Low-resistance high-efficiency air filter applied to semiconductor manufacturing workshop

Abstract

The utility model relates to the field of air filters, and discloses a low-resistance high-efficiency air filter applied to a semiconductor manufacturing workshop, which comprises a filter body, a slot is arranged at the top of the filter body, a filter plate is inserted on the inner wall of the slot, and mounting mechanisms are arranged on the left side and the right side of the filter plate. A filter plate is arranged in the filter body, a handle is fixedly connected to the top of the filter plate, a cleaning mechanism is arranged in the filter body and comprises a stepping motor, and the stepping motor is fixedly mounted at the bottom of the inner wall of the filter body. According to the utility model, by arranging the cleaning mechanism and the resetting mechanism, the cleaning rod is extruded by the edge of the filter hole when moving up and down and is matched with the elastic force of the spring I, so that the cleaning rod reciprocates in the front-back direction, dust particles in the filter hole are popped out, and the possibility that the filter hole is blocked by fine particles is reduced; the filtering efficiency of the filtering plate is improved.

Description

Technical Field

[0001] The utility model relates to the field of air filters, in particular to a low-resistance and high-efficiency air filter used in semiconductor manufacturing workshops. Background Art

[0002] Air filters are devices that capture dust from gas-solid two-phase flow and purify the gas through the action of porous filter materials, while high-efficiency air filters are mainly used to capture dust particles larger than 0.5μm and various suspended solids. Air purifiers are mainly composed of filter elements and shells. The basic requirements are high filtration efficiency, low flow resistance, and long-term continuous use to reduce the cost of later consumables.

[0003] After searching, the Chinese patent announcement number: CN221267517U discloses a low resistance high efficiency air filter, including a fixed filter frame; a filter core net is placed on the inner side wall of the middle part of the rear end of the fixed filter frame; and symmetrical grooves are respectively opened on the rear side walls of the two ends of the filter core net. The patent scrapes the debris on the fixed filter net by a fixed scraper, cleans the debris on the fixed filter net, and does not let the debris block the mesh of the fixed filter net, and the dust or impurities on the surface of the filter core net can also be removed, so that the mesh of the fixed filter net and the filter core net is transparent, but when the fine dust particles on the filter hole are cleaned by the movement of the fixed scraper, because the diameter of some dust particles is similar to the aperture of the filter hole, when the fixed scraper reciprocates, the fixed scraper will push the dust particles to the inside of the filter hole, so that the dust particles are stuck on the inner wall of the filter hole, resulting in the clogging of the filter hole, thereby reducing the filtering efficiency of the filter plate. Therefore, a low resistance high efficiency air filter applied to a semiconductor manufacturing workshop is proposed to solve the above problems. Utility Model Content

[0004] In order to make up for the above deficiencies, the utility model provides a low-resistance and high-efficiency air filter used in semiconductor manufacturing workshops, aiming to improve the problem in the prior art that "when the fixed scraper moves back and forth, it pushes particulate dust into the inside of the filter holes, causing blockage of the filter holes, thereby reducing the filtering efficiency of the filter plate."

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a low-resistance and high-efficiency air filter used in a semiconductor manufacturing workshop, comprising a filter body, a slot is opened at the top of the filter body, a filter plate is inserted on the inner wall of the slot, mounting mechanisms are arranged on the left and right sides of the filter plate, a handle is fixedly connected to the top of the filter plate, a cleaning mechanism is arranged inside the filter body, the cleaning mechanism comprises a stepper motor, the stepper motor is fixedly connected to the bottom of the inner wall of the filter body, a reciprocating screw rod is fixedly connected to the top of the output shaft of the stepper motor, a cross plate is slidably mounted on the circumferential surface of the reciprocating screw rod, a reset mechanism is arranged inside the cross plate, a moving block is arranged inside the cross plate, a cleaning rod is fixedly connected to the front side of the moving block, the front side of the cleaning rod is in contact with the back side of the filter plate, and a fan is fixedly mounted on the rear side of the filter body.

