Point evaporation shielding device and evaporator

Abstract

The utility model provides a spot evaporation shielding device and an evaporator, and solves the problems that materials need to be cleaned after being accumulated to a certain degree, and continuous production cannot be realized. At least two point evaporation sources are arranged in the vacuum chamber, a vertical rotating mechanism is arranged beside each point evaporation source, a transverse rotating mechanism is arranged at the top of each vertical rotating mechanism, shielding mechanisms are symmetrically arranged on the transverse rotating mechanisms up and down, and each shielding mechanism comprises a shielding piece located in the center. Gathering covers are arranged on the periphery of the shielding piece, the vertical rotating mechanism drives the shielding piece and the point evaporation source to achieve alignment and dislocation switching, and the transverse rotating mechanism switches one gathering cover to be arranged over the point evaporation source in a covering mode. The problem that production is stopped due to the fact that materials fall off from the evaporation source baffle after the evaporator produces for a period of time is effectively solved, continuous production of evaporation equipment is guaranteed, waste of the materials is avoided, and productivity is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of evaporation equipment, in particular to a point evaporation shielding device and an evaporation machine. Background Art

[0002] Some of the material evaporation sources required for organic light-emitting diodes are point evaporation sources. Multiple material evaporation sources are usually arranged in the same vacuum chamber so that the evaporation of multiple film layers can be completed in the same chamber.

[0003] In order to achieve non-interference between different film layers during evaporation, each material evaporation source will be equipped with a corresponding evaporation source baffle. The evaporation source baffle is closed except when the film layer is evaporated. Since organic materials are relatively fluffy and as the evaporation time increases, more and more materials accumulate on the evaporation source baffle. When a certain limit is reached, some materials will fall to the periphery of the evaporation source and cause blockage, or cause an imbalance in rate stability, resulting in production interruption. It takes at least 24 hours to cool the material and open the cavity for cleaning, and then resume production, which affects the production schedule and output, while increasing the frequency and cost of cleaning.

[0004] For example, Chinese patent document 201720572428.2 discloses an evaporation source and a vacuum coating system, wherein the evaporation source includes: an evaporation source crucible for carrying and heating the evaporation material; an evaporation source baffle, which is movably arranged above the evaporation source crucible; the evaporation source baffle includes: a plate body, which has a shielding surface for shielding the evaporation material; a storage and cleaning part, which is arranged on the plate body, and the storage and cleaning part includes a grid mesh structure, which is arranged on the shielding surface to prevent the evaporation material deposited on the plate body from falling into the evaporation source crucible. The utility model solves the problem of poor working stability of the evaporation source in the prior art.

[0005] Although the above technical solution discloses a baffle structure, its baffle structure adopts a single structure, that is, it only has one shielding structure. When the material accumulates to a certain extent, it needs to be cleaned up. The single-sided shielding shortens the shielding effect time, so continuous production cannot be achieved. In addition, the above technical solution only discloses that the evaporation source baffle is movable, but does not disclose the movable structure and moving method, and thus it is impossible to determine the effect of the movable baffle structure. Utility Model Content

[0006] The purpose of the utility model is to solve the above problems in the prior art and to propose a point evaporation shielding device and a vapor deposition machine.

[0007] The purpose of the utility model can be achieved through the following technical solutions: a point evaporation shielding device, comprising a vacuum chamber, at least two point evaporation sources are arranged in the vacuum chamber, a vertical rotation mechanism is arranged on the side of each point evaporation source, a horizontal rotation mechanism is arranged on the top of the vertical rotation mechanism, a shielding mechanism is symmetrically arranged on the horizontal rotation mechanism, the shielding mechanism includes a shielding member located in the center, a gathering cover is arranged on the outer periphery of the shielding member, the vertical rotation mechanism drives the shielding member and the point evaporation source to achieve alignment and misalignment switching, and the horizontal rotation mechanism switches one of the gathering covers to be arranged directly above the point evaporation source.

[0008] In the above-mentioned point evaporation shielding device, the vertical rotation mechanism includes a vertical motor, and the vertical motor has a Z-rotation shaft facing vertically upward, and the Z-rotation shaft is drivingly connected to the vertical shaft.

