Quartz tube cleaning and fluorine-containing cleaning wastewater purification integrated device

Abstract

The utility model discloses an integrated device integrating quartz tube cleaning and fluorine-containing cleaning wastewater purification. The integrated device comprises an ultrasonic water washing tank, a pickling tank, a rinsing tank and a leaching and backwashing tank which are sequentially connected and mutually separated, a filtering assembly is arranged in the leaching and backwashing tank and divides the interior of the leaching and backwashing tank into a leaching area and a pH adjusting area; a flocculation chamber and an adsorption chamber are arranged below the ultrasonic washing tank, the pickling tank and the rinsing tank, and the adsorption chamber, the flocculation chamber and the pH adjusting area are sequentially communicated. According to the device disclosed by the utility model, quartz tube cleaning and fluorine-containing wastewater purification are integrated, so that cleaning wastewater is purified while the quartz tube cleaning efficiency is improved, and pollution is avoided.

Description

Technical Field

[0001] The utility model relates to the field of quartz tube cleaning, in particular to an integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification. Background Art

[0002] At present, the main process of quartz tube cleaning is to soak the quartz tube in hydrofluoric acid solutions of different concentrations, and then rinse it with pure water to remove dirt and aerosol on the surface of the quartz tube, so that the tube is clean as a whole. After cleaning, there is a high concentration of fluoride ions in the wastewater, which will cause damage to the environment if not disposed of. In addition, the implementation of this process is mainly carried out manually, which is not only inefficient, but also has certain safety hazards.

[0003] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the utility model, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to ordinary technicians in this field. Utility Model Content

[0004] Purpose of the utility model: The technical problem to be solved by the utility model is to provide an integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification in response to the deficiencies of the prior art, which can improve the cleaning efficiency of the quartz tube and purify the cleaning wastewater at the same time.

[0005] In order to solve the above technical problems, the utility model discloses an integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification, which includes an ultrasonic water washing tank, a pickling tank, a rinse tank and a rinsing backwashing tank which are sequentially connected and separated from each other. A filter assembly is arranged in the rinsing backwashing tank, and the filter assembly separates the interior of the rinsing backwashing tank into a rinsing area and a pH adjustment area. A flocculation chamber and an adsorption chamber are arranged below the ultrasonic water washing tank, the pickling tank and the rinse tank, and the adsorption chamber, the flocculation chamber and the pH adjustment area are sequentially connected.

[0006] Furthermore, a hanging rail is arranged directly above the pickling tank, the rinse tank and the rinse backwash tank, and a traveling crane is slidably connected to the hanging rail, and a rinse rack is mounted on the traveling crane, and a rinse component and a quartz tube rack located below the rinse component are arranged on the rinse rack. The traveling crane can drive the rinse rack to move between the ultrasonic water washing tank, the pickling tank, the rinse tank and the rinse area.

[0007] Specifically, the common chamber wall of the adsorption chamber and the flocculation chamber and the common chamber wall of the flocculation chamber and the pH adjustment zone are respectively provided with overflow grooves, and the adsorption chamber and the flocculation chamber, and the flocculation chamber and the pH adjustment zone are respectively connected through corresponding overflow grooves.

[0008] Specifically, an oscillation component is installed around the tank wall of the ultrasonic water washing tank.

[0009] Specifically, it comprises an acid filtering pump, the inlet of the acid filtering pump is connected with one end of the pickling tank, and the outlet of the acid filtering pump is connected with the other end of the pickling tank.

[0010] Specifically, it comprises an aeration component and an aeration pump. The aeration component is arranged at the bottom of the rinsing tank and connected to the aeration pump.

[0011] Specifically, it comprises a backwashing component and a backwashing pump. The backwashing component is arranged in the rinsing area, and the backwashing pump is connected to the backwashing component.

[0012] Specifically, it includes a first pH sensor, which is installed at the bottom of the rinsing rack and is used to measure the pH value of the rinsing liquid wastewater after rinsing the rinsing rack. The system is configured to control the opening and closing of the rinsing component and the opening and closing of the backwashing component according to the detection result of the first pH sensor.

[0013] Specifically, it includes a pH regulating liquid inlet pipeline, a pH regulating liquid metering pump and a second pH sensor, wherein the second pH sensor is installed in the pH regulating area and is used to measure the pH value of the liquid in the pH regulating area. The pH regulating liquid inlet pipeline is connected to the pH regulating area, and the pH regulating liquid metering pump is installed on the pH regulating liquid inlet pipeline. The system is configured to control the start and stop of the pH regulating liquid metering pump according to the detection result of the second pH sensor.

