Device for simulating coating process in high-temperature vacuum environment

Abstract

The utility model provides a device for simulating a coating process in a high-temperature vacuum environment, which relates to the field of equipment for simulating the coating process in the high-temperature vacuum environment, and comprises a main body frame and an adhesion component, the vacuum coating chamber comprises a working cavity box body, a sealing door, a sealing cover, a movable shaft and an observation window, and the vacuum coating chamber is used for simulating a working place of a coating process; according to the utility model, by adopting the vertical four-direction loading mechanism, more workpieces to be coated can be simultaneously processed in a limited coating space, the working efficiency of simulating a coating process is improved, and uniform distribution and stress balance of the loading plates are ensured through space structure matching of the rotating frame and the rotating table, so that the coating quality is improved. Therefore, the tested uniformity of each workpiece in the simulated coating process is ensured, and the adhesion component and the loading plate are fixed by adopting the rubber salient points, so that the mounting process is simplified, and the production cost is also reduced.

Description

Technical Field

[0001] The utility model belongs to the field of equipment for simulating coating technology in a high-temperature vacuum environment, in particular to a device for simulating coating technology in a high-temperature vacuum environment. Background Art

[0002] High-temperature vacuum coating technology is a process that uniformly coats a metal target on the surface of a substrate to form a thin and dense metal film. The process of simulating coating in a high-temperature vacuum environment can check the state of the workpiece in the coating environment and predict the coating quality, which is of great significance for improving the yield rate of subsequent coating processes. Traditional workpiece fixation requires fixtures of different sizes, and the installation and disassembly of the workpiece is also very cumbersome. A simulation coating device that is easy to install and disassemble and adaptable to workpieces of different sizes is needed;

[0003] Surface bonding technology is a technology widely used in various engineering applications. It mainly combines the surfaces of two materials according to certain requirements. Surface bonding technology has the characteristics of high strength, compact structure, simple process and low cost. However, it is also limited by poor repeatable adhesion and difficulty in falling off. At the same time, the existing bonding structure is difficult to ensure the accuracy of the device surface, and there may be indentations or chemical residues, which will affect the coating process.

[0004] According to Chinese patent publication number: CN117260585A, a bionic adhesive pad suitable for use in a vacuum high-temperature environment is disclosed. The bionic adhesive pad has the characteristic of maintaining adhesion in a high-temperature vacuum environment. The bionic adhesive pad is made of a high-temperature resistant polymer substrate through precision manufacturing and has a micro-column structure. The bionic adhesive pad can form good contact with a smooth surface and is fixed to the smooth surface by van der Waals force for transportation. However, the bionic adhesive pad is difficult to fall off from the attached workpiece. For the transportation of precision workpieces, the complicated falling process will increase the probability of damage to the workpiece and reduce the transportation efficiency. Therefore, an adhesive device with high adhesion and easy to fall off is needed.

[0005] According to Chinese patent publication number: CN116895596A, a wafer handling robot gripper based on suction cup adsorption is disclosed, which has the characteristics of non-destructive wafer handling and efficient desorption. The suction cup gripper includes a robot body, a fixed end, a suction end, an airway and other components. The suction cup is pressed against the wafer surface by atmospheric pressure to provide pulling force for wafer handling, which makes it easy to pick up and put down the wafer. However, this device cannot generate adsorption force in a vacuum environment and cannot meet the requirements for handling precision workpieces such as wafers and screens in a vacuum environment. Therefore, a device that can generate stable adsorption force in a vacuum environment is needed to transport the precision workpieces.

