Device for preparing high-purity oxygen by utilizing circulating machine
By using a separate partitioned device and an external three-stage compression cycler in the PSA pressure-switching oxygen-making system, combined with the three-tower equal pressure adsorption and different adsorption molecular sieves, the problem of difficulty in improving the purity of oxygen in the prior art is solved, and the preparation and stable output of high-purity oxygen are achieved.
Patent Information
- Application Number
- CN202421550606.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-03
- Publication Date
- 2025-04-25
- Estimated Expiration
- 2034-07-03
AI Technical Summary
The existing PSA pressure-switching oxygen-producing system is difficult to further improve the purity of oxygen to more than 96%. At the same time, traditional oxygen cylinders or liquid oxygen storage tanks have problems such as high production costs, difficulty in on-site production, and high risks during transportation.
The screw air compressor, purification oxygen-making integrated machine, oxygen purification machine and purification circulation machine are independently set up in partitions, combined with an external three-stage compression circulation machine for vacuum extraction, exhaust gas recovery and high-purity oxygen output. Through the three-tower equal pressure adsorption and the use of different adsorption molecular sieves, the preparation of high-purity oxygen is achieved.
It has achieved the preparation of high-purity oxygen, with a concentration of more than 99.5%. It has the characteristics of compact structure, high oxygen preparation purity, low energy consumption and good gas production stability. It is suitable for medical, aviation, electronics and other fields.
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Figure CN222788856U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of gas separation, and in particular relates to a device for preparing high-purity oxygen by utilizing a circulation machine. Background Art
[0002] The PSA pressure swing adsorption oxygen production system uses molecular sieve as adsorbent and ambient air as raw material through pressure swing adsorption. Under normal temperature and low pressure conditions, the pressure swing adsorption characteristics of molecular sieve are used to form a cycle process in which the oxygen production adsorption tower adsorbs molecular sieves when pressurized and decomposes molecular sieves when depressurized. Generally, oxygen with a concentration of 93% ± 3 (V / V) can be produced, but it is more difficult to further obtain high-purity oxygen with a higher purity (above 96%). In actual applications, high-purity oxygen is widely used in many fields such as medicine, aviation, electronics, cutting and metal processing, while traditional oxygen cylinders or liquid oxygen storage tanks have the disadvantages of high production costs, difficulty in on-site production, and high risks during transportation.
[0003] At present, most of the prior art uses a multi-stage pressure swing adsorption system to produce higher concentrations of oxygen. For example, Chinese patent CN20255514 proposes a two-stage pressure swing adsorption device for producing high-purity oxygen, which can produce high-purity oxygen with a concentration greater than 99% on site. Chinese patent CN103768891B discloses a two-stage series pressure swing adsorption oxygen production system and its operation method. The first stage of the patent is an oxygen-nitrogen separation pressure swing adsorption separation system based on a balanced selective adsorption mechanism equipped with conventional zeolite and other nitrogen adsorbents, and the second stage is an oxygen-argon separation pressure swing adsorption separation system based on a balanced adsorption mechanism equipped with oxygen selective adsorbents. The traditional two-stage pressure swing adsorption system is improved, and an oxygen-containing argon-rich tail gas recovery loop is set between the first and second stage pressure swing adsorption systems. For example, Chinese patent CN103585856 proposes a multi-reflux pressure swing adsorption method for obtaining two pure components in a two-component or three-component system. During the adsorption process, the feed is fed in the middle of the adsorption tower, and the weak component product gas (oxygen) is obtained at the top of the adsorption tower. For example, patent application number "201710561469.6" introduces a two-stage pressure swing adsorption system and method for producing high-purity oxygen by recycling exhaust gas. In the first-stage separation system, the adsorption tower undergoes multiple pressure equalization and pressurization processes, which not only prevents the adsorbent layer from being penetrated prematurely, but also fully recovers the useful components in the adsorption tower, significantly improves the oxygen recovery rate, and reduces energy consumption; in the second-stage separation system, most of the argon-rich exhaust gas is recycled, which effectively improves the oxygen recovery rate and improves the overall recovery rate. There is also a patent application number "202110248286.5" which discloses a pressure swing adsorption process and method for purifying oxygen-enriched air with low oxygen concentration. The oxygen-enriched air produced by the pressure swing adsorption oxygen production system with zeolite molecular sieve as the adsorbent equilibrium adsorption mechanism is used as the raw gas. The kinetic adsorption mechanism is adopted, and the modified CMS molecular sieve is used as the adsorbent. The fully oil-free lubricated oxygen compressor provides power. The double-tower plus single-tower two-stage purification process is used to purify the oxygen-enriched air, which improves the oxygen concentration and stability of the final product gas. At the same time, the waste gas generated in the two-stage purification process is recycled and reused, which further improves the oxygen recovery rate and reduces the energy consumption of the entire system.