[0006] As a further description of the above technical solution:

[0007] The number of the cleaning rods is set to be multiple, and the multiple cleaning rods are arranged in a straight line and at equal intervals on the front side of the horizontal plate.

[0008] As a further description of the above technical solution:

[0009] The reset mechanism comprises a guide rod, the upper and lower ends of which are fixedly mounted on the inner wall of the filter body, and the outer wall of the guide rod is slidably connected to the inner wall of the transverse plate.

[0010] As a further description of the above technical solution:

[0011] The reset mechanism also includes a spring 1, one end of which is fixedly connected to the inner wall of the horizontal plate, and the other end of which is fixedly connected to the back side of the moving block.

[0012] As a further description of the above technical solution:

[0013] The limit blocks are fixedly mounted on the left and right sides of the moving block, a limit slot is provided inside the transverse plate, and the limit blocks are slidably mounted on the inner wall of the limit slot.

[0014] As a further description of the above technical solution:

[0015] The installation mechanism comprises clamping blocks, the number of the clamping blocks is set to two groups, and the two groups of clamping blocks are fixedly connected with pull rings on the sides away from each other.

[0016] As a further description of the above technical solution:

[0017] The clamping block is slidably mounted on the inner wall of the filter body, and the clamping block is elastically connected to the inner wall of the filter body via a second spring.

[0018] As a further description of the above technical solution:

[0019] The filter plate is provided with card slots on both sides of the left side, and the card blocks are plugged into the inner walls of the card slots.

[0020] The utility model has the following beneficial effects:

[0021] 1. In the utility model, by providing a cleaning mechanism and a reset mechanism, when the cleaning rod moves up and down, it is squeezed by the edge of the filter hole and cooperates with the elastic force of the spring, so that the cleaning rod moves back and forth in the front and back directions, thereby ejecting the dust particles inside the filter hole, reducing the possibility of the filter hole being blocked by fine particles, and improving the filtration efficiency of the filter plate.

[0022] 2. In the utility model, by setting up the installation mechanism, when the filter plate needs to be removed, the pull ring is pulled outward to make the card block disengage from the inside of the card slot to release the limit, and then the handle is pulled upward to remove the filter plate from the inside of the slot, which is convenient and quick, and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a front view schematic diagram of the overall three-dimensional structure of the utility model;

[0024] Figure 2 It is a rear view schematic diagram of the overall three-dimensional structure of the utility model;

[0025] Figure 3 It is a schematic diagram of the overall three-dimensional explosion structure of the utility model;

[0026] Figure 4 It is a schematic cross-sectional view of the three-dimensional structure of the installation mechanism in the utility model;

[0027] Figure 5 It is a schematic cross-sectional view of the three-dimensional structure of the cleaning mechanism and the resetting mechanism in the utility model.

[0028] Legend:

[0029] 1. Filter body; 2. Filter plate; 3. Slot; 4. Handle; 5. Stepper motor; 6. Reciprocating screw; 7. Horizontal plate; 8. Guide rod; 9. Moving block; 10. Spring 1; 11. Limit block; 12. Limit slot; 13. Cleaning rod; 14. Pull ring; 15. Block; 16. Spring 2; 17. Slot; 18. Fan. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] Reference Figure 1 - Figure 3 The utility model provides an embodiment: a low-resistance high-efficiency air filter used in a semiconductor manufacturing workshop, comprising a filter body 1, a slot 3 is opened on the top of the filter body 1, a filter plate 2 is inserted on the inner wall of the slot 3, and filter holes are arranged on the surface of the filter plate 2 for filtering solid particle impurities in the air. Mounting mechanisms are arranged on the left and right sides of the filter plate 2, and a handle 4 for conveniently lifting the filter plate 2 is fixedly connected to the top of the filter plate 2, which is convenient and labor-saving, and a cleaning mechanism is arranged inside the filter body 1.