[0006] In summary, the present invention provides a device for simulating a coating process in a high-temperature vacuum environment to solve the above-mentioned problems. Utility Model Content

[0007] In order to solve the above technical problems, the utility model provides the following technical solutions:

[0008] A device for simulating a coating process in a high-temperature vacuum environment, comprising a main frame and an adhesive component, a vacuum coating chamber is installed on the top of the main frame, the vacuum coating chamber comprises a working chamber box, a sealed door, a sealed cover, a movable shaft and an observation window, the vacuum coating chamber is used to simulate the working place of the coating process, a driving component is installed on the surface of the main frame, the driving component comprises a working chamber base and a driving motor, the driving motor is fixed to the upper end of the inner cavity of the main frame, the driving component is used to provide power for the rotational motion of the simulated coating process, a vacuum component is installed at the bottom of the inner cavity of the main frame, the vacuum component comprises a vacuum pump, a molecular pump and a connecting pipe, the vacuum component is used to provide a vacuum environment for the inner cavity of the working chamber box, the inner cavity of the working chamber box is installed with a loading mechanism, the loading mechanism comprises a loading plate, a rotating frame and a rotating table, the loading plate comprises a supporting substrate, a second screw hole and a connecting pipe The connecting hole, the second screw hole and the connecting hole are both opened on the surface of the supporting substrate, the rotating frame includes a bracket substrate, a third screw hole and a fourth screw hole, the third screw hole is opened on the surface of the bracket substrate, and the fourth screw hole is opened at both ends of the bracket substrate, the rotating table includes a column, a circular table, a rotating disk and a fifth screw hole, one end of the column is fixedly connected to the circular table, the circular table is fixed to the top of the rotating disk, the carrying mechanism is used to carry the workpiece, the working chamber base is fixed to the top of the main frame, and is connected to the inner cavity of the working chamber box, the output shaft of the driving motor passes through the inner cavity of the working chamber base and is transmission-connected to the rotating disk, the adhesion component includes an adhesion plate, a bionic adhesion column and a rubber bump, the bionic adhesion column is fixed to one side of the adhesion plate, the bionic adhesion column is fixed to the other side of the adhesion plate, the adhesion plate is connected to the carrier plate by bolts, and the rotating frame is threadedly connected to the carrier plate and the rotating table by bolts.

[0009] Furthermore, in the utility model, the sealing door is movably connected to the working chamber box body through a movable shaft, and the two ends of the movable shaft are threadedly connected to the working chamber box body and the sealing door through bolts respectively, the sealing cover is located on the surface of the sealing door, and the observation window is located in the inner cavity of the sealing cover.

[0010] Furthermore, in the utility model, the sealing door includes a door base plate, a sealing gasket and a boss, the boss is fixed to the front side of the door base plate, the door base plate is threadedly connected to the sealing cover by bolts, the sealing gasket is fixed to the back side of the door base plate, and one side of the sealing gasket is in contact with the working chamber box body.

[0011] Furthermore, in the utility model, the sealing cover includes a cover substrate, a first screw hole and an inlay groove, the inlay groove is opened at the center of the cover substrate surface, the first screw hole is opened around the cover substrate surface, and the observation window is inlaid in the inner cavity of the inlay groove.

[0012] Furthermore, in the utility model, the number of the connecting pipes is two, the input ends of the vacuum pump and the molecular pump are connected to the inner cavity of the working chamber box through the connecting pipe, the vacuum pump is a rotary vane high-power oil pump with a pumping rate of 4L / S, and the connecting pipe is made of silicone rubber.

[0013] Furthermore, in the utility model, the supporting substrate is made of aluminum alloy plate, the size of the supporting substrate is 760mm*170mm*4mm, the second screw holes are provided in two groups, and each group has four, the aperture of the second screw holes is 6.0mm, and the aperture of the connecting hole is 6.2mm.

[0014] Furthermore, in the present invention, the adhesive component is a rectangular thin sheet of rubber with a bionic micro-nano structure, which is made of high-temperature resistant fluororubber, and the diameter of the rubber protrusion is 6.0 mm.