[0004] Admittedly, there are many introductions on the use of PSA pressure swing adsorption to prepare high-purity oxygen, but in general, it is still based on the two-stage treatment of PSA adsorption, and the primary oxygen with a concentration of about 93% is further purified. However, the further purification process has problems such as high energy consumption, complex process, and large equipment investment. In addition, for the entire purification device, the existing overall integrated control method is relatively cumbersome, resulting in a large equipment volume, a not compact layout, and inconvenient on-site installation. For this reason, the existing device structure and method for preparing high-purity oxygen need to be further improved. Utility Model Content
[0005] The purpose of the utility model is to overcome the deficiencies in the prior art and provide a device for preparing high-purity oxygen by using a circulation machine, which has the characteristics of compact structure, independent regional control, convenient on-site installation, high purity of oxygen preparation and good gas production stability. A screw air compressor, an integrated purification oxygen making machine, an oxygen purifier and a purification circulation machine are independently arranged in different zones, which facilitates on-site installation and layout. At the same time, an external three-stage compression circulation machine is used for vacuuming, tail gas recovery and utilization, high-purity oxygen output and other operations, which greatly improves the oxygen production efficiency and reduces the energy consumption of gas production. The prepared high-purity oxygen has a concentration of more than 99.5%, which can be widely used in many technical fields such as medicine, aviation, electric welding, and electronics.
[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a device for preparing high-purity oxygen by using a circulation machine, comprising a screw air compressor, the screw air compressor is connected to a purification oxygen production machine; the purification oxygen production machine prepares ordinary oxygen with a concentration of 93%±3 (V / V), and is connected to an oxygen purifier through a general oxygen outlet pipeline; the oxygen purifier is connected to a purification circulation machine;
[0007] The oxygen purifier comprises a square frame, and legs are arranged under the square frame; a general oxygen buffer tank, an adsorption tower A, an adsorption tower B, an adsorption tower C and a pure oxygen buffer tank are arranged inside the square frame, and a general oxygen air inlet is arranged on the upper side of the general oxygen buffer tank, and the general oxygen air inlet is connected to the general oxygen outlet pipeline, and a general oxygen air outlet is arranged on the lower side of the general oxygen buffer tank, and the general oxygen air outlet is connected to the three-tower pressure-equalizing pipeline through a pipeline; the three-tower pressure-equalizing pipeline comprises an air inlet pipeline, an air outlet pipeline, a circulation pipeline and an exhaust gas discharge pipeline; the three-tower pressure-equalizing pipeline connects the adsorption tower A, the adsorption tower B and the adsorption tower C, and is respectively connected to the purification air inlet and the purification air outlet of the purification circulation machine through the side air outlet and the side air inlet; the purified high-purity oxygen is connected to the pure oxygen buffer tank through a pipeline, and an air outlet filter, a pressure regulating valve and an air outlet valve are arranged at the rear end of the pure oxygen buffer tank, and a high-purity oxygen outlet is arranged at the rear end of the air outlet valve;
[0008] The purification circulation machine comprises a piston compressor, a spare compressor, a purification buffer tank and connecting pipelines. The piston compressor, the spare compressor and the purification buffer tank are all located on a circulation machine base. The base is a square structure with supporting cross bars inside.
[0009] As an improvement, the integrated oxygen purification machine is a closed box structure.
[0010] As an improvement, the supporting legs are provided with four and are of square channel steel structure with a flat pad at the bottom.
[0011] As an improvement, the general oxygen buffer tank and the pure oxygen buffer tank are arranged side by side, and the adsorption tower A, the adsorption tower B and the adsorption tower C are arranged side by side and divided into two front and rear areas by a middle cross bar.
