buffer element; 312, inlet element; 313, first outlet element; 314, second outlet element; 315, third outlet element; 316, third connecting element;

[0128] 400, separation component; 410, filter unit; 411, filter element; 412, fourth connecting element; 420, push unit; 421, push element; 430, second drive unit; 431, second drive element; 432, second movable element;

[0129] 500, first collecting component; 510, first conveying unit; 511, third conveying element; 520, first collecting unit; 521, first collecting element; 530, first monitoring unit; 531, pressure monitoring element;

[0130] 600, second collecting component; 610, second conveying unit; 611, fourth conveying element; 620, second collecting unit; 621, second collecting element; 630, second monitoring unit; 631, pH monitoring element; 632, liquid level monitoring element;

[0131] 700, third collecting component; 710, third conveying unit; 711, fifth conveying element; 720, third collecting unit; 721, third collecting element;

[0132] 800, control component; 810, control unit; 811, control element; 812, communication element; 813, power supply element;

[0133] 900, feeding component; 910, feeding unit; 911, feeding element; 912, sixth conveying element. DETAILED DESCRIPTION

[0134] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0135] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0136] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0137] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or units (units) is not limited to the listed steps or units, but may also include steps or units that are not listed, or may also include other steps or units inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there can be three relationships, for example, "A and / or B" can mean: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0138] Example 1

[0139] This embodiment relates to the cleaning component of the utility model.

[0140] An illustrative embodiment of the present utility model is as follows: Figure 1 As shown, a cleaning component 100 for an exhaust gas treatment pipeline comprises a sealing unit 110, a cleaning unit 120 and a first driving unit 130. The sealing unit 110 is detachably arranged at the end of the exhaust gas treatment pipeline for sealing the exhaust gas treatment pipeline; the cleaning unit 120 is made of an elastic deformation material, and is spiral-shaped. The cleaning unit 120 is movably arranged at the bottom of the sealing unit 110 and is slidably connected to the exhaust gas treatment pipeline for reciprocating along the axial direction of the exhaust gas treatment pipeline to remove silicon dioxide attached to the exhaust gas treatment pipeline; the first driving unit 130 is arranged at the top of the sealing unit 110 and is connected to the cleaning unit 120 for driving the cleaning unit 120 to reciprocate along the axial direction of the exhaust gas treatment pipeline.

[0141] like Figure 2As shown, the closing unit 110 includes a closing element 111, a first connecting element 112 and a through-hole element 113. The closing element 111 is detachably arranged at the end of the exhaust gas treatment pipeline for sealing the exhaust gas treatment pipeline; the first connecting element 112 is arranged at the bottom end of the closing element 111 and is detachably connected to the exhaust gas treatment pipeline; the through-hole element 113 is arranged through the closing element 111 for the first driving unit 130 to pass through.

[0142] In some embodiments, the material of the sealing element 111 includes but is not limited to stainless steel.

[0143] In some of the embodiments, the closing element 111 is a first sealing cover.

[0144] The first connecting element 112 is disposed on the inner edge surface and / or the outer edge surface of the bottom end of the closing element 111 .

[0145] The size of the first connecting element 112 matches the size of the closing element 111. Generally, the radial size (eg, outer diameter) of the first connecting element 112 is smaller than the radial size (eg, inner diameter) of the closing element 111.

[0146] In some embodiments, the first connecting element 112 includes but is not limited to a first connecting internal thread, a first connecting external thread, a first connecting slot, and a first connecting block.

[0147] The through-hole element 113 is arranged coaxially with the closing element 111 .

[0148] The size of the through hole element 113 matches the size of the closed element 111. Generally, the radial size (such as the outer diameter) of the through hole element 113 is smaller than the radial size (such as the inner diameter) of the closed element 111.

[0149] In some of the embodiments, the through-hole element 113 is a mounting hole.

[0150] Furthermore, the closing unit 110 further includes a first sealing element 114 . The first sealing element 114 is disposed at the top of the closing element 111 , above the through-hole element 113 , and is used to seal the through-hole element 113 .

[0151] The first sealing element 114 is connected to the closing element 111 by fixed connection, wherein the fixed connection includes but is not limited to welding.

[0152] The size of the first sealing element 114 matches the size of the closing element 111. Generally, the radial size (eg, outer diameter) of the first sealing element 114 is not greater than the radial size (eg, outer diameter) of the closing element 111.

[0153] The radial dimension of the first sealing element 114 matches the dimension of the through-hole element 113. Generally, the radial dimension (eg, outer diameter) of the first sealing element 114 is not less than the radial dimension (eg, outer diameter) of the through-hole element 113.

[0154] In some embodiments, the material of the first sealing element 114 includes but is not limited to stainless steel.

[0155] In some of the embodiments, the first sealing element 114 is a sealing plate.

[0156] In some of the embodiments, the tightness of the contact surface of the first sealing element 114 is ensured by precision machining, and the surface of the first sealing element 114 is hardened, so as to achieve a close fit between the first sealing element 114 and the closing element 111 and the first driving unit 130.

[0157] like Figure 3 As shown, the cleaning unit 120 includes a central axis element 121 and a spiral cleaning element 122. The end of the central axis element 121 is connected to the first driving unit 130, and is used to reciprocate along the axial direction of the exhaust gas treatment pipeline under the action of the first driving unit 130; the spiral cleaning element 122 is arranged on the outer side of the central axis element 121, and is used to reciprocate along the axial direction of the exhaust gas treatment pipeline under the action of the central axis element 121 to remove the silicon dioxide attached to the exhaust gas treatment pipeline.

[0158] The size of the central axis element 121 matches the size of the through hole element 113. Generally, the radial size (such as the outer diameter) of the central axis element 121 is not greater than the radial size (such as the inner diameter) of the through hole element 113.

[0159] In some embodiments, the material of the middle axis element 121 includes but is not limited to rubber material.

[0160] In some of the embodiments, the central axis element 121 is a central axis.

[0161] The spiral cleaning element 122 is connected to the central axis element 121 in a fixed connection, wherein the fixed connection includes but is not limited to integral molding.