[0015] Beneficial effects: The utility model has the following beneficial effects:

[0016] The utility model adopts a vertical four-way loading mechanism to process more workpieces to be coated in a limited coating space at the same time, thereby improving the working efficiency of the simulated coating process. The spatial structure coordination of the rotating frame and the rotating table ensures the uniform distribution and force balance of each loading plate, thereby ensuring the uniformity of each workpiece tested in the simulated coating process. The use of rubber bumps to fix the adhesive component and the loading plate not only simplifies the installation process but also reduces the production cost. The use of an adhesive component based on a bionic micro-nano structure to achieve the adhesive function achieves the characteristics of high adhesion, no residue and repeated adhesion in a high temperature and vacuum environment, satisfying the functions of quick fixation and rapid, non-destructive disassembly of precision workpieces. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the main structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the connection state of the vacuum coating chamber and the loading mechanism of the utility model;

[0019] Figure 3 It is a rear view structural schematic diagram of the utility model;

[0020] Figure 4 This is a schematic diagram of the connection state structure of the utility model sealing door

[0021] Figure 5 It is a schematic cross-sectional structural diagram of the sealing cover of the utility model;

[0022] Figure 6 This is a schematic diagram of the connection state structure of the loading mechanism of the utility model;

[0023] Figure 7 This is a schematic diagram of the main structure of the loading plate of the utility model;

[0024] Figure 8 This is a schematic diagram of the main structure of the rotating frame of the utility model.

[0025] Fig. 9 This is a schematic diagram of the structure of the connection state of the rotating table of the utility model;

[0026] Fig.10 It is a schematic diagram of the main structure of the adhesive assembly of the utility model.

[0027] In the figure:

[0028] 1. Main frame; 2. Vacuum coating chamber; 21. Working chamber box; 22. Sealing door; 221. Door substrate; 222. Sealing gasket; 223. Boss; 23. Sealing cover; 231. Cover substrate; 232. First screw hole; 233. Inlay groove; 24. Movable shaft; 25. Observation window; 3. Driving assembly; 31. Working chamber base; 32. Driving motor; 4. Vacuum assembly; 41. Vacuum pump; 42. Molecular pump; 43 , connecting tube; 5, loading mechanism; 51, loading plate; 511, supporting base plate; 512, second screw hole; 513, connecting hole; 52, rotating frame; 521, bracket base plate; 522, third screw hole; 523, fourth screw hole; 53, rotating table; 531, column; 532, circular table; 533, rotating disk; 534, fifth screw hole; 6, adhesive component; 61, adhesive plate; 62, bionic adhesive column; 63, rubber bump. DETAILED DESCRIPTION

[0029] In order to better understand the technical content of the utility model, specific embodiments are cited and described as follows in conjunction with the accompanying drawings. In this disclosure, various aspects of the utility model are described with reference to the accompanying drawings, and many illustrative embodiments are shown in the accompanying drawings. The embodiments of the present disclosure are not necessarily defined to include all aspects of the utility model. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed in the utility model are not limited to any implementation method. In addition, some aspects disclosed in the utility model can be used alone, or used in any appropriate combination with other aspects disclosed in the utility model.

[0030] Example 1

[0031] like Figure 1-10 As shown, it is the first embodiment of the utility model, which provides a device for simulating a coating process in a high-temperature vacuum environment, including a main frame 1 and an adhesive component 6. A vacuum coating chamber 2 is installed on the top of the main frame 1. The vacuum coating chamber 2 includes a working chamber box 21, a sealing door 22, a sealing cover 23, a movable shaft 24 and an observation window 25. The vacuum coating chamber 2 is used as a workplace for simulating a coating process. A driving component 3 is installed on the surface of the main frame 1. The driving component 3 includes a working chamber base 31 and a driving motor 32. The driving motor 32 is fixed The driving assembly 3 is fixed at the upper end of the inner cavity of the main frame 1, and is used to provide power for the rotational motion of the simulated coating process. A vacuum assembly 4 is installed at the bottom of the inner cavity of the main frame 1. The vacuum assembly 4 includes a vacuum pump 41, a molecular pump 42 and a connecting pipe 43. The vacuum assembly 4 is used to provide a vacuum environment for the inner cavity of the working chamber box 21. The inner cavity of the working chamber box 21 is installed with a carrier mechanism 5. The carrier mechanism 5 includes a carrier plate 51, a rotating frame 52 and a rotating table 53. The carrier plate 51 includes a supporting substrate 511, a second screw hole 512 and a connecting hole 513. The second The screw hole 512 and the connecting hole 513 are both provided on the surface of the supporting substrate 511. The rotating frame 52 includes a support substrate 521, a third screw hole 522 and a fourth screw hole 523. The third screw hole 522 is provided on the surface of the support substrate 521. The fourth screw hole 523 is provided at both ends of the support substrate 521. The rotating platform 53 includes a column 531, a circular platform 532, a rotating disk 533 and a fifth screw hole 534. One end of the column 531 is fixedly connected to the circular platform 532. The circular platform 532 is fixed to the top of the rotating disk 533. The object carrying mechanism 5 is used to carry The workpiece is carried, the working chamber base 31 is fixed to the top of the main frame 1, and is connected to the inner cavity of the working chamber box 21, the output shaft of the driving motor 32 passes through the inner cavity of the working chamber base 31 and is connected to the rotating disk 533 by transmission, the adhesion component 6 includes an adhesion plate 61, a bionic adhesion column 62 and a rubber bump 63, the bionic adhesion column 62 is fixed to one side of the adhesion plate 61, the bionic adhesion column 62 is fixed to the other side of the adhesion plate 61, the adhesion plate 61 is connected to the carrier plate 51 by bolts, and the rotating frame 52 is threadedly connected to the carrier plate 51 and the rotating table 53 by bolts.

