Filter assembly, tail gas treatment device and deposition equipment
By designing a filter assembly with a cross-chamber structure and setting the filter member in the second chamber, the problem of gas flow interference caused by impurity deposition in the exhaust gas treatment is solved, and more efficient exhaust gas treatment and improvement of component life is achieved.
Patent Information
- Application Number
- CN202421784631.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-25
- Publication Date
- 2025-04-25
- Estimated Expiration
- 2034-07-25
AI Technical Summary
In traditional exhaust gas treatment devices, as the treatment time increases, impurities in the exhaust gas are deposited in the pipelines and components, resulting in disturbance in the gas flow or damage to the valve.
A filter assembly is designed, which includes a housing having an intersecting chamber structure and a filter member, which intersects the extension direction of the second chamber through the extension direction of the first chamber, and arranges the filter member in the second chamber so that when gas enters and exits the first chamber, the deposit is filtered and collected at the bottom of the second chamber to avoid affecting gas flow.
It effectively avoids the impact of sediments on gas flow, reduces the risk of valve damage, improves the service life of components, and improves the efficiency of exhaust gas treatment.
Smart Images
Figure CN222788706U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor or photovoltaic equipment, and in particular to a filter component, an exhaust gas treatment device and a deposition device. Background Art
[0002] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Semiconductor and photovoltaic materials usually need to be chemically treated before they can be used, for example, using Chemical Vapor Deposition (CVD) technology. Practical applications also include some common diffusion treatments, such as phosphorus diffusion, boron diffusion, etc. According to the specific processing requirements, the corresponding equipment can be selected for processing. It is often achieved by sending the sheet material into the furnace to react under certain temperature and pressure conditions, so gas diffusion and emission are involved. During the gas diffusion and emission process, the exhaust gas needs to be treated, including filtering the exhaust gas.
[0003] However, the inventors have found that in the process of filtering exhaust gas in traditional technology, as the processing time increases, impurities in the exhaust gas are deposited in the exhaust gas pipes and components, and there are problems such as gas flow interference or valve damage. Therefore, a filtering component is urgently needed to solve the above problems. Utility Model Content
[0004] In view of this, an embodiment of the present application provides a filter assembly that solves the problem of gas flow being disturbed or valve being damaged.
[0005] In a first aspect, an embodiment of the present application provides a filter assembly, comprising: a shell having a first chamber and a second chamber, the extension direction of the first chamber intersecting with the extension direction of the second chamber, the first end of the first chamber having an air inlet, the second end of the first chamber having an air outlet, the second chamber being connected to the middle of the first chamber, wherein the middle of the first chamber is located between the first end of the first chamber and the second end of the first chamber; a filter element, arranged in the second chamber, and passing through the space of the first chamber overlapping with the second chamber.
[0006] In one embodiment, the extension direction of the first chamber is horizontal, or the projection of the first end of the first chamber on the second chamber is above the projection of the second end of the first chamber on the second chamber; the extension direction of the second chamber is vertical, wherein the second chamber is partially located below the first chamber.
[0007] In one embodiment, the intersection of the second chamber and the first chamber is located in the middle of the second chamber.
[0008] In one embodiment, the shell includes a plurality of second chambers: wherein the plurality of second chambers are arranged at intervals along an extension direction of the first chamber.
[0009] In one embodiment, the second chamber has a replacement port; wherein the filter assembly further comprises: a collecting member configured to close or expose the replacement port and to collect impurities filtered by the filter member.
[0010] In one embodiment, the filter assembly further includes: a sealing member located between the collecting member and the replacement port; wherein the sealing member has a sealing portion and a limiting portion that are interconnected, the sealing portion is configured to seal the gap between the collecting member and the replacement port, and the limiting portion is configured to limit the position of the sealing portion so that the sealing portion is fixed between the collecting member and the replacement port.
