Low-temperature controllable flash evaporation platform

Abstract

The utility model discloses a low temperature controllable flash evaporation platform, relates to semiconductor and photovoltaic industry film coating technical field, including platform upper seat and platform lower seat, the platform lower seat is fixed on the platform upper seat bottom end through bolt, the upper surface of platform upper seat is provided with the material groove. According to the utility model, the platform upper seat and the platform lower seat are arranged, the platform upper seat and the platform lower seat can support a device, the heat conduction plate is arranged on the lower surface of the platform upper seat, the heat conduction groove with a snake-shaped structure is arranged in the heat conduction plate, and the heat conduction groove can guide a cold medium; the multiple inclined heat conduction fins are arranged in the heat conduction grooves, the heat conduction fins can play a role in guiding cold media to flow, the heat exchange effect between the cold media and the heat conduction plates can also be improved, and therefore it is guaranteed that the device controls the temperature.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor and photovoltaic industry coating, and in particular to a low-temperature controllable flash evaporation platform. Background Art

[0002] With the development of technology, current semiconductor devices are usually stacked structures, such as self-luminous displays, top-incident photodetectors, image sensors, and solar cells. When manufacturing semiconductor devices with stacked structures, a solution method is usually used. The film layer of the semiconductor device formed by the solution method may have residual solvent, and the semiconductor device needs to be placed in a vacuum process chamber to remove the residual solvent. The existing method of removing solvent is called vacuum flash evaporation process, which is to place the semiconductor device in the process chamber, and then evacuate the process chamber to remove the residual solvent. In the prior art, the semiconductor device is placed on a flash evaporation platform in a vacuum chamber for flash evaporation processing.

[0003] However, the existing flash evaporation platform often cannot achieve precise control of temperature, and the existing flash evaporation platform cannot be leveled, making it difficult to ensure the flatness of the device after placement.

[0004] Therefore, it is necessary to invent a low-temperature controllable flash evaporation platform to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide a low-temperature controllable flash evaporation platform to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a low-temperature controllable flash evaporation platform, comprising a platform upper seat and a platform lower seat, the platform lower seat is fixed to the bottom end of the platform upper seat by bolts, the upper surface of the platform upper seat is provided with a discharge trough, the lower surface of the platform upper seat is fixedly provided with a heat conduction plate, and the heat conduction plate is arranged in a groove opened above the platform lower seat, the lower surface of the heat conduction plate is provided with a heat conduction groove, and the heat conduction groove is arranged in a serpentine structure, the inner side wall of the heat conduction groove is fixedly provided with a plurality of heat conduction fins, the heat conduction fins are arranged in an inclined structure, and two adjacent heat conduction fins are staggered, and two mounting seats are penetrated through the lower surface of the platform lower seat, and the top ends of the two mounting seats extend to the two ends of the heat conduction groove respectively.

[0007] Preferably, a support seat is provided below the platform lower seat, and support rings are fixedly provided at the four corners of the support seat.

[0008] Preferably, a support screw is provided through the interior of the support ring, and the support screw is fixedly provided on the lower surface of the platform lower seat.

[0009] Preferably, a support spring is sleeved on the outer side of the support screw, and the top end of the support spring is in contact with the lower surface of the support ring.

[0010] Preferably, the bottom end of the support screw is provided with an adjustment seat through a thread, and the top end of the adjustment seat is movably connected to the bottom end of the support spring through a bearing.

[0011] Preferably, support blocks are fixedly provided at both ends of the lower surface of the support seat, a base is fixedly provided at the bottom end of the support block, and mounting ears are fixedly provided at the four corners of the outer side wall of the base.

[0012] Technical effects and advantages of the utility model:

[0013] 1. The utility model provides a platform upper seat and a platform lower seat, which can support the device, and provides a heat conduction plate on the lower surface of the platform upper seat. A serpentine heat conduction groove is provided inside the heat conduction plate. The heat conduction groove can guide the cold medium, thereby achieving low temperature control of the platform upper seat and the platform lower seat. By providing a plurality of inclined heat conduction fins inside the heat conduction groove, the heat conduction fins can not only guide the flow of the cold medium, but also improve the heat exchange effect between the cold medium and the heat conduction plate, so as to ensure the temperature control of the device;

[0014] 2. The utility model arranges a support seat under the platform lower seat, and positioning rings are arranged at the four corners of the support seat. A support screw is arranged inside the positioning ring, and the support screw is fixedly arranged under the platform lower seat. An adjustment seat is arranged at the bottom end of the support screw, and a support spring is arranged between the adjustment seat and the support ring. The position of the support screw can be adjusted by rotating the adjustment seat, thereby realizing the leveling of the platform lower seat, so as to facilitate the use of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0016] Figure 2 It is a side schematic diagram of the overall structure of the utility model.

[0017] Figure 3 This is a schematic diagram of the heat conduction groove structure of the utility model.

