Splash-proof detection mechanism and evaporation equipment

Abstract

The utility model discloses a splash-proof detection mechanism and evaporation equipment, the splash-proof detection mechanism comprises a detection pipe, a detection assembly and a splash-proof cover, the detection pipe is used for being fixedly arranged at the top of an evaporation box so that the detection pipe can be communicated with an evaporation cavity of the evaporation box; the upper end of the detection assembly is rotatably arranged above the detection pipe, so that one end of the detection assembly can be aligned with the pipe orifice of the detection pipe or extend into the detection pipe; the splash guard is fixedly arranged on the detection assembly and can be arranged on the periphery of the detection pipe in a sleeving mode so as to prevent substances in the evaporation cavity from splashing upwards from the detection pipe. When one end of the detection assembly is aligned with a pipe opening of the detection pipe or extends into the detection pipe, the splash-proof cover can be arranged on the periphery of the detection pipe in a sleeving mode so as to prevent substances in the evaporation cavity from splashing upwards from the detection pipe, and therefore the situation that when the evaporation box is preheated, evaporation substances and impurities are splashed to a panel base body, and consequently display of a display panel is poor can be avoided; and the evaporation quality of the evaporation equipment can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation equipment, in particular to an anti-splash detection mechanism and evaporation equipment. Background Art

[0002] During the display panel processing, multiple layers of alternating metal layers and insulating layers need to be laid on the panel substrate through an evaporation furnace. The evaporation furnace needs to be preheated before each use, that is, the furnace mouth is first covered and heated so that the temperature in the furnace chamber of the evaporation furnace reaches the preset temperature, and then the furnace mouth is opened and the panel substrate is passed over the furnace mouth for evaporation.

[0003] In the prior art, such as Figure 1 As shown, during the preheating process of the vapor deposition furnace 100', it is usually necessary to use a detection mechanism to detect the temperature in the furnace cavity 101' and the state of the vapor deposition material. Specifically, the detection mechanism includes a detection tube 1' and a detection component 2'. The detection tube 1' is fixed to the vapor deposition furnace 100' and is connected to the furnace cavity 101' of the vapor deposition furnace 100'. The upper end of the detection component 2' is rotatably arranged above the detection tube 1' so that the lower end of the detection component 2' can be extended into the detection tube 1' to detect the temperature in the furnace cavity 101' and the state of the vapor deposition material. When the detection is not needed, the detection component 2' can also be separated from the detection tube 1' to avoid the detection component 2' from being damaged by long-term heat.

[0004] When the lower end of the detection member 2′ is extended into the detection tube 1′, there is a gap between the outer wall of the detection member 2′ and the inner wall of the detection tube 1′, which may easily cause the evaporated material to splash upward from the gap to the panel substrate. Since the temperature in the furnace cavity 101′ has not reached the preset temperature at this time, the evaporated material cannot evaporate stably, and the evaporated material and the impurities it contains will evaporate together, affecting the insulation between the metal layer and the insulating layer, thereby causing poor display of the display panel. Utility Model Content

[0005] The utility model aims to provide a splash-proof detection mechanism and a vapor deposition device, which can prevent the material in the vapor deposition chamber from splashing upward from the detection tube and can improve the vapor deposition quality of the vapor deposition device.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] In a first aspect, a splash-proof detection mechanism is provided, characterized in that it comprises:

[0008] A detection tube, the detection tube is used to be fixed on the top of the evaporation box so that the detection tube can be connected with the evaporation chamber of the evaporation box;

[0009] A detection assembly, wherein the detection assembly is movably disposed above the detection tube so that one end of the detection assembly can be aligned with the tube opening of the detection tube or extend into the detection tube; and

[0010] A splash shield is fixed to the detection assembly and can be sleeved on the outer circumference of the detection tube to prevent the material in the evaporation chamber from splashing upward from the detection tube.

[0011] As a preferred solution of the splash-proof detection mechanism, the splash-proof cover comprises:

[0012] An annular portion and a cylindrical portion, wherein the annular portion is sleeved on the outer circumference of the detection component, and the inner edge of the annular portion is fixedly connected to the detection component;

[0013] The cylindrical portion is a structure with two open ends. The annular portion is fixed to the opening at one end of the cylindrical portion and closes the opening. The opening at the other end of the cylindrical portion can be sleeved on the outer circumference of the detection tube.