[0011] In one embodiment, one end of the shell near the replacement port has a protrusion away from the second chamber; wherein, the filter assembly also includes: a first locking member, which is arranged on the side of the collecting member away from the shell, and the first locking member has a first threaded portion; a second locking member, which is arranged on the side of the protrusion away from the collecting member, and the second locking member has a second threaded portion, and the extension direction of the second threaded portion is the same as the extension direction of the first threaded portion; a connecting member, the connecting member is respectively threadedly connected to the first threaded portion and the second threaded portion, so that the first locking member abuts against the side of the collecting member away from the shell, and the second locking member abuts against the side of the protrusion away from the collecting member.
[0012] In one embodiment, the first locking member has a first abutment surface and a first limiting surface, the first abutment surface is configured to abut against a side of the collecting member away from the shell, and the first limiting surface abuts against a side of the collecting member extending axially along the shell; the second locking member has a second abutment surface and a second limiting surface, the second abutment surface is configured to abut against a side of the protrusion away from the collecting member, and the second limiting surface abuts against a side of the protrusion extending axially along the shell.
[0013] In one embodiment, the filter element is located in the middle of the second chamber, and its orthographic projection in the direction toward the first chamber covers the connection position between the first chamber and the second chamber.
[0014] In a second aspect, an embodiment of the present application provides an exhaust gas treatment device, comprising: the filter assembly mentioned in the first aspect above; an exhaust device, connected to the filter assembly, and configured to extract the exhaust gas filtered by the filter assembly.
[0015] In a third aspect, an embodiment of the present application provides a deposition device, comprising: a deposition device, configured to perform a thin film deposition process on a workpiece; the above-mentioned exhaust gas treatment device, which is connected to the deposition device and configured to treat the exhaust gas generated by the deposition process.
[0016] The inventor has found that during the use of the exhaust treatment device, the sediment in the exhaust gas accumulates in the exhaust pipe and components, which affects the gas flow, resulting in the problem of gas flow being disturbed or valve damage. Therefore, the filter assembly provided in the embodiment of the present application intersects the extension direction of the second chamber through the extension direction of the first chamber, and the filter element is arranged in the second chamber, so that the sediment is filtered by the filter assembly in the path where the gas enters from the air inlet of the first chamber and is discharged from the air outlet, and part of it falls into the bottom of the second chamber, and the gas does not pass through the position of the sediment, thereby achieving the purpose of avoiding the sediment from affecting the gas flow effect, thereby solving the problem of gas flow being disturbed or valve damage. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The above and other purposes, features and advantages of the present application will become more apparent by describing the embodiments of the present application in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation on the present application.
[0018] Figure 1 Shown is a schematic structural diagram of a filter assembly provided in one embodiment of the present application.
[0019] Figure 2 Shown is a schematic diagram of the positions of the first chamber and the second chamber provided in one embodiment of the present application.
[0020] Figure 3 Shown is a schematic diagram of the intersection position of the first chamber and the second chamber provided in one embodiment of the present application.
[0021] Figure 4 Shown is a schematic structural diagram of a housing provided in one embodiment of the present application.
[0022] Figure 5 Shown is a schematic structural diagram of a filter assembly provided in another embodiment of the present application.
[0023] Figure 6 Shown Figure 5 A schematic diagram of the structure of the filter assembly shown in FIG.
[0024] Figure 7 Shown is a schematic structural diagram of a filter assembly provided in another embodiment of the present application.
[0025] Figure 8 Shown is a schematic structural diagram of an exhaust gas treatment device provided in one embodiment of the present application.
[0026] Fig. 9 Shown is a schematic structural diagram of a deposition device provided in one embodiment of the present application.