[0009] In the above-mentioned point evaporation shielding device, the transverse rotation mechanism includes a transverse motor fixed to the top end of the vertical axis, the transverse motor is arranged perpendicular to the vertical axis, and the transverse motor has a horizontal X-rotation axis, and the X-rotation axis is driven and connected to the transverse axis.

[0010] In the above-mentioned point evaporation shielding device, the shielding member is a circular mesh surface, the circular mesh surface is fixed on the end section of the X-rotation axis, and the plane where the circular mesh surface is located is parallel to the axis of the X-rotation axis.

[0011] In the above-mentioned point evaporation shielding device, the gathering hood is a bowl-shaped shell, the center of the gathering hood has an inner diameter opening, the circular mesh surface is embedded in the inner diameter opening, the inner diameter opening is expanded along a circular arc trajectory to form an outer diameter opening, the diameter of the outer diameter opening is larger than the diameter of the inner diameter opening, and the inner wall of the gathering hood between the inner diameter opening and the outer diameter opening forms a shielding wall.

[0012] In the above-mentioned point evaporation shielding device, the inner peripheral edge of the inner diameter opening is welded and fixedly connected to the contour edge of the circular mesh surface.

[0013] In the above-mentioned point evaporation shielding device, the point evaporation source is specifically a crucible, and the crucible has a material loading inner cavity, and the top of the material loading inner cavity is a point evaporation hole.

[0014] A vapor deposition machine comprises the above-mentioned point evaporation shielding device.

[0015] Compared with the prior art, the point evaporation shielding device and the evaporation deposition machine have the following beneficial effects:

[0016] 1. The use of a circular mesh surface combined with a bowl-shaped shell can increase the shielding area and the aggregate area, thereby being able to attach more materials, providing a good shielding effect for the point evaporation source, and extending the evaporation operation time.

[0017] 2. Two symmetrical shielding mechanisms are used alternately to effectively avoid production stoppage caused by the evaporation source baffle material falling into the nozzle port; the production time of a single production cycle is extended, thereby improving the utilization rate of the production line.

[0018] 3. The plane swing method is used to realize the alignment and misalignment of the shielding mechanism, so as to realize the switching between shielding and non-shielding. In the non-shielding state, the upside-down flipping method is used to realize the switching application of the two shielding mechanisms. The overall operation is fast, accurate and highly automated. At the same time, it avoids the hole being blocked by the falling material when flipping the shielding mechanism, ensuring the sustainable operation of the point evaporation source.

[0019] 4. The utility model can achieve the expected function by making small changes to the existing equipment, so the transformation is simple and easy, the cost is low, and it is conducive to wide promotion and application.

[0020] In summary, the utility model effectively avoids the problem of the evaporation machine stopping production due to material falling from the point evaporation source baffle after a period of production, thereby ensuring that the evaporation equipment continues to produce continuously, avoiding material waste and improving production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the main structure of the point evaporation shielding device.

[0022] Figure 2 This is a schematic diagram of the top view of the structure of the point evaporation shielding device.

[0023] In the figure, 1, crucible; 2, vertical axis; 3, horizontal motor; 4, horizontal axis; 5, shielding member; 6, gathering hood. DETAILED DESCRIPTION

[0024] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0025] Embodiment 1

[0026] like Figures 1 to 2 As shown, the point evaporation shielding device comprises a vacuum chamber, in which at least two point evaporation sources are arranged, a vertical rotating mechanism is arranged beside each point evaporation source, a horizontal rotating mechanism is arranged on the top of the vertical rotating mechanism, a shielding mechanism is symmetrically arranged on the horizontal rotating mechanism, the shielding mechanism comprises a shielding member 5 located in the center, a gathering cover 6 is arranged on the outer periphery of the shielding member 5, the vertical rotating mechanism drives the shielding member 5 and the point evaporation source to realize alignment and misalignment switching, and the horizontal rotating mechanism switches one of the gathering covers 6 to be arranged directly above the point evaporation source.

[0027] The point evaporation source is specifically a crucible 1 , which has a material loading inner cavity, and the top of the material loading inner cavity is a point evaporation hole.

[0028] like Figure 1 As shown, the vertical rotation mechanism includes a vertical motor, which has a vertical upward Z-axis, which is connected to the vertical axis 2. The vertical motor is started to drive the Z-axis to rotate forward and reverse, and the vertical axis 2 is driven to rotate forward and reverse synchronously, thereby driving the horizontal rotation mechanism to swing horizontally within a certain angle range.