[0032] like Figure 1-10As shown, by adopting the bionic adhesion module, a smaller area can achieve a larger adhesion force, and good adhesion performance can be maintained in a vacuum and high temperature environment. By adopting a vertical four-way loading mechanism 5, more workpieces to be coated can be processed simultaneously in a certain space, thereby improving the efficiency of the simulated coating process. The working chamber box 21 adopts a rectangular sealed working chamber to achieve a larger effective volume. The sealed door 22 adopts a double-layer steel plate reinforced door to achieve good airtightness. Through the composition of the main frame 1, the vacuum coating chamber 2, the drive component 3, the vacuum component 4, the loading mechanism 5 and the adhesion component 6, the coating process in a high-temperature vacuum environment can be simulated. The inner cavity of the working chamber box 21 is also equipped with a heater to achieve a high-temperature environment. The temperature control range can be set to RT+20-350°C. The working chamber base 31, the drive motor 32, the vacuum pump 41 and the molecular pump 4 2 are connected to the main support loading mechanism 5 by welding. In the simulation of the coating process operation, the sealing door 22 is tightly closed with the working chamber box 21. Under the joint action of the vacuum pump 41 and the molecular pump 42, the air in the working chamber box 21 is discharged through the connecting pipe 43 to achieve a high vacuum working environment. The driving motor 32 drives the rotating table 53 to realize the uniform rotation of the loading plate 51. The surface of the loading plate 51 is fixed with an adhesive component 6. The working surface of the adhesive component 6 has a micro-sized bionic adhesive column 62, which is adsorbed with the tested workpiece through the van der Waals force, so that the workpiece is fixed and rotates together. When the simulation process is completed, the workpiece is applied with a force opposite to the van der Waals force to separate the tested workpiece from the simulation device. The adhesive component 6 has the advantages of adhering to objects in a high-temperature vacuum environment and repeatedly adhering to objects in a high-temperature vacuum environment in the simulation of the coating process.

[0033] Example 2

[0034] Reference Figure 1-10 , which is the second embodiment of the utility model, and this embodiment is based on the previous embodiment.

[0035] In this embodiment, the sealing door 22 is movably connected to the working chamber box 21 through a movable shaft 24. The two ends of the movable shaft 24 are threadedly connected to the working chamber box 21 and the sealing door 22 through bolts respectively. The sealing cover 23 is located on the surface of the sealing door 22, and the observation window 25 is located in the inner cavity of the sealing cover 23.

[0036] The sealing door 22 includes a door substrate 221, a sealing gasket 222 and a boss 223. The boss 223 is fixed to the front of the door substrate 221. The door substrate 221 and the sealing cover 23 are threadedly connected by bolts. The sealing gasket 222 is fixed to the back of the door substrate 221. One side of the sealing gasket 222 contacts the working chamber box 21.