[0014] Specifically, it comprises a stirrer for mixing the liquid in the pH adjustment zone, and the stirrer is arranged at the bottom of the pH adjustment zone.

[0015] Specifically, the filter assembly comprises a first filter plate and a second filter plate which are arranged in sequence from top to bottom. The first filter plate is parallel to the second filter plate and both are arranged in an inclined manner.

[0016] Specifically, the flocculation chamber is provided with a third filtering device for the liquid overflowing from the pH adjustment zone. The sediment in the overflowing liquid is flocculated and deposited at the bottom of the flocculation chamber. The bottom of the flocculation chamber is provided with a mud discharge port that can be opened and closed. A mud scraper is provided at the mud discharge port. The flocculation chamber is connected to a flocculant dosing pump for pumping flocculant into the flocculation chamber.

[0017] Specifically, a plurality of adsorption baffles placed in parallel and at intervals are arranged in the adsorption chamber, and a plurality of grooves are formed on the adsorption baffles, and adsorbents are applied in the grooves.

[0018] Specifically, a water outlet and a water outlet valve for controlling the opening and closing of the water outlet are arranged at the bottom of the adsorption chamber.

[0019] Beneficial effects:

[0020] 1) The device disclosed in the utility model integrates quartz tube cleaning and fluorine-containing wastewater purification, which improves the quartz tube cleaning efficiency while purifying the cleaning wastewater to avoid pollution.

[0021] 2) The washing rack is further driven to move between the ultrasonic water washing tank, the pickling tank, the rinse tank and the washing area by a traveling hoist slidably connected to the hanging rail. Compared with the manual operation method, the efficiency is further improved, no human participation is required, and the safety risk is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods, and the above and / or other advantages of the present invention will become more clear.

[0023] Figure 1 The utility model discloses an internal structure diagram of an integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification.

[0024] Figure 2 The present invention is a schematic structural diagram of a rinsing rack loaded with quartz tubes disclosed in one embodiment of the present invention.

[0025] Figure 3 The present invention is a schematic structural diagram of an adsorption partition disclosed in an embodiment of the present invention.

[0026] The description of the accompanying drawings is:

[0027] 1. Ultrasonic water washing tank; 1-1. Oscillation component; 2. Pickling tank; 2-1. Acid filter pump; 3. Rinse tank; 3-1. Aeration component; 3-2 Aeration pump; 4. Traveling crane; 4-1. Hanging rail; 5. Leaching and backwashing tank; 5-1. Leaching rack; 5-2. Leaching component; 5-3. Quartz tube rack 5-4. Limit block; 5-5. First pH sensor; 5-6. Backwashing component; 5-7. Backwashing pump; 6 , first filter plate; 7, second filter plate; 8, pH adjustment zone; 8-1, second pH sensor; 8-2, pH adjustment liquid metering pump; 8-3, agitator; 9, flocculation chamber; 9-1, scraper; 9-2, third filter device; 9-3, mud discharge port; 9-4, mud discharge valve; 9-5, flocculant dosing pump; 10, adsorption chamber; 10-1, adsorption partition; 11, water outlet; 11-1, water outlet valve. DETAILED DESCRIPTION

[0028] See also Figure 1This embodiment discloses an integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification, which includes an ultrasonic water washing tank 1, an acid washing tank 2, a rinse tank 3, and a rinsing backwashing tank 5 which are sequentially connected and separated from each other. A filter assembly is arranged in the rinsing backwashing tank 5, and the filter assembly divides the interior of the rinsing backwashing tank 5 into a rinsing area and a pH adjustment area 8. A flocculation chamber 9 and an adsorption chamber 10 are arranged below the ultrasonic water washing tank 1, the acid washing tank 2, and the rinse tank 3, and the adsorption chamber 10, the flocculation chamber 9, and the pH adjustment area 8 are sequentially connected.

[0029] Specifically, see Figure 1 A hanging rail 4-1 is arranged directly above the pickling tank 2, the rinse tank 3 and the rinse backwash tank 5, and a traveling crane 4 is slidably connected to the hanging rail 4-1, and a rinse rack 5-1 is mounted on the traveling crane 4, and a rinse component 5-2 and a quartz tube rack 5-3 located below the rinse component 5-2 are arranged on the rinse rack 5-1. The traveling crane 4 can drive the rinse rack 5-1 to move between the ultrasonic water washing tank 1, the pickling tank 2, the rinse tank 3 and the rinse area.