[0162] The size of the spiral cleaning element 122 matches the size of the central axis element 121. Generally, the radial size (such as the outer diameter) of the spiral cleaning element 122 is larger than the radial size (such as the outer diameter) of the central axis element 121, and the length of the spiral cleaning element 122 is not larger than the length of the central axis element 121.

[0163] In some embodiments, the material of the spiral cleaning element 122 includes but is not limited to rubber material.

[0164] In some embodiments, the spiral cleaning element 122 is a spiral piston.

[0165] like Figure 4 As shown, the first driving unit 130 includes a first driving element 131 and a first movable element 132. The first driving element 131 is disposed on the top of the closed unit 110; the two ends of the first movable element 132 are respectively connected to the first driving element 131 and the cleaning unit 120, and are used to drive the cleaning unit 120 to reciprocate along the axial direction of the exhaust gas treatment pipeline under the action of the first driving element 131.

[0166] Specifically, the first movable element 132 is transmission-connected to the middle shaft element 121 , and is connected to the first sealing element 114 .

[0167] In some embodiments, the first driving element 131 is a first driving motor.

[0168] In some of the embodiments, the first movable element 132 is a first transmission shaft, including but not limited to a telescopic shaft.

[0169] The method of using the utility model is as follows:

[0170] The first driving element 131 is started to make the first movable element 132 extend and retract in the axial direction, thereby driving the spiral cleaning element 122 to reciprocate along the axial direction of the exhaust gas treatment pipeline through the central axis element 121 to remove the silicon dioxide attached to the exhaust gas treatment pipeline.

[0171] The technical effects of the utility model are as follows:

[0172] By adopting sealing technology and using a closed unit to seal the reaction space, the problem of leakage of reaction products caused by a leaky reaction tube is solved. The cleaning unit is set as a spiral structure, and reciprocates under the action of the first driving unit to clean the powder attached to the tube wall, and can go deep into the curved tube for cleaning. The cleaning is efficient and timely, and the problem of blockage caused by the curved part of the reaction tube that cannot be cleaned is solved.

[0173] Example 2

[0174] This embodiment relates to the exhaust gas treatment system of the utility model.

[0175] like Figure 6As shown, a tail gas treatment system includes a reaction component 200, a cleaning component 100 as described in Example 1, a buffer component 300, a separation component 400, a first collection component 500, a second collection component 600 and a third collection component 700. The reaction component 200 is used for trichlorosilane to react with water to obtain a reaction product, wherein the reaction product includes hydrogen, hydrogen chloride and silicon dioxide; the cleaning component 100 is arranged at the end of the reaction component 200, and is used to clean the silicon dioxide attached to the reaction component 200; the buffer component 300 is connected to the reaction component 200, and is used to store the reaction product; the separation component 400 is arranged inside the buffer component 300, and is used to separate hydrogen chloride and silicon dioxide; the first collection component 500 is connected to the buffer component 300, and is used to collect hydrogen; the second collection component 600 is connected to the buffer component 300, and is used to collect hydrogen chloride; the third collection component 700 is connected to the buffer component 300, and is used to collect silicon dioxide.

[0176] like Figure 7 As shown, the reaction component 200 includes a reaction unit 210. The reaction unit 210 is used for allowing trichlorosilane to react with water to obtain a reaction product.

[0177] Furthermore, if Figure 7 As shown, the reaction unit 210 includes a reaction element 211, a first delivery element 212, a second delivery element 213 and a second connection element 214. The end of the reaction element 211 is provided with a cleaning component 100, which is slidably connected to the cleaning component 100, and is used for the trichlorosilane in the tail gas to react with water to obtain a reaction product; the first delivery element 212 is respectively connected to the reaction element 211 and the tail gas delivery system, and is used to deliver the tail gas to the reaction element 211; the second delivery element 213 is respectively connected to the reaction element 211 and the water supply system, and is used to deliver water to the reaction element 211; the second connection element 214 is provided at the end of the reaction element 211, and is detachably connected to the cleaning component 100.

[0178] Specifically, the reaction element 211 is provided with a central axis element 121 and a spiral cleaning element 122 , the closing element 111 seals the reaction element 211 , the first driving element 131 and the first movable element 132 are located outside the reaction element 211 ; the second connecting element 214 is connected to the first connecting element 112 .

[0179] The size of the reaction element 211 matches the size of the middle axis element 121. Generally, the height of the reaction element 211 is not less than the length of the middle axis element 121.

[0180] The size of the reaction element 211 matches the size of the spiral cleaning element 122. Generally, the radial size (eg, inner diameter) of the reaction element 211 is equal to the radial size (eg, outer diameter) of the spiral cleaning element 122.

[0181] In some embodiments, the material of the reaction element 211 includes but is not limited to stainless steel.

[0182] In some embodiments, the cross-sectional shape of the reaction element 211 is circular, and the longitudinal cross-sectional shape of the reaction element 211 is arc-shaped. The spiral cleaning element 122 can be used to clean the arc-shaped reaction element 211.

[0183] In some embodiments, the reaction element 211 is a reaction tube.

[0184] The first conveying element 212 and the reaction element 211 are connected in a fixed manner, wherein the fixed connection manner includes but is not limited to integral molding.

[0185] The size of the first delivery element 212 matches the size of the reaction element 211. Generally, the radial size (eg, outer diameter) of the first delivery element 212 is smaller than the radial size (eg, outer diameter) of the reaction element 211.

[0186] In some embodiments, the material of the first delivery element 212 includes but is not limited to stainless steel.

[0187] In some embodiments, the first delivery element 212 is a first delivery tube.

[0188] The second delivery element 213 is connected to the reaction element 211 in a fixed connection, wherein the fixed connection includes but is not limited to integral molding.

[0189] The size of the second delivery element 213 matches the size of the reaction element 211. Generally, the radial size (eg, outer diameter) of the second delivery element 213 is smaller than the radial size (eg, outer diameter) of the reaction element 211.

[0190] In some embodiments, the material of the second conveying element 213 includes but is not limited to stainless steel.

[0191] In some embodiments, the second delivery element 213 is a second delivery tube.