[0032] Reference Figure 3 , Figure 5 The cleaning mechanism includes a stepper motor 5. The stepper motor 5 can accurately control the rotation angle of its output shaft, which is convenient for adjusting the speed and frequency of the output shaft rotation. It can be adjusted according to different working conditions and has good adaptability. The stepper motor 5 is fixedly installed at the bottom of the inner wall of the filter body 1. The top of the output shaft of the stepper motor 5 is fixedly connected with a reciprocating screw 6 arranged in a vertical state. A horizontal plate 7 is slidably installed on the circumferential surface of the reciprocating screw 6. The rotation of the reciprocating screw 6 makes the horizontal plate 7 perform reciprocating linear motion in the axial direction of the reciprocating screw 6. A reset mechanism is arranged inside the horizontal plate 7.

[0033] Reference Figure 3 , Figure 5 A moving block 9 is arranged inside the horizontal plate 7, and the displacement direction of the moving block 9 is forward and backward displacement. A cleaning rod 13 is fixedly connected to the front of the moving block 9, and an arcuate surface is arranged on the front of the cleaning rod 13. The number of the cleaning rods 13 is set to be multiple, and multiple cleaning rods 13 are arranged in a straight line and at equal intervals on the front of the horizontal plate 7. The intervals between the cleaning rods 13 are equal to the intervals between the filter holes of the filter plate 2, and the arcuate surface of each cleaning rod 13 is stuck in the inside of the filter hole, and the front of the cleaning rod 13 is in contact with the back of the filter plate 2. A fan 18 for increasing the air flow speed is fixedly installed on the rear side of the filter body 1 to improve the efficiency of the filter.

[0034] Reference Figure 5The reset mechanism includes a guide rod 8 arranged in a vertical state, and the upper and lower ends of the guide rod 8 are fixedly mounted on the inner wall of the filter body 1. The outer wall of the guide rod 8 is slidably connected to the inner wall of the cross plate 7. The displacement of the cross plate 7 is guided by setting the guide rod 8, so that the cross plate 7 makes a more accurate linear displacement, thereby improving the stability of the displacement of the cross plate 7. The reset mechanism also includes a spring 10, one end of the spring 10 is fixedly connected to the inner wall of the cross plate 7, and the other end of the spring 10 is fixedly connected to the back of the moving block 9. By setting the spring 10, an elastic force toward the front side is applied to the moving block 9. The reset mechanism also includes a limit block 11, which is fixedly mounted on the left and right sides of the moving block 9. A limit groove 12 is provided inside the cross plate 7, and the limit block 11 is slidably mounted on the inner wall of the limit groove 12. Through the cooperation of the limit block 11 and the limit groove 12, the displacement of the moving block 9 is guided, so that the moving block 9 makes a stable linear displacement in the front and rear directions.

[0035] Reference Figure 3 , Figure 4 The mounting mechanism includes a card block 15, and the number of the card blocks 15 is set to two groups. The two groups of card blocks 15 are fixedly connected with a pull ring 14 for facilitating the user to pull the card block 15 on one side away from each other. The card block 15 is slidably mounted on the inner wall of the filter body 1. The sliding direction of the card block 15 is left and right sliding. The card block 15 is elastically connected to the inner wall of the filter body 1 through a spring 2 16. By setting the spring 2 16, the two groups of card blocks 15 have a tendency to approach each other. Card slots 17 are provided on both sides of the left side of the filter plate 2. The card block 15 is plugged into the inner wall of the card slot 17. Through the cooperation of the card block 15 and the card slot 17, the filter plate 2 is stably fixed inside the filter body 1.

[0036] Working principle: When in use, by starting the stepper motor 5, the stepper motor 5 works to rotate the reciprocating screw rod 6. The rotation of the reciprocating screw rod 6 causes the cross plate 7 to make a reciprocating linear motion in the axial direction of the reciprocating screw rod 6. The movement of the cross plate 7 causes the cleaning rod 13 on the front side of the moving block 9 to make a linear motion in the up and down directions. When the cleaning rod 13 moves, it will collide with the edge of the filter hole of the filter plate 2. When the curved surface of the cleaning rod 13 squeezes the edge of the filter hole, the filter hole applies a reaction force to the cleaning rod 13, so that the cleaning rod 13 overcomes the elastic force of the second spring 16 and moves backward. When the cleaning rod 13 moves to the next filter hole, the cleaning rod 13 resets under the elastic force of the second spring 16, and applies an impact force to the filter hole, so that the solid particulate matter stuck in the filter hole is ejected to the outside of the filter hole, so that the cleaning is more efficient and the increase in resistance caused by clogging of the filter hole is avoided.

