Novel silane energy-saving production device

Abstract

The utility model belongs to the technical field of electronic special material manufacturing, and particularly relates to a novel silane energy-saving production device which comprises a gas phase entering tower, the gas phase entering tower is connected with a first compressor and a first condenser through a pipeline, and the first compressor is connected with the first condenser through a pipeline. The right end of the first condenser is connected with a second compressor through a pipeline, and the second compressor is connected with a fourth compressor, a second heat exchanger and a third tower through pipelines. According to the device, a compressor pressure-increasing condensation theory is added, and gaseous compression pressure-increasing condensation is added between series disproportionation reactions to gradually purify a silane mixed raw material; the operation cost is reduced by increasing the condensation temperature and reducing the coolant requirement, and meanwhile, the efficiency of the tower is improved by feeding gaseous silane mixed gas for the first time, so that the loss of the whole system is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of manufacturing electronic special materials, in particular to a novel silane energy-saving production device. Background Art

[0002] Silane is a compound of silicon and hydrogen. It is the general name for a series of compounds, including monosilane (SiH4), disilane (Si2H6) and some higher-level silicon hydrogen compounds, with the general formula SinH2n+2. Among them, monosilane is the most common, and sometimes monosilane is simply called silane;

[0003] The earliest practical and largest application of silane was as an intermediate product in the production of high-purity silicon, which is generally called the silane method.

[0004] Silane is an amorphous semiconductor, amorphous silicon. Compared with single crystal semiconductor materials, amorphous silicon is easy to form extremely thin (thickness about 10nm) large-area devices. The substrate can be glass, stainless steel, or even plastic, and the surface can be flat or curved, so it can be made into a variety of devices with excellent performance.

[0005] Silane has become the most important special gas used in semiconductor microelectronics technology, and is used in the preparation of various microelectronic films, including single crystal films, microcrystals, polycrystalline, silicon oxide, silicon nitride, metal silicide, etc. The microelectronic application of silane is still developing in depth, including low-temperature epitaxy, selective epitaxy, and heterogeneous epitaxy. It is not only used for silicon devices and silicon integrated circuits, but also for compound semiconductor devices (gallium arsenide, silicon carbide, etc.). It is also used in the preparation of superlattice quantum well materials. It can be said that silane is needed in almost all advanced integrated circuit production lines today. The purity of silane is extremely related to device performance and yield, and more advanced devices require higher purity silane.

[0006] However, the current energy-saving silane production equipment has a lot of emissions during the production and preparation process, is not environmentally friendly, has a low material utilization rate, and cannot produce high-purity silane.

[0007] Therefore, a new type of silane energy-saving production device is proposed to solve the above problems Utility Model Content

[0008] The purpose of the utility model is to provide a novel silane energy-saving production device to solve the problems raised in the above background technology.

[0009] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a novel silane energy-saving production device, comprising a gas phase inlet tower, the gas phase inlet tower is provided with a first compressor and a first condenser through a pipeline connection, the first compressor and the first condenser are connected through a pipeline, the right end of the first condenser is provided with a second compressor through a pipeline connection, the second compressor is provided with a fourth compressor, a second heat exchanger and a third tower through a pipeline connection, the fourth compressor is connected to the second heat exchanger through a pipeline, the fourth compressor is provided with a first tower through a pipeline connection, the second heat exchanger is provided with a second tower through a pipeline connection, the right end of the second tower is provided with a tower bottom reboiler through a pipeline connection, the tower bottom reboiler is provided with a tower bottom pump through a pipeline connection, the tower bottom reboiler and the tower The bottom pumps are all connected and fixed to the second tower through pipelines, the third tower is provided with a second condenser, a third heat exchanger and a fifth pump through pipelines, the fifth pump is connected and fixed to the second heat exchanger through pipelines, the lower end of the second condenser is provided with a silane storage device and a fifth compressor through pipelines, the silane storage device and the fifth compressor are connected through pipelines, the lower end of the silane storage device is provided with a fourth pump through pipelines, the fifth compressor is connected and fixed to the third tower through pipelines, the fourth pump is connected and fixed to the second tower through pipelines, the gas phase enters the tower with a third compressor and a first heat exchanger through pipelines, the third compressor and the first heat exchanger are connected and fixed through pipelines, and the third compressor and the first heat exchanger are connected and fixed to the second heat exchanger through pipelines.

[0010] Preferably, a first valve is provided on the pipeline connecting and fixing the fifth compressor to the third tower.

[0011] Preferably, a third valve is provided on the pipeline connecting the fourth pump and the second tower.