[0029] The horizontal rotation mechanism includes a horizontal motor 3 fixedly mounted on the top of the vertical shaft 2. The horizontal motor 3 is arranged perpendicular to the vertical shaft 2. The horizontal motor 3 has a horizontal X-axis, and the X-axis is driven to connect the horizontal shaft 4. The horizontal motor 3 is started to drive the X-axis to rotate forward and reverse 180°, and the horizontal shaft 4 is synchronously driven to rotate forward and reverse 180°, so that the opening of the gathering cover 6 is switched downward to cover the point evaporation source.

[0030] like Figures 1 to 2 As shown, the shielding member 5 is a circular mesh surface, which is fixed on the end section of the X-axis, and the plane where the circular mesh surface is located is parallel to the axis of the X-axis. The gathering cover 6 is a bowl-shaped shell, and the center of the gathering cover 6 has an inner diameter opening, and the circular mesh surface is embedded in the inner diameter opening, and the inner diameter opening is expanded along the arc trajectory to form an outer diameter opening, and the diameter of the outer diameter opening is larger than the diameter of the inner diameter opening, and the inner wall of the gathering cover 6 between the inner diameter opening and the outer diameter opening forms a shielding wall. The circular mesh surface can be combined with the bowl-shaped shell to increase the shielding area and the aggregate area, so that more materials can be attached, providing a good shielding effect for the point evaporation source.

[0031] The inner peripheral edge of the inner diameter opening is welded and fixedly connected with the contour edge of the circular mesh surface.

[0032] The characteristics of this point evaporation shielding device are:

[0033] 1. The materials evaporated by the evaporation source are mainly small molecule organic materials and metal materials such as magnesium and silver. Figure 2 As shown, in the same vacuum chamber, usually more than two point evaporation sources are arranged, and each point evaporation source is equipped with a shielding device. The control device corresponding to each shielding device can drive the shielding to be opened or closed, so that the switches of different shielding devices do not interfere with each other.

[0034] 2. The shielding mechanism is placed directly above the point evaporation source by rotating the vertical rotating mechanism clockwise to form shielding; the shielding member 5 is completely moved directly above the point evaporation source by rotating the vertical rotating mechanism counterclockwise to form non-shielding.

[0035] 3. The lateral rotation mechanism is flipped 180° to achieve switching of the upper and lower shielding mechanisms.

[0036] The function of this point evaporation shielding device is:

[0037] 1. In the early stage of production, the vertical motor is used to drive the vertical axis 2 to rotate forward, driving the horizontal axis 4 to swing forward at a certain angle in the plane, so that the first set of shielding members 5 and the gathering cover 6 are downwardly shielded above the point evaporation source, and the bowl-shaped shell is used to block the material coming out of the evaporation source.

[0038] 2. In the middle of production or at a certain time point, the material in the first group of gathering hoods 6 is full, and the vertical motor drives the vertical axis 2 to reverse, driving the horizontal axis 4 to swing in the opposite direction at a certain angle in the plane, so that the gathering hood 6 completely leaves the top of the point evaporation source, and forms a non-blocking (open state) through dislocation.

[0039] 3. Start the horizontal motor 3 to drive the horizontal axis 4 to rotate forward / reverse 180°, turn the second set of shielding members 5 and the gathering cover 6 downward, and turn the first set of shielding members 5 and the gathering cover 6 upward. Due to the misalignment, the material on the circular mesh surface can be ensured not to fall on the crucible 1 and cause blockage during the rotation process.

[0040] 4. Start the vertical motor again to drive the vertical axis 2 to rotate forward, and drive the horizontal axis 4 to swing forward in the plane at a certain angle, so that the second set of shielding members 5 and the gathering cover 6 are facing downward to block the point evaporation source directly above, and the bowl-shaped shell is used to block the material coming out of the evaporation source.

[0041] 5. In the subsequent production process, the second set of shielding members 5 and the gathering cover 6 are continuously used for shielding until the production is completed.

[0042] Embodiment 2

[0043] Based on the first embodiment, the difference of this embodiment is that:

[0044] A vapor deposition machine comprises the above-mentioned point evaporation shielding device.