[0037] When the filter plate 2 needs to be replaced and disassembled, the pull ring 14 is pulled to move away from the center of the filter plate 2. The pull ring 14 drives the block 15 to overcome the elastic force of the spring 16 and move away from the center of the filter plate 2, so that the block 15 is disengaged from the inner wall of the slot 17, and then the handle 4 is lifted upward, so that the handle 4 drives the filter plate 2 to move upward, so that the filter plate 2 can be easily and quickly removed from the inner wall of the slot 3 for replacement.

[0038] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A low resistance high efficiency air filter used in a semiconductor manufacturing workshop, comprising a filter body (1), characterized in that: The filter body (1) is provided with a slot (3) at the top, a filter plate (2) is inserted into the inner wall of the slot (3), mounting mechanisms are provided on the left and right sides of the filter plate (2), a handle (4) is fixedly connected to the top of the filter plate (2), a cleaning mechanism is provided inside the filter body (1), the cleaning mechanism comprises a stepping motor (5), the stepping motor (5) is fixedly mounted on the bottom of the inner wall of the filter body (1), a reciprocating screw rod (6) is fixedly connected to the top of the output shaft of the stepping motor (5), a horizontal plate (7) is slidably mounted on the circumferential surface of the reciprocating screw rod (6), a reset mechanism is provided inside the horizontal plate (7), a moving block (9) is provided inside the horizontal plate (7), a cleaning rod (13) is fixedly connected to the front of the moving block (9), the front of the cleaning rod (13) is in contact with the back of the filter plate (2), and a fan (18) is fixedly mounted on the rear side of the filter body (1).

2. A low resistance high efficiency air filter used in a semiconductor manufacturing workshop according to claim 1, characterized in that: The number of the cleaning rods (13) is set to be multiple, and the multiple cleaning rods (13) are arranged in a straight line and at equal intervals on the front side of the transverse plate (7).

3. The low resistance high efficiency air filter used in a semiconductor manufacturing workshop according to claim 1, characterized in that: The reset mechanism comprises a guide rod (8), the upper and lower ends of which are fixedly mounted on the inner wall of the filter body (1), and the outer wall of the guide rod (8) is slidably connected to the inner wall of the transverse plate (7).

4. The low resistance high efficiency air filter used in a semiconductor manufacturing workshop according to claim 3, characterized in that: The reset mechanism also includes a spring (10), one end of which is fixedly connected to the inner wall of the horizontal plate (7), and the other end of which is fixedly connected to the back side of the moving block (9).

5. The low resistance high efficiency air filter used in a semiconductor manufacturing workshop according to claim 4, characterized in that: The reset mechanism further comprises a limit block (11), wherein the limit block (11) is fixedly mounted on the left and right sides of the moving block (9), a limit slot (12) is provided inside the transverse plate (7), and the limit block (11) is slidably mounted on the inner wall of the limit slot (12).

6. The low resistance high efficiency air filter used in a semiconductor manufacturing workshop according to claim 1, characterized in that: The installation mechanism comprises a clamping block (15), the number of the clamping blocks (15) is set to two groups, and the two groups of clamping blocks (15) are fixedly connected to a pull ring (14) on one side away from each other.

7. A low resistance high efficiency air filter used in a semiconductor manufacturing workshop according to claim 6, characterized in that: The clamping block (15) is slidably mounted on the inner wall of the filter body (1), and the clamping block (15) is elastically connected to the inner wall of the filter body (1) via a second spring (16).

8. The low resistance high efficiency air filter used in a semiconductor manufacturing workshop according to claim 7, characterized in that: The filter plate (2) is provided with card slots (17) on both sides of the left side, and the card block (15) is plugged into the inner wall of the card slot (17).

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