[0014] As a preferred solution of the splash-proof detection mechanism, the inner diameter of the cylindrical portion remains unchanged along the axial direction of the cylindrical portion; or,

[0015] The cylindrical portion is in a trumpet-shaped structure, the small-diameter end of the cylindrical portion is connected to the annular portion, and the large-diameter end of the cylindrical portion can be sleeved on the outer circumference of the detection tube.

[0016] As a preferred solution of the splash-proof detection mechanism, the angle between the cylindrical portion and the annular portion is a, 90°≤a≤150°.

[0017] As a preferred solution of the splash-proof detection mechanism, when the splash-proof cover is sleeved on the outer circumference of the detection tube, the horizontal distance between the upper end of the detection tube and the inner wall of the splash-proof cover is L, 10mm≤L≤20mm.

[0018] As a preferred solution of the splash-proof detection mechanism, when the splash-proof cover is sleeved on the outer circumference of the detection tube, the vertical distance between the lower end of the splash-proof cover and the upper end of the detection tube is H, 5mm≤H≤10mm.

[0019] As a preferred solution of the splash-proof detection mechanism, the splash-proof cover is connected to one end of the detection component or the middle part of the detection component.

[0020] As a preferred solution of the splash-proof detection mechanism, the detection assembly includes a detection mounting member and a detection member, the detection mounting member includes a mounting plate and a mounting tube, the detection member is fixedly mounted on the mounting plate, and the detection end of the detection member is located in the mounting tube, the splash-proof cover is fixedly mounted on the mounting tube, one end of the mounting tube is fixedly connected to the mounting plate, and the mounting plate is movably disposed above the detection tube so that the other end of the mounting tube can be aligned with the pipe mouth of the detection tube or extend into the detection tube.

[0021] As a preferred solution of the splash-proof detection mechanism, the detection component includes a detection position and a storage position, and the detection component can be switched between the detection position and the storage position; in the detection position, one end of the detection component can be aligned with the tube mouth of the detection tube or extend into the detection tube; in the storage position, the detection component is separated from the detection tube;

[0022] The splash-proof detection mechanism further comprises a cover plate, and when the detection assembly is located at the storage position, the cover plate can seal the upper end of the detection tube.

[0023] In a second aspect, a vapor deposition device is provided, comprising a vapor deposition box and the splash-proof detection mechanism as described in the first aspect, wherein the detection tube is fixedly mounted on the top of the vapor deposition box and is connected to the vapor deposition chamber of the vapor deposition box.

[0024] The beneficial effect of the utility model is that when one end of the detection component is aligned with the tube mouth of the detection tube or extends into the detection tube, the splash-proof cover can be mounted on the outer periphery of the detection tube to prevent the material in the evaporation chamber from splashing upward from the detection tube, thereby preventing the evaporation material and impurities from splashing onto the panel substrate when the evaporation box is preheated, thereby preventing the display panel from displaying poorly, which is beneficial to improving the evaporation quality of the evaporation equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The utility model is further described in detail below based on the drawings and embodiments.

[0026] Figure 1 It is a structural schematic diagram of a detection mechanism used for a vapor deposition furnace in the prior art;

[0027] Figure 2 It is a structural schematic diagram of a splash-proof detection mechanism and a vapor deposition device (the detection component is located at the detection position) of an embodiment of the utility model;

[0028] Figure 3 It is a structural schematic diagram of a splash-proof detection mechanism and a vapor deposition device (the detection component is located in the storage position) according to an embodiment of the utility model;

[0029] Figure 4 It is a schematic structural diagram of a splash-proof detection mechanism and a vapor deposition device according to another embodiment of the present invention.

[0030] Figure 1 middle:

[0031] 100′, evaporation furnace; 101′, furnace chamber; 1′, detection tube;

[0032] 2′, test pieces.