[0030] Specifically, see Figure 1 The common chamber wall of the adsorption chamber 10 and the flocculation chamber 9 and the common chamber wall of the flocculation chamber 9 and the pH adjustment zone 8 are respectively provided with overflow grooves, and the adsorption chamber 10 and the flocculation chamber 9 and the flocculation chamber 9 and the pH adjustment zone 8 are respectively connected through corresponding overflow grooves.

[0031] For details, see Figure 1 The ultrasonic water washing tank 1 is provided with an oscillation component 1-1 installed around the tank wall.

[0032] Specifically, see Figure 1 , including an acid filtering pump 2 - 1 , the inlet of the acid filtering pump 2 - 1 is connected to one end of the pickling tank 2 , and the outlet is connected to the other end of the pickling tank 2 .

[0033] Specifically, see Figure 1 An aeration component 3-1 is provided at the bottom of the washing tank 3, and the aeration component 3-1 is connected to an external aeration pump 3-2.

[0034] Specifically, see Figure 1 , including a backwash component 5-6 and a backwash pump 5-7, the backwash component 5-6 is arranged in the rinsing area, and the backwash pump 5-7 is connected to the backwash component 5-6.

[0035] Specifically, see Figure 2, including a limit block 5-4, which is arranged at the bottom of the rinsing rack 5-1. The limit block 5-4 is used to limit the quartz tube rack 5-3 to the rinsing rack 5-1.

[0036] Specifically, see Figure 1 , comprising a first pH sensor 5-5, which is installed at the bottom of the rinsing rack 5-1 and is used to measure the pH value of the elution wastewater after eluting the elution rack 5-1. The system is configured to control the opening and closing of the elution component 5-2 and the opening and closing of the backwash component 5-6 according to the detection result of the first pH sensor 5-5.

[0037] Specifically, see Figure 1 , including a pH regulating liquid inlet pipeline, a pH regulating liquid metering pump 8-2 and a second pH sensor 8-1, wherein the second pH sensor 8-1 is installed in the pH regulating area 8 and is used to measure the pH value of the liquid in the pH regulating area 8. The pH regulating liquid inlet pipeline is connected to the pH regulating area 8, and the pH regulating liquid metering pump 8-2 is installed on the pH regulating liquid inlet pipeline. The system is configured to control the start and stop of the pH regulating liquid metering pump 8-2 according to the detection result of the second pH sensor 8-1. Optionally, the pH regulating liquid metering pump 8-2 is installed on the outer wall of the leaching and backwashing tank 5.

[0038] Specifically, see Figure 1 , the filter assembly includes a first filter plate 6 and a second filter plate 7 arranged in sequence from top to bottom. More specifically, the first filter plate 6 and the second filter plate 7 are respectively provided with dense through holes for allowing the eluent and backwashing liquid to pass through and blocking impurities. The through hole diameter of the second filter plate 7 is smaller than the through hole diameter of the first filter plate 6. At the same time, the first filter plate 6 is parallel to the second filter plate 7, and both are arranged at an angle so that impurities naturally roll off to one side and avoid the through holes.

[0039] Specifically, see Figure 1 , including an agitator 8 - 3 for mixing the liquid in the pH adjustment zone 8 , and the agitator 8 - 3 is arranged at the bottom of the pH adjustment zone 8 .

[0040] Specifically, see Figure 1 The flocculation chamber 9 is provided with a third filtering device 9-2 for the liquid overflowing from the pH adjustment zone 8. The sediment in the overflowing liquid is flocculated and deposited at the bottom of the flocculation chamber 9. The bottom of the flocculation chamber 9 is provided with an openable and closable mud discharge port 9-3. A mud scraper 9-1 is provided at the mud discharge port 9-3.

[0041] For details, see Figure 1The flocculation chamber 9 is connected to a flocculant dosing pump 9 - 5 for pumping flocculant into the flocculation chamber 9 .

[0042] For details, see Figure 1 A mud discharge valve 9-4 for controlling the opening and closing of the mud discharge port 9-3 is installed at the mud discharge port 9-3.