[0012] As an improvement, support frames are provided on the sides of the general oxygen buffer tank, adsorption tower A, adsorption tower B, adsorption tower C and pure oxygen buffer tank, and each individual tank body is provided with four support frames, each support frame includes an arc close-fitting surface and an H-shaped support plate, the arc close-fitting surface is connected to the side of the tank body, and the H-shaped support plate is provided with bolt holes inside, and is fixed to the square frame through the bolt holes.
[0013] As an improvement, the general oxygen buffer tank and the pure oxygen buffer tank have the same diameter and height, and are both provided with pressure gauges on the sides.
[0014] As an improvement, the adsorption tower A and the adsorption tower C have the same diameter and height, the adsorption tower B is located between the adsorption tower A and the adsorption tower C, and has a smaller volume than the adsorption tower A and the adsorption tower C.
[0015] As an improvement, the adsorption tower A and the adsorption tower C are filled with carbon molecular sieves, and the adsorption tower B is filled with oxygen molecular sieves.
[0016] As an improvement, the piston compressor has three-stage compression, with a lower intake pressure and an operating pressure range from 100Pa to 0.6MPa, and can achieve multiple functions of vacuuming and high-purity oxygen output.
[0017] As an improvement, the piston compressor is connected to a heat sink and a cooling fan is provided on the side.
[0018] The utility model also discloses an oxygen production method of the device for preparing high-purity oxygen using a circulation machine, comprising: using the integrated oxygen purification machine to prepare ordinary oxygen with a concentration of 93%±3 (V / V), then inputting the ordinary oxygen with a concentration of 93%±3 (V / V) into the oxygen purifier through a pipeline, and repeatedly circulating and purifying through the adsorption tower A, the adsorption tower B, the adsorption tower C and the purification circulation machine until high-purity oxygen with a concentration of more than 99.5% is obtained, and outputting it from the high-purity oxygen outlet to an application terminal.
[0019] The beneficial effects achieved by the utility model are as follows: a device for preparing high-purity oxygen by using a circulation machine has the characteristics of compact structure, high purity of oxygen preparation, low energy consumption and good gas production stability; by adopting a purification circulation machine with a three-stage compression ratio, ordinary oxygen with a concentration of 93%±3 (V / V) entering the pipeline of the oxygen purification machine is purified, and the purification process adopts repeated circulation purification until the high-purity oxygen with a concentration of 99.5% is reached, and the purification process is more energy-saving and environmentally friendly; and, due to the high compression ratio of the purification circulation machine, double heat dissipation is achieved by equipping a heat sink and a heat dissipation fan, so as to achieve the purpose of protecting the normal operation of the circulation machine; by adopting an oxygen purification machine with three-tower equalized pressure adsorption, and cooperating with a general oxygen buffer tank and a pure oxygen buffer tank, it is ensured that the purification process is more sufficient, the purification efficiency is high, and the continuity of high-purity oxygen production is good; in addition, by arranging an outlet filter, a pressure regulating valve and an outlet valve at the rear end of the pure oxygen buffer tank, the purity of the high-purity oxygen is further improved, and the outlet pressure and flow of the high-purity oxygen can be adjusted to meet the terminal high-purity oxygen demand.
[0020] The utility model uses a circulating machine to prepare high-purity oxygen. By creatively zoning and arranging three adsorption towers and two buffer tanks, the entire oxygen purifier has a compact structure. At the same time, it can be moved as a whole and installed more conveniently to meet the on-site installation requirements at any time. The oxygen purification machine can be independently operated and controlled to realize the recovery of the argon-poor oxygen generated in the purification process of adsorption tower A and adsorption tower C as the front-stage cleaning gas and pre-charged gas, and then the high oxygen concentration waste gas generated in the purification process of adsorption tower B is recovered as the replacement gas of adsorption tower A and adsorption tower C, and purified again, thereby greatly improving the oxygen concentration. The pipeline control of the working process is complex, mainly including oxygen-enriched air intake pipeline, primary exhaust gas discharge and recovery pipeline, cross-pressure equalization pipeline, transfer pipeline, replacement cleaning pipeline, secondary recovery pipeline and oxygen production pipeline, etc. For specific working steps, please refer to the process pipeline control method described in patent application number "202110248286.5". BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is a process flow chart of the device for preparing high-purity oxygen using a circulation machine in the utility model;
[0022] Figure 2 This is a front view of an oxygen purifier for preparing high-purity oxygen using a circulation machine according to the utility model;
[0023] Figure 3 This is a top view of an oxygen purifier for preparing high-purity oxygen using a circulation machine according to the utility model;
[0024] Figure 4 The utility model is a working principle diagram of a device for preparing high-purity oxygen by using a circulation machine.