[0033] Figures 2 to 3 middle:

[0034] 100. Evaporation box; 101. Evaporation chamber; 1. Detection tube;

[0035] 2. Detection mounting parts; 21. Mounting plate; 22. Mounting pipe;

[0036] 3. Splash shield; 31. Ring-shaped portion; 32. Cylindrical portion;

[0037] 4. Cover plate. DETAILED DESCRIPTION

[0038] The advantages and features of the present invention and the methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. The present embodiments are provided only to complete the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is limited only by the scope of the claims. The same reference numerals represent the same constituent elements throughout the specification.

[0039] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

[0040] like Figures 2 to 4 As shown, this embodiment provides a splash-proof detection mechanism and a vapor deposition device, the vapor deposition device includes a vapor deposition box 100 and a splash-proof detection mechanism, the splash-proof detection mechanism includes a detection tube 1, a detection component and a splash-proof cover 3, the detection tube 1 is fixedly arranged on the top of the vapor deposition box 100, and the detection tube 1 can be connected with the vapor deposition chamber 101 of the vapor deposition box 100; the detection component includes a detection position and a storage position, the detection component is movably arranged above the detection tube 1, so that the detection component can switch between the detection position and the storage position; in the detection position, one end of the detection component can be aligned with the tube mouth at the upper end of the detection tube 1 or extend into the detection tube 1; in the storage position, the detection component is separated from the detection tube 1; the splash-proof cover 3 is fixedly arranged on the detection component, and when the detection component is located at the detection position, the splash-proof cover 3 can be sleeved on the outer periphery of the detection tube 1 to prevent the substance in the vapor deposition chamber 101 from splashing upward from the detection tube 1.

[0041] The splash-proof detection mechanism of this embodiment can detect the temperature in the vapor deposition chamber 101 and the state of the vapor deposition material when the lower end of the detection component is aligned with the tube opening at the upper end of the detection tube 1 or extends into the detection tube 1.

[0042] When the lower end of the detection component is aligned with the tube opening at the upper end of the detection tube 1 or extends into the detection tube 1, the splash-proof cover 3 can be mounted on the outer periphery of the detection tube 1 to prevent the material in the evaporation chamber 101 from splashing upward from the detection tube 1, thereby preventing the evaporation material and impurities from splashing onto the panel substrate when the evaporation box 100 is preheated, thereby preventing poor display of the display panel, which is beneficial to improving the evaporation quality of the evaporation equipment.

[0043] Optionally, the detection assembly is rotatably disposed above the detection tube 1. Further, the detection assembly includes a detection mounting member 2 and a detection member (not shown in the figure), the detection mounting member 2 includes a mounting plate 21 and a mounting tube 22, the detection member is fixedly disposed on the mounting plate 21, and the detection end of the detection member is located in the mounting tube 22, the splash shield 3 is fixedly disposed on the mounting tube 22, the upper end of the mounting tube 22 is fixedly connected to the mounting plate 21, and the mounting plate 21 is rotatably disposed above the detection tube 1, so that the lower end of the mounting tube 22 can be aligned with the pipe opening at the upper end of the detection tube 1 or extend into the detection tube 1, so that the temperature in the evaporation chamber 101 and the state of the evaporated material can be detected by the detection member, and the detection end of the detection member can be protected by the mounting tube 22, and the main body of the detection member is supported by the mounting plate 21, which is convenient for the overall layout of the splash detection mechanism and the detection assembly.

[0044] In another optional embodiment, the detection assembly can also be slidably disposed above the detection tube 1. Specifically, the mounting plate 21 of the detection mounting member 2 can be slidably disposed above the detection tube 1, and the lower end of the mounting tube 22 can be aligned with the pipe opening at the upper end of the detection tube 1 or extend into the detection tube 1.

[0045] Optionally, the splash shield 3 includes an annular portion 31 and a cylindrical portion 32, the annular portion 31 is sleeved on the outer circumference of the detection component, and the inner edge of the annular portion 31 is fixedly connected to the detection component; the cylindrical portion 32 is a structure with open ends, the annular portion 31 is fixedly arranged on the opening at one end of the cylindrical portion 32 and closes the opening, in other words, one end of the cylindrical portion 32 is fixedly arranged on the annular portion 31, and the opening of the one end of the cylindrical portion 32 is closed by the annular portion 31, and the opening at the other end of the cylindrical portion 32 can be sleeved on the outer circumference of the detection tube 1, thereby avoiding interference between the splash shield 3 and the detection tube 1 during the rotation of the detection component and ensuring the splash-proof effect.