[0043] Specifically, see Figure 1 The adsorption chamber 10 is provided with a plurality of adsorption baffles 10-1 arranged in parallel and spaced apart from each other. The adsorption baffles 10-1 are provided with a plurality of grooves, and the adsorbent is applied in the grooves. Figure 3 The groove can be circular or in other shapes.

[0044] For details, see Figure 1 A water outlet 11 and a water outlet valve 11 - 1 for controlling the opening and closing of the water outlet 11 are provided at the bottom of the adsorption chamber 10 .

[0045] Below, refer to Figure 1 , the method of using the integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification shown in this embodiment is explained.

[0046] First, the quartz tube to be cleaned is loaded into the quartz tube rack 5-3 and placed on the rinsing rack 5-1. The rinsing rack 5-1 is lifted by the crane 4 and placed in the ultrasonic washing tank 1. The oscillation component 1-1 is turned on to ultrasonically clean the quartz tube carried on the rinsing rack 5-1.

[0047] Then, the rinse rack 5-1 is hoisted into the pickling tank 2, and the quartz tube carried by the rinse rack 5-1 is completely immersed in the hydrofluoric acid solution contained in the pickling tank 2 for a certain period of time to remove dirt and aerosol on the surface of the tube. The acid filter pump 2-1 filters the hydrofluoric acid solution, and the filtered hydrofluoric acid solution re-enters the pickling tank 2 to realize the recycling of the hydrofluoric acid solution.

[0048] Then, the rinsing rack 5-1 is hoisted into the rinse tank 3, the aeration component 3-1 is opened, and the quartz tube after acid washing is repeatedly rinsed up and down. Then, the rinsing rack 5-1 is hoisted to the rinse backwash tank 5, and the rinsing component 5-2 is opened to rinse the quartz tube after rinsing. When the detection result of the first pH sensor 5-5 is 6-7, the rinsing component 5-2 is controlled to be automatically closed, and then the backwash pump 5-7 is turned on to drive the backwash component 5-6 to work, and the bottom of the quartz tube after rinsing is rinsed again.

[0049] The quartz tube elution wastewater passes through the first filter plate 6 of the filter assembly to remove larger particles in the elution water, and then passes through the second filter plate 7 of the filter assembly to filter out fine particles.

[0050] The quartz tube leaching wastewater enters the pH adjustment zone 8, and the second pH sensor 8-1 detects the pH value of the quartz tube leaching wastewater. When the pH value is not within the range of 6-7, the pH adjusting liquid metering pump 8-2 is controlled to add pH adjusting liquid into the pH adjustment zone 8, and the agitator 8-3 is turned on for stirring, so that the quartz tube leaching wastewater and the pH adjusting liquid are fully mixed. When the value of the second pH sensor is 6-7, the pH adjusting liquid metering pump 8-2 is controlled to stop adding pH adjusting liquid. In this example, the pH adjusting liquid is an alkaline solution.

[0051] The quartz tube leaching wastewater enters the flocculation chamber 9, and the flocculant dosing pump 9-5 adds flocculants to the flocculation chamber 9, so that the pollutants in the quartz tube leaching wastewater are flocculated and precipitated. At the same time, the third filtering device 9-2 filters the leaching water to prevent the sediment from overflowing the flocculation chamber 9. Then the scraper 9-1 is rotated to gather the sediment deposited at the bottom of the flocculation chamber 9, and the mud discharge valve 9-4 is opened to discharge the sediment through the mud discharge port 9-3.

[0052] Finally, the quartz tube elution wastewater enters the adsorption chamber 10 for adsorbing fluoride ions. The adsorption chamber 10 is provided with a plurality of adsorption baffles 10-1 placed in parallel and at intervals. The adsorbent laid in the groove on the adsorption baffle 10-1 adsorbs the fluoride ions in the elution water. Finally, the outlet valve 11-1 is opened to discharge the qualified elution wastewater through the outlet 11 or reuse it.

[0053] The utility model provides a concept and method for an integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification. There are many methods and ways to implement the technical solution. The above is only a preferred implementation of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the utility model. These improvements and modifications should also be regarded as the protection scope of the utility model. All components not specified in this embodiment can be implemented by existing technologies.