[0025] In the figure: 1. screw air compressor, 2. purified oxygen generator, 3. outlet flange, 4. general oxygen outlet pipeline, 5. oxygen purifier, 51. square frame, 52. support leg, 53. general oxygen buffer tank, 54. adsorption tower A, 55. adsorption tower B, 56. adsorption tower C, 57. pure oxygen buffer tank, 58. general oxygen air inlet, 59. general oxygen air outlet, 510. three-tower pressure equalizing pipeline, 511. side air outlet, 512. side air inlet, 513. air outlet filter, 514. pressure regulating valve, 515. air outlet valve, 516. high-purity oxygen outlet, 517. support frame, 518. pressure gauge, 519. pneumatic valve, 6. purification circulation machine, 61. purification air inlet, 62. purification air outlet. DETAILED DESCRIPTION
[0026] Now, in conjunction with the accompanying drawings, a preferred embodiment of the present utility model is described in detail.
[0027] like Figures 1 to 3 As shown, a device for preparing high-purity oxygen using a circulation machine in this embodiment includes a screw air compressor 1, and the screw air compressor 1 is connected to the purification oxygen generator 2; specifically, the screw air compressor 1 is connected to the purification oxygen generator 2 through an outlet flange 3; the purification oxygen generator 2 prepares ordinary oxygen with a concentration of 93%±3 (V / V), and is connected to an oxygen purifier 5 through a general oxygen outlet pipeline 4; the oxygen purifier 5 is connected to a purification circulation machine 6; specifically, the oxygen purifier 5 is connected to a purification air inlet 61 and a purification air outlet 62 of the purification circulation machine 6 through pipelines, respectively;
[0028] The oxygen purifier 5 includes a square frame 51, and a support leg 52 is provided below the square frame 51; a general oxygen buffer tank 53, an adsorption tower A54, an adsorption tower B55, an adsorption tower C56 and a pure oxygen buffer tank 57 are provided inside the square frame 51, and a general oxygen air inlet 58 is provided on the upper side of the general oxygen buffer tank 53, and the general oxygen air inlet 58 is connected to the general oxygen outlet pipeline 4, and a general oxygen air outlet 59 is provided on the lower side of the general oxygen buffer tank 53, and the general oxygen air outlet 59 is connected to the three-tower pressure equalizing pipeline 510 through a pipeline; the three-tower pressure equalizing pipeline 510 includes an air inlet Pipeline, outlet pipeline, circulation pipeline and waste gas emission pipeline; the three-tower equalizing pipeline 510 connects the adsorption tower A54, adsorption tower B55 and adsorption tower C56, and is respectively connected to the purification inlet 61 and the purification outlet 62 of the purification circulation machine 5 through the side outlet 511 and the side inlet 512; the purified high-purity oxygen is connected to the pure oxygen buffer tank 57 through a pipeline, and the rear end of the pure oxygen buffer tank 57 is provided with an outlet filter 513, a pressure regulating valve 514 and an outlet valve 515, and the rear end of the outlet valve 515 is provided with a high-purity oxygen outlet 516;
[0029] The purification circulation machine 6 includes a piston compressor, a spare compressor, a purification buffer tank and connecting pipelines. The piston compressor, the spare compressor and the purification buffer tank are all located on the circulation machine base. The base is a square structure with a supporting cross piece inside.
[0030] Furthermore, the integrated purified oxygen generator 2 is a closed box structure and can operate independently, specifically including a control panel, a dryer, a filter, and a double-tower adsorption tower, and can independently and continuously provide ordinary oxygen with a concentration of 93%±3 (V / V).
[0031] Furthermore, the legs 52 are provided with four and are of a square channel steel structure, with a flat pad 521 provided at the bottom; specifically, a bolt hole is provided in the middle of the flat pad 521, so as to facilitate fixing the entire oxygen purifier 5 with anchor bolts.
