Heat-proof radiation screen structure of low-temperature probe station

By designing a low-temperature probe table heat-proof radiation screen structure using oxygen-free copper material, the existing heat-proof radiation screen has been solved, and more efficient electromagnetic wave reflection and sample temperature stability are achieved, and the accuracy and stability of the test are improved.

CN222786233UActive Publication Date: 2025-04-22XINBO MICRO SEMICON EQUIP (SHANGHAI) CO LTD
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Patent Information

Application Number
CN202421342358.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-13
Publication Date
2025-04-22
Estimated Expiration
2034-06-13

AI Technical Summary

Technical Problem

The heat-proof radiation screen of the existing low-temperature probe table has problems such as poor radiation resistance and poor thermal conductivity, which affects the accuracy and stability of the test results.

Method used

A heat-proof radiation screen structure of a low-temperature probe table is designed, and the upper cover plate, window cover plate, outer cover plate and bottom cold plate are made of oxygen-free copper materials. Through the thermal conductivity and structural design of these materials, the reflection ability of electromagnetic waves is enhanced.

Benefits of technology

By improving the thermal conductivity and reflection ability of the heat-proof radiation screen, electromagnetic waves can be reflected more effectively and the stable temperature of the sample seat can be maintained, thereby improving the accuracy and stability of the test.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a heat-proof radiation screen structure of a low-temperature probe station. The heat-proof radiation screen structure comprises an upper cover plate, a window cover plate, an outer cover and a bottom cold disc, the window cover plate is arranged at the upper part of the upper cover plate; the upper cover plate is arranged at the upper part of the outer cover; the bottom of the outer cover is fixedly connected with the bottom cold disc; a sapphire window is arranged in the middle of the upper cover plate; the outer cover comprises an upper flange, a side wall and a lower flange; the upper flange is fixedly arranged at the upper end of the side wall; the lower flange is fixedly arranged at the lower end of the side wall; and holes are formed in the side walls. Except the sapphire window, other structures are all made of oxygen-free copper materials, so that the heat-conducting property is good; when electromagnetic waves pass through the heat-proof radiation screen, an electric field and a magnetic field in the heat-proof radiation screen can cause charges in the heat-proof radiation screen to be rearranged, so that reflected waves are generated, and the heat-proof radiation screen can reflect the electromagnetic waves back to the original direction, so that the electromagnetic waves cannot be continuously propagated; furthermore, the internal sample seat has more stable temperature, so that the accuracy and the stability of the test are improved.
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Description

Technical Field

[0001] The utility model belongs to the field of heat radiation protection screens, and in particular relates to a heat radiation protection screen structure of a low-temperature probe station. Background Art

[0002] At present, my country's instrument manufacturers are mainly concentrated in some large scientific research institutes and universities. The scale of enterprises is relatively small, and their technology development capabilities and market development capabilities need to be improved. In terms of market demand, with the development of fields such as materials science and nanoscience, the demand for probe stations is gradually increasing. This provides new market opportunities for the application of probe stations.

[0003] However, the existing low-temperature probe station thermal radiation shields on the market have the disadvantages of poor radiation protection and poor thermal conductivity, which affects the accuracy and stability of the test results. Utility Model Content

[0004] In order to solve the shortcomings of poor radiation protection and poor thermal conductivity of the existing low-temperature probe station thermal radiation shield, the present application designs a thermal radiation shield structure of the low-temperature probe station to enhance the thermal radiation protection function of the low-temperature probe station.

[0005] A heat radiation shield structure for a low-temperature probe station, comprising an upper cover plate, a window cover plate, an outer cover, and a bottom cold plate;

[0006] The window cover is arranged on the upper part of the upper cover;

[0007] The upper cover plate is arranged on the upper part of the outer cover;

[0008] The bottom of the outer cover is fixedly connected to the bottom cold plate.

[0009] Preferably, a sapphire window is also provided in the middle of the upper cover plate.

[0010] Preferably, the outer cover comprises an upper flange, a side wall and a lower flange;

[0011] The upper flange is fixedly arranged at the upper end of the side wall;

[0012] The lower flange is fixedly arranged at the lower end of the side wall.