[0046] Alternatively, if Figure 2As shown, the cylindrical portion 32 is in a trumpet-shaped structure, the small diameter end of the cylindrical portion 32 is connected to the annular portion 31, and the large diameter end of the cylindrical portion 32 can be sleeved on the outer periphery of the detection tube 1, thereby increasing the range of the splash guard 3 and further improving the splash-proof effect. At the same time, it can further facilitate the cylindrical portion 32 and the detection tube 1 to avoid interference.

[0047] The angle a between the cylindrical portion 32 and the annular portion 31 is too small, and if the angle a is too small, the evaporated material and impurities splashing upward from the detection tube 1 will not enter the splash guard 3, and the splash protection effect will not be achieved; if the angle a is too large, the evaporated material and impurities entering the splash guard 3 will overflow, reducing the splash protection effect.

[0048] In an optional embodiment, 90°<a≤150°, and the splash-proof effect is better.

[0049] Exemplarily, the angle a between the cylindrical portion 32 and the annular portion 31 may be 91°, 95°, 100°, 110°, 120°, 130°, 140°, 150°, etc.

[0050] In another alternative embodiment, Figure 4 As shown, the inner diameter of the cylindrical portion 32 may be unchanged along the axial direction of the cylindrical portion 32. At this time, the angle a between the cylindrical portion 32 and the annular portion 31 is equal to 90°. In other words, the cylindrical portion 32 is a straight cylindrical structure, which can also play a splash-proof role.

[0051] When the splash shield 3 is sleeved on the outer periphery of the detection tube 1, the horizontal distance between the upper end of the detection tube 1 and the inner wall of the splash shield 3 is L. If L is too small, it will make it difficult for the evaporated material and impurities to fly out of the detection tube 1, and then cause the evaporated material to accumulate on the detection component and the inner wall of the detection tube 1, which will affect the detection of the detection part over time; if L is too large, it will cause the evaporated material and impurities entering the splash shield 3 to overflow, reducing the splash protection effect.

[0052] It should be noted that when the detection mounting member 2 is rotated so that the detection mounting member 2 is in the Figure 2 The status shown is similar to Figure 3 When switching between the states shown, no interference occurs between the mounting member 2 and the detection tube 1 , and between the splash shield 3 and the detection tube 1 .

[0053] Optionally, 10 mm ≤ L ≤ 20 mm, the splash-proof effect is better, and the evaporated material and impurities will not be accumulated on the detection component and the inner wall of the detection tube 1.

[0054] Exemplarily, the horizontal distance L between the upper end of the detection tube 1 and the inner wall of the splash shield 3 can be any value between 10mm and 20mm, for example, L can be 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm, 20mm, etc.

[0055] When the splash shield 3 is sleeved on the outer periphery of the detection tube 1, the vertical distance between the lower end of the splash shield 3 and the upper end of the detection tube 1 is H. If H is too small, the evaporated material and impurities entering the splash shield 3 will overflow, reducing the splash-proof effect; if H is too large, the splash shield 3 will easily interfere with the detection tube 1 or the evaporation furnace.

[0056] Optionally, 5mm≤H≤10mm, the splash-proof effect is better, and the splash-proof cover 3 will not cause interference with the detection tube 1 or the evaporation furnace.

[0057] In an alternative embodiment, Figure 2 As shown, the splash shield 3 is connected to the middle of the detection component, so that the lower end of the detection component can be extended into the detection tube 1, and the detection effect is better.

[0058] In another alternative embodiment, Figure 4 As shown, the splash shield 3 can also be connected to the lower end of the detection assembly. In this way, the lower end of the detection assembly can only be aligned with the tube opening at the upper end of the detection tube 1, and the purpose of detection can also be achieved. It should be noted that such a setting is equivalent to shortening the length of the detection assembly, which is conducive to saving materials and reducing costs.