[0192] The second connection element 214 is connected to the first connection element 112 in a detachable manner, wherein the detachable connection manner includes but is not limited to a threaded connection and a clamping connection.

[0193] The size of the second connection element 214 matches the size of the first connection element 112. Generally, the radial size (eg, outer diameter) of the second connection element 214 is equal to the radial size (eg, inner diameter) of the first connection element 112.

[0194] In some of the embodiments, the second connecting element 214 includes but is not limited to a second connecting internal thread, a second connecting external thread, a second connecting slot, and a second connecting block.

[0195] like Figure 8 As shown, the buffer component 300 includes a buffer unit 310. The buffer unit 310 is communicated with the reaction component 200 and is used to store the reaction product.

[0196] Furthermore, if Figure 8 As shown, the buffer unit 310 includes a buffer element 311 , an inlet element 312 , a first outlet element 313 , a second outlet element 314 , a third outlet element 315 and a third connecting element 316 . Among them, the buffer element 311 is respectively connected to the reaction component 200, the first collecting component 500, the second collecting component 600, and the third collecting component 700 for storing reaction products; the inlet element 312 is arranged on the side of the buffer element 311 and is connected to the reaction component 200, for transporting the reaction product of the reaction component 200 to the buffer element 311; the first outlet element 313 is arranged on the side of the buffer element 311 and is connected to the first collecting component 500 for outputting the reaction product hydrogen; the second outlet element 314 is arranged on the side of the buffer element 311 and is connected to the second collecting component 600 for outputting the reaction product hydrogen chloride; the third outlet element 315 is arranged at the bottom of the buffer element 311 and is connected to the third collecting component 700 for outputting the reaction product silica; the third connecting element 316 is arranged inside the buffer element 311 and is connected to the separation component 400.

[0197] Specifically, the buffer element 311 is connected to the first conveying element 212 .

[0198] The buffer element 311 and the first conveying element 212 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to screw connection.

[0199] The size of the buffer element 311 matches the size of the first conveying element 212. Generally, the radial size (eg, outer diameter) of the buffer element 311 is greater than the radial size (eg, outer diameter) of the first conveying element 212.

[0200] In some embodiments, the material of the buffer element 311 includes but is not limited to stainless steel.

[0201] In some of the embodiments, the buffer element 311 is a buffer tank.

[0202] The size of the inlet element 312 matches the size of the buffer element 311. Generally, the radial size (such as the outer diameter) of the inlet element 312 is smaller than the radial size (such as the outer diameter, length, width) and axial size (height) of the buffer element 311.

[0203] In some of these embodiments, inlet element 312 is an inlet.

[0204] The size of the first outlet element 313 matches the size of the buffer element 311. Generally, the radial size (such as outer diameter) of the first outlet element 313 is smaller than the radial size (such as outer diameter, length, width) and axial size (height) of the buffer element 311.

[0205] In some of the embodiments, the first outlet element 313 is a first outlet.

[0206] In some embodiments, the first outlet element 313 includes a first outlet and a first valve. The first outlet is provided at the reaction element 211 and communicates with the first collection component 500; the first valve is provided at the first outlet to control whether the first outlet delivers the reaction product hydrogen to the first collection component 500.

[0207] The size of the second outlet element 314 matches the size of the buffer element 311. Generally, the radial size (such as outer diameter) of the second outlet element 314 is smaller than the radial size (such as outer diameter, length, width) and axial size (height) of the buffer element 311.

[0208] In some of these embodiments, the second outlet component 314 is a second outlet.

[0209] In some embodiments, the second outlet element 314 includes a second outlet and a second valve. The second outlet is provided at the reaction element 211 and communicates with the second collection component 600. The second valve is provided at the second outlet to control whether the second outlet delivers the reaction product hydrogen chloride to the second collection component 600.

[0210] The size of the third outlet element 315 matches the size of the buffer element 311. Generally, the radial size (such as outer diameter) of the third outlet element 315 is smaller than the radial size (such as outer diameter, length, width) and axial size (height) of the buffer element 311.

[0211] In some of the embodiments, the third outlet component 315 is a third outlet.

[0212] In some embodiments, the third outlet element 315 includes a third outlet and a third valve. The third outlet is provided at the reaction element 211 and communicates with the third collection component 700; the third valve is provided at the third outlet to control whether the third outlet delivers the reaction product silicon dioxide to the third collection component 700.

[0213] The size of the third connecting element 316 matches the size of the buffer element 311. Generally, the radial size (such as the outer diameter) of the third connecting element 316 is smaller than the radial size (such as the outer diameter, length, width) of the buffer element 311.

[0214] In some embodiments, the third connection element 316 is a connection port.

[0215] like Fig. 9 As shown, the separation component 400 includes a filtering unit 410, a pushing unit 420 and a second driving unit 430. The filtering unit 410 is arranged inside the buffer component 300, and is used to separate hydrogen chloride and silicon dioxide; the pushing unit 420 is movably arranged inside the buffer component 300, and is used to push silicon dioxide to the third collecting component 700; the second driving unit 430 is arranged in the buffer component 300, and is connected to the pushing unit 420, and is used to drive the pushing unit 420.

[0216] like Fig.10 As shown, the filter unit 410 includes a filter element 411 and a fourth connecting element 412. The filter element 411 is disposed on the buffer component 300 and located at the end of the second collecting component 600 for filtering the reaction product silica; the fourth connecting element 412 is disposed on the filter element 411 and connected to the buffer component 300.

[0217] Specifically, the filter element 411 is disposed on the second outlet element 314 ; and the fourth connecting element 412 is connected to the third connecting element 316 .

[0218] The size of the filter element 411 matches the size of the buffer element 311. Generally, the radial size (such as the outer diameter) of the filter element 411 is smaller than the radial size (such as the outer diameter) of the buffer element 311.

[0219] The size of the filter element 411 matches the size of the second outlet element 314. Generally, the radial size (eg, outer diameter) of the filter element 411 is greater than the radial size (eg, outer diameter) of the second outlet element 314.

[0220] In some of the embodiments, the filter element 411 includes but is not limited to a filter mesh and a filter plate.