[0013] Preferably, holes are provided on the side wall.

[0014] Preferably, 4 to 8 holes are provided on the side wall.

[0015] Preferably, six holes are provided on the side wall.

[0016] Preferably, the upper flange is connected to the upper cover plate by bolts.

[0017] Preferably, the lower flange is connected to the bottom cold plate by bolts.

[0018] Preferably, the upper cover plate, the window cover plate, the outer cover and the bottom cold plate are all made of oxygen-free copper material.

[0019] The advantages and effects of this application are as follows:

[0020] The present application designs a thermal radiation shield structure for a low-temperature probe station, wherein the upper cover plate, window cover plate, outer cover and bottom cold plate are all made of oxygen-free copper material with good thermal conductivity. When electromagnetic waves pass through the thermal radiation shield, the electric field and magnetic field therein will cause the charges inside the thermal radiation shield to be rearranged, thereby generating reflected waves. In this way, the thermal radiation shield can reflect the electromagnetic waves back to the original direction, preventing them from continuing to propagate. This in turn makes the internal sample holder have a more stable temperature, thereby improving the accuracy and stability of the test.

[0021] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application so that it can be implemented in accordance with the contents of the specification, and to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following is a detailed description of the preferred embodiments of the present application in conjunction with the accompanying drawings as follows.

[0022] Based on the detailed description of the specific embodiments of the present application in combination with the accompanying drawings below, those skilled in the art will become more aware of the above and other objects, advantages and features of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can also be obtained based on these drawings without creative work. In all drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, each element or part is not necessarily drawn according to the actual scale.

[0024] Figure 1 A structural diagram of a heat radiation shield structure of a low-temperature probe station designed for this application;

[0025] Figure 2 Diagram of the housing structure designed for this application;

[0026] Figure numerals: 1. upper cover plate; 2. window cover plate; 3. sapphire window; 4. outer cover; 5. bottom cold plate; 6. upper flange; 7. side wall; 8. lower flange. DETAILED DESCRIPTION

[0027] To make the purpose, technical scheme and advantages of the embodiment of the present application clearer, the technical scheme in the embodiment of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiment of the present application. Obviously, the described embodiment is a part of the embodiment of the present application, rather than all of the embodiments. In the following description, specific details such as specific configuration and components are provided only to help fully understand the embodiments of the present application. Therefore, it should be clear to those skilled in the art that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present application. In addition, for clarity and brevity, the description of known functions and structures is omitted in the embodiment.

[0028] It should be understood that the references to "one embodiment" or "this embodiment" throughout the specification mean that the specific features, structures, or characteristics associated with the embodiment are included in at least one embodiment of the present application. Therefore, the references to "one embodiment" or "this embodiment" appearing throughout the specification do not necessarily refer to the same embodiment. In addition, these specific features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0029] In addition, the present application may repeat reference numerals and / or letters in different examples. This repetition is for the purpose of simplicity and clarity, and does not in itself indicate the relationship between the various embodiments and / or settings discussed.

[0030] The term "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, B exists alone, and A and B exist at the same time. The term " / and" in this article describes another type of association object relationship, indicating that there can be two relationships. For example, A / and B can mean: A exists alone, and A and B exist alone. In addition, the character " / " in this article generally indicates that the previous and next associated objects are in an "or" relationship.

[0031] The term "at least one" in this article is merely a description of the association relationship of associated objects, indicating that there may be three relationships. For example, at least one of A and B can mean: A exists alone, A and B exist at the same time, and B exists alone.

[0032] It should also be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusions.

[0033] Example 1

[0034] Please refer to Figure 1 , This embodiment mainly introduces a basic structure of a heat radiation shield structure of a low-temperature probe station, including an upper cover plate 1, a window cover plate 2, an outer cover 4, and a bottom cold plate 5;

[0035] The window cover plate 2 is arranged on the upper part of the upper cover plate 1;

[0036] The upper cover plate 1 is arranged on the upper part of the outer cover 4;

[0037] The bottom of the outer cover 4 is fixedly connected to the bottom cold plate 5 .

