Damping platform hydrostatic pressure linear guide rail structure easy to assemble

Abstract

The utility model discloses a damping platform hydrostatic pressure linear guide rail structure easy to assemble, and relates to the technical field of hydrostatic pressure linear guide rails, the damping platform hydrostatic pressure linear guide rail structure easy to assemble comprises a guide rail body and a sliding block, the sliding block is buckled on the top of the guide rail body, pressing plates are attached to the two sides of a notch of the sliding block, and the pressing plates are fixed to the sliding block through connecting screws in a threaded mode. The pressing plate and the sliding block are in sliding fit with the guide rail body through the inner side static pressure cavity. According to the damping platform hydrostatic pressure linear guide rail structure easy to assemble, sliding blocks and pressing plates are fastened and assembled through connecting screw rods, the number of static pressure cavities is six, the pressing plates on the two sides and the bottom ends of notches of the sliding blocks are correspondingly arranged in four positions, and the two sides of the notches are each provided with two positions; the assembly composed of the sliding block and the pressing plate is in sliding fit with the guide rail body through the static pressure cavity at the position, oil film adjustment and load distribution control are facilitated, and in addition, the guide rail body, the sliding block and the pressing plate are standardized in structure, small in size and easy to assemble and debug.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid static pressure linear guide rails, in particular to a liquid static pressure linear guide rail structure of a shock-absorbing platform which is easy to assemble. Background Art

[0002] Liquid hydrostatic linear guides, referred to as hydraulic guides, have an extremely low friction coefficient during operation because their working surface is completely under pure liquid friction. The movement of the guide is not limited by load and speed, and it moves evenly at low speeds without creeping. Since the liquid has a vibration-absorbing effect, the guide has good vibration resistance and can be better suited for semiconductor equipment lithography machines, providing a more stable working environment for the lithography machines.

[0003] At present, the existing liquid hydrostatic guide rails are divided into open guide rails and closed guide rails in terms of structural form due to the different load conditions borne by the guide rails. However, no matter which of the above structures is adopted, there is a problem that the structure of the liquid hydrostatic guide rail cannot be standardized, and the installation and debugging require a lot of time and money, which increases the manufacturing time and cost of the machine tool.

[0004] Therefore, in view of this, the shortcomings of the existing structure are studied and improved, and an easy-to-assemble shock-absorbing platform liquid static pressure linear guide structure is proposed. Utility Model Content

[0005] The utility model aims to provide a liquid hydrostatic linear guide rail structure for a damping platform that is easy to assemble, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a liquid hydrostatic linear guide structure of a shock-absorbing platform that is easy to assemble, comprising a guide body and a slider, wherein a slider is buckled on the top of the guide body, and pressure plates are fitted on both sides of the slider recess, the pressure plate is threadably fixed to the slider by a connecting screw, and both the pressure plate and the slider are slidably matched with the guide body through an inner hydrostatic cavity.

[0007] Furthermore, the cross section of the slider is an inverted "concave" structure, and the slider is slidably matched with the guide rail body, and the cross section of the guide rail body is a "T"-shaped structure.

[0008] Furthermore, the static pressure cavities are correspondingly distributed on the pressure plate and the sliding block, and three pairs of planes where the static pressure cavities contact the guide rail body are parallel to each other.

[0009] Furthermore, mounting screws are fixedly connected to both sides of the guide rail body, and butterfly nuts are threadedly matched at the ends of the mounting screws.

[0010] Furthermore, the bottom of the guide rail body is in contact with the shock absorbing platform body, and an air inlet hole is provided on one side of the shock absorbing platform body.

[0011] Furthermore, adjustable feet are provided at four corners of the bottom of the shock absorbing platform body, and the adjustable feet are fixed to threaded countersunk holes at corresponding positions of the shock absorbing platform body.

[0012] Furthermore, side plates are welded and fixed on both sides of the shock-absorbing platform body, and a groove matching with the installation screw is opened through the middle of the side plate.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] 1. When the utility model is in use, the slider and the pressure plate of the present application are fastened and assembled by connecting screws. There are six static pressure cavities, four corresponding to the bottom ends of the notches of the pressure plates on both sides and the slider, and two respectively on both sides of the notches. The assembly composed of the slider and the pressure plate slides with the guide rail body through the static pressure cavity at the above position, which is convenient for adjusting the oil film and controlling the load distribution. In addition, the guide rail body, slider and pressure plate are standardized in structure and compact in size, easy to assemble and debug, and effectively reduce costs.

[0015] 2. When the utility model is in use, the guide rail body is installed in the middle groove of the side plate by sliding the screws on both sides and is locked by butterfly nuts. Multiple parallel guide rail bodies can be mounted on the shock-absorbing platform body according to needs. Similarly, the spacing between adjacent guide rail bodies can also be adjusted. In addition, the adjustable feet corresponding to the four corners of the bottom of the shock-absorbing platform body are fixed by threaded countersunk holes at corresponding positions, so that the overall height and leveling of the device can be adjusted. The operation is simple and the applicability is strong. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of the shock-absorbing platform body of the utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the guide rail body of the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the slider of the utility model.