[0221] The fourth connection element 412 and the third connection element 316 are connected in a detachable manner, wherein the detachable connection manner includes but is not limited to screw connection.

[0222] The fourth connection element 412 and the filter element 411 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding; the detachable connection includes but is not limited to screw connection and clamping.

[0223] In some of the embodiments, the fourth connecting element 412 is a connecting bracket.

[0224] like Fig.11 As shown, the pushing unit 420 includes a pushing element 421. The pushing element 421 is movably disposed inside the buffer component 300, and is used to push the silicon dioxide in the buffer component 300 into the third collecting component 700.

[0225] Specifically, the pushing element 421 is disposed inside the buffer element 311 , and is used to push the silicon dioxide in the buffer element 311 into the third outlet element 315 .

[0226] The pushing element 421 and the buffer element 311 are connected in a detachable manner, wherein the detachable connection manner includes but is not limited to a screw connection.

[0227] The size of the pushing element 421 matches the size of the buffer element 311. Generally, the radial size (such as the outer diameter) of the pushing element 421 is smaller than the radial size (such as the inner diameter) of the buffer element 311, and the height of the pushing element 421 is smaller than the height of the buffer element 311.

[0228] In some of the embodiments, the pushing element 421 includes but is not limited to a rotating brush and a pushing plate.

[0229] like Fig.12 As shown, the second driving unit 430 includes a second driving element 431 and a second movable element 432. The second driving element 431 is disposed at the bottom of the buffer component 300; the two ends of the second movable element 432 are respectively connected to the second driving element 431 and the pushing unit 420, and are used to drive the pushing unit 420 to move under the action of the second driving element 431.

[0230] Specifically, the second movable element 432 is connected to the pushing element 421 .

[0231] In some embodiments, the second driving element 431 is a second driving motor.

[0232] In some of the embodiments, the second movable element 432 is a second transmission shaft, including but not limited to a telescopic shaft.

[0233] like Fig.13 As shown, the first collecting component 500 includes a first conveying unit 510 and a first collecting unit 520. The first conveying unit 510 is connected to the buffer component 300 for conveying hydrogen stored in the buffer component 300; the first collecting unit 520 is connected to the first conveying unit 510 for collecting hydrogen conveyed by the first conveying unit 510.

[0234] like Fig.13 As shown, the first delivery unit 510 includes a third delivery element 511. The third delivery element 511 is connected to the buffer component 300 and is used to deliver hydrogen, a reaction product of the buffer component 300.

[0235] Specifically, the third delivery element 511 is connected to the first outlet element 313 and is used to deliver the reaction product hydrogen inside the buffer element 311 .

[0236] The third delivery element 511 and the first outlet element 313 are connected in a fixed or detachable manner, wherein the fixed connection manner includes but is not limited to integral molding and welding; the detachable connection manner includes but is not limited to screw connection.

[0237] The size of the third delivery element 511 matches the size of the first outlet element 313. Generally, the radial size (eg, outer diameter) of the third delivery element 511 is not less than the radial size (eg, outer diameter) of the first outlet element 313.

[0238] In some embodiments, the material of the third conveying element 511 includes but is not limited to stainless steel.

[0239] In some embodiments, the third conveying element 511 is a third conveying tube.

[0240] like Fig.13 As shown, the first collecting unit 520 includes a first collecting element 521. The first collecting element 521 is connected to the first conveying unit 510 and is used to collect the reaction product hydrogen conveyed by the first conveying unit 510.

[0241] The connection between the first collecting element 521 and the third conveying element 511 is a fixed connection or a detachable connection. The fixed connection includes but is not limited to one-piece molding; the detachable connection includes but is not limited to screw connection, clamping, and plugging.

[0242] In some embodiments, the material of the first collecting element 521 includes but is not limited to stainless steel.

[0243] In some of the embodiments, the first collecting element 521 is a first storage tank.

[0244] In some embodiments, the first collecting element 521 includes a gas storage tank, a nitrogen inlet, a hydrogen inlet, and a gas outlet. The hydrogen storage tank is used to store gas; the nitrogen inlet is provided in the gas storage tank and is connected to the nitrogen delivery system, and is used to deliver nitrogen to the gas storage tank to protect the safety and purity of the collected hydrogen; the hydrogen inlet is provided in the gas storage tank and is connected to the third delivery element 511, and is used to deliver hydrogen to the gas storage tank; the gas outlet is provided in the gas storage tank, and is used to discharge the gas in the gas storage tank.

[0245] like Fig.14 As shown, the second collecting component 600 includes a second conveying unit 610 and a second collecting unit 620. The second conveying unit 610 is connected to the buffer component 300 for conveying the hydrogen chloride stored in the buffer component 300; the second collecting unit 620 is connected to the second conveying unit 610 for collecting the hydrogen chloride conveyed by the second conveying unit 610.

[0246] like Fig.14 As shown, the second conveying unit 610 includes a fourth conveying element 611. The fourth conveying element 611 is connected to the buffer component 300 and is used to convey hydrogen chloride, a reaction product of the buffer component 300.

[0247] Specifically, the fourth conveying element 611 is connected to the second outlet element 314 and is used to convey the reaction product hydrogen chloride inside the buffer element 311 .

[0248] The fourth conveying element 611 and the second outlet element 314 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to screw connection.

[0249] The size of the fourth delivery element 611 matches the size of the second outlet element 314. Generally, the radial size (eg, outer diameter) of the fourth delivery element 611 is not less than the radial size (eg, outer diameter) of the second outlet element 314.

[0250] In some embodiments, the material of the fourth conveying element 611 includes but is not limited to stainless steel.

[0251] In some of the embodiments, the fourth conveying element 611 is a fourth conveying tube.

[0252] like Fig.14 As shown, the second collecting unit 620 includes a second collecting element 621. The second collecting element 621 is connected to the second conveying unit 610 and is used to collect the reaction product hydrogen chloride conveyed by the second conveying unit 610.

[0253] The second collecting element 621 is in communication with the fourth conveying element 611 .