[0018] In the figure: 1. Platform upper seat; 2. Platform lower seat; 3. Material discharge trough; 4. Heat transfer plate; 5. Heat transfer trough; 6. Heat transfer fins; 7. Mounting seat; 8. Support seat; 9. Support ring; 10. Support screw; 11. Support spring; 12. Adjustment seat; 13. Support block; 14. Base; 15. Mounting ear. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] The utility model provides Figure 1-3 A low-temperature controllable flash vaporization platform is shown, comprising a platform upper seat 1 and a platform lower seat 2, wherein the platform lower seat 2 is fixedly arranged at the bottom end of the platform upper seat 1 by bolts, a discharge trough 3 is provided on the upper surface of the platform upper seat 1, a heat conducting plate 4 is fixedly arranged on the lower surface of the platform upper seat 1, and the heat conducting plate 4 is arranged in a groove provided above the platform lower seat 2;

[0021] Specifically, a heat conduction groove 5 is provided on the lower surface of the heat conduction plate 4, and the heat conduction groove 5 is arranged in a serpentine structure, and a plurality of heat conduction fins 6 are fixedly arranged on the inner side wall of the heat conduction groove 5, and the heat conduction fins 6 are arranged in an inclined structure, and two adjacent heat conduction fins 6 are arranged in a staggered manner, and two mounting seats 7 are arranged through the lower surface of the platform lower seat 2, and the top ends of the two mounting seats 7 extend to the two ends of the heat conduction groove 5 respectively;

[0022] More specifically, a support seat 8 is provided below the platform lower seat 2, and support rings 9 are fixedly provided at the four corners of the support seat 8. A support screw 10 is provided inside the support ring 9, and the support screw 10 is fixedly provided on the lower surface of the platform lower seat 2. A support spring 11 is sleeved on the outer side of the support screw 10, and the top of the support spring 11 fits with the lower surface of the support ring 9. An adjustment seat 12 is provided at the bottom end of the support screw 10 through a thread, and the top of the adjustment seat 12 is movably connected to the bottom end of the support spring 11 through a bearing. When the adjustment seat 12 rotates, the position between the adjustment seat 12 and the support screw 10 is adjusted, and the adjustment seat 12 is connected to the support ring 9 through the support spring 11. Therefore, the position between the support screw 10 and the support ring 9 is adjusted, so that the position of the platform lower seat 2 can be adjusted. In this process, the support spring 11 can ensure the smoothness of the platform lower seat 2 when adjusting the position and the smoothness of the movement of the platform lower seat 2 during the placement of the device;

[0023] In addition, support blocks 13 are fixedly provided at both ends of the lower surface of the support seat 8, a base 14 is fixedly provided at the bottom end of the support block 13, and mounting ears 15 are fixedly provided at the four corners of the outer wall of the base 14. The mounting ears 15 can be installed and fixed by fasteners such as bolts.

[0024] Working principle of this utility model:

[0025] When the device is in use, the platform upper seat 1 and the platform lower seat 2 can support the device, and the heat conduction groove 5 with a serpentine structure is provided inside the heat conduction plate 4, so that the heat conduction groove 5 can guide the cold medium, thereby realizing low temperature control of the platform upper seat 1 and the platform lower seat 2. By arranging a plurality of inclined heat conduction fins 6 inside the heat conduction groove 5, the heat conduction fins 6 can not only guide the flow of the cold medium, but also improve the heat exchange effect between the cold medium and the heat conduction plate 4, so as to ensure the temperature control of the device;

[0026] In addition, a support seat 8 is arranged below the platform lower seat 2, and positioning rings 9 are arranged at the four corners of the support seat 8. A support screw 10 is arranged inside the positioning ring 9, and the support screw 10 is fixedly arranged below the platform lower seat 2. An adjustment seat 12 is arranged at the bottom end of the support screw 10, and a support spring 11 is arranged between the adjustment seat 12 and the support ring 9. The position of the support screw 11 can be adjusted by rotating the adjustment seat 12, so that the platform lower seat 2 can be leveled to facilitate the use of the device.

[0027] Finally, it should be noted that the above is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A low-temperature controllable flash evaporation platform, comprising a platform upper base (1) and a platform lower base (2), characterized in that: The platform lower seat (2) is fixedly arranged on the bottom end of the platform upper seat (1) by bolts, the upper surface of the platform upper seat (1) is provided with a discharge trough (3), the lower surface of the platform upper seat (1) is fixedly provided with a heat conduction plate (4), and the heat conduction plate (4) is arranged in a groove opened above the platform lower seat (2), the lower surface of the heat conduction plate (4) is provided with a heat conduction groove (5), and the heat conduction groove (5) is arranged in a serpentine structure, the inner side wall of the heat conduction groove (5) is fixedly provided with a plurality of heat conduction fins (6), the heat conduction fins (6) are arranged in an inclined structure, and two adjacent heat conduction fins (6) are arranged in a staggered manner, and two mounting seats (7) are arranged through the lower surface of the platform lower seat (2), and the top ends of the two mounting seats (7) extend to the two ends of the heat conduction groove (5) respectively.

2. A low-temperature controllable flash evaporation platform according to claim 1, characterized in that: A support seat (8) is arranged below the platform lower seat (2), and support rings (9) are fixedly arranged at the four corners of the support seat (8).

3. A low-temperature controllable flash evaporation platform according to claim 2, characterized in that: A support screw (10) is provided through the interior of the support ring (9), and the support screw (10) is fixedly provided on the lower surface of the platform lower seat (2).

4. A low-temperature controllable flash evaporation platform according to claim 3, characterized in that: A support spring (11) is sleeved on the outer side of the support screw (10), and the top end of the support spring (11) is in contact with the lower surface of the support ring (9).

5. A low-temperature controllable flash evaporation platform according to claim 4, characterized in that: The bottom end of the support screw rod (10) is provided with an adjustment seat (12) through a thread, and the top end of the adjustment seat (12) is movably connected to the bottom end of the support spring (11) through a bearing.

6. A low-temperature controllable flash evaporation platform according to claim 5, characterized in that: Support blocks (13) are fixedly provided at both ends of the lower surface of the support seat (8), a base (14) is fixedly provided at the bottom end of the support block (13), and mounting ears (15) are fixedly provided at the four corners of the outer wall of the base (14).

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