[0019] In the figure: 1. Guide rail body; 2. Mounting screw; 3. Butterfly nut; 4. Shock-absorbing platform body; 5. Air inlet; 6. Adjustable feet; 7. Side panel; 8. Groove; 9. Slider; 10. Pressure plate; 11. Connecting screw; 12. Static pressure chamber. DETAILED DESCRIPTION

[0020] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0021] like Figures 1 to 3 As shown, an easy-to-assemble damping platform liquid hydrostatic linear guide structure includes a guide body 1 and a slider 9. The slider 9 is buckled on the top of the guide body 1, and the two sides of the notch of the slider 9 are fitted with a pressure plate 10. The pressure plate 10 is threadedly fixed to the slider 9 through a connecting screw 11, and the pressure plate 10 and the slider 9 are both slidably matched with the guide body 1 through an inner static pressure cavity 12. The cross section of the slider 9 is an inverted "concave" structure, and the slider 9 is slidably matched with the guide body 1, and the cross section of the guide body 1 is a "T" shaped structure, the static pressure cavity 12 is correspondingly distributed on the pressure plate 10 and the slider 9, and the static The three pairs of planes in contact between the pressure cavity 12 and the guide rail body 1 are parallel to each other. The slider 9 and the pressure plate 10 of the present application are fastened and assembled by connecting screws 11. There are six static pressure cavities 12, and four corresponding bottom ends of the notches of the pressure plates 10 on both sides and the slider 9 are provided. Two places are provided on both sides of the notches. The assembly composed of the slider 9 and the pressure plate 10 is slidably matched with the guide rail body 1 through the static pressure cavity 12 at the above position, which is convenient for adjusting the oil film and controlling the load distribution. In addition, the guide rail body 1, the slider 9 and the pressure plate 10 are standardized in structure and compact in size, easy to assemble and debug, and effectively reduce costs;

[0022] like Figure 1 to Figure 2 The cam 4 is provided with an air inlet 5 on one side of the cam 4 and an air inlet 6 on the other side of the cam 4. The cam 4 has two guide rails 1 and 2 that are connected to the guide rail 1. The guide rails 1 have two guide rails 1 and 2 that are connected to the guide rail 1. The guide rails 1 have two guide rails 1 and 2 that are connected to the guide rail 1. The guide rails 1 have two guide rails 1 and 2 that are connected to the guide rail 1. The guide rails 1 have two guide rails 1 and 2 that are connected to the guide rail 1.

[0023] Working principle: When using this easy-to-assemble damping platform liquid hydrostatic linear guide structure, when in use, the guide body 1 is installed by sliding the screw rods 2 on both sides in the middle groove 8 of the side plate 7 to adjust the installation position and lock it through the butterfly nut 3. According to the needs, multiple parallel guide bodies 1 can be mounted on the damping platform body 4. Similarly, the spacing between adjacent guide bodies 1 can also be adjusted. In addition, the adjustable feet 6 corresponding to the four corners at the bottom of the damping platform body 4 are fixed through the threaded countersunk holes at the corresponding positions, which can adjust the device The whole is height-adjusted and leveled. The slider 9 and the pressure plate 10 of the present application are fastened and assembled by connecting screws 11. There are six static pressure cavities 12. Four corresponding bottom ends of the recesses of the pressure plates 10 on both sides and the slider 9 are provided. Two locations are provided on both sides of the recess respectively. The assembly composed of the slider 9 and the pressure plate 10 is slidably matched with the guide rail body 1 through the static pressure cavity 12 at the above position, which is convenient for adjusting the oil film and controlling the load distribution. In addition, the guide rail body 1, the slider 9 and the pressure plate 10 are standardized in structure and compact in size, which are easy to assemble and debug, and effectively reduce costs.

[0024] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. An easy-to-assemble damping platform liquid hydrostatic linear guide structure, characterized in that: The invention comprises a guide rail body (1) and a slider (9), wherein the slider (9) is buckled on the top of the guide rail body (1), and pressure plates (10) are fitted on both sides of the notch of the slider (9), and the pressure plate (10) is threadedly fixed to the slider (9) via a connecting screw (11), and the pressure plate (10) and the slider (9) are both slidably matched with the guide rail body (1) via an inner static pressure cavity (12).

2. The easy-to-assemble damping platform liquid hydrostatic linear guide structure according to claim 1, characterized in that: The cross section of the slider (9) is an inverted "concave" structure, the slider (9) is slidably matched with the guide rail body (1), and the cross section of the guide rail body (1) is a "T"-shaped structure.

3. The easy-to-assemble damping platform liquid hydrostatic linear guide structure according to claim 1, characterized in that: The static pressure cavity (12) is correspondingly distributed on the pressure plate (10) and the sliding block (9), and three pairs of planes where the static pressure cavity (12) contacts the guide rail body (1) are parallel to each other.

4. The easy-to-assemble damping platform liquid hydrostatic linear guide structure according to claim 1, characterized in that: The guide rail body (1) is fixedly connected with mounting screws (2) on both sides, and the ends of the mounting screws (2) are threadedly matched with butterfly nuts (3).

5. The easy-to-assemble damping platform liquid hydrostatic linear guide structure according to claim 1, characterized in that: The bottom of the guide rail body (1) is in contact with the shock-absorbing platform body (4), and an air inlet hole (5) is provided on one side of the shock-absorbing platform body (4).

6. The easy-to-assemble damping platform liquid hydrostatic linear guide structure according to claim 5, characterized in that: Adjustable feet (6) are provided at four corners of the bottom of the shock-absorbing platform body (4), and the adjustable feet (6) are fixed to threaded countersunk holes at corresponding positions of the shock-absorbing platform body (4).

7. The easy-to-assemble damping platform liquid hydrostatic linear guide structure according to claim 5, characterized in that: Side plates (7) are welded and fixed on both sides of the shock-absorbing platform body (4), and a groove (8) matching with the mounting screw rod (2) is provided through the middle of the side plate (7).

Images