[0254] The second collecting element 621 and the fourth conveying element 611 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding; the detachable connection includes but is not limited to screw connection, clamping, and plugging.

[0255] In some embodiments, the material of the second collecting element 621 includes but is not limited to stainless steel.

[0256] In some of the embodiments, the second collecting element 621 is a second storage tank.

[0257] like Fig.15 As shown, the third collecting component 700 includes a third conveying unit 710 and a third collecting unit 720. The third conveying unit 710 is disposed at the bottom of the buffer component 300 and communicated with the buffer component 300 for conveying the silicon dioxide stored in the buffer component 300; the third collecting unit 720 is communicated with the third conveying unit 710 for collecting the silicon dioxide conveyed by the third conveying unit 710.

[0258] like Fig.15 As shown, the third conveying unit 710 includes a fifth conveying element 711. The fifth conveying element 711 is connected to the buffer component 300 and is used to convey the reaction product silicon dioxide of the buffer component 300.

[0259] Specifically, the fifth conveying element 711 is connected to the third outlet element 315 and is used to convey the reaction product silicon dioxide inside the buffer element 311 .

[0260] The fifth conveying element 711 and the third outlet element 315 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding and welding; the detachable connection includes but is not limited to screw connection.

[0261] The size of the fifth delivery element 711 matches the size of the third outlet element 315. Generally, the radial size (eg, outer diameter) of the fifth delivery element 711 is not less than the radial size (eg, outer diameter) of the third outlet element 315.

[0262] In some embodiments, the material of the fifth conveying element 711 includes but is not limited to stainless steel.

[0263] In some of the embodiments, the fifth delivery element 711 is a fifth delivery tube.

[0264] like Fig.15As shown, the third collecting unit 720 includes a third collecting element 721. The third collecting element 721 is connected to the third conveying unit 710 and is used to collect the reaction product silicon dioxide conveyed by the third conveying unit 710.

[0265] The third collecting element 721 is in communication with the fifth conveying element 711 .

[0266] The third collecting element 721 and the fifth conveying element 711 are connected in a fixed connection or a detachable connection. The fixed connection includes but is not limited to integral molding; the detachable connection includes but is not limited to screw connection, clamping, and plugging.

[0267] In some embodiments, the material of the third collecting element 721 includes but is not limited to stainless steel.

[0268] In some of the embodiments, the third collecting element 721 is a third storage tank.

[0269] Furthermore, if Fig.16 As shown, the tail gas treatment system further includes a control component 800. The control component 800 is connected to the cleaning component 100, the reaction component 200, and the separation component 400 respectively.

[0270] like Fig.16 As shown, the control component 800 includes a control unit 810. The control unit 810 is connected to the cleaning component 100, the reaction component 200, and the separation component 400 respectively.

[0271] Furthermore, the control unit 810 includes a control element 811, a communication element 812 and a power element 813. The control element 811 is respectively connected to the cleaning component 100, the reaction component 200 and the separation component 400; the communication element 812 is connected to the control element 811 for signal transmission; and the power element 813 is connected to the control element 811 for power supply.

[0272] Specifically, the control element 811 is connected to the first driving element 131 and the second driving element 431 respectively.

[0273] In some of the embodiments, the control element 811 includes but is not limited to a single chip microcomputer, a chip, and a processor.

[0274] In some of the embodiments, the communication element 812 includes but is not limited to a Bluetooth module, a WiFi module, a 4G module, and a 5G module.

[0275] In some embodiments, the power supply element 813 is detachable or non-detachable. When it is detachable, the power supply element 813 can be replaced; when it is non-detachable, the power supply element 813 can be charged.

[0276] The method of using this embodiment is as follows:

[0277] (I) Reaction

[0278] The exhaust system inputs the exhaust gas into the reaction element 211 through the first conveying element 212, and the water supply system inputs water into the reaction element 211 through the second conveying element 213. The trichlorosilane in the exhaust gas reacts with water to generate reaction products such as hydrogen, hydrogen chloride and silicon dioxide. The reaction products enter the buffer element 311 through the inlet element 312, and part of the silicon dioxide product remains on the inner wall of the reaction element 211.

[0279] (II) Cleaning

[0280] While the reaction occurs in the reaction element 211, the first driving element 131 drives the first movable element 132 to drive the central axis element 121 to reciprocate in the reaction element 211, thereby driving the spiral cleaning element 122 to reciprocate in the reaction element 211 to clean the silicon dioxide powder on the inner wall of the reaction element 211 and enter the buffer element 311.

[0281] (III) Collection

[0282] First, a certain amount of nitrogen is filled into the first collecting element 521, and the hydrogen collected in the buffer element 311 enters the first collecting element 521 through the first outlet element 313 and the third delivery element 511;

[0283] The liquid in the buffer element 311 enters the second collecting element 621 through the filter element 411, the second outlet element 314, and the fourth conveying element 611;

[0284] The second pushing element drives the second movable element 432 and further drives the pushing element 421 to rotate, pushing the silicon dioxide powder at the bottom of the buffer element 311 into the third outlet element 315 and into the third collecting element 721 through the fifth conveying element 711 .

[0285] The technical effects of this embodiment are as follows:

[0286] The reaction component is provided with a sealing technology to provide a closed space for the reaction of trichlorosilane and water, thereby solving the problem that the reaction tube is not airtight and easily causes the leakage of the reaction product; and the reaction product silica attached to the inner wall and the bend of the reaction component is cleaned away in time by the cleaning component, and the cleaning is efficient and timely, thereby solving the problem that the bend of the reaction tube cannot be cleaned and easily causes blockage; the reaction product is stored and separated in the buffer component, and the first conveying component, the first collecting component, the second conveying component, the second collecting component, the third conveying component, the third collecting component and the buffer component form a closed space, which is not connected to the outside world, effectively avoiding the pressure caused by the leakage of the reaction product to the environment, and at the same time, the reaction products can be effectively separated and collected and the safety of the collection is guaranteed, thereby solving the problem that oxygen is easy to enter and affect the reaction process and the reaction products are not separated and collected; and by setting the control component for intelligent control, cleaning and collection are performed as needed, which not only reasonably utilizes resources, but also reduces the influence of human factors on the reaction, and reduces the risk of injury to the operator during the operation.