[0037] The sealing cover 23 includes a cover substrate 231 , a first screw hole 232 and an embedding groove 233 . The embedding groove 233 is opened at the center of the surface of the cover substrate 231 . The first screw hole 232 is opened around the surface of the cover substrate 231 . The observation window 25 is embedded in the inner cavity of the embedding groove 233 .

[0038] There are two connecting pipes 43. The input ends of the vacuum pump 41 and the molecular pump 42 are connected to the inner cavity of the working chamber box 21 through the connecting pipe 43. The vacuum pump 41 is a rotary vane high-power oil pump with a pumping rate of 4L / S. The connecting pipe 43 is made of silicone rubber.

[0039] The supporting substrate 511 is made of aluminum alloy plate, and the size of the supporting substrate 511 is 760mm*170mm*4mm. The second screw holes 512 are provided in two groups, and each group has four. The aperture of the second screw holes 512 is 6.0mm, and the aperture of the connecting hole 513 is 6.2mm.

[0040] The adhesive component 6 is a rectangular thin sheet of rubber with a bionic micro-nano structure, made of high-temperature resistant fluororubber, and the diameter of the rubber protrusion 63 is 6.0 mm.

[0041] like Figure 1-10 As shown, by using a fluororubber pad printed with micro-nano structures as an adhesive material, the micro-nano structure of the adhesive component 6 and the surface of the workpiece are bonded by van der Waals force, so that the workpiece is kept in the vacuum coating chamber 2. The overall length of the bionic adhesive column 62 is 3 mm, the radius of the bionic adhesive column 62 is 2 mm, the column is arranged in a hexagonal shape, and each column is surrounded by 6 adhesive micro-columns, and the distance between each adhesive micro-column is 5 mm, so as to maintain the discrete distribution of each adhesive area and increase the adhesive work required to overcome the crack expansion during interface separation.

[0042] When in use, in the simulation of coating process operation, the sealing door 22 and the working chamber box 21 are tightly closed, and under the joint action of the vacuum pump 41 and the molecular pump 42, the air in the working chamber box 21 is discharged through the connecting pipe 43 to achieve a high vacuum working environment, and the driving motor 32 drives the rotating table 53 to achieve uniform rotation of the carrier plate 51. The adhesion component 6 is fixed on the surface of the carrier plate 51, and the working surface of the adhesion component 6 has a tiny-sized bionic adhesive column 62, which is adsorbed with the tested workpiece through the van der Waals force, so that the workpiece is fixed and rotates together. When the simulation process is completed, a force opposite to the van der Waals force is applied to the tested workpiece to make the tested workpiece separate from the simulation device. The adhesion component 6 has the advantages of adhering to objects in a high-temperature vacuum environment and repeatedly adhering to objects in a high-temperature vacuum environment in simulation of coating process.

[0043] The standard parts used in this application document can all be purchased from the market and can be customized according to the description in the specification and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt conventional models in the prior art. The control method is automatic control through a controller. The control circuit of the controller can be implemented through simple programming by technicians in this field, which is common knowledge in the field. This application is mainly used to protect mechanical devices, so this application no longer explains the control method and circuit connection in detail.