[0032] Furthermore, the general oxygen buffer tank 53 and the pure oxygen buffer tank 57 are arranged side by side, and the adsorption tower A54, the adsorption tower B55 and the adsorption tower C56 are arranged side by side, and are divided into two front and rear areas by the middle cross bar; specifically, the general oxygen buffer tank 53, the adsorption tower A54, the adsorption tower B55, the adsorption tower C56 and the pure oxygen buffer tank 57 are provided with support frames 517 on the side, and each individual tank body is provided with four support frames 517, and the support frame 517 includes a circular arc close-fitting surface and an H-shaped support plate, the circular arc close-fitting surface is connected to the side of the tank body, and the H-shaped support plate is provided with bolt holes inside, and is fixed to the square frame 51 through the bolt holes, so that The fixation is more reliable and stable, ensuring that vibration is reduced during operation; further, the general oxygen buffer tank 53 and the pure oxygen buffer tank 57 have the same diameter and height, and pressure gauges 518 are provided on the sides; the adsorption tower A54 and the adsorption tower C56 have the same diameter and height, the adsorption tower B55 is located between the adsorption tower A54 and the adsorption tower C56, and its volume is smaller than that of the adsorption tower A54 and the adsorption tower C56, and pressure gauges 518 are also provided on the sides of the adsorption tower A54, the adsorption tower B55, and the adsorption tower C56; more specifically, the adsorption tower A54 and the adsorption tower C56 are filled with carbon molecular sieves, and the adsorption tower B55 is filled with oxygen molecular sieves.
[0033] Furthermore, the piston compressor is a three-stage compression with a relatively low intake pressure and an operating pressure range from 100Pa to 0.6MPa, which can achieve multiple functions of vacuuming and high-purity oxygen output; specifically, the piston compressor is connected to a heat sink and a cooling fan is also provided on the side.
[0034] like Figure 4As shown, the utility model also discloses the oxygen production method of the above-mentioned high-purity oxygen preparation device using a circulation machine, including using the purified oxygen production integrated machine 2 to prepare ordinary oxygen with a concentration of 93%±3 (V / V), and then inputting the ordinary oxygen with a concentration of 93%±3 (V / V) into the oxygen purifier 5 through a pipeline, and repeatedly circulating and purifying through the adsorption tower A54, the adsorption tower B55, the adsorption tower C56 and the purification circulation machine 6, and each pneumatic valve 519 cooperates with each other until high-purity oxygen with a concentration of more than 99.5% is obtained, and outputted from the high-purity oxygen outlet 516 to the application terminal; wherein, the oxygen purifier 5 controls the opening and closing of the pneumatic valve 519 through a PLC control system.
[0035] The utility model is a device for preparing high-purity oxygen by using a circulation machine, which has the characteristics of compact structure, high purity of oxygen preparation, low energy consumption and good gas production stability. The uniquely designed three-stage compression ratio purification circulation machine greatly improves the efficiency of oxygen purification, and at the same time, the waste gas generated in the lifting process is recycled, which is beneficial to energy conservation and environmental protection. The oxygen is further purified by three-tower adsorption equalization and different adsorption molecular sieves are set to achieve a gas production effect of more than 99.5% oxygen concentration.
[0036] Finally, it should be noted that the above examples are only specific embodiments of the present invention. Obviously, the present invention is not limited to the above examples, and there are many variations. All variations that can be directly derived or associated with the content disclosed by a person skilled in the art from the present invention should be considered as the protection scope of the present invention.