[0287] Example 3

[0288] This embodiment is a variation of Embodiment 2.

[0289] like Fig.17 As shown, the reaction unit 210 further includes a heat exchange element 215. The heat exchange element 215 is disposed outside the reaction element 211 to exchange heat generated by the reaction element 211.

[0290] The heat exchange element 215 and the reaction element 211 are connected in a detachable manner, wherein the detachable connection manner includes but is not limited to screw connection, clamping connection, and sleeve connection.

[0291] The size of the heat exchange element 215 matches the size of the reaction element 211. Generally, the radial size (eg, inner diameter) of the heat exchange element 215 is greater than the radial size (eg, outer diameter) of the reaction element 211.

[0292] In some embodiments, the heat exchange element 215 includes but is not limited to a heat exchanger and a chiller.

[0293] The method of using this embodiment is as follows:

[0294] The reaction of water and trichlorosilane in the reaction tube generates a large amount of heat, and the heat exchange element 215 exchanges the heat generated by the reaction in time to prevent the temperature of the reaction element 211 from being too high.

[0295] The technical effects of this embodiment are as follows:

[0296] By providing a heat exchange element, the heat generated by the reaction element can be exchanged in time, thereby preventing the reaction element from being overheated and affecting the smooth progress of the tail gas reaction therein.

[0297] Example 4

[0298] This embodiment is a variation of Embodiments 2 to 3.

[0299] like Fig.18 As shown, the tail gas treatment system further includes a feed component 900. The feed component 900 is communicated with the second collecting component 600, and is used to supply the alkaline solution to the second collecting component 600.

[0300] like Fig.18 As shown, the feeding component 900 includes a feeding unit 910. The feeding unit 910 is communicated with the second collecting component 600 and is used to supply the alkaline solution to the second collecting component 600.

[0301] like Fig.18 As shown, the feeding unit 910 includes a feeding element 911 and a sixth conveying element 912. The feeding element 911 is connected to the second collecting part 600 and is used to supply the alkaline solution to the second collecting part 600; the sixth conveying element 912 is respectively connected to the feeding element 911 and the second collecting part 600 and is used to convey the alkaline solution to the second collecting part 600.

[0302] Specifically, the sixth conveying element 912 is in communication with the second collecting element 621 , and is used to convey the alkaline solution inside the feeding element 911 to the second collecting element 621 .

[0303] In some of the embodiments, the material of the feeding element 911 includes but is not limited to plastic and stainless steel.

[0304] In some of the embodiments, the feed element 911 is a fourth storage tank.

[0305] The sixth conveying element 912 is connected to the second collecting element 621 in a detachable connection, wherein the detachable connection includes but is not limited to screw connection and plug connection.

[0306] The size of the sixth delivery element 912 matches the size of the second collecting element 621. Generally, the radial size (eg, outer diameter) of the sixth delivery element 912 is smaller than the radial size (eg, outer diameter) and axial size (eg, height) of the second collecting element 621.

[0307] The size of the sixth conveying element 912 matches the size of the feeding element 911. Generally, the radial size (eg, outer diameter) of the sixth conveying element 912 is smaller than the radial size (eg, outer diameter) and axial size (eg, height) of the sixth conveying element 912.

[0308] In some embodiments, the material of the sixth delivery element 912 includes but is not limited to plastic and stainless steel.

[0309] In some of the embodiments, the sixth delivery element 912 is a sixth delivery tube.

[0310] In some embodiments, the sixth delivery element 912 includes a sixth delivery pipe and a fourth valve. The sixth delivery pipe is connected to the feed element 911 and the second collection element 621 respectively; the fourth valve is disposed on the sixth delivery pipe to control whether the sixth delivery pipe delivers the alkaline solution to the second collection element 621.

[0311] In some of these embodiments, the alkaline washing solution includes, but is not limited to, a sodium hydroxide solution.

[0312] The method of using this embodiment is as follows:

[0313] When the second collecting element 621 starts to collect hydrogen chloride, the feeding element 911 delivers alkaline solution to the second collecting element 621 through the sixth delivery element 912 to neutralize the hydrogen chloride solution collected by the second collecting element 621 and adjust the pH value of the liquid in the second collecting element 621 .

[0314] The technical effects of this embodiment are as follows:

[0315] By providing a feeding component, the pH value of the solution inside the second collecting component can be effectively adjusted to avoid the pH value of the solution being too high or too low, reduce unnecessary harm to workers caused by an overly acidic environment, and reduce harm to the environment.

[0316] Example 5

[0317] This embodiment is a variation of Embodiments 2 to 4.

[0318] like Fig.19 As shown, the first collection component 500 further includes a first monitoring unit 530. The first monitoring unit 530 is disposed inside the first collection component 500 and connected to the control component 800.

[0319] Furthermore, the first monitoring unit 530 includes a pressure monitoring element 531 . The pressure monitoring element 531 is disposed in the first collecting component 500 and connected to the control component 800 , and is used to monitor the pressure inside the first collecting component 500 and transmit the pressure to the control component 800 .

[0320] Specifically, the pressure monitoring element 531 is disposed on the first collecting element 521 and connected to the control element 811 , and is used to monitor the pressure of the first collecting element 521 and transmit the pressure to the control element 811 .

[0321] The connection between the pressure monitoring element 531 and the first collecting element 521 is a detachable connection, wherein the detachable connection includes but is not limited to a screw connection.

[0322] In some of the embodiments, the pressure monitoring element 531 is a pressure monitor.

[0323] The technical effects of this embodiment are as follows:

[0324] By providing a pressure monitoring element, the pressure value inside the first collecting element can be monitored in real time, and the hydrogen inside the first collecting element can be processed in time to avoid safety hazards caused by excessive pressure in the first collecting element.

[0325] Example 6

[0326] This embodiment is a variation of Embodiments 2 to 5.

[0327] like Fig. 20 As shown, the second collection component 600 further includes a second monitoring unit 630. The second monitoring unit 630 is disposed inside the second collection component 600 and connected to the control component 800.