[0038] Furthermore, a sapphire window 3 is provided in the middle of the upper cover plate 1, which can be used to observe the interior of the heat radiation protection screen.

[0039] Further, the outer cover 4 includes an upper flange 6, a side wall 7 and a lower flange 8;

[0040] The upper flange 6 is fixedly arranged on the upper end of the side wall 7;

[0041] The lower flange 8 is fixedly arranged at the lower end of the side wall 7 .

[0042] Furthermore, the side wall 7 is provided with holes, and an aluminum-plated film shielding curtain is provided on the holes; the holes are used for needle-piercing test of the sample to be tested, and the aluminum-plated film shielding curtain is installed on the holes to minimize the electromagnetic waves passing through the side wall holes, thereby achieving the purpose of preventing heat radiation.

[0043] Furthermore, the side wall 7 is provided with 4 to 8 holes.

[0044] Furthermore, six holes are provided on the side wall 7 .

[0045] Furthermore, the upper flange 6 is connected to the upper cover plate 1 by bolts.

[0046] Furthermore, the lower flange 8 is connected to the bottom cold plate 5 by bolts.

[0047] Furthermore, the upper cover plate 1, the window cover plate 2, the outer cover 4 and the bottom cold plate 5 are all made of oxygen-free copper material.

[0048] The present application designs a thermal radiation shield structure for a low-temperature probe station, wherein the upper cover plate, window cover plate, outer cover and bottom cold plate are all made of oxygen-free copper material with good thermal conductivity. When electromagnetic waves pass through the thermal radiation shield, the electric field and magnetic field therein will cause the charges inside the thermal radiation shield to be rearranged, thereby generating reflected waves. In this way, the thermal radiation shield can reflect the electromagnetic waves back to the original direction, preventing them from continuing to propagate. This in turn makes the internal sample holder have a more stable temperature, thereby improving the accuracy and stability of the test.

[0049] The above description is only the preferred embodiment of the utility model, which does not limit the protection scope of the utility model. For those skilled in the art, the utility model can be modified and varied in various ways. Any changes, modifications, substitutions, integrations and parameter changes to these embodiments within the spirit and principle of the utility model through conventional substitutions or capable of achieving the same functions without departing from the principles and spirit of the utility model shall fall within the protection scope of the utility model.

Claims

1. A heat radiation shield structure for a low temperature probe station, characterized in that: It comprises an upper cover plate (1), a window cover plate (2), an outer cover (4), and a bottom cold plate (5); The window cover plate (2) is arranged on the upper part of the upper cover plate (1); The upper cover plate (1) is arranged on the upper part of the outer cover (4); The bottom of the outer cover (4) is fixedly connected to the bottom cold plate (5); The upper cover plate (1), the window cover plate (2), the outer cover (4) and the bottom cold plate (5) are all made of oxygen-free copper material.

2. The heat radiation shield structure of a low temperature probe station according to claim 1, characterized in that: A sapphire window (3) is also provided in the middle of the upper cover plate (1).

3. The heat radiation shield structure of a low temperature probe station according to claim 1, characterized in that: The outer cover (4) comprises an upper flange (6), a side wall (7) and a lower flange (8); The upper flange (6) is fixedly arranged on the upper end of the side wall (7); The lower flange (8) is fixedly arranged at the lower end of the side wall (7).

4. The heat radiation shield structure of a low temperature probe station according to claim 3, characterized in that: The side wall (7) is provided with holes.

5. The heat radiation shield structure of a low temperature probe station according to claim 4, characterized in that: The side wall (7) is provided with 4 to 8 holes.

6. The heat radiation shield structure of a low-temperature probe station according to claim 5, characterized in that: Six holes are arranged on the side wall (7).

7. The heat radiation shield structure of a low temperature probe station according to claim 3, characterized in that: The upper flange (6) is connected to the upper cover plate (1) via bolts.

8. The heat radiation shield structure of a low temperature probe station according to claim 3, characterized in that: The lower flange (8) is connected to the bottom cold plate (5) via bolts.