[0012] Preferably, the second tower is connected and fixed to the third tower via a pipeline, and a second valve is provided on the pipeline connecting and fixed to the second tower and the third tower.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] The device adds a compressor pressure-raising condensation theory, adds gaseous compression pressure-raising condensation between the series disproportionation reactions to gradually purify the silane mixed raw material, increase the condensation temperature, reduce the coolant requirements to reduce the operating cost, and at the same time, for the first time proposes to feed the gaseous silane mixed gas to improve the efficiency of the tower, thereby reducing the loss of the entire system. The present invention has very little discharge during the production and preparation process, which is beneficial to environmental protection and has a high material utilization rate; the reaction product and silane are easily separated to obtain high-purity silane (7-9N); various silicon hydrochlorides remaining from silane distillation can be returned to the disproportionation tower for further reaction; the reaction temperature is not high (TCS→DCS 80°C, DCS→MS50°C), so the energy consumption is low; a variety of silicon source materials such as silane, silicon tetrachloride, and dichlorodihydrogen silicon can be produced, and the product ratio can be arbitrarily matched. The silane produced by this device has the highest purity, and polysilicon with a purity of up to 9-11N can be obtained by thermal decomposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the utility model.

[0016] In the figure: 1 gas phase entering the tower, 2 first compressor, 3 first condenser, 4 second compressor, 5 third compressor, 6 first heat exchanger, 7 fourth compressor, 8 first tower, 9 second heat exchanger, 10 second tower, 11 tower bottom reboiler, 12 tower bottom pump, 13 third tower, 14 second condenser, 15 fifth compressor, 16 silane storage device, 17 fourth pump, 18 third heat exchanger, 19 fifth pump, F1 first valve, F2 second valve, F3 third valve. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0019] Example:

[0020] See also Figure 1 , the utility model provides a technical solution:

[0021] A novel silane energy-saving production device comprises a gas phase inlet tower 1, the gas phase inlet tower 1 is connected with a first compressor 2 and a first condenser 3 through a pipeline, the first compressor 2 and the first condenser 3 are connected through a pipeline, the right end of the first condenser 3 is connected with a second compressor 4 through a pipeline, the second compressor 4 is connected with a fourth compressor 7, a second heat exchanger 9 and a third tower 13 through a pipeline, the fourth compressor 7 is connected with the second heat exchanger 9 through a pipeline, the fourth compressor 7 is connected with a first tower 8 through a pipeline, the second heat exchanger 9 is connected with a second tower 10 through a pipeline, and the right end of the second tower 10 is connected with The tower bottom reboiler 11 is connected to the tower bottom reboiler 11 through a pipeline and is provided with a tower bottom pump 12. The tower bottom reboiler 11 and the tower bottom pump 12 are both connected and fixed to the second tower 10 through a pipeline. The third tower 13 is connected to the second condenser 14, the third heat exchanger 18 and the fifth pump 19 through a pipeline. The fifth pump 19 is connected and fixed to the second heat exchanger 9 through a pipeline. The lower end of the second condenser 14 is connected to a silane storage device 16 and a fifth compressor 15 through a pipeline. The silane storage device 16 and the fifth compressor 15 are connected through a pipeline. The pipeline connected and fixed to the third tower 13 by the fifth compressor 15 is provided with a first valve F1. The lower end of the device 16 is connected with a fourth pump 17 through a pipeline, and a third valve F3 is provided on the pipeline through which the fourth pump 17 is connected and fixed to the second tower 10. The fifth compressor 15 is connected and fixed to the third tower 13 through a pipeline, and the fourth pump 17 is connected and fixed to the second tower 10 through a pipeline. The gas phase enters the tower 1 through a pipeline and is connected and fixed with a third compressor 5 and a first heat exchanger 6. The third compressor 5 and the first heat exchanger 6 are connected and fixed to the second heat exchanger 9 through a pipeline. The second tower 10 is connected and fixed to the third tower 13 through a pipeline, and the second tower 10 is connected and fixed to the third tower 13. A second valve F2 is arranged on the pipeline. The device increases the compressor pressure-raising condensation theory, increases gaseous compression pressure-raising condensation between the series disproportionation reactions to gradually purify the silane mixed raw material, increases the condensation temperature, reduces the coolant requirement to reduce the operating cost, and at the same time proposes for the first time to feed the gaseous silane mixed gas to improve the efficiency of the tower, thereby reducing the loss of the entire system. The present invention has very few emissions during the production and preparation process, which is beneficial to environmental protection and has a high material utilization rate; the reaction product and silane are easily separated to obtain high-purity silane 7-9N; various silicon hydrochlorides remaining from silane distillation can be returned to the disproportionation tower for further reaction; the reaction temperature is not high (TCS→DCS 80°C, DCS→MS50°C), so the energy consumption is low; a variety of silicon source materials such as silane, silicon tetrachloride, and dichlorodihydrosilane can be produced, and the product ratio can be arbitrarily matched. The silane produced by this device has the highest purity, and polysilicon with a purity of up to 9-11N can be obtained by thermal decomposition.