[0027] Reference numerals:
[0028] 100, filter assembly; 110, shell; 111, first chamber; 112, second chamber; 1111, first end of the first chamber; 1112, second end of the first chamber; 1113, air inlet; 1114, air outlet; 1121, replacement port; 120, filter element; 130, collecting element; 140, sealing element; 150, first locking element; 160, second locking element; 170, connecting element; 200, exhaust gas treatment device; 201, exhaust device; 300, deposition equipment; 301, deposition device. DETAILED DESCRIPTION
[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0030] Figure 1 FIG. 1 is a schematic diagram of the structure of a filter assembly provided by an embodiment of the present application. Figure 1 As shown, the filter assembly 100 includes: a barrel body 110, having a first chamber 111 and a second chamber 112, the extension direction of the first chamber 111 intersects with the extension direction of the second chamber 112, the first end 1111 of the first chamber 111 has an air inlet, the second end 1112 of the first chamber 111 has an air outlet, and the second chamber 112 is connected to the middle of the first chamber, wherein the middle of the first chamber 111 is located between the first end 1111 of the first chamber and the second end 1112 of the first chamber; a filter element 120 is arranged in the second chamber 112 and passes through the space of the first chamber 111 overlapping with the second chamber 112.
[0031] Exemplarily, the filter element 120 includes a filter element or other components that cooperate with the filter element to complete the filtering function, such as a fixing member to help fix the filter element. The filter element 120 may also include only the filter element. It should be understood that the embodiment of the present application does not further limit the type of filter element, as long as it can achieve the filtering function.
[0032] For example, in actual application, the waste gas to be treated enters through the first end of the first chamber 111 and is discharged from the second end of the first chamber 111. Since the extension direction of the first chamber 111 intersects with the extension direction of the second chamber 112, the filter element 120 is arranged in the second chamber 112 and passes through the space of the first chamber 111 overlapping with the second chamber 112. During the process of gas being discharged from the first chamber 111, the gas passes through the filter element, thereby filtering the gas. Since there is dust in the filtering process, the dust is collected by the lower part of the second chamber 112, and the dust will accumulate as the filtering time goes by. Since the gas filtering path is the part of the first chamber 111 where the dust does not accumulate in the second chamber 112, the influence of dust accumulation on the filtering can be avoided, the valve opening problem and the problem of reduced pumping speed caused by dust accumulation are reduced, and the service life of components is improved.
[0033] The filter assembly provided in the embodiment of the present application can ensure that the gas inlet and outlet paths do not overlap with the locations where dust accumulates during the filtering process, thereby achieving the purpose of preventing sediments from affecting gas flow.
[0034] Figure 2 FIG. 1 is a schematic diagram showing the positions of the first chamber and the second chamber provided in one embodiment of the present application. Figure 2 As shown, the extension direction of the first chamber 111 of the filter assembly 100 provided in the embodiment of the present application is horizontal, and the extension direction of the second chamber 112 is vertical; wherein, the second chamber 112 is partially located below the first chamber 111 .
[0035] For example, the first chamber 111 extends in the horizontal direction, the second chamber 112 extends in the vertical direction, the gas enters and exits in the horizontal direction, and the dust is deposited in the vertical direction. Since the second chamber 112 is partially located below the first chamber 111, the dust is deposited in the part of the second chamber 112 below the first chamber 111 under the influence of gravity, and the overlap with the gas path is small, further reducing the overlap between the gas path and the dust deposition position, thereby reducing the impact of the deposit on the gas flow.
[0036] In some embodiments, the filter assembly 100 provided by the present application is as follows: Figure 1 As shown, the orthographic projection of the first chamber 111 on the plane passing through the midline of the first chamber 111 and the midline of the second chamber 112 is in the shape of a Z. Since the first end 1111 of the first chamber 111 has an air inlet, and the second end 1112 of the first chamber 111 has an air outlet, the path of the gas entering from the air inlet and being discharged from the air outlet in the embodiment of the present application is longer, and the filtering effect is better.
[0037] The filter assembly provided in the embodiment of the present application can reduce the occurrence of the gas path overlapping with the dust deposition position, thereby reducing the probability of the deposit affecting the valve and the pump, further solving the purpose of the deposit affecting the gas flow. In addition, the filter assembly provided in the embodiment of the present application can make the path of the gas from the air inlet to the air outlet longer, and the filtering effect is better.
[0038] Figure 3 FIG. 1 is a schematic diagram of the intersection position of the first chamber and the second chamber provided in one embodiment of the present application. Figure 3 As shown, the intersection of the second chamber 112 and the first chamber 111 is located in the middle of the second chamber 112 .