[0045] The application of this evaporation machine has the following beneficial effects:

[0046] 1. The shielding structure is improved to a bowl-shaped shell, which increases the material contact area through the gradually expanding inner wall of the shell, optimizes the shielding effect, increases the material accumulation, and prolongs the material falling time, that is, the continuous working time.

[0047] 2. Set up a symmetrical shielding structure up and down, and switch under vacuum state by 180° flipping without affecting production. Switching once in a vapor deposition operation can complete production, avoiding stopping for cleaning in the middle, that is, switching does not require opening the chamber for processing, thereby ensuring continuous production and shortening the single production time and procedures.

[0048] 3. By rotating the vertical axis 2, the two forms of shielding, alignment and misalignment, are realized. Shielding is performed during alignment, and flipping and switching are performed during misalignment, which effectively prevents the falling materials from blocking the holes, ensures the continuous operation of the point evaporation source, and improves the evaporation efficiency.

[0049] The specific embodiments described herein are merely examples of the spirit of the utility model. A person skilled in the art of the utility model may make various modifications or supplements to the specific embodiments described or replace them in a similar manner, but will not deviate from the spirit of the utility model or exceed the defined scope. Although the utility model is described and described in detail in the drawings and the foregoing description, such descriptions and descriptions are considered to be illustrative or exemplary rather than restrictive. It should be understood that within the scope of the following claims, changes and modifications may be made by a person of ordinary skill. Specifically, the utility model covers additional embodiments having any combination of features from the above-mentioned different embodiments. In terms of the use of the expression "generally" or "substantially", this patent application should be understood to disclose that these features and values ​​are also fully satisfied, that is, there is no aforementioned characterization as "generally" or "substantially".

[0050] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

Claims

1. A point evaporation shielding device, comprising a vacuum chamber, wherein at least two point evaporation sources are arranged in the vacuum chamber, characterized in that: A vertical rotating mechanism is arranged beside each of the point evaporation sources, a horizontal rotating mechanism is arranged on the top of the vertical rotating mechanism, a shielding mechanism is arranged on the horizontal rotating mechanism in a vertically symmetrical manner, the shielding mechanism comprises a shielding member (5) located at the center, a gathering cover (6) is arranged on the outer periphery of the shielding member (5), the vertical rotating mechanism drives the shielding member (5) and the point evaporation source to realize alignment and misalignment switching, and the horizontal rotating mechanism switches one of the gathering covers (6) to be arranged directly above the point evaporation source.

2. The point evaporation shielding device according to claim 1, characterized in that: The vertical rotation mechanism comprises a vertical motor, wherein the vertical motor has a Z rotating shaft facing vertically upwards, and the Z rotating shaft is driven and connected to the vertical shaft (2).

3. The point evaporation shielding device according to claim 2, characterized in that: The transverse rotation mechanism comprises a transverse motor (3) fixedly mounted on the top end of the vertical shaft (2), the transverse motor (3) being arranged perpendicularly to the vertical shaft (2), the transverse motor (3) having a horizontal X-rotation axis, and the X-rotation axis drivingly connected to the transverse shaft (4).

4. The point evaporation shielding device according to claim 3, characterized in that: The shielding member (5) is a circular mesh surface, which is fixed on the end section of the X-rotation axis, and the plane where the circular mesh surface is located is parallel to the axis of the X-rotation axis.

5. The point evaporation shielding device according to claim 4, characterized in that: The gathering cover (6) is a bowl-shaped shell, the center of the gathering cover (6) has an inner diameter opening, the circular mesh surface is embedded in the inner diameter opening, the inner diameter opening is expanded along a circular arc trajectory to form an outer diameter opening, the diameter of the outer diameter opening is greater than the diameter of the inner diameter opening, and the inner wall of the gathering cover (6) between the inner diameter opening and the outer diameter opening forms a shielding wall.

6. The point evaporation shielding device according to claim 5, characterized in that: The inner peripheral edge of the inner diameter opening is welded and fixedly connected with the contour edge of the circular mesh surface.

7. The point evaporation shielding device according to claim 1, characterized in that: The point evaporation source is specifically a crucible (1), the crucible (1) has a material loading inner cavity, and the top of the material loading inner cavity is a point evaporation hole.

8. A vapor deposition machine, characterized in that: The invention comprises a point evaporation shielding device as claimed in any one of claims 1 to 7.

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