[0022] Working principle:

[0023] Electronic grade silicon trichloride enters the second heat exchanger 9, and then enters the second tower 10 to undergo partial disproportionation reaction to generate silicon tetrachloride, and a part of it is discharged through the bottom pump 12 and passed through the bottom reboiler 11, and is heated by the first condenser 3 and the second compressor 4 to maintain the second tower 10 to control the bottom index, and a part of the silicon tetrachloride is sent to other processes through the first compressor 2; the dichloroalkane, silicon monochloride, silane and a small amount of silicon trichloride gas phase at the top are condensed through the second compressor 4, and the condensed silicon trichloride returns to the second tower 10 for disproportionation, and the uncondensed silicon dichloride, silicon monochloride, silane and silicon trichloride are pressurized and condensed by the fourth compressor 7 and enter the first tower 8 for a two-part disproportionation reaction, and silicon tetrachloride and silicon trichloride flow into the second tower 10 through the bottom drain port of the first tower 8, and the condensate returns to the second tower 10, and the silicon dichloride, silicon monochloride, silane and trace silicon trichloride gas phase at the top of the first tower 8 are condensed by the first heat exchanger 6. The trace silicon trichloride returned to the first tower 8 for re-disproportionation and separation, and the uncondensed silicon dichloride, silicon monochloride Silicon tetrachloride, after being pressurized and condensed by the third compressor 5, the gas phase enters the tower 1 for disproportionation reaction, the condensate returns to the first tower 8, silicon tetrachloride and silicon trichloride enter the tower 1 through the gas phase and flow into the first tower 8 through the drain port at the bottom of the tower, the gas phase enters the top of the tower 1, the silane, silicon monochloride and silicon dichloride left by the first compressor 2 and the first condenser 3 return to the gas phase and enter the tower 1, the gaseous silane and trace impurities are pressurized by the second compressor 4 and enter the third tower 13 for purification, and the condensate returns to the gas phase and enters In tower 1, high-purity silane gas is pressurized by the second compressor 4 and the gas phase enters the third tower 13 for purification. The electronic-grade silane coming out of the top of the tower is condensed by the second condenser 14 to obtain liquid electronic-grade silane. The electronic-grade silane liquid is pressurized by the fourth pump 17 and sent to the back system. The unqualified silane product obtained at the top of the third tower 13 is returned to the second tower 10 through the valve F2 for circulation and storage until qualified electronic-grade silane is obtained. The unqualified silane product at the bottom of the third tower 13 is sent back to the second tower 10 through the fourth pump 19 for circulation and recovery.

[0024] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model; therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description. Therefore, it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model, and any figure marks in the claims should not be regarded as limiting the claims involved.

[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A novel silane energy-saving production device, comprising a gas phase inlet tower (1), characterized in that: The gas phase entering tower (1) is provided with a first compressor (2) and a first condenser (3) through a pipeline connection. The first compressor (2) and the first condenser (3) are connected through a pipeline. The right end of the first condenser (3) is provided with a second compressor (4) through a pipeline connection. The second compressor (4) is provided with a fourth compressor (7), a second heat exchanger (9) and a third tower (13) through a pipeline connection. The fourth compressor (7) is connected to the second heat exchanger (9) through a pipeline. The fourth compressor (7) is provided with a first tower (8) through a pipeline connection. The second heat exchanger (9) is provided with a second tower (10) through a pipeline connection. The right end of the second tower (10) is provided with a tower bottom reboiler (11) through a pipeline connection. The tower bottom reboiler (11) is provided with a tower bottom pump (12) through a pipeline connection. The tower bottom reboiler (11) and the tower bottom pump (12) are both connected and fixed to the second tower (10) through a pipeline. The third tower (13) is provided with a tower bottom reboiler (11) through a pipeline connection. A second condenser (14), a third heat exchanger (18) and a fifth pump (19) are connected by pipelines. The fifth pump (19) is connected and fixed to the second heat exchanger (9) by pipelines. A silane storage device (16) and a fifth compressor (15) are connected by pipelines at the lower end of the second condenser (14). The silane storage device (16) and the fifth compressor (15) are connected by pipelines. A fourth pump (17) is connected by pipelines at the lower end of the silane storage device (16). The fifth compressor (15) is connected and fixed to the third tower (13) by pipelines. The fourth pump (17) is connected and fixed to the second tower (10) by pipelines. A third compressor (5) and a first heat exchanger (6) are connected by pipelines at the gas phase entering the tower (1). The third compressor (5) and the first heat exchanger (6) are connected and fixed by pipelines. The third compressor (5) and the first heat exchanger (6) are connected and fixed to the second heat exchanger (9) by pipelines.

2. A novel silane energy-saving production device according to claim 1, characterized in that: A first valve (F1) is provided on the pipeline that connects the fifth compressor (15) and the third tower (13) to each other.

3. A novel silane energy-saving production device according to claim 1, characterized in that: A third valve (F3) is provided on the pipeline that connects the fourth pump (17) and the second tower (10) to each other.

4. A novel silane energy-saving production device according to claim 1, characterized in that: The second tower (10) is connected and fixed to the third tower (13) via a pipeline, and a second valve (F2) is provided on the pipeline connecting and fixing the second tower (10) and the third tower (13).

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