[0039] Exemplarily, the intersection of the second chamber 112 and the first chamber 111 is located in the middle of the second chamber 112, presenting a cross structure, thereby making the structure simpler and the manufacturing process easier.
[0040] The filter assembly provided in the embodiment of the present application can prevent sediment from affecting exhaust gas, and has a simple manufacturing process and structure.
[0041] Figure 4 The figure is a schematic diagram of the structure of a barrel provided by an embodiment of the present application. Figure 4 As shown, the barrel body 110 provided in one embodiment of the present application includes a plurality of second chambers 112 ; wherein the plurality of second chambers 112 are arranged at intervals along the extension direction of the first chamber 111 .
[0042] Exemplarily, the filter assembly includes a plurality of second chambers 112, and correspondingly, a plurality of first chambers 111. Filters are respectively configured in the plurality of second chambers 112, and gas can enter and exit the plurality of second chambers 112 through the plurality of filters, thereby ensuring the filtering effect. It should be understood that the number of second chambers 112 can be selected according to demand.
[0043] The filter assembly provided in the embodiment of the present application includes a plurality of second chambers 112 , thereby ensuring the filtering effect.
[0044] Figure 5 The figure is a schematic diagram of the structure of a filter assembly provided by another embodiment of the present application. Figure 1 Based on the embodiment shown, Figure 5 The embodiment shown is described below in detail. Figure 5 The embodiment shown and Figure 1 The differences between the embodiments shown are shown, and the similarities are not repeated. Figure 5 As shown, the second chamber 112 has a replacement port 1121 ; wherein the filter assembly further comprises: a collecting member 130 , which is configured to close or expose the replacement port 1121 and is used to collect impurities filtered by the filter element.
[0045] For example, in actual application, as the number of filtrations and the use time of the filter assembly increase, the filter device in the filter assembly will fail and need to be replaced or cleaned. In the embodiment of the present application, the filter element in the filter assembly can be replaced or cleaned through the replacement port 1121 of the second chamber 112. It should be understood that when the replacement port 1121 of the second chamber 112 is used to collect impurities filtered by the filter element, in order to facilitate operation, replacement ports can be set at both ends of the second chamber 112, and the embodiment of the present application does not further limit the number of replacement ports 1121.
[0046] Exemplarily, the second chamber 112 may have two replacement ports at the top and bottom ends; a replacement port at the top end may facilitate replacement or cleaning of the filter device; a replacement port at the bottom end may facilitate cleaning of the filter assembly, for example, cleaning deposited dust, etc.
[0047] The second chamber 112 of the filter assembly provided in the embodiment of the present application has a replacement port, which can facilitate the replacement or cleaning of the filter element and can ensure the cleaning of the filter assembly and the filtering effect.
[0048] like Figure 6 As shown, in some embodiments, the filter assembly 100 also includes a sealing member 140, which is located between the collecting member 130 and the replacement port 1121; wherein the sealing member 140 has a sealing portion and a limiting portion that are interconnected, the sealing portion is configured to seal the gap between the collecting member 130 and the replacement port, and the limiting portion is configured to limit the position of the sealing portion so that the sealing portion is fixed between the collecting member and the replacement port.
[0049] Exemplarily, the seal 140 can be a seal ring with a central support, which can cooperate with the replacement port to ensure that the seal 140 is fixed and locate the fixed position. That is, the central support is a limiting part, and the sealing rubber ring outside the central support is a sealing part. The seal can ensure the sealing of the collection part and the replacement port, prevent gas from overflowing, and ensure the filtering effect.
[0050] The filter assembly provided in the embodiment of the present application can ensure the sealing between the collecting piece and the replacement port, thereby ensuring the filtering effect.