Claims

1. An integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification, characterized in that: The invention comprises an ultrasonic water washing tank (1), an acid washing tank (2), a rinse tank (3) and a rinsing backwashing tank (5) which are sequentially connected and separated from each other; a filter assembly is arranged in the rinsing backwashing tank (5), and the filter assembly divides the interior of the rinsing backwashing tank (5) into a rinsing area and a pH adjustment area (8); a flocculation chamber (9) and an adsorption chamber (10) are arranged below the ultrasonic water washing tank (1), the acid washing tank (2) and the rinse tank (3); the adsorption chamber (10), the flocculation chamber (9) and the pH adjustment area (8) are sequentially connected.

2. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 1 is characterized in that: A hanging rail (4-1) is arranged directly above the pickling tank (2), the rinse tank (3) and the rinsing and backwashing tank (5); a traveling crane (4) is slidably connected to the hanging rail (4-1); a rinsing rack (5-1) is mounted on the traveling crane (4); a rinsing component (5-2) and a quartz tube rack (5-3) located below the rinsing component (5-2) are arranged on the rinsing rack (5-1); the traveling crane (4) can drive the rinsing rack (5-1) to move between the ultrasonic water washing tank (1), the pickling tank (2), the rinse tank (3) and the rinsing area.

3. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 2 is characterized in that: The common chamber wall of the adsorption chamber (10) and the flocculation chamber (9) and the common chamber wall of the flocculation chamber (9) and the pH adjustment zone (8) are respectively provided with overflow grooves, and the adsorption chamber (10) and the flocculation chamber (9) and the flocculation chamber (9) and the pH adjustment zone (8) are respectively connected through corresponding overflow grooves.

4. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 3 is characterized in that: The invention comprises an acid filter pump (2-1), an aeration component (3-1) and an aeration pump (3-2); the inlet of the acid filter pump (2-1) is connected to one end of the pickling tank (2), and the outlet is connected to the other end of the pickling tank (2); the aeration component (3-1) is arranged at the bottom of the rinse tank (3) and connected to the aeration pump (3-2); and an oscillation component (1-1) is installed around the tank wall of the ultrasonic water washing tank (1).

5. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 2, characterized in that: It comprises a backwashing component (5-6) and a backwashing pump (5-7); the backwashing component (5-6) is arranged in the rinsing area, and the backwashing pump (5-7) is connected to the backwashing component (5-6).

6. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 5, characterized in that: The system comprises a first pH sensor (5-5), wherein the first pH sensor (5-5) is installed at the bottom end of the rinsing rack (5-1); the system is configured to control the opening and closing of the rinsing component (5-2) and the opening and closing of the backwashing component (5-6) according to the detection result of the first pH sensor (5-5).

7. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 1, characterized in that: It comprises a pH regulating liquid inlet pipeline, a pH regulating liquid metering pump (8-2) and a second pH sensor (8-1), wherein the second pH sensor (8-1) is installed in the pH regulating area (8); the pH regulating liquid inlet pipeline is connected to the pH regulating area (8), and the pH regulating liquid metering pump (8-2) is installed on the pH regulating liquid inlet pipeline; The system is configured to control the start and stop of the pH regulating liquid metering pump (8-2) according to the detection result of the second pH sensor (8-1).

8. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 1, characterized in that: It comprises an agitator (8-3), wherein the agitator (8-3) is arranged at the bottom of the pH adjustment zone (8); the filter assembly comprises a first filter plate (6) and a second filter plate (7) which are arranged in sequence from top to bottom; the first filter plate (6) is parallel to the second filter plate (7), and both are arranged at an inclination.

9. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 1, characterized in that: The flocculation chamber (9) is provided with a third filtering device (9-2) for the liquid overflowing from the pH adjustment zone (8); the sediment in the overflowing liquid is flocculated and deposited at the bottom of the flocculation chamber (9); the bottom of the flocculation chamber (9) is provided with a mud discharge port (9-3) that can be opened and closed; a mud scraper (9-1) is provided at the mud discharge port (9-3); and the flocculation chamber (9) is connected to a flocculant dosing pump (9-5).

10. The integrated device for quartz tube cleaning and fluorine-containing cleaning wastewater purification according to claim 1, characterized in that: The adsorption chamber (10) is provided with a plurality of adsorption baffles (10-1) placed in parallel and at intervals, the adsorption baffles (10-1) are provided with a plurality of grooves, and adsorbent is applied in the grooves; the bottom of the adsorption chamber (10) is provided with a water outlet (11) and a water outlet valve (11-1) for controlling the opening and closing of the water outlet (11).

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