[0059] Alternatively, if Figure 3 As shown, the splash-proof detection mechanism further includes a cover plate 4. When the detection assembly is in the storage position, the cover plate 4 can seal the upper end of the detection tube 1. When the detection assembly is in the detection position, the upper end of the detection tube 1 is open. When it is not necessary to detect the temperature in the evaporation chamber 101 and the state of the evaporation material, the upper end of the detection tube 1 can be sealed by the cover plate 4 to prevent the evaporation material and impurities from splashing out of the detection tube 1.

[0060] Exemplarily, the cover plate 4 is connected to the detection tube 1 by a detachable connection such as a snap connection or a threaded connection, which facilitates the disassembly and assembly of the cover plate 4 without affecting the matching of the detection tube 1 and the splash cover 3 .

[0061] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.

Claims

1. Anti-splash detection mechanism, characterized in that: include: A detection tube, the detection tube is used to be fixed on the top of the evaporation box, and the detection tube can be connected to the evaporation chamber of the evaporation box; A detection component, which is movably disposed above the detection tube so that one end of the detection component can be aligned with the tube opening of the detection tube or extend into the detection tube; as well as, A splash shield is fixed to the detection assembly and can be sleeved on the outer circumference of the detection tube to prevent the material in the evaporation chamber from splashing upward from the detection tube.

2. The splash detection mechanism according to claim 1, characterized in that: The splash shield comprises an annular portion and a cylindrical portion, wherein the annular portion is sleeved on the outer circumference of the detection component, and the inner edge of the annular portion is fixedly connected to the detection component; The cylindrical portion is a structure with two open ends. The annular portion is fixed to the opening at one end of the cylindrical portion and closes the opening. The opening at the other end of the cylindrical portion can be sleeved on the outer circumference of the detection tube.

3. The splash detection mechanism according to claim 2, characterized in that: Along the axial direction of the cylindrical portion, the inner diameter of the cylindrical portion remains unchanged; or, The cylindrical portion is in a trumpet-shaped structure, the small-diameter end of the cylindrical portion is connected to the annular portion, and the large-diameter end of the cylindrical portion can be sleeved on the outer circumference of the detection tube.

4. The splash detection mechanism according to claim 2, characterized in that: The included angle between the cylindrical portion and the annular portion is a, 90°≤a≤150°.

5. The splash-proof detection mechanism according to any one of claims 1 to 4, characterized in that: When the splash shield is sleeved on the outer circumference of the detection tube, the horizontal distance between the upper end of the detection tube and the inner wall of the splash shield is L, and 10mm≤L≤20mm.

6. The splash-proof detection mechanism according to any one of claims 1 to 4, characterized in that: When the splash shield is sleeved on the outer circumference of the detection tube, the vertical distance between the lower end of the splash shield and the upper end of the detection tube is H, 5mm≤H≤10mm.

7. The splash-proof detection mechanism according to any one of claims 1 to 4, characterized in that: The splash shield is connected to one end of the detection component or the middle part of the detection component.

8. The splash-proof detection mechanism according to any one of claims 1 to 4, characterized in that: The detection assembly includes a detection mounting member and a detection member, the detection mounting member includes a mounting plate and a mounting tube, the detection member is fixedly mounted on the mounting plate, and the detection end of the detection member is located in the mounting tube, the splash guard is fixedly mounted on the mounting tube, one end of the mounting tube is fixedly connected to the mounting plate, and the mounting plate is movably arranged above the detection tube so that the other end of the mounting tube can be aligned with the pipe mouth of the detection tube or extend into the detection tube.

9. The splash-proof detection mechanism according to any one of claims 1 to 4, characterized in that: The detection assembly comprises a detection position and a storage position, and the detection assembly can be switched between the detection position and the storage position; in the detection position, one end of the detection assembly can be aligned with the tube mouth of the detection tube or extend into the detection tube; in the storage position, the detection assembly is separated from the detection tube; The splash-proof detection mechanism further comprises a cover plate, and when the detection assembly is located at the storage position, the cover plate can seal the upper end of the detection tube.

10. Evaporation equipment, characterized in that It comprises a vapor deposition box and the splash-proof detection mechanism as described in any one of claims 1 to 9, wherein the detection tube is fixedly arranged on the top of the vapor deposition box and is connected to the vapor deposition chamber of the vapor deposition box.

Images