[0051] like Figure 6As shown, in some embodiments, one end of the barrel body 110 close to the replacement port has a protrusion away from the second chamber 112; wherein, the filter assembly 100 also includes: a first locking member 150, which is arranged on the side of the collecting member 130 away from the barrel body 110, and the first locking member 150 has a first threaded portion; a second locking member 160, which is arranged on the side of the protrusion away from the collecting member 130, and the second locking member 160 has a second threaded portion, and the extension direction of the second threaded portion is the same as the extension direction of the first threaded portion; a connecting member 170, which is threadedly connected to the first threaded portion and the second threaded portion respectively, so that the first locking member abuts against the side of the collecting member 130 away from the barrel body 110, and the second locking member abuts against the side of the protrusion away from the collecting member 130.
[0052] For example, the connecting member may be a hook-shaped bolt. The hook-shaped bolt can provide a strong fixing effect by cooperating with the threads of the first locking member and the second locking member through its U-shaped structure. In addition, since the threaded part of the locking member and the connecting member is screwed together, the opening and closing of the collecting member can be more convenient, which is conducive to the replacement or cleaning of the filter element.
[0053] The filter assembly provided in the embodiment of the present application realizes the fixation or disassembly of the collecting member through the cooperation of the first locking member, the second locking member and the connecting member, which is beneficial to the replacement or cleaning of the filter member and ensures the filtering function of the filter assembly.
[0054] like Figure 6 As shown, in some embodiments, the first locking member 150 has a first abutment surface and a first limiting surface, the first abutment surface is configured to abut against the side of the collecting member 130 away from the barrel body 110, and the first limiting surface abuts against the side of the collecting member 130 extending axially along the barrel body 110; the second locking member 160 has a second abutment surface and a second limiting surface, the second abutment surface is configured to abut against the side of the protrusion away from the collecting member 130, and the second limiting surface abuts against the side of the protrusion extending axially along the barrel body 110.
[0055] The first locking member of the filter assembly provided in the embodiment of the present application has a first abutting surface and a first limiting surface, and the second locking member has a second abutting surface and a second limiting surface. The limiting surface and the abutting surface can abut against the barrel body to achieve locking of the collecting member and the barrel body, thereby increasing the sealing and ensuring the filtering effect of the filter assembly.
[0056] Figure 7 The figure is a schematic diagram of the structure of a filter assembly provided by another embodiment of the present application. Figure 5 Based on the embodiment shown, Figure 7 The embodiment shown is described below in detail. Figure 7 The embodiment shown and Figure 5 The differences between the embodiments shown are shown, and the similarities are not repeated. Figure 7As shown, the filter element 120 is in the middle of the second chamber 112, and its orthographic projection in the direction toward the first chamber 111 covers the connection position 1122 between the first chamber 111 and the second chamber 112. The filter element provided in the embodiment of the present application covers the connection position 1122 between the first chamber 111 and the second chamber 112 in the orthographic projection in the direction toward the first chamber 111. The filter element is placed according to the gas discharge path, which ensures the filtering effect while saving the material of the filter element and reducing the cost of the filter assembly.
[0057] Figure 8 FIG. 1 is a schematic diagram of the structure of an exhaust gas treatment device provided in one embodiment of the present application. Figure 8 As shown, an exhaust gas treatment device 200 provided in an embodiment of the present application includes: the filter component 100 mentioned above; an exhaust device 201, which is connected to the filter component and is configured to remove exhaust gas after being filtered by the filter component.
[0058] The beneficial effects of the exhaust gas treatment device provided in the embodiment of the present application are consistent with the beneficial effects of the above-mentioned filter assembly, and will not be repeated here.
[0059] Fig. 9 FIG. 1 is a schematic diagram of the structure of a deposition device provided in one embodiment of the present application. Fig. 9 An embodiment of the present application shown provides a deposition device 300, including: a deposition device 301, configured to perform a thin film deposition process on a workpiece; the above-mentioned exhaust gas treatment device 200, which is connected to the deposition device 301 and is configured to treat the exhaust gas generated by the deposition process.
[0060] The beneficial effects of the deposition equipment provided in the embodiment of the present application are consistent with the beneficial effects of the above-mentioned exhaust gas treatment device, and will not be repeated here.