[0328] like Fig. 20 As shown, the second monitoring unit 630 includes a pH monitoring element 631. The pH monitoring element 631 is disposed inside the second collecting component 600 and connected to the control component 800 to monitor the pH value of the second collecting component 600 and transmit it to the control component 800.

[0329] Specifically, the pH monitoring element 631 is disposed inside the second collecting element 621 and connected to the control element 811 , and is used to monitor the pH value of the second collecting element 621 and transmit it to the control element 811 .

[0330] The pH monitoring element 631 and the second collecting element 621 are connected in a detachable manner, wherein the detachable connection manner includes but is not limited to a screw connection.

[0331] In some of the embodiments, the pH monitoring element 631 is a pH monitor.

[0332] like Fig. 20 As shown, the second monitoring unit 630 includes a liquid level monitoring element 632. The liquid level monitoring element 632 is disposed inside the second collecting component 600 and connected to the control component 800 to monitor the liquid level information of the second collecting component 600 and transmit it to the control component 800.

[0333] Specifically, the liquid level monitoring element 632 is disposed inside the second collecting element 621 and connected to the control element 811 , and is used to monitor the liquid level of the second collecting element 621 and transmit the liquid level to the control element 811 .

[0334] The connection between the liquid level monitoring element 632 and the second collecting element 621 is a detachable connection, wherein the detachable connection includes but is not limited to a screw connection.

[0335] In some of the embodiments, the liquid level monitoring element 632 is a liquid level monitor.

[0336] The method of using this embodiment is as follows:

[0337] The pH monitoring element 631 is used to monitor the pH value inside the second collecting element 621 in real time, and transmit the pH value data to the control element 811. When the pH value exceeds the preset range, the control element 811 controls the feeding element 911 to transport alkaline solution to the second collecting element 621 until the pH value of the liquid inside the second collecting element 621 meets the preset range; at the same time, the liquid level monitoring element 632 monitors the liquid level inside the second collecting element 621 in real time and transmits the liquid level range to the control element 811. When the liquid level exceeds the preset range, the reaction element 211 is controlled to stop transporting reactants to the second collecting element 621, or to discharge the liquid inside the second collecting element 621 in time.

[0338] The technical effects of this embodiment are as follows:

[0339] By setting a pH monitoring element, the pH value of the liquid inside the second collecting element can be monitored in real time, so that the pH value of the liquid inside the second collecting element meets the requirements, meets the emission requirements, and avoids polluting the environment; by setting a liquid level monitoring element, the liquid level inside the second collecting element can be monitored in real time, so as to avoid the liquid level of the second collecting element being too high, which will affect the collection of reaction products and the smooth progress of the reaction.

[0340] The above description is only a preferred embodiment of the present invention, and does not limit the implementation mode and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A cleaning component for an exhaust gas treatment pipeline, characterized in that: include: A sealing unit, which is detachably disposed at the end of the tail gas treatment pipeline and is used to seal the tail gas treatment pipeline; A cleaning unit, the cleaning unit is made of an elastic deformable material, the cleaning unit is spiral, the cleaning unit is movably arranged at the bottom of the closed unit, and is slidably connected to the exhaust gas treatment pipeline, and is used to reciprocate along the axial direction of the exhaust gas treatment pipeline to remove silicon dioxide attached to the exhaust gas treatment pipeline; A first driving unit is disposed on the top of the enclosed unit and connected to the cleaning unit, and is used to drive the cleaning unit to reciprocate along the axial direction of the exhaust gas treatment pipeline.

2. The cleaning component according to claim 1, characterized in that The enclosed unit comprises: A closing element, which is detachably disposed at an end of the exhaust gas treatment pipeline and is used to seal the exhaust gas treatment pipeline; A first connecting element, which is disposed at the bottom end of the closing element and is detachably connected to the exhaust gas treatment pipeline; a through-hole element, the through-hole element being arranged through the closing element and being used for allowing the first driving unit to pass through; and / or The cleaning unit comprises: A middle axis element, the end of which is connected to the first driving unit and is used for reciprocating along the axial direction of the exhaust gas treatment pipeline under the action of the first driving unit; A spiral cleaning element, which is arranged on the outer side of the central axis element and is used to reciprocate along the axial direction of the exhaust gas treatment pipeline under the action of the central axis element to remove silicon dioxide attached to the exhaust gas treatment pipeline; and / or The first driving unit comprises: a first driving element, the first driving element being disposed on the top of the closed unit; The first movable element has two ends connected to the first driving element and the cleaning unit respectively, and is used to drive the cleaning unit to reciprocate along the axial direction of the exhaust gas treatment pipeline under the action of the first driving element.

3. The cleaning component according to claim 2, characterized in that The enclosed unit further comprises: A first sealing element is disposed at the top end of the closing element and above the through-hole element, and is used for sealing the through-hole element.

4. A tail gas treatment system, characterized in that: include: A reaction component, wherein the reaction component is used for reacting trichlorosilane with water to obtain a reaction product, wherein the reaction product includes hydrogen, hydrogen chloride, and silicon dioxide; The cleaning component according to any one of claims 1 to 3, wherein the cleaning component is arranged at the end of the reaction component and is used to clean the silicon dioxide attached to the reaction component; a buffer component, the buffer component being in communication with the reaction component and being used for storing the reaction product; A separation component, which is disposed inside the buffer component and is used to separate hydrogen chloride and silicon dioxide; a first collecting component, the first collecting component being in communication with the buffer component and being used for collecting hydrogen; a second collecting component, the second collecting component being in communication with the buffer component and being used for collecting hydrogen chloride; A third collecting component is communicated with the buffer component and is used for collecting silicon dioxide.