Claims
1. A device for preparing high-purity oxygen using a circulation machine, characterized in that: The invention comprises a screw air compressor (1), wherein the screw air compressor (1) is connected to an oxygen purification integrated machine (2); the oxygen purification integrated machine (2) prepares ordinary oxygen with a concentration of 93%±3 (V / V), and is connected to an oxygen purifier (5) via an ordinary oxygen outlet pipeline (4); the oxygen purifier (5) is connected to a purification circulation machine (6); The oxygen purifier (5) comprises a square frame (51), and a support leg (52) is provided below the square frame (51); a general oxygen buffer tank (53), an adsorption tower A (54), an adsorption tower B (55), an adsorption tower C (56), and a pure oxygen buffer tank (57) are provided inside the square frame (51); a general oxygen air inlet (58) is provided on the upper side of the general oxygen buffer tank (53), and the general oxygen air inlet (58) is connected to the general oxygen outlet pipeline (4); a general oxygen air outlet (59) is provided on the lower side of the general oxygen buffer tank (53), and the general oxygen air outlet (59) is connected to the three-tower pressure equalizing pipeline (510) through a pipeline; the three-tower pressure equalizing pipeline (510) includes The three-tower pressure equalizing pipeline (510) is connected to the adsorption tower A (54), the adsorption tower B (55) and the adsorption tower C (56), and is respectively connected to the purification inlet (61) and the purification outlet (62) of the purification circulation machine (6) through the side outlet (511) and the side inlet (512); the purified high-purity oxygen is connected to the pure oxygen buffer tank (57) through a pipeline, and the rear end of the pure oxygen buffer tank (57) is provided with an outlet filter (513), a pressure regulating valve (514) and an outlet valve (515), and the rear end of the outlet valve (515) is provided with a high-purity oxygen outlet (516); The purification circulation machine (6) comprises a piston compressor, a spare compressor, a purification buffer tank and connecting pipelines, wherein the piston compressor, the spare compressor and the purification buffer tank are all located on a circulation machine base, and the base is a square structure with a supporting cross piece inside.
2. The device for preparing high-purity oxygen using a circulation machine according to claim 1, characterized in that: The integrated oxygen purification machine (2) is a closed box structure.
3. The device for preparing high-purity oxygen using a circulation machine according to claim 1, characterized in that: The supporting legs (52) are provided with four and are of a square channel steel structure, with a flat pad provided at the bottom.
4. The device for preparing high-purity oxygen using a circulation machine according to claim 1, characterized in that: The general oxygen buffer tank (53) and the pure oxygen buffer tank (57) are arranged side by side, and the adsorption tower A (54), the adsorption tower B (55) and the adsorption tower C (56) are arranged side by side and divided into two front and rear areas by a middle cross bar.
5. The device for preparing high-purity oxygen using a circulation machine according to claim 4, characterized in that: Support frames (517) are provided on the sides of the general oxygen buffer tank (53), the adsorption tower A (54), the adsorption tower B (55), the adsorption tower C (56) and the pure oxygen buffer tank (57), and each individual tank body is provided with four support frames (517). The support frames (517) include an arcuate close-fitting surface and an H-shaped support plate. The arcuate close-fitting surface is connected to the side of the tank body. The H-shaped support plate is provided with bolt holes inside and is fixed to the square frame (51) through the bolt holes.
6. The device for preparing high-purity oxygen using a circulation machine according to claim 5, characterized in that: The general oxygen buffer tank (53) and the pure oxygen buffer tank (57) have the same diameter and height, and are both provided with a pressure gauge (518) on the side.
7. The device for preparing high-purity oxygen using a circulation machine according to claim 5, characterized in that: The adsorption tower A (54) and the adsorption tower C (56) have the same diameter and height, and the adsorption tower B (55) is located between the adsorption tower A (54) and the adsorption tower C (56) and has a smaller volume than the adsorption tower A (54) and the adsorption tower C (56).
8. The device for preparing high-purity oxygen using a circulation machine according to claim 7, characterized in that: The adsorption tower A (54) and the adsorption tower C (56) are filled with carbon molecular sieves, and the adsorption tower B (55) is filled with oxygen molecular sieves.
9. The device for preparing high-purity oxygen using a circulation machine according to claim 1, characterized in that: The piston compressor is a three-stage compression with a relatively low intake pressure and a working pressure range from 100Pa to 0.6MPa, and can achieve multiple functions of vacuuming and high-purity oxygen output.
10. The device for preparing high-purity oxygen using a circulation machine according to claim 9, characterized in that: The piston compressor is connected to a heat sink and is also provided with a heat dissipation fan on the side.
Citation Information
Patent Citations
A two-stage series pressure swing adsorption oxygen generation system with improved oxygen recovery rate and its operation method
CN103768891B
System and method for preparing high purity oxygen through two-stage pressure swing adsorption by recycling tail gas
CN107469564A
Pressure swing adsorption process and method capable of purifying oxygen-enriched air with low oxygen concentration
CN115028143A