[0061] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly described or not.
[0062] It should be understood that “on,” “above,” and “over” in this application should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above something” or “over,” but also may include the meaning of “above something” or “over” with no intervening features or layers therebetween (i.e., directly on something).
[0063] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.
[0064] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.
[0065] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present application (including the claims) is limited to these examples. In line with the concept of the present application, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the embodiments of the present application as described above, which are not provided in detail for the sake of simplicity.
[0066] The embodiments of the present application are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of the present application.
Claims
1. A filter assembly, characterized in that: include: A shell, comprising a first chamber and a second chamber, wherein an extension direction of the first chamber intersects an extension direction of the second chamber, a first end of the first chamber comprises an air inlet, a second end of the first chamber comprises an air outlet, and the second chamber is communicated with a middle portion of the first chamber, wherein the middle portion of the first chamber is located between the first end of the first chamber and the second end of the first chamber; The filter element is disposed in the second chamber and passes through a space of the first chamber that overlaps with the second chamber.
2. The filter assembly according to claim 1, characterized in that: The first chamber extends in a horizontal direction, or The orthographic projection of the first chamber on a plane passing through the midline of the first chamber and the midline of the second chamber is a Z-shape; And / or the extension direction of the second chamber is a vertical direction, wherein the second chamber is partially located below the first chamber.
3. The filter assembly according to claim 2, characterized in that: include: The intersection position of the second chamber and the first chamber is located in the middle of the second chamber.
4. The filter assembly according to claim 1, characterized in that: The housing includes a plurality of said second chambers: Wherein, a plurality of the second chambers are arranged at intervals along the extension direction of the first chamber.
5. The filter assembly according to claim 1, characterized in that: The second chamber has a replacement port; Wherein, the filtering component also includes: The collecting element is configured to close or expose the replacement port and is used to collect impurities filtered by the filter element.
6. The filter assembly according to claim 5, characterized in that The filter assembly also includes: A sealing member, located between the collecting member and the replacement port; Wherein, the sealing member has a sealing portion and a limiting portion which are interconnected, the sealing portion is configured to seal the gap between the collecting member and the replacement port, and the limiting portion is configured to limit the position of the sealing portion so that the sealing portion is fixed between the collecting member and the replacement port.
7. The filter assembly according to claim 6, characterized in that One end of the shell body close to the replacement port has a protrusion away from the second chamber; Wherein, the filtering component also includes: A first locking member, disposed on a side of the collecting member away from the housing, wherein the first locking member has a first threaded portion; A second locking member is disposed on a side of the protrusion away from the collecting member, the second locking member having a second threaded portion, and an extending direction of the second threaded portion is the same as an extending direction of the first threaded portion; A connecting member is threadedly connected to the first threaded portion and the second threaded portion respectively, so that the first locking member abuts against a side of the collecting member away from the shell, and the second locking member abuts against a side of the protrusion away from the collecting member.
8. The filter assembly according to claim 7, characterized in that: The first locking member has a first abutting surface and a first limiting surface, the first abutting surface is configured to abut against a side of the collecting member away from the shell, and the first limiting surface abuts against a side surface of the collecting member extending along the axial direction of the shell; The second locking member has a second abutting surface and a second limiting surface, the second abutting surface is configured to abut against a side of the protrusion away from the collecting member, and the second limiting surface abuts against a side surface of the protrusion extending along the axial direction of the shell.
9. The filter assembly according to any one of claims 1 to 8, characterized in that: The filter element is located in the middle of the second chamber, and its orthographic projection toward the first chamber covers the connection position between the first chamber and the second chamber.
10. An exhaust gas treatment device, characterized in that: include: The filter assembly according to any one of claims 1 to 8; The exhaust device is connected to the filter assembly and is configured to extract the exhaust gas filtered by the filter assembly.
11. A deposition device, characterized in that: include: a deposition device configured to perform a thin film deposition process on a workpiece; The exhaust gas treatment device described in claim 10 is connected to the deposition device and is configured to treat the exhaust gas generated by the deposition process.