[0044] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. A device for simulating a coating process in a high-temperature vacuum environment, comprising a main frame (1) and an adhesive component (6), characterized in that: A vacuum coating chamber (2) is installed on the top of the main frame (1), and the vacuum coating chamber (2) includes a working chamber box (21), a sealing door (22), a sealing cover (23), a movable shaft (24) and an observation window (25). The vacuum coating chamber (2) is used to simulate the working place of the coating process. A driving component (3) is installed on the surface of the main frame (1), and the driving component (3) includes a working chamber base (31) and a driving motor (32). The driving motor (32) is fixed to the upper end of the inner cavity of the main frame (1). The driving component (3) is used to provide power for the rotational motion of the simulated coating process. A vacuum assembly (4) is installed at the bottom of the cavity, the vacuum assembly (4) comprising a vacuum pump (41), a molecular pump (42) and a connecting pipe (43), the vacuum assembly (4) is used to provide a vacuum environment for the inner cavity of the working cavity box (21), the inner cavity of the working cavity box (21) is installed with a loading mechanism (5), the loading mechanism (5) comprising a loading plate (51), a rotating frame (52) and a rotating table (53), the loading plate (51) comprising a supporting substrate (511), a second screw hole (512) and a connecting hole (513), the second screw hole (512) and the connecting hole (513) are both opened on the surface of the supporting substrate (511), The rotating frame (52) comprises a support base plate (521), a third screw hole (522) and a fourth screw hole (523), wherein the third screw hole (522) is provided on the surface of the support base plate (521), and the fourth screw hole (523) is provided at both ends of the support base plate (521). The rotating platform (53) comprises a column (531), a circular platform (532), a rotating disk (533) and a fifth screw hole (534), wherein one end of the column (531) is fixedly connected to the circular platform (532), and the circular platform (532) is fixed to the top of the rotating disk (533). The object carrying mechanism (5) is used for carrying a workpiece, and the working chamber base (31) The adhesive component (6) is fixed to the top of the main frame (1) and communicates with the inner cavity of the working chamber box (21); the output shaft of the driving motor (32) passes through the inner cavity of the working chamber base (31) and is transmission-connected to the rotating disk (533); the adhesive component (6) comprises an adhesive plate (61), a bionic adhesive column (62) and a rubber bump (63); the bionic adhesive column (62) is fixed to one side of the adhesive plate (61); the bionic adhesive column (62) is fixed to the other side of the adhesive plate (61); the adhesive plate (61) is connected to the carrier plate (51) by bolts; the rotating frame (52) is threadedly connected to the carrier plate (51) and the rotating table (53) by bolts.

2. The device for simulating a coating process in a high temperature vacuum environment as claimed in claim 1, characterized in that: The sealing door (22) is movably connected to the working chamber housing (21) via a movable shaft (24); two ends of the movable shaft (24) are respectively threadedly connected to the working chamber housing (21) and the sealing door (22) via bolts; the sealing cover (23) is located on the surface of the sealing door (22); and the observation window (25) is located in the inner cavity of the sealing cover (23).

3. The device for simulating a coating process in a high temperature vacuum environment as claimed in claim 1, characterized in that: The sealing door (22) comprises a door base plate (221), a sealing gasket (222) and a boss (223); the boss (223) is fixed to the front side of the door base plate (221); the door base plate (221) and the sealing cover (23) are threadedly connected via bolts; the sealing gasket (222) is fixed to the back side of the door base plate (221); and one side of the sealing gasket (222) is in contact with the working chamber box body (21).

4. The device for simulating a coating process in a high temperature vacuum environment as claimed in claim 1, characterized in that: The sealing cover (23) comprises a cover substrate (231), a first screw hole (232) and an embedding groove (233); the embedding groove (233) is arranged at the center of the surface of the cover substrate (231); the first screw hole (232) is arranged around the surface of the cover substrate (231); and the observation window (25) is embedded in the inner cavity of the embedding groove (233).

5. The device for simulating a coating process in a high temperature vacuum environment as claimed in claim 1, characterized in that: The number of the connecting pipes (43) is two. The input ends of the vacuum pump (41) and the molecular pump (42) are both connected to the inner cavity of the working chamber box (21) through the connecting pipe (43). The vacuum pump (41) is a rotary vane high-power oil pump with a pumping rate of 4L / S. The connecting pipe (43) is made of silicone rubber.

6. The device for simulating a coating process in a high temperature vacuum environment as claimed in claim 1, characterized in that: The support substrate (511) is made of an aluminum alloy plate, and the size of the support substrate (511) is 760mm*170mm*4mm. The second screw holes (512) are provided in two groups, and each group has four holes. The hole diameter of the second screw holes (512) is 6.0mm, and the hole diameter of the connecting hole (513) is 6.2mm.

7. The device for simulating a coating process in a high temperature vacuum environment as claimed in claim 1, characterized in that: The adhesive component (6) is a rectangular thin sheet of rubber with a bionic micro-nano structure, made of high-temperature resistant fluororubber, and the diameter of the rubber protrusion (63) is 6.0 mm.

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