5. The exhaust gas treatment system according to claim 4, characterized in that: The reaction component comprises: A reaction unit; the reaction unit is used for reacting trichlorosilane with water to obtain a reaction product; and / or The buffer component comprises: a buffer unit, the buffer unit being in communication with the reaction component and being used for storing the reaction product; and / or The separation component comprises: A filter unit, the filter unit is arranged inside the buffer component and is used to separate hydrogen chloride and silicon dioxide; A pushing unit, the pushing unit is movably disposed inside the buffer component and is used to push the silicon dioxide toward the third collecting component; A second driving unit, which is disposed on the buffer component and connected to the pushing unit and is used to drive the pushing unit; and / or The first collecting component comprises: a first conveying unit, the first conveying unit being in communication with the buffer component and being used for conveying the hydrogen stored in the buffer component; A first collecting unit, the first collecting unit is connected to the first conveying unit and is used to collect the hydrogen conveyed by the first conveying unit; and / or The second collecting component comprises: a second conveying unit, the second conveying unit being in communication with the buffer component and being used for conveying the hydrogen chloride stored in the buffer component; a second collecting unit, the second collecting unit being in communication with the second conveying unit and being used for collecting the hydrogen chloride conveyed by the second conveying unit; and / or The third collecting component comprises: a third conveying unit, the third conveying unit being disposed at the bottom of the buffer component and being in communication with the buffer component, and being used for conveying the silicon dioxide stored in the buffer component; A third collecting unit is communicated with the third conveying unit and is used for collecting the silicon dioxide conveyed by the third conveying unit.

6. The exhaust gas treatment system according to claim 5, characterized in that: The reaction unit includes: A reaction element, the end of which is provided with the cleaning component and is slidably connected to the cleaning component, and is used for allowing trichlorosilane to react with water to obtain a reaction product; a first conveying element, the first conveying element being in communication with the reaction element and the tail gas conveying system, respectively, and being used for conveying the tail gas to the reaction element; a second conveying element, the second conveying element being in communication with the reaction element and the water supply system, respectively, and being used for conveying water to the reaction element; a second connecting element, which is disposed at an end of the reaction element and is detachably connected to the cleaning component; and / or The buffer unit comprises: a buffer element, the buffer element being connected to the reaction component, the first collecting component, the second collecting component, and the third collecting component respectively, and being used for storing reaction products; an inlet element, the inlet element being disposed at a side of the buffer element and being in communication with the reaction component, and being used for conveying a reaction product of the reaction component to the buffer element; A first outlet element, which is disposed at a side of the buffer element and is connected to the first collecting component, and is used for outputting the reaction product hydrogen; A second outlet element, which is disposed at a side of the buffer element and is in communication with the second collecting component and is used for outputting the reaction product, hydrogen chloride; a third outlet element, the third outlet element being disposed at the bottom of the buffer element and being in communication with the third collecting component for outputting the reaction product, silicon dioxide; A third connecting element, the third connecting element is arranged inside the buffer element and connected to the separation component; and / or The filtering unit comprises: A filter element, which is disposed on the buffer component and located at the end of the second collecting component, and is used to filter the reaction product, silicon dioxide; a fourth connecting element, the fourth connecting element being disposed on the filter element and connected to the buffer component; and / or The pushing unit comprises: a pushing element, the pushing element being movably disposed inside the buffer component and used for pushing the silicon dioxide in the buffer component into the third collecting component; and / or The second driving unit comprises: a second driving element, the second driving element being disposed at the bottom of the buffer component; A second movable element, two ends of which are respectively connected to the second driving element and the pushing unit, and are used to drive the pushing unit to move under the action of the second driving element; and / or The first conveying unit comprises: A third conveying element, the third conveying element is connected to the buffer component and is used to convey the reaction product hydrogen of the buffer component; and / or The first collecting unit comprises: A first collecting element, the first collecting element is connected to the first delivery unit and is used to collect the reaction product hydrogen delivered by the first delivery unit; and / or The second conveying unit comprises: a fourth conveying element, the fourth conveying element being connected to the buffer component and being used for conveying hydrogen chloride, a reaction product of the buffer component; and / or The second collecting unit comprises: A second collecting element, the second collecting element is connected to the second conveying unit and is used to collect the reaction product hydrogen chloride conveyed by the second conveying unit; and / or The third conveying unit comprises: a fifth conveying element, the fifth conveying element being connected to the buffer component and being used for conveying the reaction product silicon dioxide of the buffer component; and / or The third collecting unit comprises: A third collecting element is connected to the third conveying unit and is used to collect the reaction product silicon dioxide conveyed by the third conveying unit.

7. The exhaust gas treatment system according to claim 6, characterized in that: The reaction unit also includes: A heat exchange element is arranged outside the reaction element and is used to exchange heat generated by the reaction element.

8. The tail gas treatment system according to any one of claims 4 to 7, characterized in that: Also includes: a feeding component, the feeding component being in communication with the second collecting component and being used for supplying an alkaline solution to the second collecting component; and / or A control component is connected to the cleaning component, the reaction component, the separation component, the first collecting component, and the second collecting component respectively.

9. The exhaust gas treatment system according to claim 8, characterized in that: The first collecting component also includes: A first monitoring unit, which is disposed inside the first collecting component and connected to the control component, and is used to monitor the pressure inside the first collecting component; and / or The second collecting component also includes: a second monitoring unit, which is disposed inside the second collecting component and connected to the control component, and is used to monitor the state of the liquid inside the second collecting component; and / or The feeding component comprises: A feeding unit is communicated with the second collecting part and is used for supplying an alkaline solution to the second collecting part.

10. The exhaust gas treatment system according to claim 9, characterized in that: The first monitoring unit comprises: a pressure monitoring element, which is disposed in the first collecting component and connected to the control component, and is used to monitor the pressure of the first collecting component and transmit the pressure to the control component; and / or The second monitoring unit comprises: a pH monitoring element, which is disposed inside the second collecting component and connected to the control component, and is used to monitor the pH value of the second collecting component and transmit the pH value to the control component; and / or The second monitoring unit comprises: a liquid level monitoring element, which is disposed inside the second collecting component and connected to the control component, and is used to monitor the liquid level information of the second collecting component and transmit it to the control component; and / or The feeding unit comprises: a feeding element, the feeding element being in communication with the second collecting part and being used for supplying an alkaline solution to the second collecting part; A sixth conveying element is connected to the feeding element and the second collecting component respectively, and is used for conveying the alkaline solution to the second collecting component.

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